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1. 发明申请

WO2012161745A2 MASS ANALYSIS VARIABLE EXIT APERTURE 审中-公开
标题翻译：质量分析可变出口孔
公开(公告)号：WO2012161745A2
公开(公告)日：2012-11-29
申请号：PCT/US2012000258
申请日：2012-05-24
申请人： AXCELIS TECH INC , HAMBY WILLIAM , VALINSKI JOSEPH
发明人： HAMBY WILLIAM , VALINSKI JOSEPH
IPC分类号： H01J37/317 , H01J37/02 , H01J37/05 , H01J49/06
CPC分类号： H01J37/3171 , H01J37/023 , H01J37/05 , H01J49/30 , H01J2237/0455 , H01J2237/055 , H01J2237/057 , H01J2237/24514
摘要： A method and apparatus is provided for reducing unwanted isotopes of an ion implantation species from an ion beamline. The apparatus herein disclosed is a mass analysis variable exit aperture that selectively reduces the size of an exit aperture as seen by an ion beam. In one embodiment, the variable mass analysis exit is located within the mass analyzer at a location upstream of a resolving aperture and is configured to effectively limit the size of the exit aperture to allow passage of desired implantation isotope(s) while blocking the passage of unwanted implantation isotopes. In one particular embodiment, the mass analysis variable exit aperture is mounted in the beam guide which, in turn, is mounted between the poles of the AMU magnet(s). A mechanical drive mechanism enables the blocking structure to be moved into the beam path in a graduated fashion as guided by a control unit tied to beam characteristics.
摘要翻译：提供了一种用于从离子束线减少离子注入物质的不想要的同位素的方法和装置。本文公开的装置是质量分析可变出口孔，其选择性地减小出口孔的尺寸，如离子束所见。在一个实施例中，可变质量分析出口位于质量分析器内的分辨孔的上游位置处，并且被配置为有效地限制出口孔的尺寸，以允许期望的植入同位素通过，同时阻止不想要的植入同位素。在一个特定实施例中，质量分析可变出口孔安装在梁导向件中，梁引导件又安装在AMU磁体的磁极之间。机械驱动机构使得阻挡结构能够以分级方式移动到光束路径中，如由与光束特性相关联的控制单元引导的。

2. 发明申请

WO2012112537A3 METHODS, APPARATUS, AND SYSTEM FOR MASS SPECTROMETRY 审中-公开
标题翻译：方法，装置和大容量光谱系统
公开(公告)号：WO2012112537A3
公开(公告)日：2012-10-11
申请号：PCT/US2012025032
申请日：2012-02-14
申请人： MASSACHUSETTS INST TECHNOLOGY , HUNTER IAN W , HEMOND BRIAN D , HEMOND HAROLD F
发明人： HUNTER IAN W , HEMOND BRIAN D , HEMOND HAROLD F
IPC分类号： H01J49/00
CPC分类号： H01J49/30 , H01J49/0013 , H01J49/0031 , H01J49/022 , H01J49/147 , H01J49/24
摘要： A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high- voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.
摘要翻译：一种小型，低成本的质谱仪，能够在10至50 AMU的质量范围内进行单位分辨率。质谱仪结合了几个功能，可以提高设计的性能，而不是比较可比较的仪器。高效的离子源能够在不牺牲测量分辨率的情况下实现相对较低的功耗。可变几何机械滤镜允许可变分辨率。机载离子泵不需要外部泵浦源。磁轭和磁轭产生具有不同磁通密度的磁场区域以运行离子泵和磁性扇区质量分析器。真空室内部的车载数字控制器和电源转换电路允许在质谱仪的操作上具有较大的灵活性，同时不需要高压电气馈通。微型质谱仪感测入口气体百分比的分数，并将质谱数据返回到计算机。

3. 发明申请

WO2008085748A3 PERMANENT MAGNET HAVING IMPROVED FIELD QUALITY AND APPARATUS EMPLOYING THE SAME 审中-公开
标题翻译：具有改进的现场质量的永久磁铁和使用相同设备的设备
公开(公告)号：WO2008085748A3
公开(公告)日：2008-10-09
申请号：PCT/US2007088898
申请日：2007-12-27
申请人： MONITOR INSTR COMPANY LLC , VOSS GUENTER F , DURYEA ANTHONY N
发明人： VOSS GUENTER F , DURYEA ANTHONY N
IPC分类号： H01F7/02
CPC分类号： H01F7/0294 , H01F7/0278 , H01J49/30
摘要： A ring magnet assembly has a generally cylindrical magnet body defining an air gap having an upper end and a lower end. Upper and lower face plates dispose respectively at an upper portion of the ring magnet and lower portion of the ring magnet. The face plates preferably have a high magnetic permeability. A mass analyzer may be disposed within the air gap. An ion generator may be disposed within an air gap of a ring magnetic assembly of the present invention. A pair of vertically-stacked magnetic ring assemblies may be provided. In that embodiment, a mass analyzer may be disposed within one air gap and an ion generator within another.
摘要翻译：环形磁体组件具有限定具有上端和下端的气隙的大致圆柱形的磁体。上，下面板分别设置在环形磁体的上部和环形磁体的下部。面板优选具有高磁导率。质量分析器可以布置在气隙内。离子发生器可以设置在本发明的环形磁性组件的气隙内。可以提供一对垂直堆叠的磁环组件。在该实施例中，质量分析器可以设置在一个气隙内并且离子发生器设置在另一个气隙内。

4. 发明申请

WO2005008719A3 MASS SPECTROMETER FOR BOTH POSITIVE AND NEGATIVE PARTICLE DETECTION 审中-公开
标题翻译：质谱仪用于正负粒子检测
公开(公告)号：WO2005008719A3
公开(公告)日：2005-10-20
申请号：PCT/US2004021113
申请日：2004-06-30
申请人： OI CORP , SCHEIDEMANN ADI A , DASSEL MARK , WADSWORTH MARK , VASSILIOU EUSTATHIOS
发明人： SCHEIDEMANN ADI A , DASSEL MARK , WADSWORTH MARK , VASSILIOU EUSTATHIOS
IPC分类号： H01F7/02 , H01J49/02 , H01J49/10 , H01J49/20 , H01J49/32
CPC分类号： H01J49/30 , H01J49/0095 , H01J49/20
摘要： A mass spectrometer suitable to measure both positive and negative particles, such as ions for example in a vacuum chamber. This spectrometer is provided with a turnable permanent magnet segment, which provides the gap of a yoke with adequate magnetic flux having the appropriate direction to separate the positive or the negative particles. Changing the polarity adjusts the flight path of the ions. Thus, negatively charged ions and positively charged ions will follow similar flight paths under opposite polarities, permitting the use of a single array of detectors. One or more coils may be used in place of or in addition to the turnable permanent magnet segment in order to provide the appropriate magnetic flux to the gap, and/or facilitate the turning process of the turnable magnet segment. The turnable magnet and/or the coils may be inside or outside the vacuum chamber. The detector may comprise at least one detector area, two charge mode amplifiers coupled to the detector area, a first CCD shift register coupled to a first one of the charge mode amplifiers and a second CCD shift register coupled to a second one of the charge mode amplifiers.
摘要翻译：质谱仪适用于测量正负粒子，例如真空室中的离子。该分光计配备有可转动的永磁体段，其为轭提供具有适当方向的足够磁通量的间隙以分离正颗粒或负颗粒。改变极性可调整离子的飞行路径。因此，带负电荷的离子和带正电的离子将在相反的极性下遵循类似的飞行路径，从而允许使用单个阵列的检测器。可以使用一个或多个线圈代替可转动的永磁体节段或者除了可转动的永磁体节段之外，以便向间隙提供适当的磁通量，和/或促进可转动的磁体节段的转动过程。可转动的磁体和/或线圈可以在真空室内部或外部。检测器可以包括至少一个检测器区域，耦合到检测器区域的两个充电模式放大器，耦合到第一个充电模式放大器的第一CCD移位寄存器和耦合到充电模式中的第二个的第二CCD移位寄存器放大器。

5. 发明申请

WO2016154958A1 一种具有同位素同时测量功能的加速器质谱仪审中-公开
公开(公告)号：WO2016154958A1
公开(公告)日：2016-10-06
申请号：PCT/CN2015/075644
申请日：2015-04-01
申请人：中国原子能科学研究院
发明人：姜山 , 包轶文 , 何明 , 苏胜勇 , 游曲波 , 胡跃明 , 崔大庆
IPC分类号： H01J49/30
CPC分类号： H01J49/0086 , H01J49/10 , H01J49/30 , H01J49/48
摘要：一种具有同位素同时测量功能的加速器质谱仪，包括用于产生负离子的溅射负离子源（1），所述溅射负离子源（1）与用于同时加速多个同位素离子的加速管（7）相连，所述加速管（7）的输出端连接同位素质量分辨系统（8），所述同位素质量分辨系统（8）连接电荷转换分析及多接收测量系统，所述电荷转换分析及多接收测量系统连接离子探测系统（13）。能够对多个同位素负离子同时进行加速，加速后的多个同位素负离子中稳定的同位素负离子被稳定同位素接收器（9）进行测量，不稳定的同位素负离子转换为正离子后被探测器（13）测量，测量信号经时间匹配后同时传送至核电子学和数据获取单元进行数据运算。

6. 发明申请

WO2013067902A1 宽带离子束分析器审中-公开
公开(公告)号：WO2013067902A1
公开(公告)日：2013-05-16
申请号：PCT/CN2012/084004
申请日：2012-11-02
申请人：北京中科信电子装备有限公司
发明人：彭立波 , 龙会跃 , 谢均宇
IPC分类号： H01J37/21 , H01J37/05 , H01J37/317
CPC分类号： H01J49/30 , H01J37/05 , H01J37/3171 , H01J2237/055 , H01J2237/057
摘要：一种宽带离子束分析器，用于从宽带离子束中分离出所需的离子，包括上磁极（1）、下磁极（2）、上励磁线圈（3）、下励磁线圈（4）、分析光栏（7）和磁轭（5，6）。其中，上磁极（1）和下磁极（2）均具有弧形的入射端边界（101）和出射端边界（102）。入射端边界（101）和出射端边界（102）的弧面半径（Rb）都等于所需的离子在磁场中的偏转半径（R）。宽带离子束中所需的离子能够在磁场中部理想聚焦，得到焦斑尺寸等于0的理想焦点，可以通过选取合适的最小分析缝（701）宽度而获得最佳的分辨率，实现宽带离子束中所需的离子与其他离子完全分离。

7. 发明申请

WO2012091851A2 SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM 审中-公开
标题翻译：用于生产质量分析离子束的系统和方法
公开(公告)号：WO2012091851A2
公开(公告)日：2012-07-05
申请号：PCT/US2011/063095
申请日：2011-12-02
申请人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. , BENVENISTE, Victor, M. , SINCLAIR, Frank , RADOVANOV, Svetlana , KOO, Bon, Woong
发明人： BENVENISTE, Victor, M. , SINCLAIR, Frank , RADOVANOV, Svetlana , KOO, Bon, Woong
IPC分类号： H01J37/317 , H01J37/08 , H01J27/02
CPC分类号： H01J37/3171 , H01J37/05 , H01J37/20 , H01J49/30 , H01J2237/055 , H01J2237/057 , H01J2237/20221
摘要： An implantation system includes an ion extraction plate having a set of apertures configured to extract ions from an ion source to form a plurality of beamlets. A magnetic analyzer is configured to provide a magnetic field to deflect ions in the beamlets in a first direction that is generally perpendicular to a principle axis of the beamlets. A mass analysis plate includes a set of apertures wherein first ion species having a first mass/charge ratio are transmitted through the mass analysis plate and second ion species having a second mass/charge ratio are blocked by the mass analysis plate. A workpiece holder is configured to move with, respect to the mass analysis plate in a second direction perpendicular to the first direction, wherein a pattern of ions transmitted through the mass analysis plate forms a continuous ion beam current along the first direction at the substrate.
摘要翻译：植入系统包括具有一组孔口的离子提取板，其被配置为从离子源提取离子以形成多个子束。磁分析器被配置为提供磁场，以在大体上垂直于子束的主轴的第一方向上偏转子束中的离子。质量分析板包括一组孔，其中具有第一质量/荷率的第一离子种类通过质量分析板传输，具有第二质量/荷重比的第二离子种被质量分析板阻挡。工件保持器构造成在垂直于第一方向的第二方向上相对于质量分析板移动，其中透过质量分析板的离子图案在衬底处沿着第一方向形成连续的离子束电流。

8. 发明申请

WO2010056823A2 MASS ANALYSIS MAGNET FOR A RIBBON BEAM 审中-公开
标题翻译：质量分析磁铁用于带状光束
公开(公告)号：WO2010056823A2
公开(公告)日：2010-05-20
申请号：PCT/US2009/064159
申请日：2009-11-12
申请人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES , BENVENISTE, Victor, M. , BUFF, James, S. , SINCLAIR, Frank , OLSON, Joseph, C.
发明人： BENVENISTE, Victor, M. , BUFF, James, S. , SINCLAIR, Frank , OLSON, Joseph, C.
IPC分类号： H01L21/265
CPC分类号： H01J37/05 , H01J37/08 , H01J37/3171 , H01J49/30 , H01J2237/022 , H01J2237/055 , H01J2237/057 , H01J2237/083 , H01J2237/31705
摘要： A ribbon beam mass analyzer having a first and second solenoid coils and steel yoke arrangement. Each of the solenoid coils have a substantially "racetrack" configuration defining a space through which an ion ribbon beam travels. The solenoid coils are spaced apart along the direction of travel of the ribbon beam. Each of the solenoid coils generates a uniform magnetic field to accommodate mass resolution of wide ribbon beams to produce a desired image of ions generated from an ion source.
摘要翻译：具有第一和第二螺线管线圈以及钢轭装置的带状梁质量分析仪。每个电磁线圈具有基本上“跑道” 限定离子带束行进通过的空间的配置。螺线管线圈沿带状束的行进方向间隔开。每个螺线管线圈产生均匀的磁场以适应宽带状光束的质量分辨率，从而产生由离子源产生的离子的期望图像。

9. 发明申请

WO2008085748A2 PERMANENT MAGNET HAVING IMPROVED FIELD QUALITY AND APPARATUS EMPLOYING THE SAME 审中-公开
标题翻译：具有改进的现场质量的永久磁铁和使用其的装置
公开(公告)号：WO2008085748A2
公开(公告)日：2008-07-17
申请号：PCT/US2007/088898
申请日：2007-12-27
申请人： MONITOR INSTRUMENTS COMPANY, LLC , VOSS, Guenter, F. , DURYEA, Anthony, N.
发明人： VOSS, Guenter, F. , DURYEA, Anthony, N.
IPC分类号： H01F7/02
CPC分类号： H01F7/0294 , H01F7/0278 , H01J49/30
摘要： A ring magnet assembly has a generally cylindrical magnet body defining an air gap having an upper end and a lower end. Upper and lower face plates dispose respectively at an upper portion of the ring magnet and lower portion of the ring magnet. The face plates preferably have a high magnetic permeability. A mass analyzer may be disposed within the air gap. An ion generator may be disposed within an air gap of a ring magnetic assembly of the present invention. A pair of vertically-stacked magnetic ring assemblies may be provided. In that embodiment, a mass analyzer may be disposed within one air gap and an ion generator within another.
摘要翻译：环形磁体组件具有限定具有上端和下端的气隙的大致圆柱形的磁体。上下面板分别设置在环形磁铁的上部和环形磁铁的下部。面板优选具有高磁导率。质量分析器可以设置在气隙内。离子发生器可以设置在本发明的环形磁性组件的气隙内。可以提供一对垂直堆叠的磁环组件。在该实施例中，质量分析器可以设置在一个气隙内，而离子发生器可以设置在另一个气隙内。

10. 发明申请

WO2014108375A1 MASS SPECTROMETER WITH IMPROVED MAGNETIC SECTOR 审中-公开
标题翻译：具有改进磁性部分的质谱仪
公开(公告)号：WO2014108375A1
公开(公告)日：2014-07-17
申请号：PCT/EP2014/050103
申请日：2014-01-07
申请人： CENTRE DE RECHERCHE PUBLIC - GABRIEL LIPPMANN
发明人： HOAND, Hung Quang , DOWSETT, David , WIRTZ, Tom
IPC分类号： H01J49/30
CPC分类号： H01J49/28 , H01J49/025 , H01J49/20 , H01J49/30
摘要： The present invention relates to a compact and portable mass spectrometer device comprising a source of ions, a non-scanning magnetic sector for separating ions originating at the source of ions according to their mass-to-charge ratios, and detection means. The magnetic sector comprises an ion entrance plane and at least two ion exit planes arranged at different angles with respect to the ion entrance plane, which allows to optimize the resolving power of the mass spectrometer for specific mass-to charge ratio sub-ranges.
摘要翻译：本发明涉及一种包含离子源的紧凑型便携式质谱仪装置，以及根据其质荷比分离起源于离子源的离子的非扫描磁性扇区和检测装置。磁性部分包括离子入射面和相对于离子入射面以不同角度布置的至少两个离子出射面，其允许优化用于特定质荷比子范围的质谱仪的分辨能力。

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