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1. 发明申请

WO2016057220A1 PHOTOLITHOGRAPHY STRUCTURES AND METHODS 审中-公开
标题翻译：光刻结构与方法
公开(公告)号：WO2016057220A1
公开(公告)日：2016-04-14
申请号：PCT/US2015/051656
申请日：2015-09-23
申请人： PIXTRONIX, INC.
发明人： VILLARREAL, Javier , BROSNIHAN, Timothy , HO, Chin-Yuan , LIN, Hung-Chien
IPC分类号： G02B26/02
CPC分类号： B81C1/00523 , B81B3/0029 , B81B7/02 , B81B2201/045 , B81B2203/0307 , B81C1/0019 , B81C1/00412 , B81C2201/0105 , B81C2201/0159 , G02B26/02 , G06T1/20
摘要： This disclosure provides systems, methods and apparatus including processes that use two layers of resist, with a layer of etch stop material in between. The two layers of resist may be etched in separate processes to form devices having vias with sidewalls that extend through both layers of resist
摘要翻译：本公开提供了包括使用两层抗蚀剂的工艺的系统，方法和设备，其间具有一层蚀刻停止材料。可以在单独的工艺中蚀刻两层抗蚀剂，以形成具有延伸穿过两层抗蚀剂的侧壁的通路的器件

2. 发明申请

WO2015103311A1 DISPLAY APERTURE PIXEL CIRCUIT ARCHITECTURE INCLUDING PLANARIZATION LAYER 审中-公开
标题翻译：显示光栅像素电路架构，包括平面化层
公开(公告)号：WO2015103311A1
公开(公告)日：2015-07-09
申请号：PCT/US2014/072838
申请日：2014-12-30
申请人： PIXTRONIX, INC.
发明人： LEWIS, Stephen R. , BROSNIHAN, Timothy , PAPAS, Ilias , BEEBE, Robert
IPC分类号： G09G3/34
CPC分类号： G02B26/023 , G09G3/3406 , G09G3/3466 , G09G2300/08 , G09G2300/0819 , G09G2300/0876 , G09G2310/0251 , G09G2310/0254 , G09G2320/0214 , G09G2320/0233 , G09G2320/0626
摘要： This disclosure provides systems, methods, and apparatus for providing pixel circuits for controlling the state of operation of light modulators in a display. A pixel circuit used to control one or more display elements of a MEMS display apparatus can include a first output node coupled to a first actuator of a display element and a second output node coupled to a second actuator of the display element. The first output node can be coupled to an actuation interconnect via a first pre-charge switch connected in parallel with a first capacitor. The second output node can be connected to the actuation interconnect via a second pre-charge switch connected in parallel with a second capacitor. Energizing the first output node or the second output node can cause the display element to enter or remain in a first state or a second state, respectively.
摘要翻译：本公开提供了用于提供用于控制显示器中的光调制器的操作状态的像素电路的系统，方法和装置。用于控制MEMS显示装置的一个或多个显示元件的像素电路可以包括耦合到显示元件的第一致动器的第一输出节点和耦合到显示元件的第二致动器的第二输出节点。第一输出节点可以经由与第一电容器并联连接的第一预充电开关耦合到致动互连。第二输出节点可以经由与第二电容器并联连接的第二预充电开关连接到致动互连。激活第一输出节点或第二输出节点可以使显示元件分别进入或保持在第一状态或第二状态。

3. 发明申请

WO2016039911A1 DITHERED DISPLAYS AND DITHERING PROCESSES AND APPARATUS 审中-公开
标题翻译：几何显示和抖动过程和设备
公开(公告)号：WO2016039911A1
公开(公告)日：2016-03-17
申请号：PCT/US2015/044519
申请日：2015-08-10
申请人： PIXTRONIX, INC.
发明人： MATSUMOTO, Katsumi , KOBAYASHI, Tsutomu , BUCKLEY, Edward , MI, Xiang-Dong , SHI, Jianru , GANDHI, Jignesh , BROSNIHAN, Timothy
IPC分类号： G02B26/02 , G03F7/20
CPC分类号： G02B26/02 , G03F7/70466 , G09G3/2051 , G09G5/02
摘要： In one innovative aspect of the disclosure, a method includes patterning a first region and a first portion of a second region of a substrate using a first reticle. The method also includes patterning the second region and a first portion of the first region using a second reticle. The method additionally includes forming a first array of first patterned elements based on the patterning by the first reticle, and forming a second array of second patterned elements based on the patterning by the second reticle. In some implementations, each of the first and the second arrays are incomplete in each of the first portions. However, the first patterned elements in the first portion of the second region are complementary to the second patterned elements in the first portion of the second region. Similarly, the first patterned elements in the first portion of the first region are complementary to the second patterned elements in the first portion of the first region. In some such implementations, the combination of the first array and the second array form a complete array of patterned elements.
摘要翻译：在本公开的一个创新方面，一种方法包括使用第一掩模版图案化衬底的第二区域的第一区域和第一部分。该方法还包括使用第二掩模版图案化第二区域和第一区域的第一部分。该方法还包括基于通过第一掩模版的图案化形成第一图案化元件的第一阵列，以及基于通过第二掩模版的图案化形成第二图案化元件的第二阵列。在一些实施方案中，第一和第二阵列中的每一个在每个第一部分中是不完全的。然而，第二区域的第一部分中的第一图案化元件与第二区域的第一部分中的第二图案化元件互补。类似地，第一区域的第一部分中的第一图案化元件与第一区域的第一部分中的第二图案化元件互补。在一些这样的实现中，第一阵列和第二阵列的组合形成完整的图案化元件阵列。

4. 发明申请

WO2016025105A1 DISPLAYS HAVING REDUCED OPTICAL SENSITIVITY TO APERTURE ALIGNMENT AT STEPPER FIELD BOUNDARY 审中-公开
标题翻译：具有降低光学对准性能的显示屏在STEPPER现场边界
公开(公告)号：WO2016025105A1
公开(公告)日：2016-02-18
申请号：PCT/US2015/039722
申请日：2015-07-09
申请人： PIXTRONIX, INC.
发明人： MI, Xiang-Dong , GANDHI, Jignesh , BROSNIHAN, Timothy , FIJOL, John , NI CHLEIRIGH, Cait , FRANZ, Aleksander , SHI, Jianru , LEWIS, Stephen Robert
IPC分类号： G02B26/02
CPC分类号： G02B27/0025 , G02B26/023 , G03F9/7046 , G09G3/346 , G09G2300/0842 , G09G2310/0267 , G09G2310/027 , G09G2360/10
摘要： Systems, methods and methods of manufacture for, among other things, a MEMS display that has a substrate with a first and a second array of apertures. The first and second arrays are, typically, formed on the substrate so that the arrays are adjacent and define a field boundary line that may extend between the two arrays and along a width of the substrate. In at least one array, the apertures that are proximate the field boundary line are placed at locations on the substrate to reduce differences in luminance between one portion of the display and another portion of the display.
摘要翻译：尤其是MEMS显示器的系统，方法和制造方法，其具有具有第一和第二阵列阵列的基板。通常，第一和第二阵列形成在基板上，使得阵列相邻并且限定可以在两个阵列之间并且沿着基板的宽度延伸的场边界线。在至少一个阵列中，靠近场边界线的孔被放置在衬底上的位置处，以减少显示器的一部分与显示器的另一部分之间的亮度差异。

5. 发明申请

WO2016018563A1 MICROELECTROMECHANICAL MICROPHONE 审中-公开
标题翻译：微电子麦克风
公开(公告)号：WO2016018563A1
公开(公告)日：2016-02-04
申请号：PCT/US2015/039092
申请日：2015-07-02
申请人： PIXTRONIX, INC.
发明人： SPARKS, Andrew William , BROSNIHAN, Timothy
IPC分类号： H04R19/00 , H04R31/00 , G09G3/00
CPC分类号： B81B3/007 , B81B2201/0257 , B81B2203/0127 , B81B2203/0163 , B81B2203/0307 , B81B2207/07 , B81C1/00158 , G09G3/346 , G09G5/363 , H04R1/028 , H04R19/005 , H04R23/006 , H04R31/00 , H04R2201/003 , H04R2499/15
摘要： This disclosure provides systems, methods and apparatus including microelectromechanical system microphones. In one aspect, the systems include a substrate made of a low dielectric material, such as glass. A layer of semiconductor material extends, substantially continuously over a surface of the substrate and includes an array of display elements that modulate light to form an image and a movable diaphragm that detects acoustic signals. The diaphragm is held away from the substrate by springs that include beams having an aspect ratio of about four to one.
摘要翻译：本公开提供包括微机电系统麦克风的系统，方法和装置。在一个方面，系统包括由诸如玻璃的低电介质材料制成的衬底。一层半导体材料基本上连续地延伸到衬底的表面上，并且包括调制光以形成图像的显示元件阵列和检测声信号的可移动光阑。膜片通过弹簧保持远离基板，弹簧包括纵横比大约为四比一的横梁。

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