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    • 2. 发明申请
    • TRIODES USING NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME
    • 使用南方文章的三方及其制作方法
    • WO2009005908A2
    • 2009-01-08
    • PCT/US2008/064385
    • 2008-05-21
    • NANTERO, INC.SEGAL, Brent, M.RUECKES, ThomasWARD, Jonathan, W.
    • SEGAL, Brent, M.RUECKES, ThomasWARD, Jonathan, W.
    • H01J27/26
    • H01J21/10H01J3/021H01J19/38H01J2203/0232Y10S977/742
    • Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally- disposed nanotube fabrics are disclosed, as are CMOS -compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low -power devices that can be employed in radiation-intensive applications.
    • 提供具有碳纳米管膜,层,带和织物的真空微电子器件。 本发明公开了包括三端(发射极,栅极和阳极)的三极管结构的微电子真空装置,以及诸如四极和五极管的高阶器件,所有这些都使用碳纳米管来形成 设备。 在某些实施例中,纳米管织物的图案化部分可以用作栅极/栅极部件,导电迹线等。纳米管织物可以悬挂或保形地设置。 在某些实施例中,使用用于加强纳米管织物层的方法。 公开了用于施加,选择性地去除(例如蚀刻)悬浮和加强垂直和水平布置的纳米管织物的各种方法,以及CMOS相容的制造方法。 在某些实施例中,纳米管织物三极管提供可用于辐射密集型应用中的高速度,小规模的低功率器件。
    • 5. 发明申请
    • CARBON NANOTUBE RESONATORS
    • 碳纳米管谐振器
    • WO2007030423A3
    • 2007-04-19
    • PCT/US2006034477
    • 2006-09-05
    • NANTERO INCWARD JONATHAN WSEGAL BRENT M
    • WARD JONATHAN WSEGAL BRENT M
    • G01R23/00B82B1/00G12B21/00H01L29/06
    • C09D5/14A01N37/36Y10S977/724Y10S977/742Y10S977/75Y10S977/752Y10S977/932A01N25/10A01N37/02A01N37/04A01N37/06A01N37/10A01N59/16A01N59/20A01N2300/00
    • Under one aspect, a resonator 400 includes a nanotube element 410 including a non-woven fabric of unahgned nanotubes and having a thickness, and a support structure 404 defining a gap 406 over which the nanotube element 410 is suspended, the thickness of the nanotube element 410 and the length of the gap 406 being selected to provide a pre-specified resonance frequency for the resonator 400 The resonator 400 also includes a conductive element 412 in electrical contact with the nanotube element 410, a drive electrode 408 in spaced relation to the nanotube element 410, and power logic in electrical contact with die at least one drive electrode 408 The power logic provides a series of electrical pulses at a frequency selected to be about the same as the pre-specified resonance frequency of the resonator 400 to the drive electrode 408 during operation of the resonator 400, such that the nanotube element 410 responds to the series of electrical pulses applied to the drive electrode 408 by making a series of mechanical motions at the resonance frequency of the resonator 400.
    • 在一个方面,谐振器400包括纳米管元件410,纳米管元件410包括具有厚度的未预制纳米管的无纺织物,以及限定纳米管元件410悬置在其上的间隙406的支撑结构404,纳米管元件的厚度 410,并且间隙406的长度被选择为谐振器400提供预定的谐振频率。谐振器400还包括与纳米管元件410电接触的导电元件412,与纳米管相隔离的驱动电极408 元件410和与裸片至少一个驱动电极408电接触的功率逻辑功率逻辑提供一系列电脉冲,频率被选择为与谐振器400的预先指定的谐振频率相对于驱动电极 在谐振器400的操作期间,使得纳米管元件410响应于施加到驱动电极408的一系列电脉冲 在谐振器400的谐振频率处产生一系列机械运动。
    • 10. 发明申请
    • CARBON NANOTUBE RESONATORS
    • 碳纳米管谐振器
    • WO2007030423A2
    • 2007-03-15
    • PCT/US2006/034477
    • 2006-09-05
    • NANTERO, INC.WARD, Jonathan, W.SEGAL, Brent, M.
    • WARD, Jonathan, W.SEGAL, Brent, M.
    • G01R19/00
    • C09D5/14A01N37/36Y10S977/724Y10S977/742Y10S977/75Y10S977/752Y10S977/932A01N25/10A01N37/02A01N37/04A01N37/06A01N37/10A01N59/16A01N59/20A01N2300/00
    • Under one aspect, a resonator includes a nanotube element including a non- woven fabric of unaligned nanotubes and having a thickness, and a support structure defining a gap over which the nanotube element is suspended, the thickness of the nanotube element and the length of the gap being selected to provide a pre-specified resonance frequency for the resonator. The resonator also includes a conductive element in electrical contact with the nanotube element; a drive electrode in spaced relation to the nanotube element; and power logic in electrical contact with the at least one drive electrode. The power logic provides a series of electrical pulses at a frequency selected to be about the same as the pre-specified resonance frequency of the resonator to the drive electrode during operation of the resonator, such that the nanotube element responds to the series of electrical pulses applied to the drive electrode by making a series of mechanical motions at the resonance frequency of the resonator.
    • 在一个方面,谐振器包括纳米管元件,纳米管元件包括非对准纳米管的非织造织物并具有厚度,以及限定纳米管元件悬置的间隙的支撑结构,纳米管元件的厚度和 间隙被选择为谐振器提供预定的谐振频率。 谐振器还包括与纳米管元件电接触的导电元件; 与纳米管元件间隔开的驱动电极; 以及与所述至少一个驱动电极电接触的电力逻辑。 功率逻辑在谐振器的操作期间提供一系列电脉冲,频率选择为与谐振器的预定谐振频率相同,以使得纳米管元件响应于一系列电脉冲 通过在共振器的共振频率下进行一系列机械运动而施加到驱动电极。