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    • 6. 发明申请
    • PINHOLE DEFECT REPAIR BY RESIST FLOW
    • 用微流量法以微孔形式进行故障修复
    • WO02025375A2
    • 2002-03-28
    • PCT/US2001/029565
    • 2001-09-21
    • G01Q30/10G01Q60/00G01Q70/00G01Q80/00G01Q90/00G03F7/40H01L21/027H01L21/66G03F7/00
    • B82Y15/00G03F7/40
    • According to one aspect of the present invention, pinhole defects in resist coatings are repaired by heating the resist briefly to induce the resist to flow and fill pinholes. The resist is brought to a temperature at or above that at which the resist flows for long enough to permit the resist to flow and fill pinhole defects, but not so long as to corrupt the resist pattern. The original resist pattern may be biased to allow for some flow during the pinhole repair process. The entire patterned resist may be heated at once, or it may be heated one portion at a time. The application of heat may optionally be limited to locations where pinhole defects are found. By means of the invention, very thin patterned resist coatings free from pinhole defects may be obtained.
    • 本发明使得可以修复出现在抗蚀剂涂层上的微孔形式的缺陷。 要做到这一点,加热器会短暂加热以引起抗蚀剂流动并填充微孔。 使抗蚀剂达到等于或大于流动温度的温度足够的时间以使抗蚀剂流动并填充微孔,但不足以改变抗蚀剂图案。 最初的抗蚀剂图案可以被偏置以在微孔修复操作期间允许流动。 整个图案化的抗蚀剂可以立即或逐渐加热。 而且,热量的施加可能仅限于微孔出现的位置。 本发明提供了非常精细的抗蚀剂涂层而没有不希望的微孔。