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    • 6. 发明申请
    • INTERCONNECT STRUCTURE WITH A MUSHROOM-SHAPED OXIDE CAPPING LAYER AND METHOD FOR FABRICATING SAME
    • 具有蘑菇状氧化物覆盖层的互连结构及用于制造相同结构的方法
    • WO2011084667A2
    • 2011-07-14
    • PCT/US2010060933
    • 2010-12-17
    • IBMNGUYEN SON VANGRILL ALFREDHAIGH THOMAS JSHOBHA HOSADURGAVO TUAN A
    • NGUYEN SON VANGRILL ALFREDHAIGH THOMAS JSHOBHA HOSADURGAVO TUAN A
    • H01L21/768H01L21/28
    • H01L21/76849H01L21/76846H01L21/76864H01L21/76867
    • An interconnect structure is provided that includes a dielectric material (52) having a dielectric constant of 4.0 or less and including a plurality of conductive features (56) embedded therein. The dielectric material (52) has an upper surface that is located beneath an upper surface of each of the plurality of conductive features (56). A first dielectric cap (58) is located on the upper surface of the dielectric material (52) and extends onto at least a portion of the upper surface of each of the plurality of conductive features (56). As shown, the first dielectric cap (58) forms an interface (59) with each of the plurality of conductive features (56) that is opposite to an electrical field that is generated by neighboring conductive features. The inventive structure also includes a second dielectric cap (60) located on an exposed portion of the upper surface of each of the plurality of conductive features (56) not covered with the first dielectric cap (58). The second dielectric cap (60) further covers on an exposed surface of the first dielectric cap (58).
    • 提供了一种互连结构,其包括介电常数为4.0或更小并且包括嵌入其中的多个导电部件(56)的介电材料(52)。 介电材料(52)具有位于多个导电部件(56)中的每一个的上表面下方的上表面。 第一电介质帽(58)位于电介质材料(52)的上表面上并且延伸到多个导电部件(56)中的每一个的上表面的至少一部分上。 如所示,第一电介质帽(58)与多个导电特征(56)中的每一个形成与由相邻导电特征产生的电场相反的界面(59)。 本发明的结构还包括位于未被第一电介质帽(58)覆盖的多个导电部件(56)中的每一个的上表面的暴露部分上的第二电介质帽(60)。 第二电介质帽(60)还覆盖在第一电介质帽(58)的暴露表面上。
    • 8. 发明申请
    • SUBSTRATE PROCESSING CHAMBER WITH OFF-CENTER GAS DELIVERY FUNNEL
    • 带中心气体输送机的基板加工室
    • WO2010036999A3
    • 2010-08-12
    • PCT/US2009058557
    • 2009-09-28
    • APPLIED MATERIALS INCMERRY NIRNGUYEN SON T
    • MERRY NIRNGUYEN SON T
    • H01L21/205H01L21/00
    • C23C16/45544C23C16/45502C23C16/45563
    • Methods and apparatus for processing substrates are disclosed herein. The process chamber includes a chamber body, a substrate support pedestal, a pump port and a gas injection funnel. The chamber body has an inner volume and the substrate support pedestal is disposed in the inner volume of the chamber body. The pump port is coupled to the inner volume and is disposed off-center from a central axis of the substrate support pedestal. The pump port provides azimuthally non-uniform pumping proximate to a surface of the substrate support pedestal and creates localized regions of high pressure and low pressure within the inner volume during use. The gas injection funnel is disposed in a ceiling of the chamber body and opposite the substrate support pedestal. The gas injection funnel is offset from the central axis of the substrate support pedestal and is disposed in a region of low pressure.
    • 本文公开了处理衬底的方法和设备。 处理室包括室主体,基板支撑基座,泵口和气体注入漏斗。 腔体具有内部体积,并且衬底支撑基座设置在腔体的内部体积中。 泵口连接到内部体积并且设置在离基板支撑基座的中心轴线偏心的位置。 泵端口提供靠近基板支撑基座的表面的方位不均匀的泵送,并且在使用期间在内部体积内产生高压和低压的局部区域。 气体注入漏斗设置在室主体的顶部并与衬底支撑基座相对。 气体注入漏斗偏离衬底支撑基座的中心轴线并且设置在低压区域中。