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    • 5. 发明申请
    • RARE EARTH PNICTIDES FOR STRAIN MANAGEMENT
    • 用于应变管理的稀土地球蛋白
    • WO2017210597A1
    • 2017-12-07
    • PCT/US2017/035744
    • 2017-06-02
    • IQE, PLCCLARK, AndrewDARGIS, RytisLEBBY, MichaelPELZEL, Rodney
    • CLARK, AndrewDARGIS, RytisLEBBY, MichaelPELZEL, Rodney
    • H01L21/20
    • Systems and methods described herein may include a first semiconductor layer with a first lattice constant, a rare earth pnictide buffer epitaxially grown over the first semiconductor, wherein a first region of the rare earth pnictide buffer adjacent to the first semiconductor has a net strain that is less than 1%, a second semiconductor layer epitaxially grown over the rare earth pnictide buffer, wherein a second region of the rare earth pnictide buffer adjacent to the second semiconductor has a net strain that is a desired strain, and wherein the rare earth pnictide buffer may comprise one or more rare earth elements and one or more Group V elements. In some examples, the desired strain is approximately zero.
    • 这里描述的系统和方法可以包括具有第一晶格常数的第一半导体层,外延生长在第一半导体上的稀土pnictide缓冲区,其中稀土pnictide缓冲区的第一区域邻近 第一半导体具有小于1%的净应变,外延生长在稀土pnictide缓冲液上的第二半导体层,其中与第二半导体相邻的稀土pnictide缓冲液的第二区域具有作为所需应变的净应变 并且其中所述稀土pnictide缓冲剂可以包含一种或多种稀土元素和一种或多种V族元素。 在一些示例中,期望的应变近似为零。