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1. 发明申请

WO2003087867A2 EXTREME ULTRAVIOLET LIGHT SOURCE 审中-公开
标题翻译：极光紫外线光源
公开(公告)号：WO2003087867A2
公开(公告)日：2003-10-23
申请号：PCT/US2003/011139
申请日：2003-04-09
申请人： CYMER, INC. , MELNYCHUK, Stephen, T. , PARTLO, William, N. , FOMENKOV, Igor, V. , OLIVER, I., Roger , NESS, Richard, M. , BOWERING, Norbert , KHODYKIN, Oleh , RETTIG, Curtis, L. , BLUMENSTOCK, Gerry, M. , DYER, Timothy, S. , SIMMONS, Rodney, D. , HOFFMAN, Jerzy, R. , JOHNSON, R., Mark
发明人： MELNYCHUK, Stephen, T. , PARTLO, William, N. , FOMENKOV, Igor, V. , OLIVER, I., Roger , NESS, Richard, M. , BOWERING, Norbert , KHODYKIN, Oleh , RETTIG, Curtis, L. , BLUMENSTOCK, Gerry, M. , DYER, Timothy, S. , SIMMONS, Rodney, D. , HOFFMAN, Jerzy, R. , JOHNSON, R., Mark
IPC分类号： G01S
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70175 , G03F7/70916 , H01S3/005 , H05G2/005 , H05G2/008 , H05H1/06
摘要： The present invention provides a reliable, high-repetition rate, production line compatible high-energy photon source. Very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
摘要翻译：在真空室中产生可靠的高重复率生产线相容的高能光子源，其中包含具有期望的极紫外（EUV）波长范围内的发射线的原子元素的热等离子体。 EUV光源单元直接集成到诸如步进机之类的光刻单元中。集成部件可以包括评论者，以及如（120）所示的固态脉冲功率单元和真空容器的压缩头。支撑设备位于支撑设备柜（122）中，粗抽真空泵和高压水泵位于第三柜（124）中。脉冲功率单元提供电脉冲，其具有足够的能量和电势，足以在连续的基础上以超过5瓦的速率在中间焦点产生EUV光，并且在突发的基础上超过20瓦。

2. 发明申请

WO2011011702A8 RADIONUCLIDE PRODUCTION USING A Z-PINCH NEUTRON SOURCE 审中-公开
标题翻译：使用Z-pinch中子源的放射性核素生产
公开(公告)号：WO2011011702A8
公开(公告)日：2011-02-24
申请号：PCT/US2010043077
申请日：2010-07-23
申请人： WESSEL FRANK J , RAHMAN HAFIZ , UNIV CALIFORNIA
发明人： WESSEL FRANK J , RAHMAN HAFIZ
IPC分类号： G21G1/06
CPC分类号： G21G1/06 , G21B1/03 , H05H1/06 , H05H3/06 , Y02E30/14
摘要： Radionuclides are produced with a pulsed neutron flux from a multiple repetition rate staged Z-pinch machine, the pulsed neutron flux is moderated, an activatable radionuclide precursor is exposed to the moderated pulsed neutron flux, and a corresponding radionuclide from the activatable radionuclide precursor is produced. High current pulses are passed through a target plasma of fusible material enclosed in a cylindrical liner plasma composed of a high-Z plasma to generate a magnetic field that compresses the liner plasma, and generates shock waves. The shock implodes the target plasma. The shock front propagates between an outer shock front and an axis of the target plasma so it is heated through shock dissipation and by adiabatic compression due to an imploding shock front produced in the outer liner plasma to fuse light nuclei and generate alpha particles and neutrons. Alpha particles trapped within the magnetic field further heat the target plasma.
摘要翻译：放射性核素用来自多次重复分级Z箍缩机的脉冲中子通量产生，脉冲中子通量缓和，可活化放射性核素前体暴露于缓和脉冲中子通量，产生来自可活化放射性核素前体的相应放射性核素。高电流脉冲通过包围在由高Z等离子体构成的圆柱形衬垫等离子体中的易熔材料的目标等离子体，以产生压缩衬垫等离子体的磁场并产生冲击波。冲击使目标等离子体内爆。冲击锋在外部冲击锋和目标等离子体的轴之间传播，因此它通过冲击耗散和绝热压缩而加热，这是由于在外部等离子体等离子体中产生爆炸冲击波前沿以融合轻原子核并产生α粒子和中子。捕获在磁场内的阿尔法粒子进一步加热目标等离子体。

3. 发明申请

WO01078469A2 Z-PINCH PLASMA X-RAY SOURCE USING SURFACE DISCHARGE PREIONIZATION 审中-公开
标题翻译： Z-PINCH等离子体X射线源使用表面放电预处理
公开(公告)号：WO01078469A2
公开(公告)日：2001-10-18
申请号：PCT/US2001/009964
申请日：2001-03-28
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005 , H05H1/06
摘要： A Z-pinch plasma X-ray source includes a chamber having an insulating wall and defining a pinch region, a pinch anode and a pinch cathode positioned at opposite ends of the pinch region, a first conductor defining an edge in close proximity to or contacting an inside surface of the insulating wall and a second conductor disposed around an outside surface of the insulating wall. A surface discharge is produced on the inside surface of the insulating wall in response to application of a voltage to the first and second conductors. The surface discharge causes the gas to ionize and to form a plasma shell near the inside surface of the insulating wall. The pinch anode and the pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in the pinch region in response to application of a high energy electric pulse to the pinch anode and the pinch cathode. The azimuthal magnetic field causes the plasma shell to collapse to the central axis and to generate X-rays.
摘要翻译： Z夹式等离子体X射线源包括具有绝缘壁并限定夹持区域的腔室，夹紧阳极和位于夹持区域的相对端的夹紧阴极，第一导体限定靠近或接触的边缘所述绝缘壁的内表面和设置在所述绝缘壁的外表面周围的第二导体。响应于向第一和第二导体施加电压，在绝缘壁的内表面上产生表面放电。表面放电使得气体离子化并在绝缘壁的内表面附近形成等离子体壳。收缩阳极和夹紧阴极在轴向方向上产生通过等离子体壳体的电流，并且响应于向收缩阳极和夹点阴极施加高能电脉冲而在夹紧区域中产生方位磁场。方位角磁场使等离子体壳塌陷到中心轴线并产生X射线。

4. 发明申请

WO2008098914A1 A SYSTEM FOR ACTIVATING A PLASMA FOCUS UNIT 审中-公开
标题翻译：一个用于激活等离子体聚焦单元的系统
公开(公告)号：WO2008098914A1
公开(公告)日：2008-08-21
申请号：PCT/EP2008/051646
申请日：2008-02-12
申请人： O.C.E.M. S.P.A. , FARIOLI, Marco
发明人： FARIOLI, Marco
IPC分类号： G21B3/00 , H05H1/06
CPC分类号： G21B3/00 , G21B1/21 , H05H1/06 , Y02E30/18
摘要： A system for activating a plasma focus unit, comprising a plurality of electric meshes, (E 1 ), (E 2 ),..., (E J ),..., (E N ),each of which comprises the plasma focus unit PF and a relative branch (R J ), derived from terminals (H), (K) of the plasma focus unit (PF). A first mesh (E 1 ) exhibits: a current switch (SW); a diode (D 1 ); and a bank of capacitors (C 1 ) able to set off a current discharge (i C ) across the plasma focus unit (PF); the remaining meshes (E 2 ),..., (E J ),..., (E N ),each exhibit: a diode (D J ); and a bank of capacitors (C J ) charged at a potential difference which is insufficient for setting off a current (i C ) discharge across the plasma focus unit (PF).
摘要翻译：一种用于激活等离子体聚焦单元的系统，包括多个电网，（E 1 / N 2），（E 2 2），...，（E S ，其中每个包括源自端子的等离子体聚焦单元PF和相对分支（R SUB），相对分支（R SUB）（H），（K）等离子体聚焦单元。第一网格（E 1> 1）表现出：电流开关（SW）; 一个二极管（D 1 N）; 以及能够跨越等离子体聚焦单元（PF）排出电流放电（I SUB）的一组电容器（C 1 SUB）; 其余的网格（E 2 2）），，，，E E J J J J J））））：：：：：：：：：：：：：：）二极管（D SUB）; 以及在电位差充电的电容器组（C SUB），其不足以用于排出等离子体聚焦单元（PF）上的电流（I SUB C）放电。

5. 发明申请

WO2008098913A1 AN APPARATUS FOR ACTIVATING A PLASMA FOCUS UNIT 审中-公开
标题翻译：用于激活等离子体聚焦单元的装置
公开(公告)号：WO2008098913A1
公开(公告)日：2008-08-21
申请号：PCT/EP2008/051645
申请日：2008-02-12
申请人： O.C.E.M. S.P.A. , BASILE, Gianluigi
发明人： BASILE, Gianluigi
IPC分类号： H05H1/06 , G21B3/00
CPC分类号： H05H1/06 , G21B1/21 , G21B3/00 , Y02E30/18
摘要： An apparatus for activating a plasma focus unit, comprising a first electric mesh (E 1 ), in turn comprising: the plasma focus unit (PF); a bank of capacitors (C) derived from a first tension node (A) and a second tension node (B); a switch (SW 1 ), and a diode (D1) for conducting the current (i c ) when the potential of the node (A) is greater than the potential of the node (B). The apparatus further comprises an additional electric branch (RA) connected to the bank of capacitors (C) to define an electric mesh (E 2 ), comprising: a diode (D2) for conducting the current (i c ) when the potential of the node (B) is greater than the potential of the node (A); and a current switch (SW 2 ).
摘要翻译：一种用于激活等离子体聚焦单元的装置，包括第一电网（E＆gt; 1＆gt;），其又包括：等离子体聚焦单元（PF）; 源自第一张力节点（A）和第二张力节点（B）的电容器组（C）; 一个开关（SW 1 SUB）和一个用于在节点（A）的电位大于电位的电位时导通电流（i）的二极管（D1）节点（B）。该装置还包括连接到电容器组（C）的附加电分支（RA），以限定电网（E 2>），包括：二极管（D2），用于传导电流当节点（B）的电位大于节点（A）的电位时; 和电流开关（SW 2 2）。

6. 发明申请

WO01095362A1 PLASMA FOCUS LIGHT SOURCE WITH ACTIVE AND BUFFER GAS CONTROL 审中-公开
标题翻译：具有主动和缓冲气体控制的等离子体聚焦光源
公开(公告)号：WO01095362A1
公开(公告)日：2001-12-13
申请号：PCT/US2001/018680
申请日：2001-06-07
IPC分类号： G21K1/00 , G03F7/20 , G21K1/06 , G21K5/00 , G21K5/02 , G21K5/08 , H01L21/027 , H05G2/00 , H05H1/06 , H05H1/24 , H01J35/20
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70908 , G03F7/70916 , H05G2/005 , H05H1/06
摘要： A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber (10). The chamber (10) contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 pi steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at 2000 Hz or greater. Gas flows in the vacuum chamber are controlled to assure desired concentration of active gas in the discharge region and to minimize active gas concentration in the beam path downstream of the pinch region. In a preferred embodiment, active gas is injected downstream of the pinch region through a nozzle (2) and exhausted axially through an exhaust port (3) in the center of the anode. In another preferred embodiment a laserbeam generates metal vapor at a location close to but downstream of the pinch region and the vapor is exhausted axially through the anode.
摘要翻译：高能光子源。一对等离子体夹持电极位于真空室（10）中。室（10）包含工作气体，其包括贵重缓冲气体和选择用于提供所需光谱线的活性气体。脉冲电源以1000Hz或更大的重复频率提供电脉冲，并且在足够高的电压下在电极之间产生电放电，以在工作气体中产生非常高温度的高密度等离子体夹持，从而在源的光谱线处提供辐射或活性气体。描述了第四代单元，其以氙气作为活性气体以2000Hz的重复频率产生20mJ，13.5nm脉冲到2π立体声中。该单元包括具有对充电电容器组充电的谐振充电器的脉冲电力系统和包括用于产生2000Hz或更大的高电压电脉冲的脉冲变压器的磁性压缩电路。控制真空室中的气体流动以确保放电区域中活性气体的期望浓度，并使夹持区域下游的光束路径中的活性气体浓度最小化。在优选实施例中，活性气体通过喷嘴（2）在夹紧区域的下游被注入，并且通过在阳极中心的排气口（3）沿轴向排出。在另一个优选实施例中，激光束在靠近夹紧区域的下游的位置处产生金属蒸汽，并且蒸汽轴向地通过阳极排出。

7. 发明申请

WO1993019572A1 PROCESS FOR ACCELERTING ELECTRICALLY CHARGED PARTICLES 审中-公开
标题翻译：加电电荷颗粒的方法
公开(公告)号：WO1993019572A1
公开(公告)日：1993-09-30
申请号：PCT/DE1993000253
申请日：1993-03-18
申请人： KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH , SCHULTHEISS, Christoph , KONIJNENBERG, Martin , SCHWALL, Markus
发明人： KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH
IPC分类号： H05H01/22
CPC分类号： H05H1/06 , H05H5/00
摘要： A process for accelerating electrically charged particles and a particle accelerator for applying the process are diclosed. The beam thus generated has a high degree of intensity and convergence and is suitable for uniformly depositing a material on a substrate. Similarly, it is useful for generating light of different spectral regions.

8. 发明申请

WO2015199770A2 FAST BURST AND STEADY-STATE INTENSE NEUTRON SOURCE 审中-公开
标题翻译：快速爆发和稳定状态强化中性源
公开(公告)号：WO2015199770A2
公开(公告)日：2015-12-30
申请号：PCT/US2015/021032
申请日：2015-03-17
申请人： PHOENIX NUCLEAR LABS LLC
发明人： RADEL, Ross , SCHNEIDER, Dave , MOLL, Eli , OZBURN, David , SENGBUSCH, Evan , CAMPBELL, Logan
IPC分类号： G21G4/02
CPC分类号： G21G4/02 , G21C1/30 , H05H1/06 , H05H3/06
摘要： A first system for producing a high flux of neutrons for non-destructive testing includes a dense plasma focus device neutronically coupled to a subcritical or sub-prompt critical fission assembly. The dense plasma focus device is a source of initiating neutrons for the fission assembly, and the fission assembly is configured to multiply a number of the initiating neutrons via inducing fission. A second system for producing a high flux of neutrons includes a gas-target neutron generator neutronically coupled to a subcritical or sub-prompt critical fission assembly. The gas-target neutron generator is a source of initiating neutrons for the fission assembly, and the fission assembly is configured to multiply a number of the initiating neutrons via inducing fission.
摘要翻译：用于生产用于非破坏性测试的高通量中子的第一系统包括中子耦合到亚临界或次临界裂变组件的致密等离子体聚焦装置。致密等离子体聚焦装置是用于分裂组件的起始中子的源，并且裂变组件被配置成通过引发裂变使多个起始中子倍增。用于产生高通量中子的第二系统包括中子耦合到亚临界或次临界裂变组件的气靶中子发生器。气体目标中子发生器是用于分裂组件的起始中子的源，并且裂变组件被配置为通过引发裂变来乘以多个起始中子。

9. 发明申请

WO2011014801A3 STAGED Z-PINCH FOR THE PRODUCTION OF HIGH-FLUX NEUTRONS AND NET ENERGY 审中-公开
标题翻译：用于生产高通量中子和网络能量的标记Z-PINCH
公开(公告)号：WO2011014801A3
公开(公告)日：2011-05-26
申请号：PCT/US2010043967
申请日：2010-07-30
申请人： WESSEL FRANK , RAHMAN HAFIZ UR , ROSTOKER NORMAN , NEY PAUL , UNIV CALIFORNIA
发明人： WESSEL FRANK , RAHMAN HAFIZ UR , ROSTOKER NORMAN , NEY PAUL
IPC分类号： G21B1/00 , G21B1/23
CPC分类号： H05H3/06 , G21B3/008 , H05H1/06 , H05H6/00
摘要： A fusible target is embedded in a high Z liner, ohmically heated and then shock wave heated by implosion of an enveloping high Z liner. The target is adiabatically heated by compression, fusibly ignited and charged-particle heated as it is being ignited. A shock front forms as the liner implodes which shock front detaches from the more slowly moving liner, collides with the outer surface of the target, accelerates inward, rapidly heating the target, adiabatically compressing the target and liner and amplifying the current to converge the liner mass toward a central axis thereby compressing the target to a fusion condition when it begins to ignite and produce charged particles. The charged particles are trapped in a large magnetic field surrounding the target. The energy of the charged particles is deposited into the target to further heat the target to produce an energy gain.
摘要翻译：一个可熔的目标是嵌入一个高Z衬里，欧姆加热，然后冲击波加热包围高Z衬里的内爆。目标通过压缩绝热加热，易燃点燃，带电粒子被点燃时加热。当衬垫撞击时，冲击前锋与更缓慢移动的衬垫分离，与目标的外表面碰撞，向内加速，快速加热靶，绝热压缩靶和衬垫，并放大电流以使衬套收敛从而当靶开始点燃并产生带电粒子时将靶压缩到融合条件。带电粒子被捕获在围绕靶的大磁场中。带电粒子的能量被沉积到靶中以进一步加热目标物以产生能量增益。

10. 发明申请

WO2011014801A2 STAGED Z-PINCH FOR THE PRODUCTION OF HIGH-FLUX NEUTRONS AND NET ENERGY 审中-公开
标题翻译：用于生产高通量中性粒子和净能量的Z-PINCH
公开(公告)号：WO2011014801A2
公开(公告)日：2011-02-03
申请号：PCT/US2010/043967
申请日：2010-07-30
申请人： WESSEL, Frank , RAHMAN, Hafiz Ur , ROSTOKER, Norman , NEY, Paul , The Regents of the University of California
发明人： WESSEL, Frank , RAHMAN, Hafiz Ur , ROSTOKER, Norman , NEY, Paul
IPC分类号： G21B1/00 , G21B1/23
CPC分类号： H05H3/06 , G21B3/008 , H05H1/06 , H05H6/00
摘要： A fusible target is embedded in a high Z liner, ohmically heated and then shock wave heated by implosion of an enveloping high Z liner. The target is adiabatically heated by compression, fusibly ignited and charged-particle heated as it is being ignited. A shock front forms as the liner implodes which shock front detaches from the more slowly moving liner, collides with the outer surface of the target, accelerates inward, rapidly heating the target, adiabatically compressing the target and liner and amplifying the current to converge the liner mass toward a central axis thereby compressing the target to a fusion condition when it begins to ignite and produce charged particles. The charged particles are trapped in a large magnetic field surrounding the target. The energy of the charged particles is deposited into the target to further heat the target to produce an energy gain.
摘要翻译：将可熔目标嵌入高Z内衬中，通过欧姆加热，然后通过封装高Z内衬的内爆来加热冲击波。目标通过压缩绝热加热，在被点燃时被熔化点燃并被带电粒子加热。当内衬撞击时，冲击锋形成，冲击锋从较缓慢移动的内衬分离，与目标外表面碰撞，向内加速，快速加热目标，绝热地压缩目标和内衬并放大电流以聚集内衬朝向中心轴质量，从而当目标开始点燃并产生带电粒子时将目标压缩到融合状态。带电粒子被困在目标周围的大磁场中。带电粒子的能量会沉积到目标中，进一步加热目标以产生能量增益。

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