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1. 发明申请

WO2013024234A1 PLASMA PROCESSING APPARATUS 审中-公开
标题翻译：等离子体加工设备
公开(公告)号：WO2013024234A1
公开(公告)日：2013-02-21
申请号：PCT/GB2011/051546
申请日：2011-08-16
申请人： P2i LTD , COULSON, Stephen Richard , HOPPER, Fred , KING, Charles Edmund
发明人： COULSON, Stephen Richard , HOPPER, Fred , KING, Charles Edmund
IPC分类号： H01J37/32
CPC分类号： H01J37/32137 , H01J37/32155 , H01J37/32165 , H01J37/32541 , H01J37/32577 , H01J37/32935 , H01J2237/3323 , H01J2237/3325
摘要： The present invention relates to an apparatus (10) for plasma processing an article (12), the apparatus comprising: a chamber (14) for receiving an article to be processed; electrode means (16) for generating an electric field in said chamber for establishing a plasma in said chamber so that said article can be processed; generation means (24) for generating alternating electrical energy for transmission to said electrode means (18); connection means for connecting said generation means to said electrode means (20); and control means for varying the location of nodes and anti- nodes of standing waves generated in said chamber during processing, so that a plurality of standing waves are generated over time which are not coincident with one another.
摘要翻译：本发明涉及一种用于等离子体处理物品（12）的设备（10），该设备包括：用于接收待处理物品的室（14）电极装置（16），用于在所述腔室中产生电场，用于在所述腔室中建立等离子体，从而可以对所述制品进行加工; 用于产生用于传输到所述电极装置（18）的交替电能的发生装置（24）; 用于将所述产生装置连接到所述电极装置的连接装置; 以及用于在处理期间改变在所述室中产生的驻波的节点和反节点的位置的控制装置，使得随着时间不同而产生多个驻波而不是彼此重合。

2. 发明申请

WO2013024235A1 PLASMA PROCESSING APPARATUS 审中-公开
标题翻译：等离子体加工设备
公开(公告)号：WO2013024235A1
公开(公告)日：2013-02-21
申请号：PCT/GB2011/051548
申请日：2011-08-16
申请人： P2I LTD , KING, Charles Edmund
发明人： KING, Charles Edmund
IPC分类号： H01J37/32 , C23C16/509
CPC分类号： H01J37/32082 , H01J37/32165 , H01J37/32376 , H01J2237/3323 , H01J2237/3325
摘要： The present invention relates to an apparatus (10) for plasma processing an article(12), the apparatus comprisingra chamber(14) for receiving an article to be processed; electrode means (16) for generating an electricand/or magneticfield in said chamberwhen energised by alternating electrical energyfor establishing a plasma in said chamber so that said article can be processed; andvarying frequency generatingmeans (20) for generating alternating electrical energy for transmission tothe electrode means, said alternating electrical energy being generated at a plurality of different frequencies in succession, one frequency after another frequency, thereby producing a succession of standing waves in said chamber of a plurality of different wavelengths.
摘要翻译：本发明涉及一种用于等离子体处理物品（12）的设备（10），该设备包括用于接收待处理物品的室（14）电极装置（16），用于当通过交替的电能激发时在所述室中产生电和/或磁场，以在所述室中建立等离子体，使得可以处理所述制品; 和用于产生用于传输到电极装置的交替电能的变化频率产生装置（20），所述交替电能以多个不同的频率连续产生，一个频率再次频率，从而在所述腔室中产生一系列驻波多个不同的波长。

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