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    • 4. 发明申请
    • METHOD AND APPARATUS FOR MANUFACTURE OF SEMICONDUCTORS AND RESULTING STRUCTURES, DEVICES, CIRCUITS, AND COMPONENTS
    • 用于制造半导体和结构的方法和装置,器件,电路和组件
    • WO2007128075A3
    • 2007-12-27
    • PCT/AU2007000613
    • 2007-05-08
    • EPITACTIX PTY LTDCUNNINGHAM SHAUN JOSEPH
    • CUNNINGHAM SHAUN JOSEPH
    • H01L27/00H01L29/32H01L29/735
    • H01L29/7371H01L27/0605H01L29/0817H01L29/1029H01L29/20H01L29/6631H01L29/66318H01L29/735H01L29/737H01L29/812
    • The present invention relates to semiconductor structures, devices, circuits and components and the manufacture or fabrication of same. In one form, the invention is suitable for use in structures, devices, integrated circuits, components and manufacturing processes relating to compound semiconductor materials such as gallium arsenide (GaAs) and may equally apply to other semiconductor materials such as, for instance, indium phosphide (InP), gallium nitride (GaN), silicon carbide (SiC) and also silicon (Si). A first embodiment relates, in particular, to improved means of fabrication of bipolar transistor devices such as for example, npn and pnp bipolar transistors in a single process. A second preferred embodiment is related in general to control mechanisms for use in relation to HBT's, for example those used in power amplifiers. A third preferred embodiment provides a manufacturing method and structure for a compound semiconductor heterojunction bipolar transistor (HBT) which provides scalable device feature size, reduced manufacturing complexity and increased operating voltage. Fourth and fifth preferred embodiment relates to integrated HBT/FET fabrication technologies.
    • 本发明涉及半导体结构,器件,电路和元件及其制造或制造。 在一种形式中,本发明适用于与诸如砷化镓(GaAs)的化合物半导体材料相关的结构,器件,集成电路,部件和制造工艺,并且可以同样适用于其它半导体材料,例如磷化铟 (InP),氮化镓(GaN),碳化硅(SiC)以及硅(Si)。 第一实施例特别涉及在单个工艺中制造双极晶体管器件,例如npn和pnp双极晶体管的改进方法。 第二优选实施例通常涉及用于关于HBT的控制机构,例如用于功率放大器中的那些。 第三优选实施例提供了一种化合物半导体异质结双极晶体管(HBT)的制造方法和结构,其提供可扩展的器件特征尺寸,降低的制造复杂性和增加的工作电压。 第四和第五优选实施例涉及集成的HBT / FET制造技术。
    • 5. 发明申请
    • METHOD AND APPARATUS FOR MANUFACTURE OF SEMICONDUCTORS AND RESULTING STRUCTURES, DEVICES, CIRCUITS, AND COMPONENTS
    • 用于制造半导体和结构的方法和装置,器件,电路和组件
    • WO2007128075A2
    • 2007-11-15
    • PCT/AU2007/000613
    • 2007-05-08
    • EPITACTIX PTY LTDCUNNINGHAM, Shaun, Joseph
    • CUNNINGHAM, Shaun, Joseph
    • H01L29/7371H01L27/0605H01L29/0817H01L29/1029H01L29/20H01L29/6631H01L29/66318H01L29/735H01L29/737H01L29/812
    • The present invention relates to semiconductor structures, devices, circuits and components and the manufacture or fabrication of same. In one form, the invention is suitable for use in structures, devices, integrated circuits, components and manufacturing processes relating to compound semiconductor materials such as gallium arsenide (GaAs) and may equally apply to other semiconductor materials such as, for instance, indium phosphide (InP), gallium nitride (GaN), silicon carbide (SiC) and also silicon (Si). A first embodiment relates, in particular, to improved means of fabrication of bipolar transistor devices such as for example, npn and pnp bipolar transistors in a single process. A second preferred embodiment is related in general to control mechanisms for use in relation to HBT's, for example those used in power amplifiers. A third preferred embodiment provides a manufacturing method and structure for a compound semiconductor heterojunction bipolar transistor (HBT) which provides scalable device feature size, reduced manufacturing complexity and increased operating voltage. Fourth and fifth preferred embodiment relates to integrated HBT/FET fabrication technologies
    • 本发明涉及半导体结构,器件,电路和元件及其制造或制造。 在一种形式中,本发明适用于与诸如砷化镓(GaAs)的化合物半导体材料相关的结构,器件,集成电路,部件和制造工艺,并且可以同样适用于其它半导体材料,例如磷化铟 (InP),氮化镓(GaN),碳化硅(SiC)以及硅(Si)。 第一实施例特别涉及在单个工艺中制造双极晶体管器件,例如npn和pnp双极晶体管的改进方法。 第二优选实施例通常涉及用于关于HBT的控制机构,例如用于功率放大器中的那些。 第三优选实施例提供了一种化合物半导体异质结双极晶体管(HBT)的制造方法和结构,其提供可扩展的器件特征尺寸,降低的制造复杂性和增加的工作电压。 第四和第五优选实施例涉及集成的HBT / FET制造技术
    • 6. 发明申请
    • METHOD AND STRUCTURE FOR A HIGH PERFORMANCE SEMICONDUCTOR DEVICE
    • 高性能半导体器件的方法和结构
    • WO2007076576A1
    • 2007-07-12
    • PCT/AU2006/001976
    • 2006-12-29
    • EPITACTIX PTY LTDCUNNINGHAM, Shaun, Joseph
    • CUNNINGHAM, Shaun, Joseph
    • H01L29/737H01L21/331
    • H01L29/7371H01L29/0817H01L29/66318
    • The present invention relates generally to integrated circuit devices. In one form, the invention provides a manufacturing method and resulting structure for a compound semiconductor heterojunction bipolar transistor (HBT) which provides scalable device feature size and reduced manufacturing complexity. A preferred embodiment of the present invention provides for the fabrication of an integrated circuit device comprising: converting at least one portion of a layered arrangement of semiconductor materials to an insulating state to form an isolation region and at least one isolated device bounded by the isolation region; subsequently providing at least one layer of material operatively associated with the isolated device and which extends across an isolation region boundary to form at least one region of overlap within the isolation region. Consequently, embodiments of the present invention provide for improved precision of device alignment, reduced emitter widths for improved performance and enlarged metal interconnects for circuit connectivity and heat dissipation.
    • 本发明一般涉及集成电路器件。 在一种形式中,本发明提供了一种化合物半导体异质结双极晶体管(HBT)的制造方法和结果,其提供可扩展的器件特征尺寸和降低的制造复杂度。 本发明的优选实施例提供一种集成电路器件的制造方法,包括:将至少一部分半导体材料的分层布置转换成绝缘状态以形成隔离区域,以及至少一个被隔离区限定的隔离器件 ; 随后提供与所述隔离装置可操作地相关联并且跨越隔离区边界延伸的至少一层材料,以形成所述隔离区域内的至少一个重叠区域。 因此,本发明的实施例提供了器件对准的改进的精度,用于改善性能的减小的发射极宽度以及用于电路连接和散热的扩大的金属互连。