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    • 1. 发明申请
    • SYSTEM AND METHOD FOR DETERMINING THE ABSOLUTE SENSITIVITY OF A MEMS MICROPHONE WITH CAPACITIVE AND PIEZOELECTRIC ELECTRODES
    • 用电容和压电电极确定MEMS麦克风的绝对灵敏度的系统和方法
    • WO2017102172A1
    • 2017-06-22
    • PCT/EP2016/076802
    • 2016-11-07
    • ROBERT BOSCH GMBH
    • DOLLER, Andy
    • H04R29/00H04R23/02
    • H04R29/004H04R17/02H04R19/04H04R23/006H04R23/02H04R2201/003
    • Microphone systems and methods of determining absolute sensitivities of a MEMS microphone (100). The microphone system includes a speaker (155), the MEMS microphone (100), and a controller (205). The speaker (155) is configured to generate acoustic pressure. The MEMS microphone (100) includes a capacitive electrode (105), a backplate (110), and a piezoelectric electrode (115). The capacitive electrode (105) is configured such that the acoustic pressure causes a first movement and to generate a first mechanical pressure. The piezoelectric electrode (115) is coupled to the capacitive electrode (105) and is configured to generate a first piezoelectric response signal based on the acoustic pressure. The piezoelectric electrode (115) is further configured to generate a second piezoelectric response signal based on the first mechanical pressure. The controller (205) is configured to determine a first capacitive response based on the first movement and determine an absolute sensitivity of the capacitive electrode (105) based on the first capacitive response, the first piezoelectric response signal, and the second piezoelectric response signal.
    • 确定MEMS麦克风绝对灵敏度的麦克风系统和方法(100)。 麦克风系统包括扬声器(155),MEMS麦克风(100)和控制器(205)。 扬声器(155)被配置为产生声压。 MEMS麦克风(100)包括电容电极(105),背板(110)和压电电极(115)。 电容电极(105)被配置成使得声压引起第一运动并产生第一机械压力。 压电电极(115)耦合到电容电极(105),并被配置为基于声压生成第一压电响应信号。 压电电极(115)还被配置为基于第一机械压力产生第二压电响应信号。 控制器(205)被配置为基于第一移动确定第一电容响应并且基于第一电容响应,第一压电响应信号和第二压电响应信号来确定电容电极(105)的绝对灵敏度。
    • 7. 发明申请
    • ELECTROSTATIC TRANSDUCER
    • 静电传感器
    • WO2012156753A1
    • 2012-11-22
    • PCT/GB2012/051130
    • 2012-05-18
    • WARWICK AUDIO TECHNOLOGIES LIMITEDATKINS, BrianBILLSON, DuncanHOARE, David
    • ATKINS, BrianBILLSON, DuncanHOARE, David
    • H04R19/02H04R7/08
    • H04R19/02H04R7/08H04R19/04H04R23/006H04R2201/003
    • An electrostatic transducer comprises an electrically conductive first layer (1), a flexible insulating second layer (25) disposed over the first layer, and a flexible electrically conductive third layer (26) disposed over the second layer. Between the first and the second layers are provided spacers (24) and between the second and the third layers are provided spacers (27). The spacers may be provided by strips of adhesive or by bonding the layers together by welding, for example. The first layer (1) is provided with an array of through apertures (5) each having an inlet (6) facing the second layer (2) and an outlet (7). In response to signals applied to the first and third layers, the second and third layers have portions which are displaced towards the outlets of the apertures by electrostatic forces. The apertures (5) may have conducting walls and the walls may converge.
    • 静电换能器包括导电的第一层(1),设置在第一层之上的柔性绝缘的第二层(25)和设置在第二层上的柔性导电的第三层(26)。 在第一和第二层之间设置间隔物(24),并且在第二和第三层之间设置间隔物(27)。 间隔物可以由粘合剂条提供,或者通过例如焊接将层粘合在一起。 第一层(1)设置有每个具有面向第二层(2)的入口(6)和出口(7)的通孔(5)的阵列。 响应于施加到第一和第三层的信号,第二和第三层具有通过静电力朝向孔的出口移位的部分。 孔(5)可以具有导电壁并且壁会聚。
    • 10. 发明申请
    • DUAL DIAPHRAGM MICROPHONE
    • 双胶膜麦克风
    • WO2016160327A1
    • 2016-10-06
    • PCT/US2016/022493
    • 2016-03-15
    • QUALCOMM INCORPORATED
    • PARK, Hyun Jin
    • H04R19/04H04R3/00
    • H04R7/02H04R1/08H04R1/222H04R3/005H04R19/005H04R19/04H04R23/006H04R2201/003H04R2410/05
    • A dual diaphragm microphone can be used to reduce or eliminate a component of the output signal due to acceleration of the microphone. The dual diaphragm microphone can include a first sound-detecting component including a first diaphragm spaced apart from a first electrode and configured to generate a first signal and a second sound-detecting component including a second diaphragm spaced apart from a second electrode and configured to generate a second signal. The first sound-detecting component and the second sound-detecting component are oriented in opposite directions and include electronic circuitry configured to sum the first and second output signals to generate a combined output signal substantially unaffected by acceleration of the microphone.
    • 可以使用双隔膜麦克风来减少或消除由于麦克风的加速度引起的输出信号的分量。 双隔膜麦克风可以包括第一声音检测部件,该第一声音检测部件包括与第一电极间隔开并被配置为产生第一信号的第一隔膜和包括与第二电极间隔开的第二隔膜的第二声音检测部件, 第二个信号。 第一声​​音检测部件和第二声音检测部件被定向在相反方向上,并且包括被配置为对第一和第二输出信号求和以产生基本上不受麦克风的加速度影响的组合输出信号的电子电路。