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    • 7. 发明申请
    • OPTICAL COMPONENT OF POLARIZING MODULATION, AND ITS USE IN A POLARIMETER OR IN AN ELLIPSOMETER
    • 极化调制的光学元件及其在极化仪中或在偏振仪中的应用
    • WO1998019142A1
    • 1998-05-07
    • PCT/FR1997001849
    • 1997-10-16
    • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUEDREVILLON, BernardCOMPAIN, Eric
    • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
    • G01J04/00
    • G01N21/211G01J4/00G02F1/0327
    • The invention concerns an optical component of polarizing modulation, a polarimeter and a Mueller ellipsometer comprising this optical component. The optical component modulates an incident light beam (10) linearly polarized and sends back a modulated beam (11). It comprises a coupled phase modulator (6B) modulating twice successively the incident beam, the two modulations being at the same frequency omega /2 pi and being coupled by a system (61) modifying the state of polarization of the light between the two modulations. The ellipsometer comprises means for sensing a measuring beam sent back by a sample, which receives the modulated beam, and a processing unit. The sensing means include a polarimeter generating n measured quantities representing the states of polarization of the beam and the processing unit generates by Fourier transform m values for each of these quantities, with n x m >/= 16 and m >/= 4, for simultaneously acceding to the sixteen coefficients of the Mueller matrix of the sample.
    • 本发明涉及偏振调制的光学部件,偏振计和包含该光学部件的米勒椭偏仪。 光学部件调制线偏振的入射光束(10)并发送回调制光束(11)。 它包括耦合相位调制器(6B),连续调制入射光束两次,两个调制处于相同的频率ω/2π,并通过修改两个调制之间的光的偏振状态的系统(61)耦合。 椭偏仪包括用于感测由接收调制束的样本发回的测量光束的装置和处理单元。 感测装置包括产生表示光束的极化状态的n个测量量的旋转计,并且处理单元通过用这些量的每一个的傅立叶变换m值产生,其中nxm> = 16和m> / = 4,用于同时加入 到样本的Mueller矩阵的十六个系数。