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    • 1. 发明申请
    • THERMAL MANAGEMENT SOLUTIONS FOR MICROELECTRONIC DEVICES USING JUMPING DROPS VAPOR CHAMBERS
    • 微型电子设备的热管理解决方案使用跳槽式蒸汽灭菌器
    • WO2017052848A1
    • 2017-03-30
    • PCT/US2016/047314
    • 2016-08-17
    • INTEL CORPORATION
    • EID, FerasCHOUDHURY, Arnab
    • H01L23/46H01L23/427H01L23/367
    • H01L23/427H01L21/4878H01L21/4882H01L23/3675H01L23/373H01L23/433H01L25/0652H01L2224/16225H01L2224/73253
    • A thermal management solution may be provided for a microelectronic system, wherein a jumping drops vapor chamber is utilized between at least one microelectronic device and an integrated heat spreader. The microelectronic system may comprise a microelectronic device attached by an active surface thereof to a microelectronic substrate. The integrated heat spreader, having a first surface and an opposing second surface, is also attached to the microelectronic substrate with a jumping drops vapor chamber disposed between a back surface of the microelectronic device and the integrated heat spreader second surface. The jumping drops vapor chamber may comprise a vapor space defined by a hydrophilic evaporation surface on the microelectronic device back surface, a hydrophobic condensation surface on the integrated heat spreader second surface, and at least one sidewall extending between the hydrophilic evaporation surface and the hydrophobic condensation surface with a working fluid disposed within the vapor space.
    • 可以为微电子系统提供热管理解决方案,其中在至少一个微电子器件和集成散热器之间利用跳跃液滴蒸气室。 微电子系统可以包括通过其有源表面附着到微电子衬底的微电子器件。 具有第一表面和相对的第二表面的集成散热器也通过设置在微电子器件的后表面和集成散热器第二表面之间的跳跃液滴蒸气室附接到微电子衬底。 跳跃液滴蒸气室可以包括由微电子器件背表面上的亲水蒸发表面,集成散热器第二表面上的疏水性冷凝表面和在亲水蒸发表面和疏水性冷凝物之间延伸的至少一个侧壁限定的蒸汽空间 表面具有设置在蒸气空间内的工作流体。