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1. 发明申请

WO2004074766A1 INVESTIGATION AND/OR MANIPULATION DEVICE 审中-公开
标题翻译：调查和/或处理装置
公开(公告)号：WO2004074766A1
公开(公告)日：2004-09-02
申请号：PCT/IB1997/000895
申请日：1997-07-17
申请人： BINNIG, Gerd, Karl , BRUGGER, Jürgen , HAEBERLE, Walter , VETTIGER, Peter
发明人： BINNIG, Gerd, Karl , BRUGGER, Jürgen , HAEBERLE, Walter , VETTIGER, Peter
IPC分类号： G01B7/34
CPC分类号： G01N25/72 , G01Q20/04 , G01Q80/00 , G11B9/14 , G11B9/1409 , G11B11/007 , G11B2005/0021 , Y10S977/867 , Y10S977/871
摘要： The present invention discloses an investigation and/or manipulation device for a sample, the sample consisting of a material which is locally deformed when subjected to a local heat treatment; the device comprises an investigation and/or manipulation tool movably supported by a support means, and positioning means for positioning the support means and thereby the tool relatively to the sample. The core features of the invention are power supply means for supplying electric power to the tool, said tool and the support means having such a structure and/or being respectively made of such materials that the supplied power is heating substantially only the tool, sensing means adapted to supply a low amount of power to the tool, the low amount of power being insufficient to locally deform the sample, the sensing means detecting a variation in temperature of the tool as being indicative of the surface structure of the sample, and/or manipulation means adapted to supply a high amount of power to the tool, said high amount of power heating the tool to a temperature which is sufficient to deform the sample surface region being presently effected by the tool. Further aspects of the present invention are a novel data storage system and a novel displacement sensor, both of which make use of the basic pronciples of the invention.
摘要翻译：本发明公开了一种用于样品的研究和/或操作装置，所述样品由经受局部热处理时局部变形的材料组成; 该装置包括由支撑装置可移动地支撑的调查和/或操纵工具，以及用于相对于样本定位支撑装置并因此定位工具的定位装置。本发明的核心特征是用于向工具，所述工具和支撑装置提供电力的电源装置，具有这种结构和/或分别由这样的材料制成，所供电的功率基本上仅加热工具，感测装置适于向工具提供少量的动力，少量的功率不足以使样本局部变形，感测装置检测工具的温度变化，以指示样品的表面结构，和/或操作装置，其适于向工具提供大量的动力，所述大量的功率将工具加热到足以使由工具目前影响的样品表面区域变形的温度。本发明的另外的方面是新颖的数据存储系统和新的位移传感器，它们都利用了本发明的基本语义。

2. 发明申请

WO2004020328A1 THERMAL MOVEMENT SENSOR 审中-公开
标题翻译：热运动传感器
公开(公告)号：WO2004020328A1
公开(公告)日：2004-03-11
申请号：PCT/IB2003/003749
申请日：2003-08-22
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BINNIG, Gerd, K. , DESPONT, Michel , LANTZ, Mark, A. , VETTIGER, Peter
发明人： BINNIG, Gerd, K. , DESPONT, Michel , LANTZ, Mark, A. , VETTIGER, Peter
IPC分类号： B81B3/00
CPC分类号： G01Q60/58 , G11B9/1418
摘要： A transducer for detecting movement of an article mounted for movement in a plane, the transducer comprising: a heater facing the plane of movement of the article and having a temperature dependent resistance; and, an edge defined in the article between regions of different thermal conductivity; wherein, as the article describes the movement, the edge moves relative to the heater producing a corresponding variation in heat loss from the heater and a corresponding variation in resistance of the heater.
摘要翻译：一种用于检测安装成用于在平面中移动的物品的运动的换能器，所述换能器包括：加热器，其面向所述物品的运动平面并具有温度依赖性电阻; 以及在不同热导率的区域之间在物品中限定的边缘; 其中，当制品描述移动时，边缘相对于加热器移动，产生来自加热器的热损失的对应变化和加热器的相应的电阻变化。

3. 发明申请

WO2003014789A3 MICROSYSTEM SWITCHES 审中-公开
公开(公告)号：WO2003014789A3
公开(公告)日：2003-02-20
申请号：PCT/IB2002/002117
申请日：2002-06-07
申请人： INTERNATIONAL BUSINESS MACHINES COPORATION , DESPONT, Michel , DRECHSLER, Ute , ROTHUIZEN, Hugo, E. , VETTIGER, Peter , WIDMER, Roland, W.
发明人： DESPONT, Michel , DRECHSLER, Ute , ROTHUIZEN, Hugo, E. , VETTIGER, Peter , WIDMER, Roland, W.
IPC分类号： G02B6/35
摘要： A microsystem switch (1, 20, 25, 30, 33) has a support (2) defining a recess (3), and a flexible bridge (6) is mounted on the support (2) bridging the recess (3). The bridge (6) is shaped so as to hold selectively a concave support stable state, in which the bridge bulges out of the recess (3). The switch includes an actuator (8, 9; 26, 27) for effecting flexing of the bridge (6) between the stable states, and a switching element (7, 31, 34) is mounted on the bridge (6) such that movement of the bridge between the stable states moves the switching element between an on position and an off position. According to another design, a microsystem switch (40, 55) has a support (41) defining a recess (42), and an elongate torsion member (44) is mounted on the support (41) bridging the recess (42). A flexible bridge (43, 56) is mounted on the support (41) bridging the recess (42) in a direction substantially perpendicular to the torsion member (44). The bridge (43, 56) is connected to the torsion member (44) at the cross-point thereof so that a first section of the bridge extends between the cross-point and one side; of the recess, (42) and a second section of the bridge extends between the cross-point and the opposite side of the recess (42). The bridge (43, 56) is shaped so as to hold selectively a first stable state, in which the first section of the bridge bulges into the recess and the second section of the bridge bulges out of the recess, and a second stable state in which this configuration is reversed.

4. 发明申请

WO02077988A3 DATA READ/WRITE SYSTEMS 审中-公开
标题翻译：数据读/写系统
公开(公告)号：WO02077988A3
公开(公告)日：2003-02-20
申请号：PCT/IB0200816
申请日：2002-03-15
申请人： IBM , BINNIG GERD K , HAEBERLE WALTER , VETTIGER PETER
发明人： BINNIG GERD K , HAEBERLE WALTER , VETTIGER PETER
IPC分类号： G11B9/14 , G11B9/00 , G11B11/00 , G11B11/16 , G11B13/00
CPC分类号： B82Y10/00 , G11B9/14 , G11B11/007 , G11B13/00
摘要： A method for writing data to and/or reading data from locations on a surface (90) via a tip (40) comprises moving the tip between the locations on the surface. At each location, energy (250) is selectively applied to the surface via the tip and the tip and the surface are selectively forced together in synchronization with the application of energy.
摘要翻译：一种通过尖端（40）将数据写入和/或从表面（90）上的位置读取数据的方法包括在表面上的位置之间移动尖端。在每个位置，能量（250）经由尖端被选择性地施加到表面，并且尖端和表面与能量的施加同步地选择性地被强制在一起。

5. 发明申请

WO2002064495A2 ENHANCED SACRIFICIAL LAYER ETCHING TECHNIQUE FOR MICROSTRUCTURE RELEASE 审中-公开
标题翻译：用于微结构释放的增强型真空层蚀刻技术
公开(公告)号：WO2002064495A2
公开(公告)日：2002-08-22
申请号：PCT/IB2002/000395
申请日：2002-02-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , DRECHSLER, Ute , GENOLET, Gregoire , VETTIGER, Peter
发明人： DESPONT, Michel , DRECHSLER, Ute , GENOLET, Gregoire , VETTIGER, Peter
IPC分类号： B81B3/00
CPC分类号： B81C1/00476 , B81C2201/0109
摘要： A method for at least partially releasing microstructures from a substrate is provided. The method comprises the steps of: a) providing a substrate (2); b) depositing onto said substrate (2) a first layer (4) and a second layer (6), the first layer (4) and the second layer (6) each comprising an electrically conducting material and each having a different oxido-reduction potential; c) electrically connecting the first layer (4) and the second layer (6); d) forming a microstructure (8) on the first (4) and second (6) layers deposited in step b) to produce an intermediate structure (10); and e) electrochemically etching said second layer (6) by immersing the intermediate structure (10) formed in step d) in an electrolyte (12).
摘要翻译：提供了一种至少部分地从基板上释放微结构的方法。该方法包括以下步骤：a）提供衬底（2）; b）在所述衬底（2）上沉积第一层（4）和第二层（6），所述第一层（4）和所述第二层（6）各自包含导电材料并且各自具有不同的氧化还原潜在; c）电连接第一层（4）和第二层（6）; d）在步骤b）中沉积的第一（4）和第二（6）层上形成微结构（8）以产生中间结构（10）; 以及e）通过将步骤d）中形成的中间结构（10）浸入电解质（12）中来电化学蚀刻所述第二层（6）。

6. 发明申请

WO2004074765A1 METHOD OF FORMING ULTRASMALL STRUCTURES AND APPARATUS THEREFOR 审中-公开
标题翻译：形成超声波结构的方法及其设备
公开(公告)号：WO2004074765A1
公开(公告)日：2004-09-02
申请号：PCT/IB1997/000894
申请日：1997-07-17
申请人： BINNIG, Gerd, Karl , DESPONT, Michel , HAEBERLE, Walter , VETTIGER, Peter
发明人： BINNIG, Gerd, Karl , DESPONT, Michel , HAEBERLE, Walter , VETTIGER, Peter
IPC分类号： G01B7/34
CPC分类号： G03F7/0002 , G01Q70/10 , G01Q80/00 , G11B9/14 , G11B11/007 , Y10S977/856 , Y10S977/878
摘要： The present invention discloses a method of forming ultrasmall (nano) structures in a thin film provided on a substrate by means of a tip which is movable relative to the surface of the thin film. According to principles of the invention, the penetration depth of the tip is limited, thereby avoiding wear of the tip. Furthermore, an apparatus for carrying out the method is disclosed.
摘要翻译：本发明公开了一种通过能够相对于薄膜表面移动的尖端在基片上形成超薄（nano）结构的方法。根据本发明的原理，尖端的穿透深度受到限制，从而避免了尖端的磨损。此外，公开了一种用于执行该方法的装置。

7. 发明申请

WO2003021592A3 DATA DETECTION FOR LOCAL PROBE DATA STORAGE DEVICES 审中-公开
公开(公告)号：WO2003021592A3
公开(公告)日：2003-03-13
申请号：PCT/IB2002/002828
申请日：2002-07-19
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BÄCHTOLD, Peter , BINNIG, Gerd, K. , CHERUBINI, Giovanni , DHOLAKIA, Ajay , DÜRIG, Urs, T. , ELEFTHERIOU, Evangelos, S. , LOELIGER, Theodor, W. , VETTIGER, Peter
发明人： BÄCHTOLD, Peter , BINNIG, Gerd, K. , CHERUBINI, Giovanni , DHOLAKIA, Ajay , DÜRIG, Urs, T. , ELEFTHERIOU, Evangelos, S. , LOELIGER, Theodor, W. , VETTIGER, Peter
IPC分类号： G11B9/14
摘要： Apparatus for detecting data in a sensor signal generated by a read sensor (10) in a local probe data storage device comprises a differentiation (110) for subtracting a value of the sensor signal from the succeeding value of the sensor signal to generate a ternary difference signal ; and a convertor (120) connected to the differentiator for converting the difference signal into a binary output signal indicative of the detected data. A local probe data storage device comprising such apparatus is also described.

8. 发明申请

WO2002077986A2 APPARATUS AND METHOD FOR STORING AND READING HIGH DATA CAPACITIES 审中-公开
标题翻译：用于存储和读取高数据能力的装置和方法
公开(公告)号：WO2002077986A2
公开(公告)日：2002-10-03
申请号：PCT/IB2002/000783
申请日：2002-03-14
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , VETTIGER, Peter , BINNIG, Gerd, K. , HAEBERLE, Walter
发明人： VETTIGER, Peter , BINNIG, Gerd, K. , HAEBERLE, Walter
IPC分类号： G11B9/14
CPC分类号： B82Y10/00 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B25/06 , G11B25/063
摘要： In accordance with the present invention, there is provided an apparatus comprising a tape having an information layer on which information is storable in the form of perturbations, an array of probes that in function faces the tape such that the probes scan the surface of the tape, means for selectively forming the perturbations via the probes, means for detecting the presence of the perturbations via the probes, and drive means for moving the tape relative to the array of probes. The apparatus allows to store high data capacities at a small form factor.
摘要翻译：根据本发明，提供了一种装置，包括具有信息层的信息层，信息层可以以扰动的形式存储在信息层上，探针的阵列在功能上面向带，使得探针扫描带的表面用于选择性地通过探针形成扰动的装置，用于检测经由探针的扰动的存在的装置，以及用于相对于探针阵列移动带的驱动装置。该设备允许以小尺寸存储高数据容量。

9. 发明申请

WO0223250A2 OPTICAL DEVICES 审中-公开
标题翻译：光学器件
公开(公告)号：WO0223250A2
公开(公告)日：2002-03-21
申请号：PCT/IB0101553
申请日：2001-08-29
申请人： IBM , BINNIG GERD K , BONA GIAN LUCA , HAEBERLE WALTER , VETTIGER PETER
发明人： BINNIG GERD K , BONA GIAN-LUCA , HAEBERLE WALTER , VETTIGER PETER
IPC分类号： G02B6/35 , G02B26/00
CPC分类号： G02B6/3514 , G02B6/352 , G02B6/3528 , G02B6/3538 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3596
摘要： An optical device comprises a substrate having a plane surface. An optical path is disposed on the substrate and extends in a plane parallel to the surface of the substrate. A recess intercepts the optical path. An optical element is provided for modifying light incident thereon. The optical element is moveable within the recess between a first position in which the optical element is located in the path and a second position in which optical element is remote from the path. A cantilever suspends the optical elements for movement within the recess between the second and first positions in a direction normal to the surface of the substrate.
摘要翻译：一种光学器件包括具有平面表面的衬底。光路布置在基板上并且在平行于基板表面的平面中延伸。凹槽拦截光路。提供用于修改入射到其上的光的光学元件。光学元件可在凹槽内在光学元件位于路径中的第一位置和光学元件远离路径的第二位置之间移动。悬臂将光学元件悬挂在垂直于基板表面的方向上的第二位置与第一位置之间的凹槽内移动。

10. 发明申请

WO1997013127A1 MECHANICAL SIGNAL PROCESSOR BASED ON MICROMECHANICAL OSCILLATORS AND INTELLIGENT ACOUSTIC DETECTORS AND SYSTEMS BASED THEREON 审中-公开
标题翻译：基于微机电振荡器的机械信号处理器和基于其的智能声学检测器和系统
公开(公告)号：WO1997013127A1
公开(公告)日：1997-04-10
申请号：PCT/IB1995000817
申请日：1995-09-29
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BINNIG, Gerd, Karl , GUERET, Pierre, Leopold , ROHRER, Heinrich , VETTIGER, Peter
发明人： INTERNATIONAL BUSINESS MACHINES CORPORATION
IPC分类号： G01H11/00
CPC分类号： G01H11/00
摘要： The present invention concerns mechanical signal processing means comprising a mechanical adder as basic building block. Such a mechanical adder (40), which is a basic element of the present invention, comprises: a first micromechanical member (40.1) being sensitive to a first frequency (f1); and a second micromechanical member (40.2) being sensitive to a second frequency (f2). The two micromechanical members (40.1, 40.2) are coupled via linear coupling means (41) to provide a superposition (sum) of the two frequencies f1 and f2. Based on the above adder, AND-gates and OR gates can be realized by adding further micromechanical members and appropriate linear and non-linear coupling elements.
摘要翻译：本发明涉及包括机械加法器作为基本构造块的机械信号处理装置。这种作为本发明的基本元件的机械加法器（40）包括：对第一频率（f1）敏感的第一微机械构件（40.1）; 以及对第二频率（f2）敏感的第二微机械构件（40.2）。两个微机械构件（40.1,40.2）经由线性耦合装置（41）耦合以提供两个频率f1和f2的叠加（和）。基于上述加法器，可以通过添加另外的微机械构件和适当的线性和非线性耦合元件来实现与门和OR门。

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