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    • 7. 发明申请
    • SYSTEMS AND METHODS FOR HANDLING SUBSTRATES AT BELOW DEW POINT TEMPERATURES
    • 用于在下面的点温度处理基板的系统和方法
    • WO2014106152A1
    • 2014-07-03
    • PCT/US2013/078218
    • 2013-12-30
    • CASCADE MICROTECH, INC.
    • HIRSCHFELD, BothoBECKER, Axel
    • G01K13/12
    • G01N25/66G01R31/00G01R31/2862
    • Disclosed systems and methods for testing a device under test (DUT) with a probe system are selected to test a DUT at a temperature below the dew point of the ambient environment surrounding the probe system. Probe systems include a measurement chamber configured to isolate a cool, dry testing environment and a measurement chamber door configured to selectively isolate the internal volume of the measurement chamber. When a DUT, that is or is included on a substrate, is tested at a low temperature, systems and methods are selected to heat the substrate in a dry environment, at least partially isolated from the measurement chamber, to at least a temperature above the dew point and/or the frost point of the ambient environment.
    • 选择用于使用探针系统测试被测设备(DUT)的公开的系统和方法,以在低于探针系统周围环境环境露点的温度下测试DUT。 探测系统包括被配置为隔离冷却干燥测试环境的测量室和被配置为选择性地隔离测量室的内部体积的测量室门。 当在低温下测试被包括在基底上的DUT时,选择系统和方法以将至少部分与测量室隔离的干燥环境中的衬底加热至至少高于 露点和/或周围环境的霜点。
    • 9. 发明申请
    • HOT TESTING OF SEMICONDUCTOR DEVICES
    • 半导体器件的热测试
    • WO2008032179A1
    • 2008-03-20
    • PCT/IB2007/002607
    • 2007-09-11
    • XPEQT NVESCH VAN, Eddy
    • ESCH VAN, Eddy
    • G01R31/28
    • G01R31/2868G01R31/2862
    • A testing apparatus for testing of integrated circuit devices at elevated temperatures comprises hot belt 111 is operable to transport integrated circuits from a main production line into a hot chamber 121 and thence onto a test area 122 within the hot chamber 121 and a cold belt 112 operable to receive integrated circuits from the test area 122 and transport them back to the main production line. Both the hot and cold belts 111, 112 are indexed stepwise, the indexing distance being equal to the separation of the pockets provided for receiving integrated circuits. In the test area 122 are four vacuum chucks 131a-131d each operable to pick an integrated circuit from adjacent pockets on the hot belt 111 and place it on corresponding test heads 133a-133d (via a corresponding repositioning means 132a-132d ) for diagnostic testing at an elevated temperature. After testing, the vacuum chucks 131a-131d are operable to pick the integrated circuits from the corresponding test heads 133 a- 133d and place them in adjacent pockets on the cold belt 112.
    • 用于在升高的温度下测试集成电路器件的测试装置包括热带111可操作以将集成电路从主生产线输送到热室121中,然后到达热室121内的测试区域122和可操作的冷带112 从测试区域122接收集成电路并将其传送回主生产线。 热带和冷带111,112均逐级地分度,分度距离等于为接收集成电路提供的口袋的分离。 在测试区域122中有四个真空卡盘131a-131d,每个真空卡盘131a-131d可操作以从热带111上的相邻袋拾取集成电路,并将其放置在相应的测试头133a-133d上(经由相应的重新定位装置132a-132d)进行诊断测试 在高温下。 在测试之后,真空卡盘131a-131d可操作以从相应的测试头133a-133d拾取集成电路,并将它们放置在冷带112上的相邻凹穴中。
    • 10. 发明申请
    • THERMAL STRATIFICATION TEST APPARATUS AND METHOD PROVIDING CYCLICAL AND STEADY-STATE STRATIFIED ENVIRONMENTS
    • 热分析测试装置和提供循环和稳态分析环境的方法
    • WO2004083747A2
    • 2004-09-30
    • PCT/US2004006049
    • 2004-02-26
    • INTEL CORP
    • FENK C WALTER
    • G01R31/28F25D
    • G01R31/2862G01R31/2817G01R31/2874
    • A method and apparatus for a thermal stratification test providing cyclical and steady-state stratified environments. In order to test an electronic device, for example one having one or more levels of ball-grid-array interconnections, e.g., connecting a chip to a flip-chip substrate and connecting the flip-chip substrate to a printed circuit board of a device, an apparatus and method are provided to heat one side of the device while cooling the second side. In some embodiments, the process is then reversed to cool the first side and heat the second. Some embodiments repeat the cycle of heat-cool-heat-cool several times, and then perform functional tests of the electronic circuitry. In some embodiments, the functional tests are performed in one or more thermal-stratification configurations after cycling at more extreme thermal stratification setups. In some embodiments, a test that emphasizes solder creep is employed.
    • 提供循环和稳态分层环境的热分层测试的方法和装置。 为了测试电子设备,例如具有一个或多个级别的球栅阵列互连的电子设备,例如将芯片连接到倒装芯片衬底并将倒装芯片衬底连接到器件的印刷电路板 提供了一种在冷却第二侧的同时加热设备的一侧的装置和方法。 在一些实施例中,然后反转该过程以冷却第一侧并加热第二侧。 一些实施例重复热 - 冷却 - 冷却多次循环,然后执行电子电路的功能测试。 在一些实施例中,在更极端的热分层设置循环之后,功能测试在一个或多个热分层结构中进行。 在一些实施例中,采用强调焊料蠕变的测试。