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1. 发明申请

WO2016012799A1 APPARATUS FOR DETERMINING THICKNESS OF LINING LAYER 审中-公开
标题翻译：用于确定衬层厚度的装置
公开(公告)号：WO2016012799A1
公开(公告)日：2016-01-28
申请号：PCT/GB2015/052138
申请日：2015-07-23
申请人： JOHNSON MATTHEY PUBLIC LIMITED COMPANY
发明人： FERGUSON JNR, Dave Doyle , RONCHI, Emanuele , TIPTON, Carl Robert
IPC分类号： G01B15/02 , F27D21/00 , G01N23/203
CPC分类号： G01B15/02 , C21B7/06 , C21C5/445 , C21C2005/448 , F27D21/0021 , G01N23/203 , G01N2223/1013 , G01N2223/61 , G01N2223/633
摘要： An apparatus (2) for determining thickness of refractory material (4) lining a metal vessel (6) is disclosed. The apparatus comprises a radiation source (16) for emitting radiation through a metal wall of the vessel and into the refractory material, wherein some of the radiation is scattered by the refractory material, and a radiation detector (20) for detecting radiation scattered by the refractory material through the wall of the vessel. A converter provides an output signal dependent on the quantity of radiation scattered by the refractory material through the wall of the vessel and detected by the radiation detector.
摘要翻译：公开了一种用于确定衬在金属容器（6）上的耐火材料（4）的厚度的装置（2）。该装置包括用于通过容器的金属壁发射辐射并进入耐火材料的辐射源（16），其中一些辐射由耐火材料散射;以及辐射探测器（20），用于检测由耐火材料通过容器的壁。 A转换器提供输出信号，其取决于耐火材料通过容器的壁散射并由辐射检测器检测的辐射量。

2. 发明申请

WO2013048913A1 SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON AND LOW-ENERGY X-RAY FLUORESCENCE SPECTROSCOPY 审中-公开
标题翻译：用X射线光电子和低能量X射线荧光光谱表征薄膜的系统和方法
公开(公告)号：WO2013048913A1
公开(公告)日：2013-04-04
申请号：PCT/US2012/056752
申请日：2012-09-21
申请人： REVERA INCORPORATED , SCHUELER, Bruno W. , REED, David A. , FANTON, Jeffrey Thomas , SMEDT, Rodney
发明人： SCHUELER, Bruno W. , REED, David A. , FANTON, Jeffrey Thomas , SMEDT, Rodney
IPC分类号： G01N23/223 , G01N23/225
CPC分类号： G21K1/06 , G01N23/223 , G01N23/2273 , G01N2223/61 , G21K2201/062 , G21K2201/064
摘要： Systems and methods for characterizing films by X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a system for characterizing a film may include an X-ray source for generating an X-ray beam having an energy below the k-edge of silicon. A sample holder may be included for positioning a sample in a pathway of the X-ray beam. A first detector may be included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. A second detector may be included for collecting an X-ray fluorescence (XRF) signal generated by bombarding the sample with the X-ray beam. Monitoring/estimation of the primary X-ray flux at the analysis site may be provided by X-ray flux detectors near and at the analysis site. Both XRF and XPS signals may be normalized to the (estimated) primary X-ray flux to enable film thickness or dose measurement without the need to employ signal intensity ratios.
摘要翻译：公开了通过X射线光电子能谱（XPS）表征膜的系统和方法。例如，用于表征胶片的系统可以包括用于产生具有低于硅的k边缘的能量的X射线束的X射线源。可以包括样品保持器以将样品定位在X射线束的通路中。可以包括第一检测器以收集通过用X射线束轰击样品而产生的XPS信号。可以包括第二检测器，用于收集通过用X射线束轰击样品而产生的X射线荧光（XRF）信号。在分析现场的X射线通量探测器附近和分析现场可以提供监测/估计分析现场的主要X射线通量。 XRF和XPS信号都可以归一化为（估计的）初级X射线通量，以实现膜厚度或剂量测量，而不需要使用信号强度比。

3. 发明申请

WO2013039507A1 GRAPHENE DEFECT DETECTION 审中-公开
标题翻译：石墨缺陷检测
公开(公告)号：WO2013039507A1
公开(公告)日：2013-03-21
申请号：PCT/US2011/051876
申请日：2011-09-16
申请人： EMPIRE TECHNOLOGY DEVELOPMENT LLC , MILLER, Seth
发明人： MILLER, Seth
IPC分类号： G01N21/88 , C01B31/04 , B82Y35/00 , G01N23/223
CPC分类号： G01N23/223 , B82Y30/00 , B82Y35/00 , G01N2223/076 , G01N2223/61 , G01N2223/6462 , Y10T436/23
摘要： Technologies are generally described for a method and system configured effective to detect a defect in a sample including graphene. An example method may include receiving a sample, where the sample may include at least some graphene and at least some defects in the graphene. The method may further include exposing the sample to a gas under sufficient reaction conditions to produce a marked sample, where the marked sample may include marks bonded to at least some of the defects. The method may further include placing the marked sample in a detector system. The method may also include detecting at least some of the marks with the detector system.
摘要翻译：一般来说，对于有效地检测包括石墨烯的样品中的缺陷的方法和系统来描述技术。示例性方法可以包括接收样品，其中样品可以包括至少一些石墨烯和石墨烯中的至少一些缺陷。该方法还可以包括在足够的反应条件下将样品暴露于气体以产生标记的样品，其中标记的样品可以包括结合至少一些缺陷的标记。该方法还可以包括将标记的样品放置在检测器系统中。该方法还可以包括用检测器系统检测至少一些标记。

4. 发明申请

WO2016059672A1 Ｘ線薄膜検査装置审中-公开
标题翻译： X射线薄膜检查装置
公开(公告)号：WO2016059672A1
公开(公告)日：2016-04-21
申请号：PCT/JP2014/077335
申请日：2014-10-14
申请人：株式会社リガク
发明人：尾形　潔 , 吉原　正 , 杵渕　隆男 , 梅垣　志朗 , 淺野　繁松 , 洞田　克隆 , 吉田宗生 , 本野　寛 , ▲高▼橋　秀明 , 樋口　明房 , 表　和彦 , 伊藤　義泰 , 河原　直樹 , 中野　朝雄
IPC分类号： G01N23/20 , G01N23/223
CPC分类号： G01N23/223 , G01N23/203 , G01N23/2204 , G01N23/2206 , G01N2223/076 , G01N2223/315 , G01N2223/61 , G01N2223/6116
摘要：　本発明のＸ線薄膜検査装置は、第１の旋回アーム３２に搭載されたＸ線照射ユニット４０と、第２の旋回アーム３３に搭載されたＸ線検出器５０と、Ｘ線の照射により検査対象から発生する蛍光Ｘ線を検出する蛍光Ｘ線検出器６０と、を備えている。そして、Ｘ線照射ユニット４０は、Ｘ線管４２から放射されたＸ線を入射し、特定波長に単色化した複数本の収束Ｘ線を反射し、これら複数本の収束Ｘ線をあらかじめ設定した焦点に収束させる、コンフォーカルミラーで構成されたＸ線光学素子４３と、このＸ線光学素子４３から反射してきた複数本の収束Ｘ線のうち、任意本数の収束Ｘ線を通過させるスリット機構４６とを含んでいる。
摘要翻译：该X射线薄膜检查装置设置有安装在第一转动臂（32）上的x射线照射单元（40）。安装在第二转动臂（33）上的x射线检测器（50）; 以及X射线荧光检测器（60），其检测由于X射线照射而从检查对象产生的X射线荧光。 x射线照射单元（40）包括：x射线光学元件（43），其由共焦焦镜构成，其接收从X射线管（42）辐射的X射线，其反射多个已经以特定波长单色化的会聚x射线，并且使得多个会聚x射线会聚在预设焦点上; 以及从所述x射线光学元件（43）反射的所述多个收敛X射线中的任意数量的收敛X射线的狭缝机构（46）。

5. 发明申请

WO2014066022A1 APPARATUS AND METHOD OF IMAGING A HETEROGENEOUS OBJECT 审中-公开
标题翻译：装置和成像异构对象的方法
公开(公告)号：WO2014066022A1
公开(公告)日：2014-05-01
申请号：PCT/US2013/063702
申请日：2013-10-07
申请人： HEXAGON METROLOGY, INC.
发明人： O'HARE, Jonathan , DARROUZET, Stephen
IPC分类号： G01N23/04 , A61B6/03 , G06T11/00
CPC分类号： G01N23/046 , A61B6/032 , A61B6/12 , A61B6/488 , A61B6/504 , G01N2223/404 , G01N2223/419 , G01N2223/61
摘要： An imaging method positions a heterogeneous object (10), such as a metallic stent having a polymer coating, within a fixture (38) having a chamber (43). The fixture (38) also has a valve (50) for receiving a gas and normally sealing the chamber (43). Thus, the object (10) is within the chamber (43). Next the method positions the fixture (38) within an active region (24) of a computerised tomographic (CT) machine (18), fluidly connects a gas line to the valve (50), and injects an inert gas into the chamber (43) through the gas line and the valve (50). The inert gas may include one or more of the xenon, argon, and krypton. The method then increases the pressure within the sealed chamber (43) to increase the density of the gas within the chamber (43), and directs x-ray energy toward the active region (24) of the CT machine (18) to produce a plurality of two- dimensional images of the object (10) and the pressurized gas. Finally, the method generates a three-dimensional representation of the object (10) from the plurality of images. In the case of a coated stent, since the metallic portion and the polymeric portion of the stent as well as the pressurising gas haven different X-ray attenuation coefficients, it is possible in the three-dimensional representation of the stent to distinguish the metallic portion from the polymeric portion of the stent.
摘要翻译：成像方法将诸如具有聚合物涂层的金属支架的异质物体（10）定位在具有室（43）的固定装置（38）内。夹具（38）还具有用于接收气体并正常密封腔室（43）的阀（50）。因此，物体（10）在室（43）内。接下来，该方法将夹具（38）定位在计算机断层摄影（CT）机器（18）的有源区域（24）内，将气体管线流体连接到阀门（50），并将惰性气体注入到室（43））通过气体管线和阀（50）。惰性气体可以包括一种或多种氙，氩和氪。该方法然后增加密封室（43）内的压力以增加腔室（43）内的气体的密度，并将x射线能量引向CT机器（18）的有源区域（24），以产生物体（10）和加压气体的多个二维图像。最后，该方法从多个图像生成对象（10）的三维表示。在涂覆的支架的情况下，由于支架的金属部分和聚合物部分以及加压气体避免了不同的X射线衰减系数，所以可以在支架的三维表示中区分金属部分从支架的聚合物部分。

6. 发明申请

WO2012163860A3 METHODS AND SYSTEMS FOR MATERIAL CHARACTERIZATION 审中-公开
标题翻译：材料特性的方法和系统
公开(公告)号：WO2012163860A3
公开(公告)日：2013-01-31
申请号：PCT/EP2012059914
申请日：2012-05-25
申请人： UNIV ANTWERPEN , NAT UNIV TSING HUA , VAN DYCK DIRK , CHEN FU-RONG
发明人： VAN DYCK DIRK , CHEN FU-RONG
IPC分类号： H01J37/22 , G01N23/02 , H01J37/26
CPC分类号： H01J37/265 , G01N23/046 , G01N23/225 , G01N2223/064 , G01N2223/414 , G01N2223/419 , G01N2223/61 , G01N2223/611 , H01J37/222 , H01J37/26 , H01J2237/226 , H01J2237/2614
摘要： The present invention pertains to methods and systems for material characterization. A method (100) is disclosed for determining information regarding an object comprising particles. The method (100) comprises obtaining (110) a wave function representative of the object detected at a detection surface of a detection system for detecting the wave function, deriving (120) at least two spatial frequencies of the detected wave function and deriving (130) for each of said at least two spatial frequencies at least a phase based on the obtained wave function. Furthermore, a functional relationship between the spatial frequency and the phase is analyzed (140) for the spatial frequencies. At least one parameter indicative of a property of the object is derived therefrom. A corresponding system (200) is also disclosed as well as corresponding computer-related products.
摘要翻译：本发明涉及用于材料表征的方法和系统。公开了一种用于确定关于包括颗粒的物体的信息的方法（100）。方法（100）包括获得（110）表示在用于检测波函数的检测系统的检测表面处检测到的物体的波函数，导出（120）检测到的波函数的至少两个空间频率并导出（130 ）对于所述至少两个空间频率中的每一个至少基于所获得的波函数的相位。此外，空间频率和相位之间的功能关系被分析（140）用于空间频率。从其中导出指示对象的属性的至少一个参数。还公开了相应的系统（200）以及相应的计算机相关产品。

7. 发明申请

WO2012163860A2 METHODS AND SYSTEMS FOR MATERIAL CHARACTERIZATION 审中-公开
标题翻译：材料表征的方法和系统
公开(公告)号：WO2012163860A2
公开(公告)日：2012-12-06
申请号：PCT/EP2012/059914
申请日：2012-05-25
申请人： UNIVERSITEIT ANTWERPEN , NATIONAL TSING HUA UNIVERSITY , VAN DYCK, Dirk , CHEN, Fu-Rong
发明人： VAN DYCK, Dirk , CHEN, Fu-Rong
IPC分类号： H01J37/22 , H01J37/26 , G01N23/02
CPC分类号： H01J37/265 , G01N23/046 , G01N23/225 , G01N2223/064 , G01N2223/414 , G01N2223/419 , G01N2223/61 , G01N2223/611 , H01J37/222 , H01J37/26 , H01J2237/226 , H01J2237/2614
摘要： The present invention pertains to methods and systems for material characterization. A method (100) is disclosed for determining information regarding an object comprising particles. The method (100) comprises obtaining (110) a wave function representative of the object detected at a detection surface of a detection system for detecting the wave function, deriving (120) at least two spatial frequencies of the detected wave function and deriving (130) for each of said at least two spatial frequencies at least a phase based on the obtained wave function. Furthermore, a functional relationship between the spatial frequency and the phase is analyzed (140) for the spatial frequencies. At least one parameter indicative of a property of the object is derived therefrom. A corresponding system (200) is also disclosed as well as corresponding computer-related products.
摘要翻译：本发明涉及用于材料表征的方法和系统。公开了一种用于确定关于包括粒子的物体的信息的方法（100）。方法（100）包括获得（110）表示在检测系统的检测表面检测到的物体的波函数，用于检测波函数，导出（120）所检测的波函数的至少两个空间频率并导出（130 ）对于所述至少两个空间频率中的每一个至少基于所获得的波函数的相位。此外，空间频率和相位之间的功能关系被分析（140）用于空间频率。从中导出指示对象的属性的至少一个参数。还公开了相应的系统（200）以及相应的计算机相关产品。

8. 发明申请

WO2017021968A1 HYBRID MEASUREMENT SYSTEM AND METHOD FOR MEASURING IN THIN FILMS 审中-公开
标题翻译：混合测量系统和薄膜测量方法
公开(公告)号：WO2017021968A1
公开(公告)日：2017-02-09
申请号：PCT/IL2016/050851
申请日：2016-08-04
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： BOZDOG, Cornel , VAID, Alok , MAHENDRAKAR, Sridhar , HOSSAIN, Mainul , KAGALWALA, Taher
IPC分类号： H01L21/66 , G01B11/06 , G01N21/21 , G01N21/84 , G01N23/227
CPC分类号： G01B15/02 , G01B11/0625 , G01B2210/56 , G01N23/2273 , G01N2223/61 , G01N2223/6116 , H01L22/20 , H01L27/12
摘要： A measurement method and system are presented for in-line measurements of one or more parameters of thin films in structures progressing on a production line. First measured data and second measured data are provided from multiple measurements sites on the thin film being measured, wherein the first measured data corresponds to first type measurements from a first selected set of a relatively small number of the measurement sites, and the second measured data corresponds to second type optical measurements from a second set of significantly higher number of the measurements sites. The first measured data is processed for determining at least one value of at least one parameter of the thin film in each of the measurement sites of said first set. Such at least one parameter value is utilized for interpreting the second measured data, thereby obtaining data indicative of distribution of values of said at least one parameter within said second set of measurement sites.
摘要翻译：提出了一种测量方法和系统，用于对在生产线上进行的结构中的薄膜的一个或多个参数进行在线测量。第一测量数据和第二测量数据由被测量的薄膜上的多个测量点提供，其中第一测量数据对应于来自相对较少数量的测量位置的第一选定组的第一类型测量值，以及第二测量数据对应于来自第二组显着更高数量的测量位点的第二类型光学测量。处理第一测量数据以确定所述第一组的每个测量位置中的薄膜的至少一个参数的至少一个值。这样的至少一个参数值用于解释第二测量数据，由此获得指示所述第二组测量位置内的所述至少一个参数的值分布的数据。

9. 发明申请

WO2015183907A1 INTEGRATED RECIPROCAL SPACE MAPPING FOR SIMULTANEOUS LATTICE PARAMETER REFINEMENT USING A TWO-DIMENSIONAL X-RAY DETECTOR 审中-公开
标题翻译：使用二维X射线探测器同时测量参数修正的集成回采空间映射
公开(公告)号：WO2015183907A1
公开(公告)日：2015-12-03
申请号：PCT/US2015/032607
申请日：2015-05-27
申请人： BRUKER AXS, INC.
发明人： GIENCKE, Jonathan
IPC分类号： G01N23/20
CPC分类号： G01T1/2978 , G01B9/02018 , G01B9/02019 , G01B9/02041 , G01B9/10 , G01B15/00 , G01B2290/65 , G01N15/0211 , G01N23/20008 , G01N23/20016 , G01N23/207 , G01N2021/8477 , G01N2223/0561 , G01N2223/0566 , G01N2223/331 , G01N2223/61
摘要： A method for performing an X-ray diffraction analysis of a crystal sample (112) using a two-dimensional detector (114) that integrates an X-ray diffraction signal while the position of the sample (112) relative to an X-ray source (102) is changed along a scan direction, such as a rocking scanning curve. The resulting image is compressed along the scan direction, but may be collected very quickly. The capture of both on-axis and off-axis reflections in a single image provides a common spatial frame of reference for comparing the reflections. This may be used in the construction of a reciprocal space map, and is useful for analyzing a sample with multiple crystal layers, such as a crystal substrate with a crystalline film deposited thereupon.
摘要翻译：使用将X射线衍射信号进行积分的二维检测器（114）进行晶体样品（112）的X射线衍射分析的方法，同时样品（112）相对于X射线源的位置（102）沿扫描方向如摇摆扫描曲线改变。所得到的图像沿着扫描方向被压缩，但是可能被非常快地收集。在单个图像中捕获轴上和离轴反射提供了用于比较反射的公共空间参考系。这可以用于构建互逆空间图，并且可用于分析具有多个晶体层的样品，例如沉积有晶体膜的晶体衬底。

10. 发明申请

WO2014107706A1 METHOD AND APPARATUS FOR SURFACE MAPPING USING IN-PLANE GRAZING INCIDENCE DIFFRACTION 审中-公开
标题翻译：使用平面衍射发生衍射的表面贴图的方法和装置
公开(公告)号：WO2014107706A1
公开(公告)日：2014-07-10
申请号：PCT/US2014/010443
申请日：2014-01-07
申请人： BRUKER AXS, INC.
发明人： GIENCKE, Jonathan
IPC分类号： G01N23/201
CPC分类号： G01N23/207 , G01N23/201 , G01N2223/501 , G01N2223/61 , G01N2223/6116
摘要： An apparatus for examining the surface of a crystalline sample uses in-plane grazing incidence diffraction with a position-sensitive detector. The x-ray source illuminates an extended region of the sample and, for crystal sections having the appropriate lattice orientation, an elongated diffraction signal is produced. The relative position of the sample and the x-ray beam may then be changed to illuminate different regions of the sample so that the diffraction signal corresponds to these other regions. By scanning across the entire sample, a spatial profile of the sample surface may be generated. The system may be used to locate crystal boundaries, defects, or the presence of attenuating materials on the sample surface.
摘要翻译：用于检查结晶样品的表面的装置使用位置敏感检测器进行平面内掠入射衍射。 x射线源照射样品的延伸区域，并且对于具有适当晶格取向的晶体部分，产生细长的衍射信号。然后可以改变样品和x射线束的相对位置以照射样品的不同区域，使得衍射信号对应于这些其它区域。通过扫描整个样品，可以产生样品表面的空间分布。该系统可用于在样品表面上定位晶体边界，缺陷或衰减材料的存在。

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