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1. 发明申请

WO2003047307A3 A MINIATURE CONDENSER MICROPHONE AND FABRICATION METHOD THEREFOR 审中-公开
公开(公告)号：WO2003047307A3
公开(公告)日：2003-06-05
申请号：PCT/US2002/037539
申请日：2002-11-25
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES , PEDERSEN, Michael
发明人： PEDERSEN, Michael
IPC分类号： H04R25/00
摘要： An acoustic pressure type sensor (10) fabricated on a supporting substrate (19) is disclosed. The acoustic sensor is fabricated by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The resulting structure contains a pressure sensitive, electrically conductive diaphragm (11) positioned at a distance from an electrically conductive fixed electrode (21). In operation, the diaphragm deflects in response to an acoustic pressure and the corresponding change of electrical capacitance between the diaphragm and the fixed electrode is detected using an electrical circuit. Two or more such acoustic sensors are combined on the same supporting substrate with an interaural flexible mechanical connection, to form a directional sensor with a small surface area.

2. 发明申请

WO2003015128A2 AN ELECTROMECHANICAL SWITCH AND METHOD OF FABRICATION 审中-公开
标题翻译：机电开关及制造方法
公开(公告)号：WO2003015128A2
公开(公告)日：2003-02-20
申请号：PCT/US2002/024927
申请日：2002-08-07
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES
发明人： PEDERSEN, Michael , OZGUR, Mehmet
IPC分类号： H01L
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H2059/0018 , H01H2059/0072
摘要： A micro-electro-mechanical (MEM) switch formed on a substrate allows switching of various types of electrical conductor structures, depending on the desired frequency range of switch transmission and isolation. The switch contains a tilting cantilever arm, which tilts around central points of attachment. At least two conducting electrodes on the cantilever arm and the substrate form at least two air gap capacitors, which when electrically charged provide electrostatic attraction forces that cause the cantilever arm to deflect and tilt until conducting electrodes near the tips of the cantilever arm make electrical contact with fixed electrodes on the underlying substrate. The air gap capacitors on either side of the cantilever points of attachment allow the switch to be driven into both ON and OFF states, thereby eliminating dependence on cantilever mechanical restoring forces One or more holes in the cantilever arm near the air gap capacitors allow air within the gap to escape, thereby reducing the squeeze film damping and increasing the mechanical bandwidth of the switch. Low-temperature, IC compatible processing allows the switch structure to be fabricated directly on substrates containing pre-processed circuits, such as monolithic microwave integrated circuits (MMICs), and on low-cost substrates, such as low temperature co-fired ceramic (LTCC), for the realization of low-cost vertical integration of complex switching circuits, such as RF phase shifter networks.
摘要翻译：形成在基板上的微机电（MEM）开关允许根据所需的开关传输和隔离的频率范围来切换各种类型的电导体结构。开关包含一个倾斜的悬臂，它围绕中心点倾斜。悬臂和基板上的至少两个导电电极形成至少两个气隙电容器，当电荷充电时，静电吸引力使悬臂臂偏转和倾斜，直到靠近悬臂臂顶端的电极进行电接触在底层基板上固定电极。悬臂连接点两侧的气隙电容允许开关被驱动到ON和OFF状态，从而消除对悬臂机械恢复力的依赖性气隙电容器附近的悬臂中的一个或多个孔允许空气内的空气间隙逃脱，从而减少挤压膜阻尼并增加开关的机械带宽。低温，IC兼容处理允许开关结构直接在包含预处理电路的基板上制造，例如单片微波集成电路（MMIC），以及低成本基板，如低温共烧陶瓷（LTCC）），用于实现复杂开关电路（如RF移相器网络）的低成本垂直整合。

3. 发明申请

WO2003106952A3 A MICRO-MECHANICAL CAPACITIVE INDUCTIVE SENSOR FOR WIRELESS DETECTION OF RELATIVE OR ABSOLUTE PRESSURE 审中-公开
公开(公告)号：WO2003106952A3
公开(公告)日：2003-12-24
申请号：PCT/US2003/019121
申请日：2003-06-18
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES , PEDERSEN, Michael , OZGUR, Mehmet , HUFF, Michael, A.
发明人： PEDERSEN, Michael , OZGUR, Mehmet , HUFF, Michael, A.
IPC分类号： H04R25/00
摘要： A micro-mechanical pressure transducer (100) is disclosed in which a capacitive transducer structure is integrated with an inductor coil (105) to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field in the transducer (100). The capacitive transducer structure (100) comprises a conductive movable diaphragm (106), a fixed counter electrode (107), and a predetermined air gap (109) between said diaphragm (106) and electrode (107). The diaphragm (106) deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer (100).

4. 发明申请

WO2003047307A2 A MINIATURE CONDENSER MICROPHONE AND FABRICATION METHOD THEREFOR 审中-公开
标题翻译：微型冷凝器麦克风及其制造方法
公开(公告)号：WO2003047307A2
公开(公告)日：2003-06-05
申请号：PCT/US2002/037539
申请日：2002-11-25
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES , PEDERSEN, Michael
发明人： PEDERSEN, Michael
IPC分类号： H04R
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H01L2224/16 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： An acoustic pressure type sensor fabricated on a supporting substrate is disclosed. The acoustic sensor is fabricated by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The resulting structure contains a pressure sensitive, electrically conductive diaphragm positioned at a distance from an electrically conductive fixed electrode. In operation, the diaphragm deflects in response to an acoustic pressure and the corresponding change of electrical capacitance between the diaphragm and the fixed electrode is detected using an electrical circuit. Two or more such acoustic sensors are combined on the same supporting substrate with an interaural flexible mechanical connection, to form a directional sensor with a small surface area.
摘要翻译：公开了一种制造在支撑衬底上的声压型传感器。通过在支撑衬底上沉积和蚀刻许多薄膜并通过加工支撑衬底来制造声学传感器。所得到的结构包含位于离导电固定电极一定距离处的压力敏感的导电膜。在操作中，隔膜响应于声压而偏转，并且使用电路检测隔膜和固定电极之间的电容的相应变化。将两个或更多个这样的声学传感器组合在相同的支撑衬底上，具有ural柔性机械连接，以形成具有小表面积的方向传感器。

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