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1. 发明申请

WO2007075908A3 ATOM PROBE TEST STANDARDS AND ASSOCIATED METHODS 审中-公开
标题翻译： ATOM探测测试标准和相关方法
公开(公告)号：WO2007075908A3
公开(公告)日：2008-04-10
申请号：PCT/US2006048823
申请日：2006-12-21
申请人： IMAGO SCIENT INSTR CORP , ULFIG ROBERT MATTHEW , KELLY THOMAS F , WIENER SCOTT ALBERT , GERSTL STEPHAN SIEGFRIED ALEXA , LARSON DAVID JAMES
发明人： ULFIG ROBERT MATTHEW , KELLY THOMAS F , WIENER SCOTT ALBERT , GERSTL STEPHAN SIEGFRIED ALEXA , LARSON DAVID JAMES
IPC分类号： G01Q10/00
CPC分类号： H01J37/3056 , B82Y35/00 , H01J37/265 , H01J37/285
摘要： The present invention relates to atom probe test standards and associated methods, including methods using the test standard to calibrate an atom probe process. One aspect of the invention is directed toward an atom probe method that includes determining a characteristic associated with (a) an atom probe process, (b) a specimen, or (c) both (a) and (b) based on a comparison of data produced by an evaporation of a portion of a test standard to one or more expected results. Other aspects are directed toward determining whether (a) a characteristic associated with a test standard has changed from a first state to a second state based on a comparison of data produced by an evaporation of a portion of the test standard to one or more expected results, (b) a relative location of the test standard in a specimen has changed, or (c) both (a) and (b).
摘要翻译：本发明涉及原子探针测试标准和相关方法，包括使用测试标准校准原子探针过程的方法。本发明的一个方面涉及一种原子探针方法，其包括根据（a）原子探针过程，（b）样品或（c）（a）和（b））确定与通过将测试标准的一部分蒸发的一个或多个预期结果产生的数据。基于将测试标准的一部分的蒸发产生的数据与一个或多个预期结果的比较来确定（a）与测试标准相关联的特性是否已经从第一状态改变到第二状态，（b）样本中测试标准的相对位置已更改，或（c）（a）和（b）两者。

2. 发明申请

WO2007016299A3 ATOM PROBE EVAPORATION PROCESSES 审中-公开
标题翻译：原子探针蒸发过程
公开(公告)号：WO2007016299A3
公开(公告)日：2008-01-31
申请号：PCT/US2006029324
申请日：2006-07-28
申请人： IMAGO SCIENT INSTR CORP , OLSON JESSE D , LENZ DANIEL R , PAYNE TIMOTHY R
发明人： OLSON JESSE D , LENZ DANIEL R , PAYNE TIMOTHY R
IPC分类号： G01Q10/00 , G01Q60/00 , H01J37/305
CPC分类号： G01Q60/00
摘要： The present invention relates to atom probe evaporation processes. For example, certain aspects are directed toward methods for controlling an evaporation process in an atom probe that includes initiating the atom probe evaporation process and monitoring a parameter associated with material being evaporated from a specimen. The method can further include controlling at least one characteristic of the atom probe evaporation process to attain a desired evaporation rate or characteristic. In selected embodiments, monitoring a parameter associated with material being evaporated can include monitoring an evaporation rate, mass-to- charge ratios of evaporated ions, a mass resolution, a composition of material being evaporated, and/or the like. In certain embodiments, controlling at least one characteristic can include controlling a pulse energy, a pulse frequency, a bias energy, and/or the like. In other embodiments, various portions of the above process can be computer implemented.
摘要翻译：本发明涉及原子探针蒸发方法。例如，某些方面涉及用于控制原子探针中的蒸发过程的方法，其包括引发原子探针蒸发过程并监测与样品蒸发的材料相关的参数。该方法还可以包括控制原子探针蒸发过程的至少一个特征以获得所需的蒸发速率或特性。在选择的实施例中，监测与被蒸发的材料相关联的参数可以包括监测蒸发速率，蒸发离子的质荷比，质量分辨率，被蒸发的材料的组成和/或类似物。在某些实施例中，控制至少一个特性可包括控制脉冲能量，脉冲频率，偏置能量等。在其他实施例中，可以计算机实现上述过程的各个部分。

3. 发明申请

WO2006134380A3 ATOM PROBE 审中-公开
标题翻译： ATOM探索
公开(公告)号：WO2006134380A3
公开(公告)日：2007-11-29
申请号：PCT/GB2006002209
申请日：2006-06-16
申请人： IMAGO SCIENT INSTR CORP , PANAYI PETER
发明人： PANAYI PETER
IPC分类号： H01J49/40
CPC分类号： H01J49/405 , H01J49/0004
摘要： Aspects of the present invention are directed generally toward atom probe and three-dimensional atom probe microscopes. For example, certain aspects of the invention are directed -toward an atom probe or a three-dimensional atom probe that includes a sub-nanosecond laser to evaporate ions from a specimen under analysis and a reflectron for reflecting the ions. In further aspects of the invention, the reflectron can include a front electrode and a back electrode. At least one of the front and back electrodes can be capable of generating a curved electric field. Additionally, the front electrode and back electrodes can be configured to perform time focusing and resolve an image of a specimen.
摘要翻译：本发明的方面通常涉及原子探针和三维原子探针显微镜。例如，本发明的某些方面涉及原子探针或三维原子探针，该原子探针或三维原子探针包括用于蒸发分析中的样品的离子的亚纳秒激光和用于反射离子的反射器。在本发明的其它方面，反射器可以包括前电极和后电极。前电极和后电极中的至少一个能够产生弯曲的电场。此外，前电极和背电极可以被配置为执行时间聚焦并且解析样本的图像。

4. 发明申请

WO2007053721A2 ATOM PROBE PULSE ENERGY 审中-公开
标题翻译： ATOM探头脉冲能量
公开(公告)号：WO2007053721A2
公开(公告)日：2007-05-10
申请号：PCT/US2006042742
申请日：2006-10-31
申请人： IMAGO SCIENT INSTR CORP , BUNTON JOSEPH HALE
发明人： BUNTON JOSEPH HALE
IPC分类号： G01N23/00
CPC分类号： H01J37/285 , B82Y15/00 , H01J2237/2852 , H01J2237/2855
摘要： The present invention relates to atom probe pulse energy. One aspect of the invention is directed toward a method that includes establishing a data relationship between pulse energy and bias energy for a target evaporation rate. In selected embodiments, establishing a data relationship can include determining an equivalent pulse fraction for a selected pulse energy and bias energy combination based on a local change in bias energy compared to a local change in pulse energy associated with the selected pulse energy and bias energy combination. Another aspect of the invention is directed toward a method that includes determining an equivalent pulse fraction for a first bias energy and pulse energy combination and/or a second bias energy and pulse energy combination based on the difference between the first bias energy and the second bias energy compared to the difference between the first pulse energy and the second pulse energy.
摘要翻译：本发明涉及原子探针脉冲能量。本发明的一个方面涉及一种方法，其包括针对目标蒸发速率建立脉冲能量和偏压能量之间的数据关系。在选择的实施例中，建立数据关系可以包括基于与所选择的脉冲能量和偏置能量组合相关联的脉冲能量的局部变化，基于偏置能量的局部变化来确定所选择的脉冲能量和偏置能量组合的等效脉冲分数。本发明的另一方面涉及一种方法，其包括基于第一偏置能量和第二偏压之间的差异来确定第一偏置能量和脉冲能量组合的等效脉冲分数和/或第二偏置能量和脉冲能量组合与第一脉冲能量和第二脉冲能量之间的差相比。

5. 发明申请

WO2005104307A3 LASER ATOM PROBES 审中-公开
标题翻译：激光原子探针
公开(公告)号：WO2005104307A3
公开(公告)日：2005-12-29
申请号：PCT/US2004027062
申请日：2004-08-19
申请人： IMAGO SCIENT INSTR CORP , BUNTON JOSEPH H , KELLY THOMAS F , GRIBB TYE T
发明人： BUNTON JOSEPH H , KELLY THOMAS F , GRIBB TYE T
IPC分类号： H01J37/285 , H01J49/40 , H01S1/00
CPC分类号： H01J37/285 , B82Y35/00 , H01J49/0004 , H01J49/067 , H01J49/164 , H01J2237/2855
摘要： A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.
摘要翻译：激光原子探针（100）将对电极置于样品座和检测器（106）之间，并且提供激光（116），其具有对准的光束（122），以通过孔（110）的孔（110）照射样品对电极（108）。检测器，样品架（102），然后被脉冲以使样本电离。激光脉冲的定时可用于确定离子离开和到达时间，从而确定离子的质荷比，因此确定它们的身份。描述了自动对准方法，其中激光被自动导向到感兴趣的区域。

6. 发明申请

WO2004111604A3 HIGH RESOLUTION ATOM PROBE 审中-公开
标题翻译：高分辨率原子探针
公开(公告)号：WO2004111604A3
公开(公告)日：2005-08-18
申请号：PCT/US2004016590
申请日：2004-05-26
申请人： IMAGO SCIENT INSTR , GRIBB TYE TRAVIS
发明人： GRIBB TYE TRAVIS
IPC分类号： G01N20060101 , G01N25/00 , H01J37/285
CPC分类号： H01J37/285 , B82Y15/00 , H01J37/05 , H01J37/10 , H01J2237/024 , H01J2237/0492 , H01J2237/053 , H01J2237/244
摘要： A three dimensional atom probe comprising a sharp specimen (10) coupled to a mounting means (12) where emission of charged particles is caused by application of a potential to the specimen tip (10) such that charged particles are influenced by filtering electrodes (206, 204) before impingement on a detection screen (202).
摘要翻译：一种三维原子探针，其包括耦合到安装装置（12）的尖锐的样本（10），其中通过向所述样本末端（10）施加电位而引起带电粒子的发射，使得带电粒子受到过滤电极（206 ，204），然后冲击到检测屏（202）上。

7. 发明申请

WO2008057066A9 SPECIMENS FOR MICROANALYSIS PROCESSES 审中-公开
标题翻译：微量分析过程的样本
公开(公告)号：WO2008057066A9
公开(公告)日：2009-07-02
申请号：PCT/US2006029323
申请日：2006-07-28
申请人： IMAGO SCIENT INSTR CORP , GOODMAN STEVEN L , KELLY TOMAS F , TOMICKI TERRI J
发明人： GOODMAN STEVEN L , KELLY TOMAS F , TOMICKI TERRI J
IPC分类号： G01N1/00
CPC分类号： G01N1/36 , Y10T436/2525
摘要： The present invention relates to specimens for use in microanalysis processes. One aspect of the invention is directed toward using a mold to form specimens for a microanalysis process (e.g., including an atom probe and/or transmission electron microscope processes). Other aspects of the invention are directed towards embedding specimen material (e.g., including nanoparticles) in an embedment material to produce a specimen suitable for use in a microanalysis process. Still other aspects include combining specimen material with an embedment material to enhance a microanalysis process. Yet other embodiments of the invention are directed toward combining a specimen material with multiple embedment materials to produce specimens suitable for a microanalysis process. Further aspects of the invention are directed toward analyzing at least a portion of a specimen produced by one or more of the processes discussed above.
摘要翻译：本发明涉及用于微量分析过程的样本。本发明的一个方面涉及使用模具来形成用于微量分析过程（例如包括原子探针和/或透射电子显微镜过程）的样本。本发明的其他方面涉及将试样材料（例如，包括纳米颗粒）嵌入嵌入材料中以产生适用于微量分析过程的试样。其他方面还包括将样本材料与嵌入材料组合以增强微量分析过程。本发明的又一些实施例涉及将样本材料与多种嵌入材料组合以产生适用于微量分析过程的样本。本发明的其他方面涉及分析由上述一个或多个过程产生的样本的至少一部分。

8. 发明申请

WO2007121325A3 ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS 审中-公开
标题翻译： ATOM探测数据处理和相关系统
公开(公告)号：WO2007121325A3
公开(公告)日：2008-07-10
申请号：PCT/US2007066570
申请日：2007-04-12
申请人： IMAGO SCIENT INSTR CORP , GEISER BRIAN PETER , KELLY THOMAS F , SCHNEIR JASON , ROBERTS JAY PHILLIP , LARSON DAVID JAMES , WIENER SCOTT ALBERT
发明人： GEISER BRIAN PETER , KELLY THOMAS F , SCHNEIR JASON , ROBERTS JAY PHILLIP , LARSON DAVID JAMES , WIENER SCOTT ALBERT
IPC分类号： G06F19/00
CPC分类号： H01J37/285 , H01J37/265 , H01J2237/153 , H01J2237/223 , H01J2237/226 , H01J2237/24571 , H01J2237/24592
摘要： The present invention relates to atom probe data processes and associated systems. Aspects of the invention are directed toward a computing system configured to process atom probe data that includes a data set receiving component configured to receive a first three-dimensional data set. The first three- dimensional data set has a first data element structure and is based on data collected from performing an atom probe process on a portion of an atom probe specimen. The system further includes a data set constructing component configured to create a second three-dimensional data set having a second data element structure different than the first data element structure. In selected embodiments, the system can further include a Fourier Transform component configured to perform a Fourier Transform on a portion of the second three- dimensional data set.
摘要翻译：本发明涉及原子探针数据处理和相关系统。本发明的方面针对被配置为处理原子探测数据的计算系统，该原子探测数据包括被配置为接收第一三维数据集的数据集接收部件。第一三维数据集具有第一数据元素结构，并且基于在原子探针样本的一部分上执行原子探测过程收集的数据。该系统还包括一个数据集构成部件，被配置为创建具有与第一数据元素结构不同的第二数据元素结构的第二三维数据集。在所选择的实施例中，系统还可以包括被配置为对第二三维数据集的一部分执行傅立叶变换的傅里叶变换分量。

9. 发明申请

WO2006009882B1 Methods and devices for atom probe mass resolutionenhancement 审中-公开
标题翻译：原子探针质量分辨率增强的方法和装置
公开(公告)号：WO2006009882B1
公开(公告)日：2006-06-29
申请号：PCT/US2005021552
申请日：2005-06-17
申请人： IMAGO SCIENT INSTR CORP
发明人： GRIBB TYE TRAVIS , OLSON JESSE D , LENZ DANIEL D , BUNTON JOSEPH H
IPC分类号： H01J37/285
CPC分类号： H01J49/168
摘要： In specimen atom probe (300) in a mass spectrometer (302) includes a voltage pulse (312) applied to the (300) and a first counter electrode (310) for producing a field ionizing pulse evaporation of ions (308) from the specimen (300); and the evaporated ions (308) subjected to corrective pulses which are synchronized with the ionizing pulses. These corrective pulses have a magnitude and timing sufficient to reduce the velocity distribution of the evaporated ions (308) for increasing mass resolution for the mass spectrometer (302) and are supplied from a second counter electrode (314) which is coupled to the first electrode (310) via an active network (322).
摘要翻译：在质谱仪（302）中的样品原子探针（300）包括施加到（300）的电压脉冲（312）和用于产生离子（308）的场电离脉冲蒸发的第一对电极（310）（300）; 并且蒸发的离子（308）经受与电离脉冲同步的校正脉冲。这些校正脉冲具有足以减小蒸发离子（308）的速度分布的量值和时间，以增加质谱仪（302）的质量分辨率，并从第二对电极（314）提供，第二对电极（314）耦合到第一电极（310）经由活动网络（322）。

10. 发明申请

WO2006042065A2 METHOD TO FORM MICROPTIPS 审中-公开
标题翻译：形成微波的方法
公开(公告)号：WO2006042065A2
公开(公告)日：2006-04-20
申请号：PCT/US2005036075
申请日：2005-10-07
申请人： IMAGO SCIENT INSTR CORP , THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , WIENER SCOTT ALBERT
发明人： THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , WIENER SCOTT ALBERT
CPC分类号： G01Q70/16
摘要： A method of farming microtips is described. The method includes forming one or more posts in aauozple, each post having an elongated, acicular body terminating in a tip; and subjecting at least the body of the posts to an etchant, wherein the etchant removes material from the posts.
摘要翻译：描述了一种养殖微型技术的方法。该方法包括在自由体中形成一个或多个柱，每个柱具有终止于尖端的细长针状体; 并且至少使柱的主体经受蚀刻剂，其中所述蚀刻剂从所述柱移除材料。

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