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1. 发明申请

WO2022165422A1 2D POLYMER BASED TARGETS FOR SERIAL X-RAY CRYSTALLOGRAPHY 审中-公开
公开(公告)号：WO2022165422A1
公开(公告)日：2022-08-04
申请号：PCT/US2022/014748
申请日：2022-02-01
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： KUHL, Tonya L. , GILBILE, Deepshika Shamraj
IPC分类号： G01N23/20 , B01L3/00 , B01L3/06 , G01N23/00 , G01N23/20025 , G01N23/201
摘要： Systems and methods for producing and using polymer based fixed targets for hydrated, room temperature, high-throughput serial protein crystallography with minimal background and minimal sample consumption are provided. The fixed targets can also be used with non-protein samples such as nanoparticle inorganic crystals. The targets maintain full crystal hydration that allows for on-chip crystallization as well as maintaining long term stability of the sample within the chip. The target chips are optimized to minimize background by controlling the sample thickness in the beam to match crystal size, enabling fast raster scanning at lower fidelity and high hit rates that facilitate dynamic measurements. The targets provide an inexpensive, flexible substrate for on-chip, micro-batch or vapor diffusion crystallization facilitated by polymer brushes for sample concentration and surface initiated crystallization thereby eliminating damaging crystal sample transfer.

2. 发明申请

WO2022066378A1 METHODS AND SYSTEMS FOR DETERMINING QUALITY OF SEMICONDUCTOR MEASUREMENTS 审中-公开
公开(公告)号：WO2022066378A1
公开(公告)日：2022-03-31
申请号：PCT/US2021/048591
申请日：2021-09-01
申请人： KLA CORPORATION
发明人： SANKO, Dzmitry , MOON, Min-Yeong , PANDEV, Stilian
IPC分类号： G01N21/956 , G01N21/95 , G01N21/88 , G01N21/21 , G01N23/18 , G01N23/201 , G01N23/207 , H01L21/66
摘要： Methods and systems for estimating a value of a quality metric indicative of one or more performance characteristics of a semiconductor measurement are presented herein. The value of the quality metric is normalized to ensure applicability across a broad range of measurement scenarios. In some embodiments, a value of a quality metric is determined for each measurement sample during measurement inference. In some embodiments, a trained quality metric model is employed to determine the uncertainty of defect classification. In some embodiments, a trained quality metric model is employed to determine the uncertainty of estimated parameters of interest, such as geometric, dispersion, process, and electrical parameters. In some examples, a quality metric is employed as a filter to detect measurement outliers. In some other examples, a quality metric is employed as a trigger to adjust a semiconductor process.

3. 发明申请

WO2018179744A1 Ｘ線分析補助装置及びＸ線分析装置审中-公开
公开(公告)号：WO2018179744A1
公开(公告)日：2018-10-04
申请号：PCT/JP2018/002205
申请日：2018-01-25
申请人：株式会社リガク
发明人：谷口　やよい , 森川　惠一
IPC分类号： G01N23/201 , G01N23/205
摘要：本発明のＸ線分析補助装置は、試料Ｓと２次元検出器２との間の距離Ｌ又は試料Ｓで散乱又は回折するＸ線の検出最大範囲Ｘｍａｘの一方を任意に入力して設定するための入力・操作装置２４と、入力・操作装置２４により設定された一方の設定項目の値に基づいて、他方の設定項目を自動的に設定する中央処理装置２０とを備える。そして、上記距離Ｌと検出最大範囲Ｘｍａｘに基づいて、Ｘ線の最大測定枠Ｈｍａｘを表示装置２１の表示画面２２に表示する。さらに、２次元検出器２の検出面がＸ線を検出可能な範囲をあらわすＸ線検出領域Ａも表示装置２１の表示画面２２に表示する。

4. 发明申请

WO2018099914A1 DUNKELFELDTENSORTOMOGRAPHIEVERFAHREN, PROBENHALTER UND VORRICHTUNG 审中-公开
公开(公告)号：WO2018099914A1
公开(公告)日：2018-06-07
申请号：PCT/EP2017/080685
申请日：2017-11-28
申请人： TECHNISCHE UNIVERSITÄT MÜNCHEN
发明人： SCHAFF, Florian , PFEIFFER, Franz
IPC分类号： G01N23/046 , G01N23/20025 , G01N23/201
摘要： Die Erfindung betrifft ein Röntgen-CT-Verfahren und insbesondere registrierungsbasiertes Dunkelfeldtensortomographieverfahren zum Untersuchen einer Probe (60) mittels Röntgenstrahlung, bei welchem eine Probe (60) aufeinanderfolgend bei mindestens zwei voneinander verschiedenen festen Orientierungen einer unter Rotation um eine jeweils feste Rotationsachse mittels Röntgenstrahlung abgetastet wird, bei jeder Orientierung der Probe (60) auf der Grundlage von Dunkelfeldsignalen eine Mehrzahl von Streudatensätzen erfasst werden und die Streudatensätze zu verschiedenen Orientierungen durch Registrierung miteinander zur Deckung gebracht und zu einem eine gegebenenfalls vorliegende Winkelabhängigkeit der Streuung durch die Probe (60) widerspiegelnden gemeinsamen Streudatensatz vereinigt werden.

5. 发明申请

WO2017198736A1 X-RAY SCATTERING APPARATUS 审中-公开
标题翻译： X射线散射装置
公开(公告)号：WO2017198736A1
公开(公告)日：2017-11-23
申请号：PCT/EP2017/061894
申请日：2017-05-17
申请人： XENOCS SA
发明人： HØGHØJ, Peter
IPC分类号： G01N23/20 , G01N23/201
CPC分类号： G01N23/20008 , G01N23/20 , G01N23/201 , G01N2223/50 , G01N2223/501
摘要： The invention relates to an X-ray scattering apparatus, comprising: - a sample holder for aligning and orienting a sample (12) to be analyzed by X-ray scattering; - an X-ray beam delivery system arranged upstream of the sample holder for generating and directing a direct X-ray beam along a propagation direction (X) towards the sample holder; - a proximal X-ray detector (10) arranged downstream of the sample holder such as to let the direct X-ray beam pass and detect X rays scattered from the sample (12); and - a distal X-ray detector (14) arranged downstream of the sample holder and movable along the propagation direction (X) of the direct X-ray beam; wherein the proximal X-ray detector (10) is also movable essentially along the propagation direction (X) of the direct X-ray beam.
摘要翻译：本发明涉及一种X射线散射装置，包括： - 样品架，用于通过X射线散射来对准和定向要分析的样品（12）; - 布置在样本保持器上游的X射线束传送系统，用于沿传播方向（X）产生并引导朝向样本保持器的直接X射线束; - 近侧X射线探测器（10），其布置在所述样本架的下游，以使所述直接X射线束通过并检测从所述样本（12）散射的X射线; 以及 - 远端X射线探测器（14），其布置在所述样本保持器的下游并且可沿着所述直接X射线束的传播方向（X）移动; 其中所述近侧X射线探测器（10）也基本上沿着所述直接X射线束的传播方向（X）移动。

6. 发明申请

WO2016064913A1 SCALABLE CONFIGURATIONS FOR MULTIMODE PASSIVE DETECTION SYSTEM 审中-公开
标题翻译：多模式被动检测系统的可扩展配置
公开(公告)号：WO2016064913A1
公开(公告)日：2016-04-28
申请号：PCT/US2015/056513
申请日：2015-10-20
申请人： DECISION SCIENCES INTERNATIONAL CORPORATION
发明人： SOSSONG, Michael, James
IPC分类号： G01N23/20 , G01N23/201 , G01V5/00
CPC分类号： G01V5/0075 , G01T1/18
摘要： Techniques, systems and apparatus are described for a multimode passive detection system (MMPDS). A MMPDS includes a detector assembly of array of drift tubes arranged as detector modules to generate detector signal data representing electrical responses to cosmic ray charged particles passing through respective detector modules and traversing through a volume of interest (VOI). Detector circuitry measures the generated detector signal data and outputs the measured detector signal data as spatially segregated data streams corresponding to respective detector modules. A clock system distributes a master clock signal throughout the detector circuitry. A compute cluster including nodes of computing devices merges the spatially segregated data streams into temporally segregated data, obtains information on tracks of the cosmic ray charged particles based on the temporally segregated data, reconstructs an image of the volume of interest based on the obtained information, and identifies an object in the VOI based on the reconstructed image.
摘要翻译：描述了用于多模式被动检测系统（MMPDS）的技术，系统和装置。 MMPDS包括布置为检测器模块的漂移管阵列的检测器组件，以产生检测器信号数据，其表示对通过相应检测器模块穿过感兴趣体积（VOI）的宇宙射线带电粒子的电响应。检测器电路测量所生成的检测器信号数据，并将测量的检测器信号数据作为对应于相应检测器模块的空间分离的数据流输出。时钟系统在整个检测器电路中分配主时钟信号。包括计算装置的节点的计算集群将空间分离的数据流合并到时间分离的数据中，基于时间上分离的数据获得关于宇宙射线带电粒子的轨道的信息，基于获得的信息重建感兴趣体积的图像，并基于重构图像识别VOI中的对象。

7. 发明申请

WO2015012850A1 GENERATION OF DIFFRACTION SIGNATURE OF ITEM WITHIN OBJECT 审中-公开
标题翻译：对象中项目的差异签名生成
公开(公告)号：WO2015012850A1
公开(公告)日：2015-01-29
申请号：PCT/US2013/052144
申请日：2013-07-25
申请人： ANALOGIC CORPORATION
发明人： SCHAFER, David , O'CONNOR, John, P.
IPC分类号： G01N23/20 , G01N23/201 , G01V5/00
CPC分类号： G01V5/0025 , G01N23/046 , G01N23/20083 , G01V5/005
摘要： A diffraction system configured to generate a diffraction signature based upon an angular disbursement of radiation is provided. In some embodiments, the diffraction system comprises a radiation source comprising a radiographic isotope configured to natural emit radiation due to decay. In some embodiment, the diffraction system is part of an object identification system that comprises one or more other radiation imaging modalities, such as a CT system and/or a line-scan system. By way of example, the one or more other radiation imaging modalities may perform an initial examination of an object to generate data indicative of the object. The data can be analyzed to identify an item of interest within the object, which can subsequently be examined by the diffraction system to generate a diffraction signature of the item. The diffraction signature of the item can be compared to known diffraction signatures of know items to characterize the item.
摘要翻译：提供了一种被配置为基于辐射的角度发射产生衍射特征的衍射系统。在一些实施例中，衍射系统包括辐射源，其包括被配置为由于衰变而自然发射辐射的射线照相同位素。在一些实施例中，衍射系统是包括一个或多个其它放射成像模态的物体识别系统的一部分，例如CT系统和/或线扫描系统。作为示例，一个或多个其它放射成像模式可以执行对象的初始检查以生成指示对象的数据。可以分析数据以识别对象内的感兴趣项目，随后可以由衍射系统检查该项目以产生该项目的衍射签名。项目的衍射签名可以与已知项目的已知衍射签名进行比较，以表征项目。

8. 发明申请

WO2014133687A3 SPECTRAL-SEGMENTATION COMPUTATION IN RADIATION DETECTORS 审中-公开
标题翻译：辐射探测器中的光谱分割计算
公开(公告)号：WO2014133687A3
公开(公告)日：2014-12-04
申请号：PCT/US2014012330
申请日：2014-01-21
申请人： PASSPORT SYSTEMS INC
发明人： COOPER DANIEL A , COSTALES JAMES B , KAMIENIECKI KRZYSZTOF E , KLIMENKO ALEXEI V , LEDOUX ROBERT J , THOMPSON JEFFREY K
IPC分类号： G01N23/20 , G01N23/201 , G01N23/203
CPC分类号： G01T1/36 , G01T1/29 , G01T7/00
摘要： A method of detecting a radiation source using: a network of at least one detector, each detector being capable of detecting photons in a predetermined energy range; and a computer including: a processor; an input device; an output device; and a memory, the memory including a predetermined list of a plurality of photopeaks, the list including for each photopeak an associated central energy, an associated energy width, and an associated isotope from which the photopeak originates; the computer being capable of receiving by the input device and storing in the memory data collected at each of the detectors; the method comprising: defining a plurality of energy bins within the predetermined energy range, such that each of the plurality of photopeaks on the predetermined list is associated with exactly one energy bin, and at least one energy bin is associated with an energy range within the predetermined energy range.
摘要翻译：一种使用以下方法检测辐射源的方法：使用至少一个检测器的网络，每个检测器能够检测预定能量范围内的光子; 以及计算机，包括：处理器; 一个输入设备; 输出设备; 以及存储器，所述存储器包括多个光峰的预定列表，所述列表包括用于每个光照相关联的中心能量，相关联的能量宽度和相关联的同位素，所述光峰从其中产生; 该计算机能够由输入装置接收并存储在每个检测器上收集的存储器数据中; 所述方法包括：在所述预定能量范围内限定多个能量仓，使得所述预定列表上的所述多个光峰中的每一个与正好一个能量仓相关联，并且至少一个能量仓与所述能量范围内的能量范围相关联预定能量范围。

9. 发明申请

WO2014150445A1 ONE-DIMENSIONAL X-RAY DETECTOR WITH CURVED READOUT STRIPS 审中-公开
标题翻译：具有弯曲读取条纹的一维X射线探测器
公开(公告)号：WO2014150445A1
公开(公告)日：2014-09-25
申请号：PCT/US2014/023282
申请日：2014-03-11
申请人： BRUKER AXS, INC.
发明人： DURST, Roger , LAGGNER, Peter , MEDVED, Sergei , BECKER, Bruce
IPC分类号： G01N23/201
CPC分类号： G01T1/1606 , G01N23/201 , G01N2223/054 , G01T1/24 , H01L31/085 , Y10T29/4913
摘要： A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.
摘要翻译：用于小角度X射线衍射系统的检测器使用弯曲的读出条，其形状对应于由系统散射的x射线的预期强度分布。该预期的强度分布可以是一系列同心圆，并且每个条具有近似于环的一部分的形状。条带可以定位在基板上，使得弯曲条带的曲率中心沿着条带所在的读出区域的边缘或者替代地位于读出区域的几何中心处。检测器可以具有使用延迟线或者替代地，多通道读出系统的信号读出系统。检测器可以通过衍射X射线束与气体室中的气体的相互作用或通过衍射光束与半导体材料的相互作用来利用电子产生。

10. 发明申请

WO2014107706A1 METHOD AND APPARATUS FOR SURFACE MAPPING USING IN-PLANE GRAZING INCIDENCE DIFFRACTION 审中-公开
标题翻译：使用平面衍射发生衍射的表面贴图的方法和装置
公开(公告)号：WO2014107706A1
公开(公告)日：2014-07-10
申请号：PCT/US2014/010443
申请日：2014-01-07
申请人： BRUKER AXS, INC.
发明人： GIENCKE, Jonathan
IPC分类号： G01N23/201
CPC分类号： G01N23/207 , G01N23/201 , G01N2223/501 , G01N2223/61 , G01N2223/6116
摘要： An apparatus for examining the surface of a crystalline sample uses in-plane grazing incidence diffraction with a position-sensitive detector. The x-ray source illuminates an extended region of the sample and, for crystal sections having the appropriate lattice orientation, an elongated diffraction signal is produced. The relative position of the sample and the x-ray beam may then be changed to illuminate different regions of the sample so that the diffraction signal corresponds to these other regions. By scanning across the entire sample, a spatial profile of the sample surface may be generated. The system may be used to locate crystal boundaries, defects, or the presence of attenuating materials on the sample surface.
摘要翻译：用于检查结晶样品的表面的装置使用位置敏感检测器进行平面内掠入射衍射。 x射线源照射样品的延伸区域，并且对于具有适当晶格取向的晶体部分，产生细长的衍射信号。然后可以改变样品和x射线束的相对位置以照射样品的不同区域，使得衍射信号对应于这些其它区域。通过扫描整个样品，可以产生样品表面的空间分布。该系统可用于在样品表面上定位晶体边界，缺陷或衰减材料的存在。

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