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1. 发明申请

WO2009140440A1 DUAL-TIP CANTILEVER 审中-公开
标题翻译：双线CANTILEVER
公开(公告)号：WO2009140440A1
公开(公告)日：2009-11-19
申请号：PCT/US2009/043863
申请日：2009-05-13
申请人： NANOINK, INC. , HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
发明人： HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
IPC分类号： G03F7/00 , G12B21/02 , G12B21/08
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
摘要翻译：描述了包括至少一个包括至少两个尖端的悬臂的装置，其中尖端具有基本上相同的尖端高度。还提供了制造和使用这种装置的方法。当两个尖端具有相等的高度时，可以更容易地确定一个尖端离开表面的高度。

2. 发明申请

WO2009140441A2 HEIGHT SENSING CANTILEVER 审中-公开
标题翻译：高度传感器
公开(公告)号：WO2009140441A2
公开(公告)日：2009-11-19
申请号：PCT/US2009/043865
申请日：2009-05-13
申请人： NANOINK, INC. , FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
发明人： FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
IPC分类号： G12B21/08 , G01N13/16
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

3. 发明申请

WO2009070622A2 CANTILEVER WITH PIVOTING ACTUATION 审中-公开
标题翻译：带有起动执行器的CANTILEVER
公开(公告)号：WO2009070622A2
公开(公告)日：2009-06-04
申请号：PCT/US2008/084758
申请日：2008-11-25
申请人： NANOINK, INC. , SHILE, Raymond, Roger
发明人： SHILE, Raymond, Roger
IPC分类号： B81B3/00
CPC分类号： G01Q70/02 , G01Q80/00 , H01H1/0094 , H01H2057/006 , H01H2061/006 , Y10T29/49002
摘要： Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.
摘要翻译：改进的致动装置可用于直写纳米光刻和成像，包括使用枢轴点用于具有长行进路径的悬臂的向下偏转。一种装置，包括至少一个保持器，至少一个悬臂，所述悬臂的延伸部，其中所述延伸部与致动器成一体，其中所述悬臂适于致动运动。致动器可以是静电的，热的或压电的。悬臂可以包括尖端，并且材料可以从尖端传递到表面。

4. 发明申请

WO2013059670A2 OCTAHEDRAL AND PYRAMID-ON-POST TIPS FOR MICROSCOPY AND LITHOGRAPHY 审中-公开
标题翻译：用于显微镜和光刻的OCTAHEDRAL和PYRAMID-ON-POST提示
公开(公告)号：WO2013059670A2
公开(公告)日：2013-04-25
申请号：PCT/US2012/061132
申请日：2012-10-19
申请人： NANOINK, INC.
发明人： SHILE, Raymond, Roger
IPC分类号： H01L21/203
CPC分类号： G01Q70/10 , G01Q70/16 , G03F7/0002
摘要： A device comprises a cantilever, and an octahedral tip extending from a bottom surface of the cantilever. The octahedral tip comprises a top portion at which the octahedral tip is attached to the cantilever, a bottom portion comprising a first vertex, and a middle portion disposed between the top portion and the bottom portion, the middle portion comprising four additional vertices and being wider than the top portion and the bottom portion. Another device comprises a cantilever, and a tip extending from a bottom surface of the cantilever. The tip comprises an elongated post portion and a pyramidal portion located at one end of the elongated post portion. The cantilever and the tip are formed of a continuous layer of material having a thickness between 400 nm and 1000 nm.
摘要翻译：装置包括悬臂和从悬臂的底表面延伸的八面体尖端。八面体尖端包括八面尖端附接到悬臂的顶部部分，包括第一顶点的底部部分和设置在顶部部分和底部部分之间的中间部分，中间部分包括四个附加顶点并且更宽而不是顶部和底部。另一装置包括悬臂和从悬臂的底表面延伸的尖端。尖端包括细长的柱部分和位于细长柱部分的一端的金字塔形部分。悬臂和尖端由厚度在400nm和1000nm之间的连续的材料层形成。

5. 发明申请

WO2008141048A1 COMPACT NANOFABRICATION APPARATUS 审中-公开
标题翻译：紧凑的纳米装置
公开(公告)号：WO2008141048A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/062959
申请日：2008-05-07
申请人： NANOINK, INC. , ROZHOK, Sergey, V. , NELSON, Michael , AMRO, Nabil, A. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger , VANMERKESTYN, Dirk, N. , BUSSAN, John, Edward
发明人： ROZHOK, Sergey, V. , NELSON, Michael , AMRO, Nabil, A. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger , VANMERKESTYN, Dirk, N. , BUSSAN, John, Edward
IPC分类号： G03F7/00 , G03F7/20
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译：一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。适用于小规模制造和纳米光刻。该仪器可以紧凑，并在实验台或台式机上使用。一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底通过多轴组件，至少一个观察组件，至少一个控制器。通过压电方法和装置和电动机的定位是特别有用的。该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。观察组件可以是具有长工作距离的显微镜。特别适用于制造生物芯片或微阵列。多轴组件可以是五轴组件。软件可以促进有效的使用。

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