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1. 发明申请

WO2007028595A2 PARTICLE -OPTICAL COMPONENT 审中-公开
标题翻译：颗粒成分
公开(公告)号：WO2007028595A2
公开(公告)日：2007-03-15
申请号：PCT/EP2006/008693
申请日：2006-09-06
申请人： CARL ZEISS SMT AG , APPLIED MATERIALS ISRAEL, LTD , CASARES, Antonio , KNIPPELMEYER, Rainer , KEMEN, Thomas , BAYER, Thomas , FRITZ, Georg , GRESCHNER, Johann , KALT, Samuel
发明人： CASARES, Antonio , KNIPPELMEYER, Rainer , KEMEN, Thomas , BAYER, Thomas , FRITZ, Georg , GRESCHNER, Johann , KALT, Samuel
IPC分类号： H01J37/09 , H01J37/04 , H01J37/317
CPC分类号： H01J37/04 , H01J37/045 , H01J37/09 , H01J37/145 , H01J37/147 , H01J37/244 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/04922 , H01J2237/04924 , H01J2237/04926 , H01J2237/15 , H01J2237/2446 , H01J2237/2448 , H01J2237/2561 , H01J2237/2817 , H01J2237/31774
摘要： The present invention relates to a particle-optical component comprising a first multi -aperture plate, and a second multi -aperture plate forming a gap between them; wherein a plurality of apertures of the first multi -aperture plate is arranged such that each aperture of the plurality of apertures of the first multi-aperture plate is aligned with a corresponding aperture of a plurality of apertures of the second multi-aperture plate; and wherein the gap has a first width at a first location and a second width at a second location and wherein the second width is by at least 5% greater than the first width. In addition, the present invention pertains to charged particle systems and arrangements comprising such components and methods of manufacturing multi aperture plates having a curved surface.
摘要翻译：本发明涉及一种包括第一多孔板的颗粒光学部件和在它们之间形成间隙的第二多孔板; 其中所述第一多孔板的多个孔被布置成使得所述第一多孔板的所述多个孔的每个孔与所述第二多孔板的多个孔的对应孔对齐; 并且其中所述间隙在第一位置具有第一宽度，在第二位置处具有第二宽度，并且其中所述第二宽度比所述第一宽度大至少5％。此外，本发明涉及包含这些部件的带电粒子系统和布置以及制造具有弯曲表面的多孔板的方法。

2. 发明申请

WO2007028595A3 PARTICLE -OPTICAL COMPONENT 审中-公开
标题翻译：颗粒成分
公开(公告)号：WO2007028595A3
公开(公告)日：2007-05-24
申请号：PCT/EP2006008693
申请日：2006-09-06
申请人： ZEISS CARL SMT AG , APPLIED MATERIALS ISRAEL LTD , CASARES ANTONIO , KNIPPELMEYER RAINER , KEMEN THOMAS , BAYER THOMAS , FRITZ GEORG , GRESCHNER JOHANN , KALT SAMUEL
发明人： CASARES ANTONIO , KNIPPELMEYER RAINER , KEMEN THOMAS , BAYER THOMAS , FRITZ GEORG , GRESCHNER JOHANN , KALT SAMUEL
IPC分类号： H01J37/09 , H01J37/04 , H01J37/317
CPC分类号： H01J37/04 , H01J37/045 , H01J37/09 , H01J37/145 , H01J37/147 , H01J37/244 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/04922 , H01J2237/04924 , H01J2237/04926 , H01J2237/15 , H01J2237/2446 , H01J2237/2448 , H01J2237/2561 , H01J2237/2817 , H01J2237/31774
摘要： The present invention relates to a particle-optical component comprising a first multi -aperture plate (613), and a second multi- aperture plate (614) forming a gap between them; wherein a plurality of apertures (615) of the first multi -aperture plate is arranged such that each aperture of the plurality of apertures of the first multi-aperture plate is aligned with a corresponding aperture of a plurality of apertures of the second multi-aperture plate; and wherein the gap has a first width (wl) at a first location and a second width (w2) at a second location and wherein the first width is by at least 5% greater than the second width. In addition, the present invention pertains to charged particle systems and arrangements comprising such components and methods of manufacturing multi aperture plates having a curved surface .
摘要翻译：本发明涉及包括第一多孔板（613）和在它们之间形成间隙的第二多孔板（614）的颗粒光学部件; 其中所述第一多孔板的多个孔（615）布置成使得所述第一多孔板的所述多个孔中的每个孔与所述第二多孔的多个孔的对应孔对准盘子; 并且其中所述间隙在第一位置处具有第一宽度（w1），在第二位置具有第二宽度（w2），并且其中所述第一宽度比所述第二宽度大至少5％。此外，本发明涉及包含这些部件的带电粒子系统和布置以及制造具有弯曲表面的多孔板的方法。

3. 发明申请

WO2005024881A3 PARTICLE-OPTICAL SYSTEMS, COMPONENTS AND ARRANGEMENTS 审中-公开
标题翻译：颗粒光学系统，组件和布置
公开(公告)号：WO2005024881A3
公开(公告)日：2007-05-31
申请号：PCT/US2004029079
申请日：2004-09-07
申请人： ZEISS CARL SMT AG , APPLIED MATERIALS ISRAEL , KNIPPELMEYER RAINER , KIENZLE OLIVER , KEMEN THOMAS , MUELLER HEIKO , UHLEMANN STEPHAN , HAIDER MAXIMILIAN , CASARES ANTONIO , ROGERS STEVEN
发明人： KNIPPELMEYER RAINER , KIENZLE OLIVER , KEMEN THOMAS , MUELLER HEIKO , UHLEMANN STEPHAN , HAIDER MAXIMILIAN , CASARES ANTONIO , ROGERS STEVEN
IPC分类号： G21K5/10 , G01N23/00 , H01J20060101 , H01J37/09 , H01J37/153 , H01J37/28
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first regularity.
摘要翻译：粒子光学装置包括用于产生带电粒子束的带电粒子源; 布置在带电粒子束的光束路径中的多孔板，其中多孔板具有以预定的第一阵列图案形成在其中的多个孔，其中多个带电粒子子束由束形成在多孔板下游的带电粒子，并且其中通过所述多个子束在所述装置的图像平面中形成多个束斑，所述多个束斑以第二阵列图案布置; 以及用于操纵带电粒子束和/或多个子束的粒子光学元件; 其中所述第一阵列图案在第一方向上具有第一图案规则性，并且所述第二阵列图案在与所述第一方向对应的电子 - 光学上的第二方向上具有第二图案规则性，并且其中所述第二规则性高于所述第一规则性。

4. 发明申请

WO2012041464A1 PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS 审中-公开
标题翻译：颗粒光学系统和安排以及这种系统和安排的颗粒光学部件
公开(公告)号：WO2012041464A1
公开(公告)日：2012-04-05
申请号：PCT/EP2011/004777
申请日：2011-09-23
申请人： APPLIED MATERIALS ISRAEL Ltd. , CARL ZEISS SMT GMBH , ZEIDLER, Dirk , KEMEN, Thomas , ANGER, Pascal , CASARES, Antonio , RIEDESEL, Christof
发明人： ZEIDLER, Dirk , KEMEN, Thomas , ANGER, Pascal , CASARES, Antonio , RIEDESEL, Christof
IPC分类号： H01J37/09
CPC分类号： H01J37/09 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/28 , H01J37/3177 , H01J2237/0453 , H01J2237/0458 , H01J2237/0492 , H01J2237/1205
摘要： The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles (301); a first multi-aperture plate (320) having plural apertures disposed in a charged particle beam path of the system downstream of the source; a first multi-aperture selector plate (313) having plural apertures; a carrier (340), wherein the first multi-aperture selector plate is mounted on the carrier; and an actuator (350) configured to move the carrier such that the first multi-aperture selector plate is disposed in the charged particle beam path of the system downstream of the source in a first mode of operation of the system, and such that the first multi-aperture selector plate is disposed outside of the charged particle beam path in a second mode of operation of the system. The source, the first multi-aperture plate and the carrier of the system are arranged such that a first number of charged particle beamlets is generated at a position downstream of both the first multi-aperture plate and the first multi-aperture selector plate in the first mode of operation, and that a second number of charged particle beamlets is generated at the position in the second mode of operation, wherein the first number of beamlets differs from the second number of beamlets.
摘要翻译：本发明涉及一种带电粒子多子束系统，其包括带电粒子源（301）; 第一多孔板（320），其具有设置在所述源的下游的所述系统的带电粒子束路径中的多个孔; 具有多个孔的第一多孔选择板（313）载体（340），其中所述第一多孔径选择器板安装在所述载体上; 以及构造成移动所述载体的致动器（350），使得所述第一多孔径选择器板在所述系统的第一操作模式中被布置在所述源的下游的系统的带电粒子束路径中，并且使得所述第一多孔径选择器板在系统的第二操作模式中设置在带电粒子束路径的外部。源极，第一多孔板和系统的载体被布置成使得在第一多孔径板和第一多孔径选择器板的下游位置处产生第一数量的带电粒子子束第一操作模式，并且在第二操作模式的位置处产生第二数量的带电粒子子束，其中第一数量的子束与第二数量的子束不同。

5. 发明申请

WO2005024881A2 PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS 审中-公开
标题翻译：颗粒光学系统和安排以及这种系统和安排的颗粒光学部件
公开(公告)号：WO2005024881A2
公开(公告)日：2005-03-17
申请号：PCT/US2004/029079
申请日：2004-09-07
申请人： CARL ZEISS SMS GMBH , APPLIED MATERIALS ISRAEL , KNIPPELMEYER, Rainer , KIENZLE, Oliver , KEMEN, Thomas , MUELLER, Heiko , UHLEMANN, Stephan , HAIDER, Maximilian , CASARES, Antonio , ROGERS, Steven
发明人： KNIPPELMEYER, Rainer , KIENZLE, Oliver , KEMEN, Thomas , MUELLER, Heiko , UHLEMANN, Stephan , HAIDER, Maximilian , CASARES, Antonio , ROGERS, Steven
IPC分类号： H01J
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first regularity.
摘要翻译：粒子光学装置包括用于产生带电粒子束的带电粒子源; 布置在带电粒子束的光束路径中的多孔板，其中多孔板具有以预定的第一阵列图案形成在其中的多个孔，其中多个带电粒子子束由束形成在多孔板下游的带电粒子，并且其中通过所述多个子束在所述装置的图像平面中形成多个束斑，所述多个束斑以第二阵列图案布置; 以及用于操纵带电粒子束和/或多个子束的粒子光学元件; 其中所述第一阵列图案在第一方向上具有第一图案规则性，并且所述第二阵列图案在与所述第一方向对应的电子 - 光学上的第二方向上具有第二图案规则性，并且其中所述第二规则性高于所述第一规则性。

6. 发明专利

ES159199U DISPOSITIVO DE SEGURIDAD PARA PUERTAS DE AUTOMOVILES. 未知
公开(公告)号：ES159199U
公开(公告)日：1970-08-01
申请号：ES159199
申请日：1970-06-08
申请人： VILCHES CASARES ANTONIO
IPC分类号： B60J20060101 , E05B20060101
摘要： Dispositivo de seguridad para puertas de automóviles, caracterizado esencialmente por el hecho de estár constituido por una bobina conectada a la batería del coche, a través del correspondiente interruptor y provista dicha bobina de un núcleo que en su extremo exterior esta dotado de medios de sujeción a la rueda de la cerradura accionadora del pestillo-muelle de cierre.

7. 发明专利

ES170500U Mecanismo para el accionamiento automático de puertas de automóviles y aplicaciones similares 未知
公开(公告)号：ES170500U
公开(公告)日：1971-12-16
申请号：ES170500
申请日：1971-07-02
申请人： CATALÁ SERRABOGUÑA PEDRO , VILCHES CASARES ANTONIO
摘要： Mecanismo para el accionamiento automático de puertas de automóviles y aplicaciones similares, que consiste esencialmente en una pluralidad de electroimanes, uno para cada una de las puertas o elementos de cierre o de mando que deben ser accionados, cuya bobina se halla alimentada por el correspondiente cable procedente de la batería, en el caso de aplicarse el mecanismo a un automóvil, alimentación que tiene lugar a través de un interruptor situado al alcance del conductor o persona responsable, con retorno a masa a través del chasis del propio vehículo, hallándose el núcleo del electroimán sometido normalmente a la acción de un muelle que tiende a mantenerlo fuera de la bobina, pero que cede al ser aquél atraído por la bobina al ser energizada, poseyendo el propio núcleo oportunos topes de limitación de carrera y hallándose el conjunto encerrado en una caja o carcasa de fácil colocación en el interior de la puerta o similar que debe accionarse y que presenta los oportunos orificios para paso de los bornes de conexión así como para la salida de un vástago accionador solidario del núcleo móvil del electroimán, el cual presenta en su extremidad una unión articulada de gran holgura, a través de eslabones, anillos o similar, para una varilla de enganche a la rueda o palanca giratoria de la cerradura, solidaria del pestillo y determinante de la posición del mismo, de tal manera que sin perturbar, gracias a la franquicia de la mencionada unión articulada, el normal accionamiento manual de la cerradura ni su condena, el dispositivo, al ser accionado el correspondiente interruptor y alimentada en consecuencia la bobino del electroimán, tira a través de su elemento de enganche de la rueda o palanca de la cerradura accionadora del pestillo, venciendo la acción del muelle que, anclado a dicha rueda, determina la posición de cierre del pestillo, efectuándose precisamente el enganche del elemento indicado del dispositivo a la rueda o palanca accionadora del pestillo en el mismo punto donde ésta presenta anclado el muelle de retorno, de tal manera que éste queda sometido directamente y sin ninguna pérdida de esfuerzo a la tracción del dispositivo, la cual tiene lugar con igual eficacia, abriendo en consecuencia con toda normalidad la puerta o similar, aun en el caso de que se hubiera efectuado la condena de la cerradura, por cuanto el fiador correspondiente de ésta actúa solamente con relación a la palanca manual de accionamiento de la misma, quedando libre sin embargo la rueda o palanca accionadora del pestillo para ser accionada por el dispositivo automático en sentido opuesto al de la mencionada palanca de accionamiento de la cerradura, tensando al muelle que fija la posición de cierre de la misma por el extremo opuesto al de su anclaje a esta última palanca y determinando en definitiva la apertura del pestillo, bastando una previa y ligera modificación en la posición de la manija interior de la cerradura para que, haciendo la misma tope en cualquier parte saliente, venga inutilizada por el interior y obedezca solamente al mando automático a disposición del conductor.

8. 发明专利

FR2145140A5 未知
公开(公告)号：FR2145140A5
公开(公告)日：1973-02-16
申请号：FR7147717
申请日：1971-12-31
申请人： CATALA SERRABOGUNA PEDRO , VILCHES CASARES ANTONIO
IPC分类号： E05B47/00 , E05B65/12 , E05B65/20 , E05B65/00

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