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1. 发明申请

WO2007016299A3 ATOM PROBE EVAPORATION PROCESSES 审中-公开
标题翻译：原子探针蒸发过程
公开(公告)号：WO2007016299A3
公开(公告)日：2008-01-31
申请号：PCT/US2006029324
申请日：2006-07-28
申请人： IMAGO SCIENT INSTR CORP , OLSON JESSE D , LENZ DANIEL R , PAYNE TIMOTHY R
发明人： OLSON JESSE D , LENZ DANIEL R , PAYNE TIMOTHY R
IPC分类号： G01Q10/00 , G01Q60/00 , H01J37/305
CPC分类号： G01Q60/00
摘要： The present invention relates to atom probe evaporation processes. For example, certain aspects are directed toward methods for controlling an evaporation process in an atom probe that includes initiating the atom probe evaporation process and monitoring a parameter associated with material being evaporated from a specimen. The method can further include controlling at least one characteristic of the atom probe evaporation process to attain a desired evaporation rate or characteristic. In selected embodiments, monitoring a parameter associated with material being evaporated can include monitoring an evaporation rate, mass-to- charge ratios of evaporated ions, a mass resolution, a composition of material being evaporated, and/or the like. In certain embodiments, controlling at least one characteristic can include controlling a pulse energy, a pulse frequency, a bias energy, and/or the like. In other embodiments, various portions of the above process can be computer implemented.
摘要翻译：本发明涉及原子探针蒸发方法。例如，某些方面涉及用于控制原子探针中的蒸发过程的方法，其包括引发原子探针蒸发过程并监测与样品蒸发的材料相关的参数。该方法还可以包括控制原子探针蒸发过程的至少一个特征以获得所需的蒸发速率或特性。在选择的实施例中，监测与被蒸发的材料相关联的参数可以包括监测蒸发速率，蒸发离子的质荷比，质量分辨率，被蒸发的材料的组成和/或类似物。在某些实施例中，控制至少一个特性可包括控制脉冲能量，脉冲频率，偏置能量等。在其他实施例中，可以计算机实现上述过程的各个部分。

2. 发明申请

WO2006101558A3 LASER ATOM PROBES 审中-公开
标题翻译：激光原子探针
公开(公告)号：WO2006101558A3
公开(公告)日：2007-05-03
申请号：PCT/US2005046842
申请日：2005-12-20
申请人： IMAGO SCIENT INSTR CORP , BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
发明人： BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813
摘要： An atom probe includes a specimen mount that holds a specimen to be analyzed. A detector is spaced apart from the specimen mount. A local electrode with an aperture is located between the detector and the specimen mount. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and the detector.
摘要翻译：原子探针包括保持要分析的样品的样品座。检测器与样品支架间隔开。具有孔径的局部电极位于检测器和样品座之间。激光器被定向成相对于孔径平面以非零角度向激光束发射激光束，孔径平面垂直于通过样品支架和检测器之间的孔限定的离子行进路径取向。

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