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    • 4. 发明申请
    • ADJUSTABLE GAS DISTRIBUTION APPARATUS
    • 可调式燃气分配装置
    • WO2010051233A2
    • 2010-05-06
    • PCT/US2009061893
    • 2009-10-23
    • APPLIED MATERIALS INCZHANG LINTSUEI LUNTSO ALANCHO TOM KSHIEH BRIAN SY-YUAN
    • ZHANG LINTSUEI LUNTSO ALANCHO TOM KSHIEH BRIAN SY-YUAN
    • H01L21/205H05H1/34
    • H01J37/32935C23C16/45565C23C16/45589H01J37/3244
    • Embodiments of the present invention generally provide apparatus and methods for altering the contour of a gas distribution plate within a process chamber without breaking vacuum conditions within the chamber. In one embodiment, a central support device adjusted to vary the height of a central region of a gas distribution plate with respect to the periphery of the gas distribution plate. In another embodiment, a plurality of central support devices is adjusted to vary the height of a central region of a gas distribution plate with respect to the periphery of the plate. In yet another embodiment, a plurality of central support devices and a plurality of mid-range support devices are adjusted to vary the height of certain regions of the gas distribution plate with respect to other regions of the gas distribution plate. In one embodiment, the contour of the gas distribution plate is altered based on changes detected within the process chamber.
    • 本发明的实施例一般提供用于改变处理室内的气体分配板的轮廓而不破坏室内的真空条件的设备和方法。 在一个实施例中,调节中央支撑装置以相对于气体分配板的周边改变气体分配板的中心区域的高度。 在另一个实施例中,调节多个中央支撑装置以改变气体分配板的中心区域相对于板的周边的高度。 在又一个实施例中,调节多个中央支撑装置和多个中档支撑装置以改变气体分配板的某些区域相对于气体分配板的其他区域的高度。 在一个实施例中,气体分配板的轮廓基于在处理室内检测到的变化而改变。
    • 9. 发明申请
    • A TORSION SENSOR
    • 扭转传感器
    • WO2008007062A3
    • 2008-03-13
    • PCT/GB2007002547
    • 2007-07-09
    • UNIV ASTONBENNION IANZHOU KAIMINGCHEN XIANFENGZHANG LIN
    • BENNION IANZHOU KAIMINGCHEN XIANFENGZHANG LIN
    • G01L1/00
    • G01M11/088G01L3/12
    • A torsion sensor (1) using an optical waveguide (2) in optical communication with a diffraction grating (3), preferably a tilted grating, and most preferably a tilted Bragg grating, which provides the optical waveguide and grating with a torsion-dependent collective optical transmission spectrum. Changes in the collective optical transmission spectrum of the waveguide and grating, induced by changes in the amount of torsion applied to the waveguide, may be detected (12) by detecting a corresponding change in the intensity of optical radiation transmitted through the grating from a controlled optical source (5). The degree of change in the collective optical transmission spectrum is dependent upon the degree of torsion (twist) applied to the optical waveguide. Measuring the magnitude and/or sense (i.e. increase/decrease) in the intensity of optical radiation transmitted through the grating from an optical source enables torsion to be sensed.
    • 一种使用与衍射光栅(3)光学通信的光波导(2)的扭转传感器(1),优选为倾斜光栅,并且最优选为倾斜布拉格光栅,其为光波导和光栅提供扭转相关集合 光传输频谱。 通过检测通过光栅传输的光辐射强度的相应变化,可以检测(12)由施加到波导的扭转量的变化引起的波导和光栅的集体光透射频谱的变化 光源(5)。 集体光传输频谱的变化程度取决于施加到光波导的扭曲程度(扭曲)。 测量从光源通过光栅透射的光辐射的强度的量值和/或感测(即增加/减少)使得能够感测扭转。