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1. 发明申请

WO2008143766A3 ADAPTOR FOR CLUSTER TOOL CHAMBERS 审中-公开
标题翻译：适用于集群工具的适配器
公开(公告)号：WO2008143766A3
公开(公告)日：2009-04-09
申请号：PCT/US2008005567
申请日：2008-04-30
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
发明人： BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
IPC分类号： H01L21/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

2. 发明申请

WO2008143766A2 INTEGRAL FACET CRYOPUMP, WATER VAPOR PUMP, OR HIGH VACUUM PUMP 审中-公开
标题翻译：整体面积CRYOPUMP，水蒸气泵或高真空泵
公开(公告)号：WO2008143766A2
公开(公告)日：2008-11-27
申请号：PCT/US2008/005567
申请日：2008-04-30
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , KRAUS, Joseph, A. , EACOBACCI, Michael, J.
发明人： BARTLETT, Allen, J. , KRAUS, Joseph, A. , EACOBACCI, Michael, J.
IPC分类号： H01L21/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

3. 发明申请

WO2008144670A1 LOAD LOCK FAST PUMP VENT 审中-公开
标题翻译：装载快速泵出口
公开(公告)号：WO2008144670A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/064166
申请日：2008-05-19
申请人： BROOKS AUTOMATION, INC. , HOFMEISTER, Christopher , ELLIOT, Martin, R. , KRUPYSHEV, Alexander , HALLISEY, Joseph , KRAUS, Joseph, A. , FOSNIGHT, William , CARBONE, Craig, J. , BLAHNIK, Jeffrey, C. , FONG, Hi Yin, Owen
发明人： HOFMEISTER, Christopher , ELLIOT, Martin, R. , KRUPYSHEV, Alexander , HALLISEY, Joseph , KRAUS, Joseph, A. , FOSNIGHT, William , CARBONE, Craig, J. , BLAHNIK, Jeffrey, C. , FONG, Hi Yin, Owen
IPC分类号： H01L21/677
CPC分类号： H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
摘要翻译：一种基板处理工具，其包括形成至少一个可分离室的框架，该隔离室被构造成保持受控气氛，至少两个基板支撑件，位于所述至少一个可隔离室的每一个内，所述至少两个基板支撑件中的每个基板支撑件彼此堆叠并且被配置为保持相应的基板和可通信地联接到所述至少两个基板支撑件的冷却单元，使得所述至少两个基板支撑件和冷却单元对位于所述至少两个基板支撑件上的各个基板的每个基板进行同时导电冷却。

4. 发明申请

WO2008143766A8 INTEGRAL FACET CRYOPUMP, WATER VAPOR PUMP, OR HIGH VACUUM PUMP 审中-公开
标题翻译：整体面积CRYOPUMP，水蒸气泵或高真空泵
公开(公告)号：WO2008143766A8
公开(公告)日：2009-02-19
申请号：PCT/US2008005567
申请日：2008-04-30
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
发明人： BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
IPC分类号： H01L21/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

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