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    • 3. 发明申请
    • IMAGE SENSORS HAVING FRONTSIDE AND BACKSIDE PHOTODETECTORS
    • 具有FRONTSIDE和背光源的图像传感器
    • WO2010151324A1
    • 2010-12-29
    • PCT/US2010/001813
    • 2010-06-24
    • EASTMAN KODAK COMPANYMCCARTEN, John P.TIVARUS, Christian AlexandruSUMMA, Joseph R.
    • MCCARTEN, John P.TIVARUS, Christian AlexandruSUMMA, Joseph R.
    • H01L27/146
    • H01L27/14603H01L27/1463H01L27/14632H01L27/1464H01L27/14647H01L27/14687H01L27/14689H01L31/035272
    • A back-illuminated image sensor ( 306) includes a sensor layer (702) of a first conductivity type having a frontside (704) and a backside (706) opposite the frontside. One or more frontside regions (726, 728, 730) of a second conductivity type are formed in at least a portion of the frontside of the sensor layer. A backside region (740) of the second conductivity type is formed in the backside (706) of the sensor layer. A plurality of frontside photodetectors (718f, 72Of, 722f ) of the first conductivity type is disposed in the sensor layer. A distinct plurality of backside photodetectors (718b, 720b, 722b) of the first conductivity type separate from the plurality of frontside photodetectors are formed in the sensor layer contiguous to portions of the region of the second conductivity type. A voltage terminal (732) is disposed on the frontside of the sensor layer. One or more connecting regions (742, 744) of the second conductivity type are disposed in respective portions of the sensor layer between the voltage terminal and the backside region for electrically connecting the voltage terminal to the backside region.
    • 背照式图像传感器(306)包括具有前侧(704)的第一导电类型的传感器层(702)和与前侧相对的背面(706)。 在传感器层的前侧的至少一部分中形成有第二导电类型的一个或多个前侧区域(726,728,730)。 第二导电类型的背面区域(740)形成在传感器层的背面(706)中。 第一导电类型的多个前端光电探测器(718f,720f,722f)设置在传感器层中。 在与第二导电类型的区域的部分相邻的传感器层中形成与多个前端光电检测器分离的第一导电类型的不同的多个背面光电检测器(718b,720b,722b)。 电压端子(732)设置在传感器层的前侧。 第二导电类型的一个或多个连接区域(742,744)设置在电压端子和背面区域之间的传感器层的相应部分中,用于将电压端子电连接到背面区域。