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21. 发明授权

US06559663B2 Method and apparatus for inspecting integrated circuit pattern 有权
标题翻译：检查集成电路图案的方法和装置
公开(公告)号：US06559663B2
公开(公告)日：2003-05-06
申请号：US09983703
申请日：2001-10-25
申请人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
发明人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC分类号： G01R31305
CPC分类号： G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with: the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
摘要翻译：一种电路图案检查方法及其装置，其中待检查样品的待检查部分的整个部分被制成处于预定的充电状态，被检查的部分用图像形成高分辨率照射，在扫描电子束的同时，在从照射电子束的时刻起经过规定时间后，照射电子束的部位检测到二次带电粒子，根据这样检测出形成图像通过使用如此形成的图像来检查次级带电粒子信号和待检查的部分。

22. 发明授权

US06329826B1 Method and apparatus for inspecting integrated circuit pattern 有权
标题翻译：检查集成电路图案的方法和装置
公开(公告)号：US06329826B1
公开(公告)日：2001-12-11
申请号：US09525341
申请日：2000-03-14
申请人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
发明人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC分类号： G01R31305
CPC分类号： G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
摘要翻译：一种电路图案检查方法及其装置，其中待检查样品的待检查部分的整个部分被制成处于预定的充电状态，被检查的部分用图像形成高分辨率照射，在扫描电子束时，在从电子束照射的时刻起经过规定的时间后，在照射电子束的部分检测到二次带电粒子，根据这样检测的次级通过使用如此形成的图像来检查带电粒子信号，并检查待检查的部分。

23. 发明授权

US09625162B2 Heating cooker 有权
公开(公告)号：US09625162B2
公开(公告)日：2017-04-18
申请号：US12999518
申请日：2009-07-24
申请人： Kazushi Yoshimura , Kazushi Furukawa , Masahiro Nishijima , Hiromi Suenaga
发明人： Kazushi Yoshimura , Kazushi Furukawa , Masahiro Nishijima , Hiromi Suenaga
IPC分类号： F24C15/32 , F24C15/16
CPC分类号： F24C15/322 , F24C15/16
摘要： A cooker is equipped with a heating chamber having an open part in the front surface and holding an object to be cooked, an opening/closing door having a see-through window and opens and closes the open part, a suction intake opening opened in one of the side walls that faces the heating chamber, an air discharge outlet opened in the other side wall of the heating chamber, and a circulation duct having first and second side surface parts provided outside of the two side walls of the heating chamber and connecting the suction intake opening provided at the first side surface part and the air discharge outlet provided at the second side surface part. The cooker further includes a circulation fan provided inside the circulation duct and drawing in gas inside the heating chamber through the suction intake opening and blows it out through the air discharge outlet.

24. 发明申请

US20120017882A1 COOKING DEVICE 审中-公开
标题翻译：烹饪器具
公开(公告)号：US20120017882A1
公开(公告)日：2012-01-26
申请号：US13258552
申请日：2010-03-23
申请人： Yoshikazu Kitaguchi , Kazushi Yoshimura , Masahiro Nishijima
发明人： Yoshikazu Kitaguchi , Kazushi Yoshimura , Masahiro Nishijima
IPC分类号： F24C15/02
CPC分类号： F24C15/008 , F21W2131/307
摘要： A cooking device is provided with a casing, a heating compartment (102) provided within the casing and having an opening on the front face side of the heating compartment, a door for opening and closing the opening of the heating compartment (102), a lamp (104) for lighting the inside of the heating compartment (102), and a steel plate (134) mounted indirectly to the heating compartment (102). The lamp (104) is mounted to the free end section of the steel plate (134).
摘要翻译：烹饪装置设置有壳体，设置在壳体内的加热室（102），并且在加热室的正面侧具有开口，用于打开和关闭加热室（102）的开口的门，用于照亮加热室（102）内部的灯（104）和间接地安装在加热室（102）上的钢板（134）。灯（104）安装在钢板（134）的自由端部分上。

25. 发明授权

US07571606B2 Stirling engine 失效
标题翻译：斯特林发动机
公开(公告)号：US07571606B2
公开(公告)日：2009-08-11
申请号：US10582785
申请日：2004-03-18
申请人： Jin Sakamoto , Kazushi Yoshimura , Shinji Yamagami , Yoshiyuki Kitamura , Hiroshi Yasumura
发明人： Jin Sakamoto , Kazushi Yoshimura , Shinji Yamagami , Yoshiyuki Kitamura , Hiroshi Yasumura
IPC分类号： F01B29/10
CPC分类号： F02G1/053 , F02G1/0435 , F02G2243/32 , F02G2270/30 , F02G2280/10
摘要： A Stirling engine A has a pressure container 1 filled with a working gas, a cylinder 2 secured inside the pressure container 1, a power piston 3 provided inside the cylinder 2, and a displacer 4a provided inside the cylinder 2 on the same axis as the power piston 3. The displacer 4 has a displacer piston 41a that slides inside the cylinder 2, and a rod 42a which is connected and fixed to the displacer piston 41a and placed through a slide hole 31 formed at the center of the power piston 3. The rod 42a is formed in the shape of a hollow pipe.
摘要翻译：斯特林发动机A具有填充有工作气体的压力容器1，固定在压力容器1内的气缸2，设置在气缸2内的动力活塞3以及设置在气缸2内的同一轴线上的置换器4a 动力活塞3.置换器4具有在气缸2内滑动的置换器活塞41a和连接并固定到置换器活塞41a并通过形成在动力活塞3的中心的滑动孔31放置的杆42a。杆42a形成为中空管的形状。

26. 发明申请

US20080302964A1 METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN 有权
标题翻译：用于检查集成电路图案的方法和装置
公开(公告)号：US20080302964A1
公开(公告)日：2008-12-11
申请号：US12190388
申请日：2008-08-12
申请人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
发明人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC分类号： G01N23/00 , G01R31/305
CPC分类号： G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
摘要翻译：电路图案检查方法及其装置，其中待检查的样品的待检查部分的整体部分处于预定的改变状态，被检查的部分用成像高分辨率照射，在扫描电子束时，在从电子束照射的时刻起经过规定的时间后，在照射电子束的部分检测到二次带电粒子，根据这样检测的次级通过使用如此形成的图像来检查带电粒子信号，并检查待检查的部分。

27. 发明申请

US20060137339A1 Stirling engine 失效
标题翻译：斯特林发动机
公开(公告)号：US20060137339A1
公开(公告)日：2006-06-29
申请号：US10564094
申请日：2004-07-20
申请人： Jin Sakamoto , Kazushi Yoshimura , Kenji Takai , Shinji Yamagami , Yoshiyuki Kitamura , Hiroshi Yasumura , Hirotaka Ohno
发明人： Jin Sakamoto , Kazushi Yoshimura , Kenji Takai , Shinji Yamagami , Yoshiyuki Kitamura , Hiroshi Yasumura , Hirotaka Ohno
IPC分类号： F02G1/04
CPC分类号： F25B9/14 , F02G1/0435 , F02G1/053 , F25B2309/001
摘要： A Stirling engine, wherein when a linear motor reciprocatingly move a piston in a cylinder, a displacer also reciprocatingly moves in the cylinder storing the displacer. By this, working mixture moves between a compression space and an expansion space. Though a spring for generating resonance is combined with the displacer, a spring for generating resonance for the piston is eliminated. Gas bearings are installed for the piston at two or more positions at specified intervals in the axial direction. An inside flange formed at the end of the cylinder and a stopper plate fixed to the linear motor determine the moving limit of the piston. Since a pin projected from the stopper plate is received by a through hole in a magnet holder, the piston can be prevented from being rotated.
摘要翻译：一种斯特林发动机，其中当线性马达往复运动的气缸中的活塞时，置换器也在容纳置换器的气缸中往复运动。由此，工作混合物在压缩空间和膨胀空间之间移动。虽然用于产生共振的弹簧与置换器组合，但是消除了用于产生活塞的共振的弹簧。在轴向上以规定的间隔在两个或多个位置安装气体轴承。形成在气缸端部的内凸缘和固定到线性电动机的止动板确定活塞的移动极限。由于从止动板突出的销被磁体保持器中的通孔接收，所以可以防止活塞旋转。

28. 发明申请

US20060065645A1 Apparatus for repairing circuit pattern and method for manufacturing display apparatus using the same 有权
标题翻译：用于修复电路图案的装置和使用该装置的显示装置的制造方法
公开(公告)号：US20060065645A1
公开(公告)日：2006-03-30
申请号：US11143981
申请日：2005-06-03
申请人： Nobuaki Nakasu , Kaoru Yamada , Yuichiro Tanaka , Takeshi Arai , Hideyuki Honoki , Kazushi Yoshimura , Tetsuya Kawamura , Masanori Okawa
发明人： Nobuaki Nakasu , Kaoru Yamada , Yuichiro Tanaka , Takeshi Arai , Hideyuki Honoki , Kazushi Yoshimura , Tetsuya Kawamura , Masanori Okawa
IPC分类号： B23K26/36 , B23K26/03 , B23K26/06
CPC分类号： B23K26/34 , B23K26/32 , B23K2101/34 , B23K2101/36 , B23K2103/08 , B23K2103/50 , G02F1/1309 , H01L27/124 , H01L27/1259
摘要： A region surrounded by two gate wiring and two drain wiring includes pixels and when there is a defect of short-circuit in adjacent pixel electrodes, the short-circuited portion is removed by irradiating a laser via a mask having a transmission pattern, which corresponds to a pattern of the gate wiring, drain wiring and pixel electrodes in the short-circuited portion. The above short-circuited portion is identified and removed in comparison to a normal pattern, by use of information from an inspection apparatus, and the pattern defect formed on the substrate is automatically repaired. By applying the above method to a manufacturing process of display apparatus, in particular, to a resist pattern forming process, a display apparatus having a highly qualified display property may be achieved.
摘要翻译：由两个栅极布线和两个漏极布线包围的区域包括像素，并且当相邻像素电极中存在短路的缺陷时，通过经由具有透射图案的掩模照射激光来去除短路部分，该掩模对应于在短路部分中的栅极布线，漏极布线和像素电极的图案。通过使用来自检查装置的信息，与正常图案相比，识别和去除上述短路部分，并自动修复在基板上形成的图案缺陷。通过将上述方法应用于显示装置的制造工艺，特别是涉及抗蚀剂图案形成处理，可以实现具有高度合格的显示特性的显示装置。

29. 发明授权

US5883437A Method and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereof 失效
标题翻译：电子电路接线检查和校正方法及装置及其制造方法
公开(公告)号：US5883437A
公开(公告)日：1999-03-16
申请号：US580531
申请日：1995-12-28
申请人： Shigenobu Maruyama , Mikio Hongo , Satoru Todoroki , Masaaki Okunaka , Hideo Matsuzaki , Takanori Ninomiya , Kazushi Yoshimura , Fumikazu Ito
发明人： Shigenobu Maruyama , Mikio Hongo , Satoru Todoroki , Masaaki Okunaka , Hideo Matsuzaki , Takanori Ninomiya , Kazushi Yoshimura , Fumikazu Ito
IPC分类号： G02F1/1362 , H01L21/48 , H01L23/48 , H01L29/40 , H01L29/52
CPC分类号： G02F1/136286 , H01L21/485 , G02F2001/136254 , H01L2924/0002
摘要： A method and apparatus for inspecting wirings of an electronic circuit substrate to detect a defect in the wiring and for enabling correction thereof. The inspection method and apparatus include electrostatically coupling at least one electrode to a wiring pattern, applying a time varying voltage between the electrode and wiring pattern at different locations so as to detect a current flow and determine a defect by a variation in the detected current flow at the different locations and a portion of the defect. A defect in the form of a disconnected or half-disconnected point of the wiring may be corrected by supplying a solution of a metal complex to the disconnected or half-disconnected point, heating the solution and end point areas of the disconnected or half-disconnected point by laser light and precipitating a metal thin film establishing a connection of the wiring.
摘要翻译：一种用于检查电子电路基板的布线以检测布线中的缺陷并使其能够进行校正的方法和装置。检查方法和装置包括将至少一个电极静电耦合到布线图案，在不同位置在电极和布线图案之间施加时变电压，以便检测电流，并通过检测电流的变化来确定缺陷在不同的位置和缺陷的一部分。可以通过将金属复合物的溶液提供给断开或半断开的点来加热接头的断开或半断开点的形式的缺陷，加热解决方案和终点区域的断开或半断开通过激光点并沉淀建立连线的金属薄膜。

30. 发明授权

US5301248A Method for pattern inspection and apparatus therefor 失效
标题翻译：图案检查方法及其设备
公开(公告)号：US5301248A
公开(公告)日：1994-04-05
申请号：US904892
申请日：1992-06-25
申请人： Ninomiya Takanori , Kazushi Yoshimura , Mineo Nomoto
发明人： Ninomiya Takanori , Kazushi Yoshimura , Mineo Nomoto
IPC分类号： G01R31/308 , G06T7/00 , G06K9/00
CPC分类号： G06T7/001 , G01R31/308 , G06T7/0006 , G06T2207/20036 , G06T2207/20144 , G06T2207/30141
摘要： A detected pattern is binarized, the binarized pattern is expanded, an image size is reduced while a connectivity of the expanded pattern is preserved and stored in a first memory. In turn, the binarized pattern is contracted, the image size is reduced while a connectivity of the contracted pattern is preserved and stored in a second memory. Then the expanded pattern is read out from the first memory and a connectivity of the pattern is selected. The contracted pattern is read out from the second pattern and the connectivity of the pattern is extracted. The selected connectivities are compared with the connectivity of a normal pattern to detect a non-coincidence. The circuit pattern having a short circuit or a semi-short circuit defect and a circuit pattern having an open circuit or a semi-open circuit defect are classified and selected in response to these non-coincidences. Further, a pattern shape stored in the first memory is analyzed to specify the position where the short circuit or a semi-short circuit defect is present.
摘要翻译：检测到的图案被二值化，二值化图案被扩展，图像尺寸减小，而扩展图案的连接被保存并存储在第一存储器中。反过来，二进制图案被缩小，图像尺寸减小，而合同图案的连接被保存并存储在第二存储器中。然后，从第一存储器读出扩展模式，并且选择模式的连接。从第二模式读出收缩模式，并提取模式的连接。将所选择的连接性与正常模式的连接进行比较以检测不重合。具有短路或半短路缺陷的电路图案以及具有开路或半开路缺陷的电路图案被分类并响应于这些非重合而选择。此外，分析存储在第一存储器中的图案形状以指定存在短路或半短路缺陷的位置。

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