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    • 10. 发明申请
    • METHOD FOR FABRICATING A THREE-DIMENSIONAL THIN-FILM SEMICONDUCTOR SUBSTRATE FROM A TEMPLATE
    • 从模板制造三维薄膜半导体基板的方法
    • WO2010111417A1
    • 2010-09-30
    • PCT/US2010/028534
    • 2010-03-24
    • SOLEXEL, INC.WANG, David, Xuan-QiMOSLEHI, Mehrdad, M.
    • WANG, David, Xuan-QiMOSLEHI, Mehrdad, M.
    • H01L31/00
    • H01L31/035281C30B29/06C30B31/22H01L31/1892Y02E10/50
    • A method is presented for fabrication of a three-dimensional thin-film solar cell semiconductor substrate from a template. A semiconductor template having three-dimensional surface features comprising a top surfaces substantially aligned along a (100) crystallographic plane of semiconductor template and a plurality of inverted pyramidal cavities defined by sidewalls substantially aligned along a (111) crystallographic plane is formed according to an anisotropic etching process. A dose of relatively of high energy light-mass species is implanted in the template at a uniform depth and parallel to the top surfaces and said sidewalls defining the inverted pyramidal cavities of the template. The semiconductor template is annealed to convert the dose of relatively of high energy light-mass species to a mechanically-weak-thin layer. The semiconductor template is cleaved along the mechanically-weak-thin layer to release a three- dimensional thin-film semiconductor substrate from the semiconductor template.
    • 介绍了从模板制造三维薄膜太阳能电池半导体衬底的方法。 具有三维表面特征的半导体模板包括沿着半导体模板的(100)结晶平面基本上对准的顶表面和由沿(111)晶面平行排列的侧壁限定的多个倒置金字塔形腔,根据各向异性 蚀刻工艺。 将相对高能量光质物质的剂量以均匀的深度注入模板中,并平行于顶表面和限定模板的倒锥形腔的所述侧壁。 将半导体模板退火以将相对较高能量的光质物质的剂量转换成机械弱薄层。 半导体模板沿着机械弱薄层切割,从半导体模板释放三维薄膜半导体衬底。