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    • 3. 发明申请
    • MICRO-FABRICATED ELECTROKINETIC PUMP
    • 微型电动泵
    • WO2004027262A2
    • 2004-04-01
    • PCT/US2003/030179
    • 2003-09-23
    • COOLIGY, INC.
    • CORBIN, DavidKENNETH, Goodson, E.KENNY, Thomas, William, Jr.ZENG, ShulinSANTIAGO, Juan, G.
    • F04B
    • F04B17/00F04B19/006
    • An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
    • 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。