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1. 发明申请

WO2012041464A1 PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS 审中-公开
标题翻译：颗粒光学系统和安排以及这种系统和安排的颗粒光学部件
公开(公告)号：WO2012041464A1
公开(公告)日：2012-04-05
申请号：PCT/EP2011/004777
申请日：2011-09-23
申请人： APPLIED MATERIALS ISRAEL Ltd. , CARL ZEISS SMT GMBH , ZEIDLER, Dirk , KEMEN, Thomas , ANGER, Pascal , CASARES, Antonio , RIEDESEL, Christof
发明人： ZEIDLER, Dirk , KEMEN, Thomas , ANGER, Pascal , CASARES, Antonio , RIEDESEL, Christof
IPC分类号： H01J37/09
CPC分类号： H01J37/09 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/28 , H01J37/3177 , H01J2237/0453 , H01J2237/0458 , H01J2237/0492 , H01J2237/1205
摘要： The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles (301); a first multi-aperture plate (320) having plural apertures disposed in a charged particle beam path of the system downstream of the source; a first multi-aperture selector plate (313) having plural apertures; a carrier (340), wherein the first multi-aperture selector plate is mounted on the carrier; and an actuator (350) configured to move the carrier such that the first multi-aperture selector plate is disposed in the charged particle beam path of the system downstream of the source in a first mode of operation of the system, and such that the first multi-aperture selector plate is disposed outside of the charged particle beam path in a second mode of operation of the system. The source, the first multi-aperture plate and the carrier of the system are arranged such that a first number of charged particle beamlets is generated at a position downstream of both the first multi-aperture plate and the first multi-aperture selector plate in the first mode of operation, and that a second number of charged particle beamlets is generated at the position in the second mode of operation, wherein the first number of beamlets differs from the second number of beamlets.
摘要翻译：本发明涉及一种带电粒子多子束系统，其包括带电粒子源（301）; 第一多孔板（320），其具有设置在所述源的下游的所述系统的带电粒子束路径中的多个孔; 具有多个孔的第一多孔选择板（313）载体（340），其中所述第一多孔径选择器板安装在所述载体上; 以及构造成移动所述载体的致动器（350），使得所述第一多孔径选择器板在所述系统的第一操作模式中被布置在所述源的下游的系统的带电粒子束路径中，并且使得所述第一多孔径选择器板在系统的第二操作模式中设置在带电粒子束路径的外部。源极，第一多孔板和系统的载体被布置成使得在第一多孔径板和第一多孔径选择器板的下游位置处产生第一数量的带电粒子子束第一操作模式，并且在第二操作模式的位置处产生第二数量的带电粒子子束，其中第一数量的子束与第二数量的子束不同。

2. 发明公开

EP2622626A1 PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS 有权转让
标题翻译：一个粒子系统和摆置颗粒组件这样的系统和安排
公开(公告)号：EP2622626A1
公开(公告)日：2013-08-07
申请号：EP11761288.7
申请日：2011-09-23
申请人： Applied Materials Israel Ltd. , Carl Zeiss SMT GmbH
发明人： ZEIDLER, Dirk , KEMEN, Thomas , ANGER, Pascal , CASARES, Antonio , RIEDESEL, Christof
IPC分类号： H01J37/09
CPC分类号： H01J37/09 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/28 , H01J37/3177 , H01J2237/0453 , H01J2237/0458 , H01J2237/0492 , H01J2237/1205
摘要： The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles (301); a first multi-aperture plate (320) having plural apertures disposed in a charged particle beam path of the system downstream of the source; a first multi-aperture selector plate (313) having plural apertures; a carrier (340), wherein the first multi-aperture selector plate is mounted on the carrier; and an actuator (350) configured to move the carrier such that the first multi-aperture selector plate is disposed in the charged particle beam path of the system downstream of the source in a first mode of operation of the system, and such that the first multi-aperture selector plate is disposed outside of the charged particle beam path in a second mode of operation of the system. The source, the first multi-aperture plate and the carrier of the system are arranged such that a first number of charged particle beamlets is generated at a position downstream of both the first multi-aperture plate and the first multi-aperture selector plate in the first mode of operation, and that a second number of charged particle beamlets is generated at the position in the second mode of operation, wherein the first number of beamlets differs from the second number of beamlets.

3. 发明申请

WO2020070156A1 METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE 审中-公开
公开(公告)号：WO2020070156A1
公开(公告)日：2020-04-09
申请号：PCT/EP2019/076637
申请日：2019-10-01
申请人： CARL ZEISS SMT GMBH
发明人： ZEIDLER, Dirk , KORB, Thomas , HÜTHWOHL, Philipp , NEUMANN, Jens Timo , RIEDESEL, Christof , WOJEK, Christian , CORREA, Joaquin , HÖGELE, Wolfgang
IPC分类号： G06T7/246
摘要： A method of recording an image using a particle microscope comprises: recording of plural images of an object, wherein intensity values of image data associated with locations in a coordinate system of the recorded image and with locations on the object; determining regions of interest associated with locations; determining image regions containing regions of interest; determining displacement vectors associated with the image regions determined by correlating the image data associated with a given image region with image data of other image regions also associated with the given region of interest; and generating a resulting image based on the image data of the recorded images, wherein locations in the coordinate system of the resulting image are determined based on the displacement vectors associated with the image regions.

4. 发明公开

EP3861528A1 METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE 无效
公开(公告)号：EP3861528A1
公开(公告)日：2021-08-11
申请号：EP19782992.2
申请日：2019-10-01
申请人： Carl Zeiss SMT GmbH
发明人： ZEIDLER, Dirk , KORB, Thomas , HÜTHWOHL, Philipp , NEUMANN, Jens Timo , RIEDESEL, Christof , WOJEK, Christian , CORREA, Joaquin , HÖGELE, Wolfgang
IPC分类号： G06T7/246

5. 发明授权

EP2622626B1 PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS 有权转让
标题翻译：一个粒子系统和摆置颗粒组件这样的系统和安排
公开(公告)号：EP2622626B1
公开(公告)日：2017-01-25
申请号：EP11761288.7
申请日：2011-09-23
申请人： Applied Materials Israel Ltd. , Carl Zeiss Microscopy GmbH
发明人： ZEIDLER, Dirk , KEMEN, Thomas , ANGER, Pascal , CASARES, Antonio , RIEDESEL, Christof
IPC分类号： H01J37/28 , H01J37/317 , H01J37/09
CPC分类号： H01J37/09 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/28 , H01J37/3177 , H01J2237/0453 , H01J2237/0458 , H01J2237/0492 , H01J2237/1205

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