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    • 4. 发明申请
    • ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS
    • 半导体处理系统中的离子源清洗
    • WO2009102762A2
    • 2009-08-20
    • PCT/US2009/033754
    • 2009-02-11
    • SWEENEY, Joseph, D.YEDAVE, Sharad, N.BYL, OlegKAIM, RobertELDRIDGE, DavidSERGI, StevenFENG, LinBISHOP, Steven, E.OLANDER, Karl, W.TANG, Ying
    • SWEENEY, Joseph, D.YEDAVE, Sharad, N.BYL, OlegKAIM, RobertELDRIDGE, DavidSERGI, StevenFENG, LinBISHOP, Steven, E.OLANDER, Karl, W.TANG, Ying
    • H01L21/265
    • H01J37/3171C23C14/48C23C14/54C23C14/564H01J37/08H01J37/16H01J37/18H01J2237/082H01J2237/22
    • Cleaning of an ion implantation system or components thereof, utilizing a reactive cleaning reagent enabling growth/etching of the filament in an ion source of the arc chamber, by appropriate control of temperature in the arc chamber to effect the desired filament growth or alternative filament etching. Also described is the use of reactive gases such as XeFx, WFx, AsFx, PFx and TaFx, wherein x has a stoichioimetrically appropriate value or range of values, for cleaning regions of ion implanters, or components of implanters, in in situ or ex situ cleaning arrangements, under ambient temperature, elevated temperature or plasma conditions. Among specific reactive cleaning agents, BrF3 is described as useful for cleaning ion implant systems or component(s) thereof, in in situ or ex situ cleaning arrangements. Also described is a method of cleaning the forelines of an ion implant system for at least partial removal of ionization-related deposit from said forelines, comprising contacting said forelines with a cleaning gas wherein said cleaning gas is chemically reactive with said deposit. Also described is a method of improving the performance and extending the lifetime of an ion implant system, comprising contacting the cathode with a gas mixture.
    • 通过适当地控制电弧室中的温度,利用能够在电弧室的离子源中生长/蚀刻长丝的反应清洁试剂来清洁离子注入系统或其组件, 期望的长丝生长或替代长丝蚀刻。 还描述了使用活性气体,例如XeFx,WFx,AsFx,PFx和TaFx,其中x具有化学计量适当的值或数值范围,用于在离子注入机或注入机的部件的原位或异位清洁区域 清洁布置,在环境温度,升高的温度或等离子体条件下。 在特定的反应性清洁剂中,BrF3被描述为可用于清洁离子注入系统或其部件,在原位或非原位清洁装置中。 还描述了一种清洁离子注入系统的前级以至少部分地从所述前级去除电离相关沉积物的方法,包括使所述前级线路与清洁气体接触,其中所述清洁气体与所述沉积物发生化学反应。 还描述了改善离子注入系统的性能和延长寿命的方法,包括使阴极与气体混合物接触。
    • 7. 发明申请
    • DIAGNOSTIC AND PROGNOSTIC AND THERAPEUTIC METHODS
    • 诊断和预防和治疗方法
    • WO2011137486A1
    • 2011-11-10
    • PCT/AU2011/000513
    • 2011-05-04
    • MONASH UNIVERSITYLIU, Jun-PingCHAN, JianxiongHAO, HaibangTANG, YingCHEN, YingyuLI, He
    • LIU, Jun-PingCHAN, JianxiongHAO, HaibangTANG, YingCHEN, YingyuLI, He
    • C12Q1/68C12N15/06G01N33/48
    • C12Q1/6883C12Q2600/158G01N33/84G01N2800/044G01N2800/08G01N2800/301
    • An assay for a behavioural disorder characterised by anxiety, such as OCD, and/or a lipid and/or a lipid-associated liver disorder (hereinafter "the conditions"), comprising assessing the level or activity of an analyte selected from ATP13A2 polypeptide, ATP13A2 nucleic acid, Mn 2+ , and a complex comprising ATP13A2 polypeptide and Mn 2+ , wherein the level or activity of the analyte indicates that the test subject has or is susceptible to the conditions. A method of treatment or prevention employing the assessment assays or ATP13A2 polypeptide or ATP13A2 nucleic acid. ATP13A2 polypeptide or ATP13A2 nucleic acid for use in the treatment or prevention of the conditions wherein the ATP13A2 polypeptide or ATP13A2 nucleic acid increases the level of mitochondrial Mn 2+ in subjects exhibiting a low level of mitochondrial Mn 2+. An isolated cell or organism comprising same, wherein the activity of ATP13A2 polypeptide is modified, such as reduced or inhibited (ablated). An assay for agents that complement the phenotype an ATP13A2 deficient cell or non-human organism comprising such cells, the assay comprising contacting the cell or organism with a putative agent and assessing the ability of the agent to increase the level of mitochondrial Mn 2+ in the cell. An assay for agents that modulate Mn 2+ levels in a cell or organism, the assay comprising contacting the cell or organism with a putative agent and assessing the ability of the agent to increase the level or activity of ATP13A2 in the cell or organism.
    • 以焦虑为特征的行为障碍(例如OCD,和/或脂质和/或脂质相关性肝病)(以下称为“所述病症”)的测定法包括评估选自ATP13A2多肽的分析物的水平或活性, ATP13A2核酸,Mn2 +和包含ATP13A2多肽和Mn2 +的复合物,其中分析物的水平或活性指示测试对象具有或者易受条件影响。 使用评估测定法或ATP13A2多肽或ATP13A2核酸的治疗或预防的方法。 ATP13A2多肽或ATP13A2核酸用于治疗或预防其中ATP13A2多肽或ATP13A2核酸增加显示低水平线粒体Mn2 +的受试者线粒体Mn2 +的水平的病症。 包含其的分离的细胞或生物体,其中ATP13A2多肽的活性被修饰,例如减少或抑制(消融)。 对包含这种细胞的ATP13A2缺陷型细胞或非人生物体的表型补充的试剂的测定法,其包括使细胞或生物与推定剂接触并评估试剂增加细胞中线粒体Mn2 +的水平的能力 。 用于调节细胞或生物体中的Mn 2+水平的试剂的测定法,该测定法包括使细胞或生物体与推定剂接触并评估试剂增加细胞或生物体中ATP13A2的水平或活性的能力。