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    • 1. 发明申请
    • APPARATUS AND METHOD FOR INHIBITING DECOMPOSITION OF GERMANE
    • 用于抑制德国分解的装置和方法
    • WO2004039478B1
    • 2006-03-23
    • PCT/US0333836
    • 2003-10-27
    • ADVANCED TECH MATERIALS
    • STURM EDWARDWANG LUPINGDIETZ JAMES
    • B01D53/04B01D53/02B01D59/26
    • B01D53/04B01D2253/102B01D2259/40083B01D2259/40086B01D2259/40088B01D2259/4525Y10S95/901
    • A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65 °C and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30 %.
    • 锗烷存储和分配系统,其中将锗烷气体吸附保留在含有吸附和游离的锗烷气体的容器中的活性炭吸附剂介质上。 活性炭吸附剂介质相对于其上吸附的锗烷气体,即在65℃和650乇的爆燃条件下,具有爆燃阻力,在此条件下,游离的锗烷气体经历爆燃,活性炭吸附剂介质不会维持爆燃 吸附的锗烷气体或热解吸锗烷气体,使其经历随后的爆燃。 通过预处理吸附剂材料来促进活性炭吸附剂介质的防爆性,以从其中除去外来的吸附物,并且通过将吸附剂介质在气体储存和分配容器中的填充水平保持在基本值,例如 至少30%。
    • 8. 发明申请
    • CHEMICAL REAGENT DELIVERY SYSTEM UTILIZING IONIC LIQUID STORAGE MEDIUM
    • 化学试剂输送系统利用离子液体储存介质
    • WO2007134183A3
    • 2008-01-17
    • PCT/US2007068693
    • 2007-05-10
    • ADVANCED TECH MATERIALSARNO JOSE IWANG LUPINGCOOPER EMANUEL I
    • ARNO JOSE IWANG LUPINGCOOPER EMANUEL I
    • B01J8/02B01J35/02
    • F17C11/00
    • A system (10) including a reagent supply container (12) in which a vessel (14) holds a composition including a chemical reagent dissolved or dispersed in a storage liquid (18) that is reversibly interactive with the chemical reagent to store the chemical reagent therein, and an ultrasonic energy source (19, 32, 34) adapted to introduce ultrasonic energy into the composition to liberate the chemical reagent therefrom for dispensing from the vessel of the reagent supply container. The ultrasonic energy source can be internally provided in the container, or may be provided as part of an external ultrasonic energy impingement unit (112), in which the stored chemical reagent, e.g., a microelectronic device manufacturing reagent, is extracted from the liquid storage medium for transport to a reagent-utilizing process or facility (38). The liquid storage medium may for example include an ionic liquid with which the chemical reagent is reversibly taken up, and subsequently released under ultrasonic energy exposure dispensing conditions.
    • 一种系统(10),包括试剂供应容器(12),其中容器(14)保持包含溶解或分散在与化学试剂可逆地相互作用的储存液体(18)中的化学试剂的组合物,以储存化学试剂 和超声能量源(19,32,34),其适于将超声能量引入所述组合物中以释放其中的化学试剂,用于从所述试剂供应容器的容器分配。 超声能量源可以内部设置在容器中,或者可以作为外部超声波能量冲击单元(112)的一部分提供,其中存储的化学试剂例如微电子器件制造试剂从液体存储器 用于运送到试剂利用过程或设施(38)的介质。 液体存储介质可以例如包括离子液体,化学试剂可以通过该离子液体被可逆地吸收,并且随后在超声能量曝光分配条件下释放。
    • 9. 发明申请
    • DELIVERY OF GASES FROM INTERNALLY REGULATED CYLINDERS
    • 从内部调节气瓶输送气体
    • WO2008101257A3
    • 2011-07-21
    • PCT/US2008054336
    • 2008-02-19
    • ADVANCED TECH MATERIALSWODJENSKI MICHAEL JWANG LUPINGARNO JOSE I
    • WODJENSKI MICHAEL JWANG LUPINGARNO JOSE I
    • B65D83/14B65D83/44F17C11/00
    • B65D83/32B65D83/44F17C2205/035Y02E60/321
    • A gas supply package, including a material storage and gas dispensing vessel defining an interior volume adapted to hold source material for the gas, with a gas dispensing stick in the interior volume. The gas dispensing stick includes at least one regulator coupled with a flow passage, with at least one generally planar filter element arranged to filter gas flowed through the flow passage prior to its flow through the regulator(s). The flow passage and the at least one generally planar filter element are arranged to produce: (i) a change in gas flow conductance in the vicinity of the filter element, and/or (ii) a direction of flow of gas at a non-zero angle with respect to the longitudinal axis of the vessel and/or to the longitudinal axis of the flow passage, for enhancement of capture efficiency of said filter element.
    • 一种气体供应包,其包括限定适于保持用于气体的源材料的内部容积的材料储存和气体分配容器,在内部容积中具有气体分配棒。 气体分配棒包括与流动通道耦合的至少一个调节器,至少一个大体上平面的过滤器元件布置成过滤流过通道的气体在流过调节器之前。 流动通道和至少一个大体上平面的过滤器元件被布置成产生:(i)过滤元件附近的气体流动传导的变化,和/或(ii)在非过滤元件的气体流动方向, 相对于容器的纵向轴线和/或流动通道的纵向轴线成零角度,以增强所述过滤元件的捕获效率。