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1. 发明申请

WO2012177371A1 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法
公开(公告)号：WO2012177371A1
公开(公告)日：2012-12-27
申请号：PCT/US2012/040339
申请日：2012-06-01
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , JAHNES, Christopher, V. , STAMPER, Anthony, K.
发明人： JAHNES, Christopher, V. , STAMPER, Anthony, K.
IPC分类号： H01L29/84
CPC分类号： B81B3/001 , B81B3/0021 , B81B3/0059 , B81B3/0072 , B81B7/0006 , B81B7/008 , B81B2201/016 , B81B2203/0163 , B81C1/00015 , B81C1/0015 , B81C1/00476 , G06F17/5045 , H01L41/094 , H01L41/1134 , H01L41/1138 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908 , Y10T29/49121
摘要： Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer (14) on a substrate (10) comprising actuator electrodes (115) and a contact electrode (110). The method further includes forming a MEMS beam (100) above the wiring layer (14). The method further includes forming at least one spring (200) attached to at least one end of the MEMS beam (100). The method further includes forming an array of mini -bumps (105') between the wiring layer (14) and the MEMS beam (100).
摘要翻译：提供微机电系统（MEMS）结构，制造方法和设计结构。形成MEMS结构的方法包括在包括致动器电极（115）和接触电极（110）的基板（10）上形成布线层（14）。该方法还包括在布线层（14）上方形成MEMS光束（100）。该方法还包括形成附接到MEMS梁（100）的至少一端的至少一个弹簧（200）。所述方法还包括在所述布线层（14）和所述MEMS光束（100）之间形成微型凸起（105'）的阵列。

2. 发明申请

WO2011162949A2 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：平面CAVITY MEMS及相关结构，制造和设计结构的方法
公开(公告)号：WO2011162949A2
公开(公告)日：2011-12-29
申请号：PCT/US2011039560
申请日：2011-06-08
申请人： IBM , DANG DINH , DOAN THAI , DUNBAR GEORGE A , HE ZHONG-XIANG , HERRIN RUSSELL T , JAHNES CHRISTOPHER V , MALING JEFFREY C , MURPHY WILLIAM J , STAMPER ANTHONY K , TWOMBLY JOHN G , WHITE ERIC J
发明人： DANG DINH , DOAN THAI , DUNBAR GEORGE A , HE ZHONG-XIANG , HERRIN RUSSELL T , JAHNES CHRISTOPHER V , MALING JEFFREY C , MURPHY WILLIAM J , STAMPER ANTHONY K , TWOMBLY JOHN G , WHITE ERIC J
IPC分类号： B81B3/00 , B81C1/00 , H01H59/00
CPC分类号： B81C1/00365 , B81B3/0021 , B81B3/0072 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60a, 60b) having a planar surface using a reverse damascene process.
摘要翻译：提供了平面腔微机电系统（MEMS）结构，制造方法和设计结构。该方法包括使用反向镶嵌工艺形成具有平面表面的至少一个微机电系统（MEMS）腔（60a，60b）。

3. 发明申请

WO2003107372A1 MICRO-ELECTROMECHANICAL SWITCH HAVING A DEFORMABLE ELASTOMERIC CONDUCTIVE ELEMENT 审中-公开
标题翻译：具有可变弹性导电元件的微电子开关
公开(公告)号：WO2003107372A1
公开(公告)日：2003-12-24
申请号：PCT/US2002/019449
申请日：2002-06-14
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DELIGIANNI, Hariklia , GREENBERG, David, R. , JAHNES, Christopher, V. , LUND, Jennifer, L. , SAENGER, Katherine, L. , VOLANT, Richard, P.
发明人： DELIGIANNI, Hariklia , GREENBERG, David, R. , JAHNES, Christopher, V. , LUND, Jennifer, L. , SAENGER, Katherine, L. , VOLANT, Richard, P.
IPC分类号： H01H57/00
CPC分类号： H01H59/0009
摘要： A micro-electromechanical switch (MEMS) having a deformable elastomeric element (1) which exhibits a large change in conductivity with a small amount of displacement. The deformable elastomeric element (1) is displaced by an electrostatic force that is applied laterally resulting in a small transverse displacement. The transversal displacement, in turn, pushes a metallic contact (7) against two conductive paths (5, 6), allowing passage of electrical signals. The elastomer (1) is provided on two opposing sids with embedded metallic elements (9, 10), such as impregnated metallic rods, metallic sheets, metallic particles, or conductive paste. Actuation electrodes (18, 8) are placed parallel to the conductive sides of the elastomer. A voltage applied between the conductive side of the elastomer and the respective actuation electrodes (18, 8) generate the electrostatic attractive force that compresses the elastomer (1), creating the transverse displacement that closes the MEMS. The elastomeric based MEMS extends the lifetime of the switch by extending fatigue life of the deformable switch elements.
摘要翻译：具有可变形的弹性体元件（1）的微机电开关（MEMS），其以少量的位移显示出大的导电性变化。可变形的弹性体元件（1）被横向施加的静电力移位，导致小的横向位移。横向移位又将金属触点（7）推向两个导电路径（5,6），允许电信号通过。弹性体（1）设置在具有嵌入的金属元件（9,10）的两个相对的窗口上，例如浸渍的金属棒，金属片，金属颗粒或导电膏。驱动电极（18,8）平行于弹性体的导电侧放置。施加在弹性体的导电侧和相应的致动电极（18,8）之间的电压产生压缩弹性体（1）的静电引力，产生封闭MEMS的横向位移。基于弹性体的MEMS通过延长可变形开关元件的疲劳寿命来延长开关的寿命。

4. 发明申请

WO2012177304A2 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHOD OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法
公开(公告)号：WO2012177304A2
公开(公告)日：2012-12-27
申请号：PCT/US2012/029005
申请日：2012-03-14
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , JAHNES, Christopher, V. , STAMPER, Anthony, K.
发明人： JAHNES, Christopher, V. , STAMPER, Anthony, K.
IPC分类号： H02N1/00 , H05K13/00
CPC分类号： H01H59/0009 , B81B3/001 , B81B7/0006 , B81B2201/016 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00293 , B81C2203/0145 , G06F17/5045 , G06F17/5068 , H01H1/0036 , H01H2001/0057 , Y10T29/49121
摘要： Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes (115) and a contact point on a substrate. The method further includes forming a MEMS beam (100) over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes (105') in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.
摘要翻译：提供微机电系统（MEMS）结构，制造方法和设计结构。形成MEMS结构的方法包括在基板上形成固定的致动器电极（115）和接触点。该方法还包括在固定的致动器电极和接触点上形成MEMS光束（100）。该方法还包括形成与固定致动器电极的部分对准的致动器电极阵列（105'），其尺寸和尺寸被确定为防止MEMS梁在重复循环之后塌陷在固定的致动器电极上。致动器电极阵列形成为与MEMS光束的下侧和固定致动器电极的表面中的至少一个直接接触。

5. 发明申请

WO2004019362A1 DIAPHRAGM ACTIVATED MICRO-ELECTROMECHANICAL SWITCH 审中-公开
标题翻译：膜片激活微电子开关
公开(公告)号：WO2004019362A1
公开(公告)日：2004-03-04
申请号：PCT/US2002/027115
申请日：2002-08-26
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , JAHNES, Christopher, V. , LUND, Jennifer, L. , SAENGER, Katherine, L. , VOLANT, Richard, P.
发明人： JAHNES, Christopher, V. , LUND, Jennifer, L. , SAENGER, Katherine, L. , VOLANT, Richard, P.
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2057/006
摘要： A micro-electromechanical (MEM) RF switch provided with a deflectable membrane (60) activates a switch contact or plunger (40). The membrane incorporates interdigitated metal electrodes (70) which cause a stress gradient in the membrane when activated by way of a DC electric field. The stress gradient results in a predictable bending or displacement of the membrane (60), and is used to mechanically displace the switch contact (30). An RF gap area (25) located within the cavity (250) is totally segregated from the gaps (71) between the interdigitated metal electrodes (70). The membrane is electrostatically displaced in two opposing directions, thereby aiding to activate and deactivate the switch. The micro-electromechanical switch includes: a cavity (250); at least one conductive path (20) integral to a first surface bordering the cavity; a flexible membrane (60) parallel to the first surface bordering the cavity (250), the flexible membrane (60) having a plurality of actuating electrodes (70); and a plunger (40) attached to the flexible membrane (60) in a direction away from the actuating electrodes (70), the plunger (40) having a conductive surface that makes electric contact with the conductive paths, opening and closing the switch.
摘要翻译：设置有可偏转膜（60）的微机电（MEM）RF开关激活开关触点或柱塞（40）。膜包含交叉指向的金属电极（70），其通过DC电场激活时引起膜中的应力梯度。应力梯度导致膜（60）的可预测的弯曲或位移，并且用于机械地移动开关触点（30）。位于空腔（250）内的RF间隙区域（25）与交错的金属电极（70）之间的间隙（71）完全分离。膜在两个相反的方向上静电位移，从而有助于启动和停用开关。微机电开关包括：空腔（250）; 至少一个导电通路（20），与所述空腔相邻的第一表面成一体; 柔性膜（60），其平行于与所述腔（250）接壤的所述第一表面，所述柔性膜（60）具有多个致动电极（70）; 以及沿远离所述致动电极（70）的方向附接到所述柔性膜（60）的柱塞（40），所述柱塞（40）具有导电表面，所述导电表面与所述导电路径电接触，所述开关闭合。

6. 发明申请

WO2012177304A3 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHOD OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法
公开(公告)号：WO2012177304A3
公开(公告)日：2014-03-13
申请号：PCT/US2012029005
申请日：2012-03-14
申请人： IBM , JAHNES CHRISTOPHER V , STAMPER ANTHONY K
发明人： JAHNES CHRISTOPHER V , STAMPER ANTHONY K
IPC分类号： B81B3/00
CPC分类号： H01H59/0009 , B81B3/001 , B81B7/0006 , B81B2201/016 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00293 , B81C2203/0145 , G06F17/5045 , G06F17/5068 , H01H1/0036 , H01H2001/0057 , Y10T29/49121
摘要： Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes (115) and a contact point on a substrate. The method further includes forming a MEMS beam (100) over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes (105') in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.
摘要翻译：提供微机电系统（MEMS）结构，制造方法和设计结构。形成MEMS结构的方法包括在基板上形成固定的致动器电极（115）和接触点。该方法还包括在固定的致动器电极和接触点上形成MEMS光束（100）。该方法还包括形成与固定致动器电极的部分对准的致动器电极阵列（105'），其尺寸和尺寸被设计成防止MEMS梁在重复循环之后塌陷在固定的致动器电极上。致动器电极的阵列形成为与MEMS光束的下侧和固定的致动器电极的表面中的至少一个直接接触。

7. 发明申请

WO2011162950A3 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：平面CAVITY MEMS及相关结构，制造和设计结构的方法
公开(公告)号：WO2011162950A3
公开(公告)日：2012-05-24
申请号：PCT/US2011039564
申请日：2011-06-08
申请人： IBM , HERRIN RUSSELL T , JAHNES CHRISTOPHER V , STAMPER ANTHONY K , WHITE ERIC J
发明人： HERRIN RUSSELL T , JAHNES CHRISTOPHER V , STAMPER ANTHONY K , WHITE ERIC J
IPC分类号： B81C1/00 , B81B3/00 , H01H59/00
CPC分类号： B81C1/00365 , B81B3/0021 , B81B3/0072 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60b) includes forming a first sacrificial cavity layer (18) over a wiring layer (14) and substrate (10). The method further includes forming an insulator layer (40) over the first sacrificial cavity layer. The method further includes performing a reverse damascene etchback process on the insulator layer. The method further includes planarizing the insulator layer and the first sacrificial cavity layer. The method further includes venting or stripping of the first sacrificial cavity layer to a planar surface for a first cavity (60b) of the MEMS.
摘要翻译：形成至少一个微机电系统（MEMS）腔（60b）的方法包括在布线层（14）和衬底（10）上形成第一牺牲腔层（18）。该方法还包括在第一牺牲腔层上形成绝缘体层（40）。该方法还包括在绝缘体层上执行反向镶嵌回蚀工艺。该方法还包括平坦化绝缘体层和第一牺牲腔层。该方法还包括将第一牺牲腔层排出或剥离到用于MEMS的第一腔（60b）的平坦表面。

8. 发明申请

WO2011162950A2 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：平面CAVITY MEMS及相关结构，制造和设计结构的方法
公开(公告)号：WO2011162950A2
公开(公告)日：2011-12-29
申请号：PCT/US2011/039564
申请日：2011-06-08
申请人： INTERNATIONAL BUSINESS MACHINE CORPORATION , HERRIN, Russell, T. , JAHNES, Christopher, V. , STAMPER, Anthony, K. , WHITE, Eric, J.
发明人： HERRIN, Russell, T. , JAHNES, Christopher, V. , STAMPER, Anthony, K. , WHITE, Eric, J.
IPC分类号： B81C1/00 , B81B3/00 , H01H59/00
CPC分类号： B81B3/0072 , B81B3/0021 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00365 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60b) includes forming a first sacrificial cavity layer (18) over a wiring layer (14) and substrate (10). The method further includes forming an insulator layer (40) over the first sacrificial cavity layer. The method further includes performing a reverse damascene etchback process on the insulator layer. The method further includes planarizing the insulator layer and the first sacrificial cavity layer. The method further includes venting or stripping of the first sacrificial cavity layer to a planar surface for a first cavity (60b) of the MEMS.
摘要翻译：形成至少一个微机电系统（MEMS）腔（60b）的方法包括在布线层（14）和衬底（10）上形成第一牺牲腔层（18）。该方法还包括在第一牺牲腔层上形成绝缘体层（40）。该方法还包括在绝缘体层上执行反向镶嵌回蚀工艺。该方法还包括平坦化绝缘体层和第一牺牲腔层。该方法还包括将第一牺牲腔层排出或剥离到用于MEMS的第一腔（60b）的平坦表面。

9. 发明申请

WO2011162949A3 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
公开(公告)号：WO2011162949A3
公开(公告)日：2011-12-29
申请号：PCT/US2011/039560
申请日：2011-06-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DANG, Dinh , DOAN, Thai , DUNBAR, George, A. , HE, Zhong-xiang , HERRIN, Russell, T. , JAHNES, Christopher, V. , MALING, Jeffrey, C. , MURPHY, William, J. , STAMPER, Anthony, K. , TWOMBLY, John, G. , WHITE, Eric, J.
发明人： DANG, Dinh , DOAN, Thai , DUNBAR, George, A. , HE, Zhong-xiang , HERRIN, Russell, T. , JAHNES, Christopher, V. , MALING, Jeffrey, C. , MURPHY, William, J. , STAMPER, Anthony, K. , TWOMBLY, John, G. , WHITE, Eric, J.
IPC分类号： B81B3/00 , B81C1/00 , H01H59/00
摘要： Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60a, 60b) having a planar surface using a reverse damascene process.

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