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1. 发明申请

WO2009056127A2 INSPECTION DEVICE 审中-公开
标题翻译：检查设备
公开(公告)号：WO2009056127A2
公开(公告)日：2009-05-07
申请号：PCT/DE2008001790
申请日：2008-10-31
申请人： ZIMMERMANN & SCHILP HANDHABUNG , SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
发明人： SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
CPC分类号： G01N21/88 , G01N21/01 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/0339
摘要： The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element (1) for supporting a material (3) on the top face of the support element (1), at least one oscillator which is connected to the support element (1) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material (3) hovering on the support element (1), and at least one optical sensor (4). The support element is made of a light-permeable material, and the optical sensor (4) is arranged below the support element (1).
摘要翻译：本发明涉及一种用于在触敏片材料或工件，如的检查的装置。 B.晶片为半导体工业，太阳能电池，玻璃，具有触敏曲面FPD基板或用于生物传感器的生物活性底物，而且材料，所述检查装置包括：支撑体（1）上以支持材料（3）承载体（1），其连接到所述承载体（1）至少一个振动发生器，其中所述振荡频率和振动发生器的振幅的顶部的平衡，以被选择为在承载体（1）的材料（3）和保持至少一个光学传感器（4），其中，所述承载体由半透明材料制成，并且所述载体主体下方的光学传感器（4）（1）被布置。

2. 发明申请

WO2008122283A3 DEVICE FOR TRANSPORTING AND HOLDING OBJECTS OR MATERIAL IN A CONTACT FREE MANNER 审中-公开
标题翻译：设备技术的非接触式运输和KEEP对象或材料
公开(公告)号：WO2008122283A3
公开(公告)日：2008-12-31
申请号：PCT/DE2008000595
申请日：2008-04-09
申请人： ZIMMERMANN & SCHILP HANDHABUNG , SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
发明人： SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
IPC分类号： B65G54/00
CPC分类号： B65G54/00 , F16C32/0611
摘要： The invention relates to a device for transporting and holding contact-sensitive components or material. Said device comprises the following characteristics: at least one oscillatory plate-shaped receiving element (2) for receiving the object that is to be transported or held and that is secured to the at least one oscillation generator (3), and at least two support elements (4), said oscillation generator (3) being arranged on a predetermined point of the plate-shaped receiving element (2) in order to displace the plate-shaped receiving element (2) in a swinging manner and the support elements (4) are disposed on one point on which the amplitude of the swinging movements is at least 50 % less than the maximum amplitude and the oscillation generator (3) is operated at a frequency that offsets the plate-shaped receiving element (2) into said oscillations such that the components or the material levitate in a contact-free manner.
摘要翻译：本发明涉及一种装置，用于输送和保持所述触敏部件或材料制成，并且具有以下特征：至少一个可振动的板状容器（2），用于接收输送的或保持对象被固定到所述至少一个振动发生器（3）和至少两个支撑元件（4），其中所述振动发生器（3）在板形插座（2）的预定位置被设置成使板状容器（2）中的弯曲振动和支撑元件（4）被布置在一个位置，其中是弯曲振动的振幅比所述最大振幅和振动发生器（3）在使板状容器（2）在这样的振动，该振动浮动组件或材料而不接触的频率操作小至少50％。

3. 发明申请

WO2011009447A3 DEVICE FOR RECEIVING AND TRANSPORTING FLAT WORKPIECES 审中-公开
标题翻译：用于记录设备及带走扁平工件
公开(公告)号：WO2011009447A3
公开(公告)日：2011-04-14
申请号：PCT/DE2010000861
申请日：2010-07-22
申请人： ZIMMERMANN & SCHILP HANDHABUNGSTECHNIK GMBH , SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
发明人： SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
IPC分类号： B65G51/03
CPC分类号： B65G51/035 , B65G2201/022
摘要： The present invention relates to a device for receiving plate-shaped workpieces. The device has the following features: at least one transport rail (11) having vacuum retention nozzles (12) for retaining the workpiece (1) below the transport rail (11) in a suspended manner and having an air bearing for retaining the workpiece along the transport rail (11) without contact, at least one drive device (17; 18) for sliding the workpiece along the transport rail, and at least one pneumatic gripping device (2) having at least one pneumatic gripping nozzle, wherein the gripping nozzle is integrated in the transport rail in such a way that the upper edge of the nozzle terminates at the transport surface of the transport rail or is sunk into the transport surface.
摘要翻译：本发明涉及一种装置，用于拾取板状工件。该设备具有以下特征：至少一个用于吊保持工件（1）的输送轨道下面（11）和具有空气轴承用于沿着传送轨道的工件的接触保持输送轨道（11）与真空压紧喷嘴（12）（11 ），至少一个驱动装置（17; 18），用于与至少一个气动Greiferdüse，其中所述Greiferdüse集成在输送轨道，使得与所述传送轨道的传送表面上的喷嘴顶端边缘的结论沿着输送轨道移动所述工件和至少一个气动夹持装置（2）或设置在沉没传送表面。

4. 发明申请

WO2008011874A2 DEFLECTING ARRANGEMENT FOR GUIDING ENDLESS PLANAR MATERIALS 审中-公开
标题翻译：偏转FOR拍扁ENDLESS材料
公开(公告)号：WO2008011874A2
公开(公告)日：2008-01-31
申请号：PCT/DE2007001322
申请日：2007-07-26
申请人： ZIMMERMANN & SCHILP , SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
发明人： SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
CPC分类号： B65H23/32 , B65H20/14 , B65H2301/441 , B65H2406/111
摘要： The invention relates to an arrangement for guiding endless planar materials, in the form of sheets, thin metal plates and the like, over deflecting arrangements, on which these sheets and thin metal plates undergo a change in direction, wherein the endless material runs over a deflecting unit having a curved deflecting surface, and wherein the endless material is changed in direction, and at least one vibration generator (10) is arranged on the deflecting unit (11) such that the vibration generator causes the deflecting unit (11) to vibrate, and that sound-pressure waves are produced at the curved deflecting surface (1), and these waves keep the endless materials spaced apart as they run past the curved deflecting surface (1).
摘要翻译：本发明涉及一种用于在薄膜的形式，薄片ù引导片状连续材料的器件。埃。通过在其上这种箔和薄板进行方向的改变偏转设备，其特征在于，所述环形材料，由此其方向被改变，并且所述偏转单元（11）运行在偏转单元的方向具有弯曲的偏转面，至少一个振动发生器（10）被布置，所说振动发生器激励偏转单元（11）摆动，并且被在弯曲偏转表面1个的声压波，其保持所述弯曲偏转表面上间隔开的通过连续的材料形成。1

5. 发明申请

WO2012062288A3 METHOD FOR LOADING AND UNLOADING A CASSETTE 审中-公开
标题翻译：装载和工艺卸载CASSETTE
公开(公告)号：WO2012062288A3
公开(公告)日：2012-08-23
申请号：PCT/DE2011001977
申请日：2011-11-11
申请人： ZIMMERMANN & SCHILP HANDHABUNGSTECHNIK GMBH , SCHILP MICHAEL , ZITZMANN ADOLF , ZIMMERMANN JOSEF
发明人： SCHILP MICHAEL , ZITZMANN ADOLF , ZIMMERMANN JOSEF
IPC分类号： H01L21/677
CPC分类号： C23C16/458 , B05B5/082 , H01L21/67772 , Y10T29/49815
摘要： The present invention relates to a method for loading and unloading a cassette which is used, for example, in plasma-coating processes, wherein the following method steps are carried out: a. supplying a cassette (1) which can be dismantled and assembled by means of a dismantling and assembling robot, b. automatically dismantling the cassette such that the floors (2) of the cassette are present in a separated state, c. feeding and assigning the floors (2) to at least one fitting machine, which fits the floors (2) with workpieces which are to be processed, d. assembling the fitted floors (2) to form the cassette (1), e. feeding the cassette (1) to the location at which the process is to be carried out, f. carrying out the process, g. feeding the cassette (1) to the dismantling and assembling robot or a further dismantling and assembling robot, h. dismantling the cassette such that the floors (2) of the cassette are present in a separated state, and i. automatically removing the processed workpieces.
摘要翻译：本发明涉及一种用于处理卡盒的装载和卸载的方法，其中，因为用于等离子体涂覆工艺z，其中随后的处理步骤进行：a。提供拆卸的可拆卸装置和组装机器人和安装处理盒（1）中，b。在于：所述底部（2）的处理盒的被分离的方式的处理盒的自动拆卸，C。供应和分配所述地板（2），其与工件安装所述地板（2）的至少一个贴片机进行加工，D。安装组装好的搁板（2）的处理盒（1）中，e。供给处理盒（1）到处理站点，其中所述处理将被执行，F。执行的过程中，克。供给处理盒（1），以拆卸和组装机器人或另一拆卸和组装机器人，小时。处理卡盒的拆卸，使得地板（2）的处理盒的分离和i是存在。自动除去加工的工件的。

6. 发明申请

WO2011009446A2 VACUUM GRIPPER 审中-公开
标题翻译：真空抓起
公开(公告)号：WO2011009446A2
公开(公告)日：2011-01-27
申请号：PCT/DE2010000860
申请日：2010-07-22
申请人： ZIMMERMANN & SCHILP HANDHABUNGSTECHNIK GMBH , SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
发明人： SCHILP MICHAEL , ZIMMERMANN JOSEF , ZITZMANN ADOLF
CPC分类号： B65G47/91 , B25J15/0616 , B65G47/911 , B65G49/061 , H01L21/6838
摘要： The present invention relates to a vacuum gripper and in particular to a vacuum gripper for gently gripping workpieces having sensitive surfaces, such as solar cells, wafers, or panels for flat screens, and for gripping heavy glass plates or plates made of other material having a very smooth surface that are stacked on top of each other and should be removed from above, wherein the vacuum gripper has the following characteristics: a straight or curved gripper plate (2), at least one suction opening (3; 3a), which is provided in the gripper plate (2), wherein a workpiece throttle surface (6) is formed around the suction opening (3), at least one recess (4), which is provided in the side of the gripper plate (2) facing the workpiece, outside of the workpiece throttle surface (6) relative to the suction opening (3), and at least one ventilation hole (5), which is provided within each recess (4).
摘要翻译：本发明涉及一种真空抓持器，特别是一个真空夹具对这种表面敏感的工件的夹紧平缓。作为太阳能电池，晶片或面板用于平板显示器，以及用于重玻璃板或其它材料的片材具有非常光滑的表面，其被堆叠在彼此之上并且从上方拆下，用真空夹具具有以下特征的把持：直链或弓形夹钳板（2），至少一个抽吸开口（3; 3A）在所述夹持器板（2）提供，其中，所述吸入口（3），一个工件节流面（6）的周围形成至少一个凹部（4 形成）在面对叼纸牙板工件节流面（6）外侧的吸入口（3）的（2）上设置有相对于与至少一个通气孔（5），该各凹部（4）内设置的工件侧的一侧。

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