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1. 发明申请

WO2006078740A3 STRUCTURE AND METHOD TO OPTIMIZE STRAIN IN CMOSFETS 审中-公开
公开(公告)号：WO2006078740A3
公开(公告)日：2006-07-27
申请号：PCT/US2006/001768
申请日：2006-01-19
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , CHEN, Xiangdong , YANG, Haining, S.
发明人： CHEN, Xiangdong , YANG, Haining, S.
IPC分类号： H01L29/78 , H01L21/8238
摘要： A semiconductor structure of strained MOSFETs, comprising both PMOSFETs and NMOSFETS, and a method for fabricating strained MOSFETs are disclosed that optimize strain in the MOSFETs, and more particularly maximize the strain in one kind (P or N) of MOSFET and minimize and relax the strain in another kind (N or P) of MOSFET, A strain inducing CA nitride coating having an original full thickness is formed over both the PMOSFETs and the NMOSFETs, wherein the strain inducing coating produces an optimized full strain in one kind of semiconductor device and degrades the performance of the other kind of semiconductor device. The strain inducing CA nitride coating is etched to a reduced thickness over the other kind of semiconductor devices, wherein the reduced thickness of the strain inducing coating relaxes and produces less strain in the other MOSFETs.

2. 发明申请

WO2008091558A1 HYBRID INTERCONNECT STRUCTURE FOR PERFORMANCE IMPROVEMENT AND RELIABILITY ENHANCEMENT 审中-公开
标题翻译：混合互连结构，用于性能改进和可靠性增强
公开(公告)号：WO2008091558A1
公开(公告)日：2008-07-31
申请号：PCT/US2008/000740
申请日：2008-01-22
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , YANG, Chih-Chao , SHAW, Thomas, M. , WONG, Keith, Kwong, Hon , YANG, Haining, S.
发明人： YANG, Chih-Chao , SHAW, Thomas, M. , WONG, Keith, Kwong, Hon , YANG, Haining, S.
IPC分类号： H01L23/48
CPC分类号： H01L21/76841 , H01L21/7682 , H01L21/76831 , H01L23/481 , H01L23/5222 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L23/53271 , H01L23/5329 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides an interconnect structure (of the single or dual damascene type) and a method of forming the same, in which a dense (i.e., non-porous) dielectric spacer is present on the sidewalls of a dielectric material. More specifically, the inventive structure includes a dielectric material having a conductive material embedded within at least one opening in the dielectric material, wherein the conductive material is laterally spaced apart from the dielectric material by a diffusion barrier, a dense dielectric spacer and, optionally, an air gap. The presence of the dense dielectric spacer results in a hybrid interconnect structure that has improved reliability and performance as compared with existing prior art interconnect structures which do not include such dense dielectric spacers. Moreover, the inventive hybrid interconnect structure provides for better process control which leads to the potential for high volume manufacturing.
摘要翻译：本发明提供了一种互连结构（单镶嵌型或双镶嵌型）及其形成方法，其中在电介质材料的侧壁上存在致密的（即非多孔的）电介质间隔物。更具体地，本发明的结构包括介电材料，其具有嵌入介电材料中的至少一个开口中的导电材料，其中导电材料通过扩散阻挡层，致密电介质间隔物和任选地，气隙。与现有技术的不包括这种致密电介质间隔物的互连结构相比，密集电介质间隔物的存在导致混合互连结构具有改进的可靠性和性能。此外，本发明的混合互连结构提供了更好的过程控制，这导致了大批量制造的潜力。

3. 发明申请

WO2007127770A2 IMPROVED CMOS DIODES WITH DUAL GATE CONDUCTORS, AND METHODS FOR FORMING THE SAME 审中-公开
标题翻译：改进的具有双栅导体的CMOS二极管及其形成方法
公开(公告)号：WO2007127770A2
公开(公告)日：2007-11-08
申请号：PCT/US2007/067361
申请日：2007-04-25
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , ONSONGO, David, M. , RAUSCH, Werner , YANG, Haining, S.
发明人： ONSONGO, David, M. , RAUSCH, Werner , YANG, Haining, S.
IPC分类号： H01L23/62
CPC分类号： H01L29/7391 , H01L29/66356
摘要： The present invention provides an improved CMOS diode structure with dual gate conductors. Specifically, a substrate comprising a first n-doped region and a second p-doped region is formed. A third region of either n-type or p-type conductivity is located between the first and second regions. A first gate conductor of n-type conductivity and a second gate conductor of p-type conductivity are located over the substrate and adjacent to the first and second regions, respectively. Further, the second gate conductor is spaced apart and isolated from the first gate conductor by a dielectric isolation structure. An accumulation region with an underlying depletion region can be formed in such a diode structure between the third region and the second or the first region, and such an accumulation region preferably has a width that is positively correlated with that of the second or the first gate conductor.
摘要翻译：本发明提供了具有双栅极导体的改进的CMOS二极管结构。具体地，形成包括第一n掺杂区域和第二p掺杂区域的衬底。 n型或p型导电性的第三区域位于第一和第二区域之间。 n型导电体的第一栅极导体和p型导电体的第二栅极导体分别位于衬底上并且分别邻近第一和第二区域。此外，第二栅极导体通过介电隔离结构与第一栅极导体隔开并隔离。可以在第三区域和第二区域或第一区域之间的这种二极管结构中形成具有底层耗尽区域的积聚区域，并且这样的累积区域优选地具有与第二或第一栅极的宽度正相关的宽度导体。

4. 发明申请

WO2007024984A2 HIGH PERFORMANCE MOSFET COMPRISING A STRESSED GATE METAL SILICIDE LAYER AND METHOD OF FABRICATING THE SAME 审中-公开
标题翻译：包含耐压门金属硅化物层的高性能MOSFET及其制造方法
公开(公告)号：WO2007024984A2
公开(公告)日：2007-03-01
申请号：PCT/US2006/032974
申请日：2006-08-22
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , YANG, Haining, S.
发明人： YANG, Haining, S.
IPC分类号： H01L29/78 , H01L21/8238
CPC分类号： H01L21/823807 , H01L21/28052 , H01L21/823835 , H01L29/4933 , H01L29/517 , H01L29/665 , H01L29/66545 , H01L29/6656 , H01L29/66628 , H01L29/66636 , H01L29/7845 , H01L29/7848
摘要： The present invention relates to a semiconductor device that comprises at least one field effect transistor (FET) containing a source region, a drain region, a channel region, a gate dielectric layer, a gate electrode, and one or more gate sidewall spacers. The gate electrode of such an FET contains an intrinsically stressed gate metal silicide layer, which is laterally confined by one or more gate sidewall spacers and is arranged and constructed for creating stress in the channel region of the FET. Preferably, the semiconductor device comprises at least one p-channel FET, and more preferably, the p-channel FET has a gate electrode with an intrinsically stressed gate metal silicide layer that is laterally confined by one or more gate sidewall spacers and is arranged and constructed for creating compressive stress in the p-channel of the FET.
摘要翻译：本发明涉及一种半导体器件，其包括至少一个包含源极区域，漏极区域，沟道区域，栅极介电层，栅极电极和一个或多个栅极侧壁间隔物的场效应晶体管（FET）。这种FET的栅电极包含本征应力的栅极金属硅化物层，其被一个或多个栅极侧壁间隔物侧向限制，并且被布置和构造用于在FET的沟道区域中产生应力。优选地，半导体器件包括至少一个p沟道FET，并且更优选地，p沟道FET具有栅极电极，其具有被一个或多个栅极侧壁间隔物侧向限制的本征应力栅极金属硅化物层，构造用于在FET的p沟道中产生压应力。

5. 发明申请

WO2009148992A1 CARRIER MOBILITY ENHANCED CHANNEL DEVICES AND METHOD OF MANUFACTURE 审中-公开
标题翻译：载波移动增强信道设备及其制造方法
公开(公告)号：WO2009148992A1
公开(公告)日：2009-12-10
申请号：PCT/US2009/045788
申请日：2009-06-01
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , YANG, Haining, S. , CHENG, Kangguo
发明人： YANG, Haining, S. , CHENG, Kangguo
IPC分类号： H01L21/8238 , H01L27/118
CPC分类号： H01L21/823828 , H01L21/823807 , H01L29/7845 , Y10S438/926
摘要： An integrated circuit with stress enhanced channels, a design structure and a method of manufacturing the integrated circuit is provided. The method includes forming a dummy gate structure on a substrate and forming a trench in the dummy gate structure. The method further includes filling a portion of the trench with a strain inducing material and filling a remaining portion of the trench with gate material.
摘要翻译：提供了具有应力增强通道的集成电路，设计结构和制造集成电路的方法。该方法包括在衬底上形成虚拟栅极结构并在虚拟栅极结构中形成沟槽。该方法还包括用应变诱导材料填充沟槽的一部分并用栅极材料填充沟槽的剩余部分。

6. 发明申请

WO2007124472A2 PATTERNING SUB-LITHOGRAPHIC FEATURES WITH VARIABLE WIDTHS 审中-公开
标题翻译：绘制具有可变宽度的次平面特征
公开(公告)号：WO2007124472A2
公开(公告)日：2007-11-01
申请号：PCT/US2007/067184
申请日：2007-04-23
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , YANG, Haining, S.
发明人： YANG, Haining, S.
IPC分类号： H01L21/302
CPC分类号： H01L21/0337 , H01L21/0334 , H01L21/3086 , H01L21/3088 , H01L21/76229 , H01L21/84 , H01L27/0207 , H01L27/11 , H01L27/1104 , H01L27/1203 , Y10S438/942 , Y10S438/947 , Y10S977/887
摘要： A method of processing a substrate of a device comprises the as following steps. Form a cap layer (14) over the substrate (12). Form a dummy layer (DL) over the cap layer (14), the cap layer having a top surface. Etch the dummy layer (DL) forming patterned dummy elements (DA, DB, DC) of variable widths and exposing sidewalls (3ON, 31N, 32N, 33N) of the dummy elements and portions of the top surface of the cap layer (14) aside from the dummy elements. Deposit a spacer layer (18C) over the device covering the patterned dummy elements (DA, DB, DC) and exposed surfaces of the cap layer (14). Etch back the spacer layer (18C) forming sidewall spacers (30N, 31N, 32N, 33N) aside from the sidewalls of the patterned dummy elements (DA, DB, DC) spaced above a minimum spacing and forming super-wide spacers between sidewalls of the patterned dummy elements spaced less than the minimum spacing. Strip the patterned dummy elements. Expose portions of the substrate aside from the sidewall spacers (30N, 31N, 32N, 33N). Pattern exposed portions of the substrate (12) by etching into the substrate.
摘要翻译：处理装置的基板的方法包括以下步骤。在衬底（12）上形成覆盖层（14）。在盖层（14）上形成虚拟层（DL），盖层具有顶表面。蚀刻形成可变宽度的图案化虚拟元件（DA，DB，DC）的虚拟层（DL），并且暴露虚拟元件的侧壁（3ON，31N，32N，33N）和盖层（14）的顶表面的部分，除了虚拟元素。在覆盖图案化的虚设元件（DA，DB，DC）的设备和覆盖层（14）的暴露表面上的元件上沉积间隔层（18C）。将间隔层（18C）刻蚀到形成侧壁间隔物（30N，31N，32N，33N）之外，其间距图案化的虚设元件（DA，DB，DC）的侧壁间隔开最小间隔，并形成超宽间隔物图案化的虚拟元件间隔小于最小间距。剥去图案的虚拟元素。将侧衬垫（30N，31N，32N，33N）的一部分露出。通过蚀刻到衬底中衬底（12）的图案曝光部分。

7. 发明申请

WO2005045901A2 METHOD AND STRUCTURE FOR FORMING STRAINED Si FOR CMOS DEVICES 审中-公开
标题翻译：用于形成用于CMOS器件的应变Si的方法和结构
公开(公告)号：WO2005045901A2
公开(公告)日：2005-05-19
申请号：PCT/US2004/037049
申请日：2004-11-05
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , STEEGEN, An, L. , YANG, Haining, S. , ZHANG, Ying
发明人： STEEGEN, An, L. , YANG, Haining, S. , ZHANG, Ying
IPC分类号： H01L
CPC分类号： H01L29/7833 , H01L21/02381 , H01L21/0243 , H01L21/02532 , H01L21/02658 , H01L21/26506 , H01L21/76224 , H01L21/76232 , H01L21/76283 , H01L21/823807 , H01L21/823814 , H01L21/823878 , H01L29/1054 , H01L29/665 , H01L29/66575 , H01L29/78 , H01L29/7842 , H01L29/7846 , H01L29/7849
摘要： A method for manufacturing a device including an n-type device and a p-type device. In an aspect of the invention, the method involves doping a portion of a semiconductor substrate and forming a gap in the semiconductor substrate by removing at least a portion of the doped portion of the semiconductor substrate. The method further involves growing a strain layer in at least a portion of the gap in the semiconductor substrate. For the n-type device, the strain layer is grown on at least a portion which is substantially directly under a channel of the n-type device. For the p-type device, the strain layer is grown on at least a portion which is substantially directly under a source region or drain region of the p-type device and not substantially under a channel of the p-type device.
摘要翻译：一种制造包括n型器件和p型器件的器件的方法。在本发明的一个方面，该方法包括通过去除半导体衬底的掺杂部分的至少一部分来掺杂半导体衬底的一部分并在半导体衬底中形成间隙。该方法还包括在半导体衬底中的间隙的至少一部分中生长应变层。对于n型器件，应变层在基本上直接位于n型器件的沟道下方的至少一部分上生长。对于p型器件，应变层生长在基本上直接位于p型器件的源极区域或漏极区域的部分上，并且基本上不在p型器件的沟道下生长。

8. 发明申请

WO2008045989A2 ENHANCED INTERCONNECT STRUCTURE 审中-公开
标题翻译：增强的互连结构
公开(公告)号：WO2008045989A2
公开(公告)日：2008-04-17
申请号：PCT/US2007/081046
申请日：2007-10-11
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , YANG, Chih-chao , YANG, Haining, S. , WONG, Keith, Kwong Hon , FAROOQ, Mukta, G.
发明人： YANG, Chih-chao , YANG, Haining, S. , WONG, Keith, Kwong Hon , FAROOQ, Mukta, G.
IPC分类号： H01L23/48
CPC分类号： H01L23/53238 , H01L21/76834 , H01L21/76843 , H01L21/76883 , H01L21/76885 , H01L23/53223 , H01L23/53266 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides a semiconductor interconnect structure with improved mechanical strength at the interface of the capping layer (61), the underlying dielectric layer (12) and the diffusion barrier (31). The interconnect structure has a portion (41) of the diffusion barrier material (31) embedded in the capping material (61). The barrier (31) can be either partially or fully embedded in the capping layer (61).
摘要翻译：本发明提供了一种在覆盖层（61），下面的介电层（12）和扩散阻挡层（31）的界面处具有改善的机械强度的半导体互连结构。互连结构具有嵌入在封盖材料（61）中的扩散阻挡材料（31）的一部分（41）。阻挡层（31）可以部分或完全嵌入覆盖层（61）中。

9. 发明申请

WO2006053258A2 METHOD TO ENHANCE CMOS TRANSISTOR PERFORMANCE BY INDUCING STRAIN IN THE GATE AND CHANNEL 审中-公开
标题翻译：通过在门和通道中诱导菌株来提高CMOS晶体管性能的方法
公开(公告)号：WO2006053258A2
公开(公告)日：2006-05-18
申请号：PCT/US2005/041051
申请日：2005-11-10
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , YANG, Haining, S.
发明人： YANG, Haining, S.
IPC分类号： H01L21/336
CPC分类号： H01L21/823807 , H01L21/823835 , H01L21/823842 , H01L21/823864 , H01L29/665 , H01L29/66545 , H01L29/6656 , H01L29/7843 , H01L29/7845
摘要： A method of manufacturing complementary metal oxide semiconductor transistors forms different types of transistors such as N-type metal oxide semiconductor (NMOS) transistors and P-type metal oxide semiconductor (PMOS) transistors (first and second type transistors) on a substrate (12). The method forms an optional oxide layer (52) on the NMOS transistors and the PMOS transistors and then covers the NMOS transistors and the PMOS transistors with a hard material (50) such as a silicon nitride layer. Following this, the method patterns portions of the hard material layer (50), such that the hard material layer remains only over the NMOS transistors. Next, the method heats (178, 204) the NMOS transistors and then removes the remaining portions of the hard material layer (50). By creating compressive stress in the gates (22) and tensile stress (70) in the channel regions of the NMOS transistors (NFETs), without creating stress in the gates (20) or channel regions of the PMOS transistors (PFETs), the method improves performance of the NFETs without degrading performance of the PFETs.
摘要翻译：制造互补金属氧化物半导体晶体管的方法在衬底（12）上形成不同类型的晶体管，例如N型金属氧化物半导体（NMOS）晶体管和P型金属氧化物半导体（PMOS）晶体管（第一和第二类型晶体管）。该方法在NMOS晶体管和PMOS晶体管上形成可选的氧化物层（52），然后用诸如氮化硅层的硬质材料（50）覆盖NMOS晶体管和PMOS晶体管。之后，硬质材料层（50）的方法图形部分，使得硬质材料层仅保留在NMOS晶体管的上方。接下来，该方法加热（178,204）NMOS晶体管，然后去除硬质材料层（50）的剩余部分。通过在NMOS晶体管（NFET）的沟道区域中的栅极（22）和拉伸应力（70）中产生压应力，而不在PMOS晶体管（PFET）的栅极（20）或沟道区域中产生应力，该方法提高NFET的性能，而不降低PFET的性能。

10. 发明申请

WO2005027192A2 STRUCTURE AND METHOD OF MAKING STRAINED CHANNEL CMOS TRANSISTORS HAVING LATTICE-MISMATCHED EPITAXIAL EXTENSION AND SOURCE AND DRAIN REGIONS 审中-公开
标题翻译：具有狭缝分离的外延延伸和源和漏区的应变通道CMOS晶体管的结构和方法
公开(公告)号：WO2005027192A2
公开(公告)日：2005-03-24
申请号：PCT/US2004/028163
申请日：2004-08-30
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DOKUMACI, Omer , CHEN, Huajie , CHIDAMBARRAO, Dureseti , YANG, Haining, S.
发明人： DOKUMACI, Omer , CHEN, Huajie , CHIDAMBARRAO, Dureseti , YANG, Haining, S.
IPC分类号： H01L
CPC分类号： H01L29/6653 , H01L21/26586 , H01L21/823807 , H01L21/823814 , H01L21/823835 , H01L21/823864 , H01L29/665 , H01L29/6656 , H01L29/7833 , H01L29/7848
摘要： A structure and method are provided in which an n-type field effect transistor (NFET) and a p-type field effect transistor (PFET) each have a channel region disposed in a single-crystal layer of a first semiconductor and a stress is applied at a first magnitude to a channel region of the PFET but not at that magnitude to the channel region of the NFET. The stress is applied by a layer of a second semiconductor which is lattice-mismatched to the first semiconductor. The layer of second semiconductor is formed over the source and drain regions and extensions of the PFET at a first distance from the channel region of the PFET and is formed over the source and drain regions of the NFET at a second, greater distance from the channel region of the NFET, or not formed at all in the NFET.
摘要翻译：提供了一种结构和方法，其中n型场效应晶体管（NFET）和p型场效应晶体管（PFET）各自具有设置在第一半导体的单晶层中的沟道区域并施加应力在第一幅度上与PFET的沟道区不同，但与NFET的沟道区不同。应力由第一半导体晶格失配的第二半导体层施加。第二半导体层形成在PFET的源极和漏极区域以及与PFET的沟道区第一距离处的延伸部分之间，并且形成在NFET的源极和漏极区域之上，距离沟道的第二更远的距离 NFET的区域，或者根本不形成在NFET中。

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