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1. 发明申请

WO2003023840A2 METHODS AND APPARATUS FOR CLEANING AND/OR TREATING A SUBSTRATE USING CO2 审中-公开
标题翻译：用于清洁和/或处理使用二氧化碳的基板的方法和装置
公开(公告)号：WO2003023840A2
公开(公告)日：2003-03-20
申请号：PCT/US2002/024007
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES, INC. , DEYOUNG, James, P. , MCCLAIN, James, P. , COLE, Michael, E. , WORM, Steve, L. , BRAINARD, David, E.
发明人： DEYOUNG, James, P. , MCCLAIN, James, P. , COLE, Michael, E. , WORM, Steve, L. , BRAINARD, David, E.
IPC分类号： H01L21/306
CPC分类号： C23G5/00 , B08B7/0021 , B81C1/00841 , B81C2201/117 , H01L21/02063 , H01L21/67051 , Y10S134/902
摘要： According to method embodiments of the present invention, a method for cleaning a microelectronic substrate includes placing the substrate in a pressure chamber. A process fluid including dense phase CO 2 is circulated through the chamber such that the process fluid contacts the substrate. The phase of the CO 2 is cyclically modulated during at least a portion of the step of circulating the process fluid.
摘要翻译：根据本发明的方法实施例，一种用于清洁微电子衬底的方法包括将衬底放置在压力室中。包括密相CO 2的工艺流体循环通过室，使得工艺流体接触基板。在循环过程流体的步骤的至少一部分期间，循环调节CO 2的相。

2. 发明申请

WO2003023828A1 GUARD HEATER AND PRESSURE CHAMBER ASSEMBLY INCLUDING THE SAME 审中-公开
标题翻译：加热器和压力室组件，包括它们
公开(公告)号：WO2003023828A1
公开(公告)日：2003-03-20
申请号：PCT/US2002/024006
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES, INC. , WORM, Steve, L. , MCCLAIN, James, B.
发明人： WORM, Steve, L. , MCCLAIN, James, B.
IPC分类号： H01L21/00
CPC分类号： H01L21/67248 , B08B7/0021 , H01L21/67103 , H01L2924/0002 , H02N13/00 , H01L2924/00
摘要： A pressure chamber assembly (400) includes a pressure vessel and a guard heater assembly (460). The pressure vessel defines an enclosed chamber (410). The guard heater assembly (460) includes a guard heater (462, 472) disposed in the chamber (410) and interposed between a surrounding portion of the pressure vessel and a holding volume (411). The guard heater (462, 472) is adapted to control a temperature of the holding volume (411). The guard heater (462, 472) is insulated from the surrounding portion of the pressure vessel.
摘要翻译：压力室组件（400）包括压力容器和保护加热器组件（460）。压力容器限定一个封闭的腔室（410）。防护加热器组件（460）包括设置在腔室（410）中并置于压力容器的周围部分和保持容积（411）之间的防护加热器（462,472）。防护加热器（462,472）适于控制保持容积（411）的温度。防护加热器（462,472）与压力容器的周围部分绝缘。

3. 发明申请

WO2003023829A3 SEALING SYSTEM AND PRESSURE CHAMBER ASSEMBLY INCLUDING THE SAME 审中-公开
公开(公告)号：WO2003023829A3
公开(公告)日：2003-03-20
申请号：PCT/US2002/024026
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES, INC. , WORM, Steve, L. , MCCLAIN, James, P.
发明人： WORM, Steve, L. , MCCLAIN, James, P.
IPC分类号： H01L21/00
摘要： A pressure chamber assembly for retaining a fluid includes first and second relatively separable casings defining an enclosed chamber and a fluid leak path extending from the chamber to an exterior region. An inner seal member is disposed along the leak path to restrict flow of fluid from the chamber to the exterior region. An outer seal member is disposed along the leak path between the inner seal member and the exterior region to restrict flow of fluid from the chamber to the exterior region. The inner seal member is a cup seal.

4. 发明申请

WO0231253A3 DEVICE AND PROCESS FOR DRY-CLEANING PROCESS USING CARBON DIOXIDE AND A DIVIDED PRESSURE VESSEL 审中-公开
标题翻译：使用二氧化碳和分压压力容器进行干燥清洗工艺的装置和方法
公开(公告)号：WO0231253A3
公开(公告)日：2002-08-01
申请号：PCT/US0131507
申请日：2001-10-10
申请人： MICELL TECHNOLOGIES INC , WORM STEVE L , DEYOUNG JAMES P , MCCLAIN JAMES B , BRAINARD DAVID E
发明人： WORM STEVE L , DEYOUNG JAMES P , MCCLAIN JAMES B , BRAINARD DAVID E
IPC分类号： A23L27/10 , D06F43/00 , D06L1/08 , F17C1/00 , F17C5/00 , F17C7/00
CPC分类号： D06L1/08 , A23L27/11 , D06F43/00 , D06F43/081 , F17C1/00 , F17C1/005 , F17C5/00 , F17C7/00 , F17C2201/0109 , F17C2201/0171 , F17C2201/032 , F17C2201/035 , F17C2201/056 , F17C2203/0643 , F17C2205/0347 , F17C2205/0397 , F17C2221/013 , F17C2221/014 , F17C2221/017 , F17C2221/033 , F17C2221/035 , F17C2227/0157 , F17C2227/0383 , F17C2250/0408 , F17C2265/012 , F17C2270/02 , F17C2270/0518
摘要： Processing systems employing one or more divided pressure vessels (653) are described. These systems may allow for multiple solvent baths each having a different chemical composition to be stored and/or processed in a single pressure vessel (653) while maintaining the different chemical compositions of the multiple solvent baths. Thus, such systems employing one or more divided pressure vessels (653) may provide the improved operational efficiency of a carbon dioxide based system having multiple solvent baths while decreasing the capital costs that may be associated with such systems.
摘要翻译：描述了采用一个或多个分压的压力容器（653）的处理系统。这些系统可以允许具有不同化学组成的多个溶剂浴在单个压力容器（653）中储存和/或加工，同时保持多个溶剂浴的不同化学组成。因此，采用一个或多个分压的压力容器（653）的这种系统可以提供具有多个溶剂浴的具有二氧化碳的系统的改进的操作效率，同时减少可能与这种系统相关联的资本成本。

5. 发明申请

WO2007027555A2 APPARATUS AND METHODS FOR PROVIDING A FLOW OF A HEAT TRANSFER FLUID IN A MICROENVIRONMENT 审中-公开
标题翻译：在微环境中提供热转移流体的装置和方法
公开(公告)号：WO2007027555A2
公开(公告)日：2007-03-08
申请号：PCT/US2006033404
申请日：2006-08-28
申请人： FORTHRIGHT ENGINEERING PLLC , WORM STEVE L
发明人： WORM STEVE L
IPC分类号： A61F7/00 , F25D23/12
CPC分类号： F25D3/107 , A62B17/005 , F25D2400/26
摘要： A microenvironment system for use with a heat transfer fluid includes a microenvironment structure and a fluid handling apparatus. The microenvironment structure defines a flow passage to receive a flow of the heat transfer fluid therethrough. The fluid handling apparatus is adapted to provide a flow of the heat transfer fluid through the flow passage. The fluid handling apparatus includes a gas driven pump and a supply of a phase change material (PCM). The gas driven pump is operable to force the flow of the heat transfer fluid through the flow passage. The supply of the PCM is convertible from a solid and/or liquid phase to a gas phase to provide a pressurized drive gas. The fluid handling apparatus is configured to drive the gas driven pump using the pressurized drive gas from the supply of the PCM.
摘要翻译：与传热流体一起使用的微环境系统包括微环境结构和流体处理装置。微环境结构限定了流动通道以接收通过其中的传热流体的流动。流体处理装置适于提供通过流动通道的传热流体的流动。流体处理装置包括气体驱动泵和相变材料（PCM）的供给。气体驱动泵可操作以迫使传热流体流过流动通道。 PCM的供应可从固相和/或液相转化为气相，以提供加压的驱动气体。流体处理装置构造成使用来自PCM的供应源的加压驱动气体来驱动气体驱动泵。

6. 发明申请

WO03023829A2 SEALING SYSTEM AND PRESSURE CHAMBER ASSEMBLY INCLUDING THE SAME 审中-公开
标题翻译：包括相同的密封系统和压力室组件
公开(公告)号：WO03023829A2
公开(公告)日：2003-03-20
申请号：PCT/US0224026
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES INC , WORM STEVE L , MCCLAIN JAMES P
发明人： WORM STEVE L , MCCLAIN JAMES P
IPC分类号： H01L21/00
CPC分类号： H01L21/67126
摘要： A pressure chamber assembly for retaining a fluid includes first and second relatively separable casings defining an enclosed chamber and a fluid leak path extending from the chamber to an exterior region. An inner seal member is disposed along the leak path to restrict flow of fluid from the chamber to the exterior region. An outer seal member is disposed along the leak path between the inner seal member and the exterior region to restrict flow of fluid from the chamber to the exterior region. The inner seal member is a cup seal.
摘要翻译：用于保持流体的压力室组件包括限定封闭室的第一和第二相对可分离壳体以及从室延伸到外部区域的流体泄漏路径。内部密封构件沿着泄漏路径设置以限制流体从腔室到外部区域的流动。外部密封构件沿内部密封构件与外部区域之间的泄漏路径设置，以限制流体从腔室流向外部区域。内密封件是杯形密封件。

7. 发明申请

WO2003023827A1 PRESSURE CHAMBER ASSEMBLY INCLUDING DRIVE MEANS 审中-公开
标题翻译：压力室组件包括驱动装置
公开(公告)号：WO2003023827A1
公开(公告)日：2003-03-20
申请号：PCT/US2002/024004
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES, INC. , WORM, Steve, L.
发明人： WORM, Steve, L.
IPC分类号： H01L21/00
CPC分类号： H01L21/68785 , B08B7/0021 , H01L21/67126 , H01L21/68792
摘要： A pressure chamber assembly (400) for processing a substrate (5) includes a pressure vessel defining an enclosed pressure chamber (410). A substrate holder (552) is disposed in the pressure chamber (410) and is adapted to hold the substrate (5). A drive assembly (580) is operable to move the substrate holder (552). The drive assembly (580) includes a first drive member (560, 590) connected to the substrate holder (552) for movement therewith relative to the pressure vessel and a second drive member (592, 594) fluidly isolated from the first drive member and the pressure chamber. A drive unit (582) is operable to move the second drive member (592, 594). The drive unit (582) is fluidly isolated from the first drive member (560, 590) and the pressure chamber (410). The second drive member (592, 594) is non-mechanically coupled to the first drive member (560, 590) such that the drive unit (582) can move the substrate holder (552) via the first and second drive members.
摘要翻译：用于处理衬底（5）的压力室组件（400）包括限定封闭压力室（410）的压力容器。衬底保持器（552）设置在压力室（410）中并且适于保持衬底（5）。驱动组件（580）可操作以移动衬底保持器（552）。驱动组件（580）包括连接到衬底保持器（552）上以便相对于压力容器移动的第一驱动构件（560,590）和与第一驱动构件流体隔离的第二驱动构件（592,594）和压力室。驱动单元（582）可操作以移动第二驱动构件（592,594）。驱动单元（582）与第一驱动构件（560,590）和压力室（410）流体隔离。第二驱动构件（592,594）非机械地联接到第一驱动构件（560,590），使得驱动单元（582）可以经由第一和第二驱动构件移动衬底保持器（552）。

8. 发明申请

WO2003023826A2 METHODS AND APPARATUS FOR HOLDING A SUBSTRATE IN A PRESSURE CHAMBER 审中-公开
标题翻译：用于在压力室中保持基底的方法和装置
公开(公告)号：WO2003023826A2
公开(公告)日：2003-03-20
申请号：PCT/US2002/024003
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES, INC. , WORM, Steve, L.
发明人： WORM, Steve, L.
IPC分类号： H01L21/00
CPC分类号： H01L21/67051 , H01L21/6838 , Y10S134/902
摘要： A process chamber assembly for use with a substrate includes a vessel and a substrate holder. The vessel defines a chamber. The substrate holder has a rotational axis and includes front and rear opposed surfaces. The front surface is adapted to support the substrate. At least one impeller vane extends rearwardly from the rear surface and radially with respect to the rotational axis. The impeller vane is operative to generate a pressure differential tending to hold the substrate to the substrate holder when the substrate holder is rotated about the rotational axis. Preferably, the process chamber assembly includes a plurality of the impeller vanes extending rearwardly from the rear surface and radially with respect to the rotational axis.
摘要翻译：用于衬底的处理室组件包括容器和衬底保持器。容器限定一个室。衬底保持器具有旋转轴线并且包括前和后相对表面。前表面适于支撑基底。至少一个叶轮叶片从后表面向后延伸并且相对于旋转轴线径向延伸。当衬底保持器围绕旋转轴线旋转时，叶轮叶片可操作以产生趋向于将衬底保持到衬底保持器的压差。优选地，处理室组件包括从后表面向后延伸并且相对于旋转轴线径向延伸的多个叶轮叶片。

9. 发明申请

WO2007027555A3 APPARATUS AND METHODS FOR PROVIDING A FLOW OF A HEAT TRANSFER FLUID IN A MICROENVIRONMENT 审中-公开
公开(公告)号：WO2007027555A3
公开(公告)日：2007-03-08
申请号：PCT/US2006/033404
申请日：2006-08-28
申请人： FORTHRIGHT ENGINEERING, PLLC , WORM, Steve L.
发明人： WORM, Steve L.
IPC分类号： A61F7/00
摘要： A microenvironment system for use with a heat transfer fluid includes a microenvironment structure and a fluid handling apparatus. The microenvironment structure defines a flow passage to receive a flow of the heat transfer fluid therethrough. The fluid handling apparatus is adapted to provide a flow of the heat transfer fluid through the flow passage. The fluid handling apparatus includes a gas driven pump and a supply of a phase change material (PCM). The gas driven pump is operable to force the flow of the heat transfer fluid through the flow passage. The supply of the PCM is convertible from a solid and/or liquid phase to a gas phase to provide a pressurized drive gas. The fluid handling apparatus is configured to drive the gas driven pump using the pressurized drive gas from the supply of the PCM.

10. 发明申请

WO03023830A3 SPRAY MEMBER AND METHOD FOR USING THE SAME 审中-公开
标题翻译：喷雾部件及其使用方法
公开(公告)号：WO03023830A3
公开(公告)日：2003-08-28
申请号：PCT/US0224061
申请日：2002-07-30
申请人： MICELL TECHNOLOGIES INC , WORM STEVE L , COLE MICHAEL E
发明人： WORM STEVE L , COLE MICHAEL E
IPC分类号： H01L21/00 , B08B3/02
CPC分类号： H01L21/67051
摘要： A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
摘要翻译：用于与衬底和工艺流体流一起使用的处理室组件包括容器和喷射构件。容器限定一个室。喷雾构件包括形成在其中的至少一个喷雾口，其适于将工艺流体流分配到腔室中的基底上。喷雾构件可操作以响应于过程流体通过至少一个喷雾口流出喷射构件而相对于容器围绕旋转轴线旋转。

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