专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2011149546A1 HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM 审中-公开
标题翻译：加热旋转密封和轴承用于冷冻离子植入系统
公开(公告)号：WO2011149546A1
公开(公告)日：2011-12-01
申请号：PCT/US2011/000955
申请日：2011-05-26
申请人： AXCELIS TECHNOLOGIES INC. , LEE, William , DIVERGILIO, William , DRUMMOND, Steve
发明人： LEE, William , DIVERGILIO, William , DRUMMOND, Steve
IPC分类号： H01J37/317 , H01J37/20
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/166 , H01J2237/2001 , H01J2237/20214
摘要： A workpiece scanning system is provided having a scan arm (202) that rotates about a first axis and a chilled end effector (206) rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate (212) and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
摘要翻译：提供了一种工件扫描系统，其具有围绕第一轴线旋转的扫描臂（202）和可旋转地联接到扫描臂的冷却端部执行器（206），围绕第二轴线选择性地固定工件。冷冻末端执行器具有夹板（212）和用于冷却夹板的一个或多个冷却机构。轴承沿着第二轴线定位并且将端部执行器可旋转地联接到扫描臂，并且沿着第二轴线定位密封件以在外部环境和内部环境之间提供压力障碍。轴承和密封件中的一个或多个可以具有与其相关联的铁磁流体。加热器组件靠近轴承和密封定位，其中加热器组件选择性地向轴承和密封提供预定量的热量，其中增加端部执行器围绕第二轴线旋转的倾向。

2. 发明申请

WO2013181093A1 INERT ATMOSPHERIC PRESSURE PRE-CHILL AND POST-HEAT 审中-公开
标题翻译：消除大气压力预热和后热
公开(公告)号：WO2013181093A1
公开(公告)日：2013-12-05
申请号：PCT/US2013/042619
申请日：2013-05-24
申请人： AXCELIS TECHNOLOGIES, INC. , LEE, William , DRUMMOND, Steve
发明人： LEE, William , DRUMMOND, Steve
IPC分类号： H01J37/317 , H01J37/18
CPC分类号： H01J37/185 , H01J37/3171 , H01J2237/022 , H01J2237/184 , H01J2237/2001 , H01J2237/31701
摘要： An ion implantation system (101) provides ions (112) to a workpiece (118) positioned in a process environment (126) of a process chamber (122) on a sub-ambient temperature chuck (130). An intermediate chamber (136) having an intermediate environment (138) is in fluid communication with an external environment (132) and has a cooling station (140) and heating station (142) for cooling and heating the workpiece (118). A load lock chamber (150) is provided between the process chamber (122) and intermediate chamber (136) to isolate the process environment (126) from the intermediate environment (138). A pressure source (166) provides a dry gas (168) within the intermediate chamber (136) at dew point that is less than a dew point of the external environment (132) to the intermediate chamber. The pressure source isolates the intermediate environment from the external environment via a flow of the dry gas from the intermediate chamber to the external environment.
摘要翻译：离子注入系统（101）向位于次环境温度卡盘（130）上的处理室（122）的处理环境（126）中的工件（118）提供离子（112）。具有中间环境（138）的中间室（136）与外部环境（132）流体连通，并具有用于冷却和加热工件（118）的冷却站（140）和加热站（142）。在处理室（122）和中间室（136）之间设置负载锁定室（150），以将过程环境（126）与中间环境（138）隔离。压力源（166）在中间室（136）内的露点处提供干燥气体（168），其露点小于外部环境（132）到中间室的露点。压力源通过从中间室到外部环境的干燥气体流将中间环境与外部环境隔离开来。

3. 发明申请

WO2011149542A1 ACTIVE DEW POINT SENSING AND LOAD LOCK VENTING TO PREVENT CONDENSATION OF WORKPIECES 审中-公开
标题翻译：活动的DEW点感测和负载锁定，以防止工作凝结
公开(公告)号：WO2011149542A1
公开(公告)日：2011-12-01
申请号：PCT/US2011/000948
申请日：2011-05-26
申请人： AXCELIS TECHNOLOGIES INC. , LEE, William
发明人： LEE, William
IPC分类号： H01J37/317 , H01J37/18 , H01J37/02
CPC分类号： H01J37/3171 , H01J37/185 , H01J2237/006 , H01J2237/184 , H01J2237/2001 , H01J2237/24585
摘要： A system, apparatus, and method is provided for preventing condensation on a workpiece in an end station of an ion implantation system. A workpiece is cooled in a first environment, and is transferred to a load lock chamber that is in selective fluid communication with the end station and a second environment, respectively. A workpiece temperature monitoring device is configured to measure a temperature of the workpiece in the load lock chamber. An external monitoring device measures a temperature and relative humidity in the second environment, and a controller is configured to determine a temperature of the workpiece at which condensation will not form on the workpiece when the workpiece is transferred from the load lock chamber to the second environment.
摘要翻译：提供了一种系统，装置和方法，用于防止离子注入系统的终端中的工件上的冷凝。工件在第一环境中被冷却，并且被转移到分别与终端站和第二环境选择性流体连通的负载锁定室。工件温度监控装置被配置为测量加载锁定室中的工件的温度。外部监视装置测量第二环境中的温度和相对湿度，并且控制器被配置为当工件从负载锁定室传送到第二环境时，确定在工件上不会形成冷凝的工件的温度。

4. 发明申请

WO2011115675A2 VAPOR COMPRESSION REFRIGERATION CHUCK FOR ION IMPLANTERS 审中-公开
标题翻译：用于离子植物的蒸气压缩式制冷器
公开(公告)号：WO2011115675A2
公开(公告)日：2011-09-22
申请号：PCT/US2011/000483
申请日：2011-03-16
申请人： AXCELIS TECHNOLOGIES, INC. , LEE, William , PUROHIT, Ashwin , LAFONTAINE, Marvin
发明人： LEE, William , PUROHIT, Ashwin , LAFONTAINE, Marvin
IPC分类号： H01L21/00 , H01L21/683
CPC分类号： H01L21/6831 , H01J37/20 , H01J37/3171 , H01J2237/002 , H01J2237/2001 , H01J2237/2007 , H01J2237/20214 , H01J2237/2065 , H01J2237/31701 , H01L21/67109
摘要： Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece.
摘要翻译：本发明的方面涉及利用蒸气压缩冷却系统的离子注入系统。在一个实施例中，蒸气压缩系统中的热控制器根据理想的蒸汽压缩循环通过压缩机和冷凝器发送制冷流体，以帮助限制或防止在植入期间对工件的不期望的加热，或者主动冷却工件。

5. 发明申请

WO2008088471A1 ANNULUS CLAMPING AND BACKSIDE GAS COOLED ELECTROSTATIC CHUCK 审中-公开
标题翻译： ANNULUS夹紧和背面气体冷却静电卡盘
公开(公告)号：WO2008088471A1
公开(公告)日：2008-07-24
申请号：PCT/US2007/024705
申请日：2007-11-30
申请人： AXCELIS TECHNOLOGIES, INC. , TAO, Teng Chao , LAFONTAINE, Marvin , LEE, William , PUROHIT, Ashwin
发明人： TAO, Teng Chao , LAFONTAINE, Marvin , LEE, William , PUROHIT, Ashwin
IPC分类号： H01L21/683
CPC分类号： H01L21/6833
摘要： An electrostatic clamp (ESC), system, and method for clamping a workpiece is provided. A clamping plate of the ESC has central disk and an annulus encircling the central disk, wherein the central disk is recessed from the annulus by a gap distance, therein defining a volume. Backside gas delivery apertures are positioned proximate to an interface between the annulus and the central disk. A first voltage to a first electrode of the annulus clamps a peripheral region of the workpiece to a first layer. A second voltage to a second electrode of the central disk generally compensates for a pressure of a backside gas within the volume. The ESC can be formed of J-R- or Coulombic- type materials. A cooling plate associated with the clamping plate further provides cooling by one or more cooling channels configured to route a cooling fluid therethrough.
摘要翻译：提供了用于夹紧工件的静电夹（ESC），系统和方法。 ESC的夹紧板具有中心盘和围绕中心盘的环形空间，其中中心盘从环形空间中间隙距离定义一个体积。背侧气体输送孔位于环形区域与中央盘之间的界面附近。环形物的第一电极的第一电压将工件的周边区域夹持到第一层。中心盘的第二电极的第二电压通常补偿体积内的背侧气体的压力。 ESC可由J-R-或库仑型材料形成。与夹紧板相关联的冷却板还通过一个或多个冷却通道提供冷却，所述冷却通道被配置成使冷却流体从其中引导。

6. 发明申请

WO2014022844A2 IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS 审中-公开
标题翻译：真空高速预冷和后加热站
公开(公告)号：WO2014022844A2
公开(公告)日：2014-02-06
申请号：PCT/US2013/053567
申请日：2013-10-02
申请人： AXCELIS TECHNOLOGIES, INC. , LEE, William , REYNOLDS, William , STONE, Stanley
发明人： LEE, William , REYNOLDS, William , STONE, Stanley
IPC分类号： H01J37/317
CPC分类号： H01J37/18 , H01J37/20 , H01J37/3171 , H01J2237/2001 , H01J2237/2002 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/31705 , H01L21/02002 , H01L21/67109 , H01L21/67201 , H01L21/67213 , H01L21/67742 , H01L21/67766
摘要： An ion implantation system provides ions to a workpiece positioned in a vacuum environment of a process chamber on a cooled chuck. A pre-chill station within the process chamber has a chilled workpiece support configured to cool the workpiece to a first temperature, and a post-heat station within the process chamber, has a heated workpiece support configured to heat the workpiece to a second temperature. The first temperature is lower than a process temperature, and the second temperature is greater than an external temperature. A workpiece transfer arm is further configured to concurrently transfer two or more workpieces between two or more of the chuck, a load lock chamber, the pre-chill station, and the post-heat station.
摘要翻译：离子注入系统向位于冷却卡盘上的处理室的真空环境中的工件提供离子。处理室内的预冷站具有构造成将工件冷却到第一温度的冷冻工件支撑件，并且处理室内的后加热站具有被配置为将工件加热到第二温度的加热工件支撑件。第一温度低于处理温度，第二温度大于外部温度。工件传送臂还被构造成在卡盘，加载锁定室，预冷站和后加热站之间的两个或更多个之间同时传送两个或更多个工件。

7. 发明申请

WO2011149541A1 MATCHED COEFFICIENT OF THERMAL EXPANSION FOR AN ELECTROSTATIC CHUCK 审中-公开
标题翻译：用于静电切割的热膨胀的匹配系数
公开(公告)号：WO2011149541A1
公开(公告)日：2011-12-01
申请号：PCT/US2011/000947
申请日：2011-05-26
申请人： AXCELIS TECHNOLOGIES INC. , LEE, William , PUROHIT, Ashwin
发明人： LEE, William , PUROHIT, Ashwin
IPC分类号： H01L21/00 , H01L21/683
CPC分类号： H01L21/6831 , B23B31/28 , H01L21/67103 , H01L21/6833 , Y10T29/49117 , Y10T279/23
摘要： An apparatus and method are provided for selecting materials for forming an electrostatic clamp. The electrostatic clamp has a backing plate having a first coefficient of thermal expansion, wherein the backing plate provides structural support and rigidity to the electrostatic clamp. The electrostatic clamp further has a clamping plate having a clamping surface associated with contact with a workpiece, wherein the clamping plate has a second coefficient of thermal expansion associated therewith. The clamping plate is bonded, attached or grown to the backing plate, wherein minimal deflection of the clamping plate is evident across a predetermined temperature range. The first coefficient of thermal expansion and second coefficient of thermal expansion, for example, are substantially similar, and vary by no greater than a factor of three.
摘要翻译：提供了用于选择用于形成静电夹的材料的装置和方法。静电夹具具有第一热膨胀系数的背板，其中背板为静电夹具提供结构支撑和刚性。静电夹具还具有夹持板，该夹板具有与工件接触的夹紧表面，其中夹持板具有与之相关联的第二热膨胀系数。夹板被粘合，附接或生长到背板，其中夹板的最小偏转在预定温度范围内是明显的。例如，第一热膨胀系数和第二热膨胀系数基本相似，并且变化不大于三分之一。

8. 发明申请

WO2008065422A1 A METHOD AND APPARATUS FOR ALLOCATING COMPUTING RESOURCES 审中-公开
标题翻译：一种分配计算资源的方法和装置
公开(公告)号：WO2008065422A1
公开(公告)日：2008-06-05
申请号：PCT/GB2007/004605
申请日：2007-11-30
申请人： IMPERIAL INNOVATIONS LIMITED , LEE, William , COHEN, Jeremy, Hugh , DARLINGTON, John
发明人： LEE, William , COHEN, Jeremy, Hugh , DARLINGTON, John
IPC分类号： G06F9/50
CPC分类号： G06F9/5044 , G06F8/61
摘要： A method of allocating computing resources comprising receiving a software package processing requirement and comparing it against each of a software implementation registry to select one or more software implementations meeting a matching criterion. The method may further comprise comparing the processing requirement against a hardware resource registry and selecting hardware resources meeting a matching criterion.
摘要翻译：一种分配计算资源的方法，包括接收软件包处理要求，并将其与每个软件实现注册表进行比较，以选择满足匹配标准的一个或多个软件实现。该方法还可以包括将处理需求与硬件资源注册表进行比较，并选择满足匹配标准的硬件资源。

9. 发明申请

WO2004045473A1 ONE-PIECE MINICAPSULORHEXIS VALVE 审中-公开
公开(公告)号：WO2004045473A1
公开(公告)日：2004-06-03
申请号：PCT/US2003/035992
申请日：2003-11-12
申请人： THE INSTITUTE FOR EYE RESEARCH , LEE, William , FERNANDEZ, Viviana , PAREL, Jean-Marie , HO, Arthur
发明人： LEE, William , FERNANDEZ, Viviana , PAREL, Jean-Marie , HO, Arthur
IPC分类号： A61F9/007
CPC分类号： A61F9/007
摘要： A one-piece capsulorhexis device is presented comprising a membrane having a curved, flexible substantially discoid flap-valve member shaped to align with an ocular lens capsular bag inner surface, and at least one integral, flexible retainer shaped to align with an ocular lens capsular bag outer surface.
摘要翻译：提供了一种单件式撕囊装置，其包括具有弯曲的，柔性的基本上盘形的瓣形构件的膜，该构件成形为与眼镜片囊袋内表面对准，以及至少一个整体的柔性保持器，其形状与眼镜片囊袋外表面。

10. 发明申请

WO2003049671A3 FUNCTIONALIZED MATERIALS AND LIBRARIES THEREOF 审中-公开
公开(公告)号：WO2003049671A3
公开(公告)日：2003-06-19
申请号：PCT/US2002/033942
申请日：2002-10-23
申请人： EMEMBRANE, INC. , LEE, William , SAITO, Kyoichi
发明人： LEE, William , SAITO, Kyoichi
IPC分类号： C08G63/48
摘要： Compositions are provided herein comprising a material having engrafted polymer brushes. The polymer brushes further comprise one or more functional groups immobilized along the surface of the brushes in a plurality of layers, which confer functional properties to the material compositions. These materials are useful in material libraries for high throughput separation studies, and for the isolation or transfection of microorganisms and cells.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式