会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明申请
    • RADIATION SHIELD FOR CRYOGENIC PUMP FOR HIGH TEMPERATURE PHYSICAL VAPOR DEPOSITION
    • 用于高温物理气相沉积的低温泵的辐射屏蔽
    • WO2008048324A2
    • 2008-04-24
    • PCT/US2006/060165
    • 2006-10-23
    • APPLIED MATERIALS, INC.RITCHIE, Alan A.
    • RITCHIE, Alan A.
    • B01D8/00
    • F04B37/08C23C14/564
    • A method and apparatus to shield a cryogenic pump in a physical vapor deposition chamber comprising a physical vapor deposition chamber, a gasket in thermal contact with the physical vapor deposition chamber, at least one post in contact with the gasket, a radiation shield connected at the top of the post, and at least one intermediate ring in contact with the post. A method and apparatus for a radiation shield for a cryogenic pump comprising a cryogenic pump with a region upstream from the cryogenic pump, a gasket in thermal contact with the region upstream from the cryogenic pump, at least one post in contact with the gasket, a radiation shield connected at the top of the post, and at least one intermediate ring in contact with the post.
    • 一种在物理气相沉积室中屏蔽低温泵的方法和装置,所述物理气相沉积室包括与物理气相沉积室热接触的垫圈,与所述物理气相沉积室接触的至少一个支柱 垫圈,连接在柱子顶部的辐射防护罩,以及至少一个与柱子接触的中间环。 一种用于低温泵的辐射屏蔽的方法和装置,该方法和装置包括具有低温泵上游区域的低温泵,与低温泵上游区域热接触的垫圈,与垫圈接触的至少一个支柱, 防辐射罩连接在柱子顶部,至少有一个中间环与柱子接触。