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1. 发明申请

WO2017010880A1 SCANNING PROBE MICROSCOPY SYSTEM FOR MAPPING NANOSTRUCTURES ON A SURFACE OF A SAMPLE AND METROLOGY FRAME THEREFORE 审中-公开
标题翻译：扫描探针显微镜系统，用于在其样品和体系框架的表面上绘制纳米结构
公开(公告)号：WO2017010880A1
公开(公告)日：2017-01-19
申请号：PCT/NL2016/050517
申请日：2016-07-14
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , CROWCOMBE, William Edward
IPC分类号： G01Q30/20 , G01Q70/04
CPC分类号： G01Q30/20 , G01Q70/04
摘要： A scanning probe microscopy system for mapping nanostructures on a surface of a sample, comprises a metrology frame, a sensor head including a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system comprises a clamp for clamping of the sample, which clamp is fixed to the metrology frame and arranged underneath the sensor head. The clamp is arranged for locally clamping of the sample in a clamping area underneath the probe tip, the clamping area being smaller than a size of the sample such as to clamp only a portion of the sample. Moreover, a metrology frame for use in scanning probe microscopy system as described includes a clamp for clamping of a sample, wherein the clamp is fixed to the metrology frame such as to be arranged underneath the sensor head.
摘要翻译：用于在样品表面上绘制纳米结构的扫描探针显微镜系统包括测量框架，包括探针尖端的传感器头部和用于相对于样品表面扫描探针尖端的致动器。该系统包括用于夹紧样品的夹具，该夹具固定到计量框架并布置在传感器头部下方。夹具被布置成用于将样品局部夹紧在探针尖端下方的夹紧区域中，夹持区域小于样品的尺寸，以仅夹紧样品的一部分。此外，用于如上所述的扫描探针显微镜系统的计量框架包括用于夹紧样品的夹具，其中夹具固定到计量框架，以便布置在传感器头部下方。

2. 发明申请

WO2019212337A1 DIRECTABLE LIGHT BEAM HANDLING DEVICE FOR OPTICAL COMMUNICATION 审中-公开
公开(公告)号：WO2019212337A1
公开(公告)日：2019-11-07
申请号：PCT/NL2019/050249
申请日：2019-04-29
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan
IPC分类号： G02B7/182 , G02B23/10 , G02B26/08 , H04B10/118
摘要： A directable light beam handling device for use in optical communication contains is provided that contains a rotation mechanism with a rotatable ring of soft magnetic material encircling a path of the beam from a beam expander. A mirror or prism being coupled to the rotatable ring is rotated with the ring. The ring includes an array of soft magnetic ridges, forming elevations extending from a surface of the ring. At least three electromagnets are used to drive rotation of the ring around the beam axis. Each electromagnets comprises a soft magnetic yoke, having poles at a first and second end portion of the yoke. The pole at the first end portion faces said surface of the ring, the first end portion having ridges elevated from the yoke in the direction towards the ring, in parallel with the ridges of the ring.

3. 发明申请

WO2014007633A1 SCANNING MICROSCOPE 审中-公开
标题翻译：扫描显微镜
公开(公告)号：WO2014007633A1
公开(公告)日：2014-01-09
申请号：PCT/NL2013/050503
申请日：2013-07-05
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan
IPC分类号： G01Q10/04 , G02B21/26
CPC分类号： G01Q10/04 , G02B21/26 , G11B9/1436 , G12B5/00 , H02N2/028
摘要： A scanning probe microscope comprises a base, a positioning stage mounted on the base, a platform mounted on the positioning stage and a probe tip on the platform, the positioning stage comprising - a first and second linear displacement actuator, each having a main direction of displacement, the main directions of displacement of the first and second linear displacement actuator being oriented substantially parallel to each other, - a first and second strut or struts coupled directly or indirectly between the platform and ends of the first and second actuators where the first and second actuators terminate in the main direction of displacement respectively, at least the first strut or struts being directed at an oblique angle to the main direction of displacement of the actuators.
摘要翻译：扫描探针显微镜包括基座，安装在基座上的定位台，安装在定位台上的平台和平台上的探针尖端，定位台包括：第一和第二线性位移致动器，每个具有主要方向位移，第一和第二线性位移致动器的主要取向方向基本上彼此平行;第一和第二支柱或支柱，其直接或间接地连接在第一和第二致动器的平台和端部之间，第二执行器分别终止于主要位移方向，至少第一支柱或支柱与致动器的主移动方向成倾斜的角度。

4. 发明申请

WO2017086787A1 METHOD OF DETERMINING AN OVERLAY ERROR, MANUFACTURING METHOD AND SYSTEM FOR MANUFACTURING OF A MULTILAYER SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURED THEREBY 审中-公开
标题翻译：确定覆盖误差的方法，用于制造多层半导体器件的制造方法和系统以及由其制造的半导体器件
公开(公告)号：WO2017086787A1
公开(公告)日：2017-05-26
申请号：PCT/NL2016/050803
申请日：2016-11-17
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , VAN ZWET, Erwin John , BÄUMER, Stefan Michael Bruno , SADEGHIAN MARNANI, Hamed
IPC分类号： H01L21/66 , G03F7/20
CPC分类号： H01L22/12 , G03F7/70633 , H01L22/20
摘要： Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby. This document describes a method of determining an overlay error during manufacturing of a multilayer semiconductor device. Manufacturing of the semiconductor device comprises forming a stack of material layers comprising depositing of at least two subsequent patterned layers (26, 27) of semiconductor material, the patterned layers comprising a first patterned layer (26) having a first marker element (29) and a second patterned layer (27) having a second marker element (37). The determining of the overlay error comprises determining relative positions of the first and second marker element in relation to each other, such as to determine the overlay error between the first patterned layer and the second patterned layer. In addition an imaging step is performed on at least one of said first and second patterned layer, for determining relative positions of the respective first (29) or second (37) marker element and a pattern feature of a device pattern (30, 36) comprised by said respective first (26) and second (27) patterned layer.
摘要翻译：确定重叠误差的方法，用于制造多层半导体器件的制造方法和系统以及由此制造的半导体器件。该文件描述了在制造多层半导体器件期间确定重叠误差的方法。所述半导体器件的制造包括形成包括沉积至少两个半导体材料的后续图案化层（26,27）的材料层堆叠，所述图案化层包括具有第一标记元件（29）的第一图案化层（26）和具有第二标记元件（37）的第二图案化层（27）。确定重叠误差包括确定第一和第二标记元件相对于彼此的相对位置，例如以确定第一图案化层和第二图案化层之间的重叠误差。此外，在所述第一和第二图案化层中的至少一个上执行成像步骤，用于确定相应的第一（29）或第二（37）标记元件和器件图案（30,36）的图案特征的相对位置，由所述相应的第一图案层（26）和第二图案层（27）构成。

5. 发明申请

WO2017010882A1 SCANNING PROBE MICROSCOPY SYSTEM FOR MAPPING HIGH ASPECT RATIO NANOSTRUCTURES ON A SURFACE OF A SAMPLE 审中-公开
标题翻译：扫描探针显微系统，用于在样品表面上绘制高比例纳米结构
公开(公告)号：WO2017010882A1
公开(公告)日：2017-01-19
申请号：PCT/NL2016/050521
申请日：2016-07-14
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , CROWCOMBE, William Edward
IPC分类号： G01Q70/02
CPC分类号： G01Q70/02
摘要： The invention is directed at a scanning probe microscopy system for mapping nanostructures on a surface of a sample being arranged for sensing a high aspect ratio nanostructure, the system comprising a metrology frame, a sample support structure for supporting a sample, a sensor head including a probe, wherein the probe comprises a probe tip, and wherein the scanning probe microscopy system further comprises an actuator for scanning the probe tip relative to the substrate surface for mapping of the nanostructures, wherein, for sensing the high aspect ratio nanostructure, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface, and wherein the system further comprises a sensor head carrier for receiving the sensor head, both being provided with a mutually cooperating mounting structure for forming a kinematic mount.
摘要翻译：本发明涉及一种扫描探针显微镜系统，用于映射样品表面上的纳米结构，用于感测高纵横比纳米结构，所述系统包括计量框架，用于支撑样品的样品支撑结构，探针，其中所述探针包括探针尖端，并且其中所述扫描探针显微镜系统还包括用于相对于所述衬底表面扫描所述探针尖端以用于映射所述纳米结构的致动器，其中，为了感测所述高纵横比纳米结构，所述探针尖端相对于传感器头部以固定的偏置角度布置成相对于样品表面成角度，并且其中该系统还包括用于接收传感器头部的传感器头托架，两个传感器头托架设置有相互配合的安装结构，用于形成运动座。

6. 发明申请

WO2016148569A1 OPTICAL COHERENCE TOMOGRAPHY METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT THEREFOR 审中-公开
标题翻译：光学相干方法，系统和计算机程序产品
公开(公告)号：WO2016148569A1
公开(公告)日：2016-09-22
申请号：PCT/NL2016/050186
申请日：2016-03-17
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , DOELMAN, Nicolaas Jan , LIEBIG, Thomas , KLOP, Willem Arjan
IPC分类号： A61B3/10 , A61B3/15
CPC分类号： A61B3/102 , A61B3/1225 , A61B3/14 , A61B3/15 , G01B9/02091 , G06T1/0007 , G06T5/50
摘要： The present invention relates to an optical coherence tomography method, comprising: providing a beam of imaging radiation from a radiation source of an optical coherence tomography apparatus; directing, using directing optics, the beam of imaging radiation towards a fundus of a human or animal eye; and receiving a reflected portion of the imaging radiation by the optical coherence tomography apparatus; wherein the method further comprises: providing, by a tracking camera, a tracking image of an image area covering at least a part of said fundus; analyzing the tracking image for detecting a displacement of the fundus; and adapting, at least dependent on the detected displacement, a direction of the beam of imaging radiation by actuating an optical correction unit of said direction optics; and in addition to said adapting of the direction of the beam of imaging radiation, adapting a location of the image area on said fundus imaged by the tracking camera at least dependent on the detected displacement.
摘要翻译：本发明涉及一种光学相干断层摄影方法，包括：提供来自光学相干断层摄影装置的辐射源的成像辐射束; 使用引导光学器件将成像辐射束瞄准人或动物眼睛的眼底; 以及通过光学相干断层摄影装置接收成像辐射的反射部分; 其中所述方法还包括：通过跟踪相机提供覆盖所述眼底的至少一部分的图像区域的跟踪图像; 分析跟踪图像以检测眼底位移; 以及通过致动所述方向光学器件的光学校正单元，至少依赖于检测到的位移来适配成像辐射束的方向; 并且除了所述适配成像辐射束的方向之外，还使得至少依赖于检测到的位移使由跟踪摄像机成像的所述眼底上的图像区域的位置适配。

7. 发明申请

WO2021242101A1 ELECTROMAGNETICALLY CONTROLLED SEGMENTED MIRROR, ELECTROMAGNETIC ACTUATOR FOR USE THEREIN AND METHOD FOR MANUFACTURING THE SAME 审中-公开
公开(公告)号：WO2021242101A1
公开(公告)日：2021-12-02
申请号：PCT/NL2021/050336
申请日：2021-05-27
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , VAN ADRICHEM, Thomas Paulus Cornelis
IPC分类号： H01F7/06
摘要： An electromagnetic actuator (1) is disclosed herein comprising a soft- ferromagnetic yoke (10), with an at least substantially cylindrical circumferential wall (11; 11a, 11b, 11c) covered at a first end with a base (12) and at a second end with a top (13), the circumferential wall (11) defining an axis (14) in a direction (14') from said base end to said top. An intermediate yoke section (10b) holds a permanent magnet fixed (20) that leaves an inner space housing an axially movable core element (17) being flexibly restrained with at least one resilient element (18, 19). One of a base yoke section (10a) and/or a top yoke section (10c) houses an electromagnetic coil (16).

8. 发明申请

WO2021015621A1 AN OPTICAL ELEMENT EXCHANGE UNIT 审中-公开
公开(公告)号：WO2021015621A1
公开(公告)日：2021-01-28
申请号：PCT/NL2020/050486
申请日：2020-07-24
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , KOOPER, Martin Paul Alfred
IPC分类号： H02K37/02 , H02K21/44 , H02K41/03 , G02B26/00 , H02K1/24
摘要： An optical element exchange unit, has a rotatable wheel e.g. with different filters. The wheel has first soft magnetic teeth protruding from a soft magnetic part of the wheel at even angular offset along at least part of a ring around a rotation axis of the wheel. The optical element exchange unit has a stator comprising a first soft magnetic yoke, the first soft magnetic yoke having poles with a first group and second group of at least one second soft magnetic tooth respectively, the second soft magnetic teeth of the first and second group protruding from the poles of the first soft magnetic yoke towards the first soft magnetic teeth and a second soft magnetic yoke, the second soft magnetic yoke having poles with a third group and fourth group of at least one second soft magnetic tooth respectively, the second soft magnetic teeth of the third and fourth group protruding from the poles of the second soft magnetic yoke towards the first soft magnetic teeth. A permanent magnet is magnetically coupled between parts of the first and second soft magnetic yoke. The teeth of the first, second, third and fourth groups are positioned so that, when each tooth of the first group is aligned with its nearest first soft magnetic tooth, each second soft magnetic tooth of the second group is halfway the angular offset between its nearest first soft magnetic teeth, and the second soft magnetic teeth in the third and fourth group are less than half the angular offset in opposite directions from their nearest first soft magnetic teeth.

9. 发明申请

WO2020242310A1 CONTROLLABLY DEFORMABLE MIRROR DEVICE 审中-公开
公开(公告)号：WO2020242310A1
公开(公告)日：2020-12-03
申请号：PCT/NL2020/050344
申请日：2020-05-28
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan , NIJENHUIS, Jan Roelof
IPC分类号： G02B26/08
摘要： A deformable mirror device has a flexible layer with a front surface that forms a mirror surface or to which a mirror layer forming mirror surface is attached. The flexible layer consists homogeneously of a first material. Protrusions extend from the back surface of the flexible layer. The protrusions consist homogeneously of the first material or a material with substantially the same thermal expansion coefficient. A plurality actuators are coupled to the protrusions and via the protrusions to the flexible layer, to deform the flexible layer. The flexible layer and the protrusions may be part of an integral body of the first material, or bonded to the flexible layer. The distal end of each protrusion has a curved surface that at least partly has a spherical shape.

10. 发明申请

WO2019212337A8 DIRECTABLE LIGHT BEAM HANDLING DEVICE FOR OPTICAL COMMUNICATION 审中-公开
公开(公告)号：WO2019212337A8
公开(公告)日：2019-11-07
申请号：PCT/NL2019/050249
申请日：2019-04-29
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： KUIPER, Stefan
IPC分类号： G02B7/182 , G02B23/10 , G02B26/08 , H04B10/118
摘要： A directable light beam handling device for use in optical communication contains is provided that contains a rotation mechanism with a rotatable ring of soft magnetic material encircling a path of the beam from a beam expander. A mirror or prism being coupled to the rotatable ring is rotated with the ring. The ring includes an array of soft magnetic ridges, forming elevations extending from a surface of the ring. At least three electromagnets are used to drive rotation of the ring around the beam axis. Each electromagnets comprises a soft magnetic yoke, having poles at a first and second end portion of the yoke. The pole at the first end portion faces said surface of the ring, the first end portion having ridges elevated from the yoke in the direction towards the ring, in parallel with the ridges of the ring.

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