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    • 4. 发明申请
    • IMAGE SENSORS HAVING FRONTSIDE AND BACKSIDE PHOTODETECTORS
    • 具有FRONTSIDE和背光源的图像传感器
    • WO2010151288A1
    • 2010-12-29
    • PCT/US2010/001679
    • 2010-06-11
    • EASTMAN KODAK COMPANYMCCARTEN, John P.TIVARUS, Cristian AlexandruSUMMA, Joseph R.
    • MCCARTEN, John P.TIVARUS, Cristian AlexandruSUMMA, Joseph R.
    • H01L27/146
    • H01L27/14603H01L27/14605H01L27/14632H01L27/1464H01L27/14647H01L27/14687H01L27/14689H01L31/035272
    • A back-illuminated image sensor includes a sensor layer (702) of a first conductivity type having a frontside (704) and a backside (706) opposite the front side. An insulating layer (708) is disposed over the backside. A circuit layer (710) is formed adjacent to the front side such that the sensor layer is positioned between the circuit layer and the insulating layer. One or more front side regions (728) of a second conductivity type are formed in at least a portion of the front side of the sensor layer. A backside region (740) of the second conductivity type is formed in the backside of the sensor layer. A plurality of front side photodetectors (718f, 720f, 722f) of the first conductivity type is disposed in the sensor layer. A distinct plurality of backside photodetectors (718b, 720b, 722b) of the first conductivity type separate from the plurality of front side photodetectors is formed in the sensor layer contiguous to portions of the backside region of the second conductivity type.
    • 背照式图像传感器包括具有前侧(704)和与前侧相对的背面(706)的第一导电类型的传感器层(702)。 绝缘层(708)设置在背面上。 电路层(710)邻近前侧形成,使得传感器层位于电路层和绝缘层之间。 第二导电类型的一个或多个前侧区域(728)形成在传感器层的前侧的至少一部分中。 在传感器层的背面形成有第二导电类型的背面区域(740)。 第一导电类型的多个前侧光电检测器(718f,720f,722f)设置在传感器层中。 在与第二导电类型的背侧区域的部分相邻的传感器层中形成有与多个前侧光电检测器分离的第一导电类型的不同的多个背面光电检测器(718b,720b,722b)。