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1. 发明申请

WO2012075338A2 NON-DEGENERATE MODE MEMS GYROSCOPE 审中-公开
标题翻译：非变性模式MEMS陀螺仪
公开(公告)号：WO2012075338A2
公开(公告)日：2012-06-07
申请号：PCT/US2011/062961
申请日：2011-12-01
申请人： ANALOG DEVICES, INC. , JUDY, Michael, W. , GEEN, John, A. , JOHARI-GALLE, Houri
发明人： JUDY, Michael, W. , GEEN, John, A. , JOHARI-GALLE, Houri
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (Δί). The difference (Δί) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators.
摘要翻译：体声波（BAW）陀螺仪有目的地使用非简并模式操作，即驱动和感测模式的谐振频率被控制，使得它们不相同。共振频率的控制量小（Δε）小。选择差异（Δε）使得作为使用非简并模式的结果的灵敏度的损失是适度的。非退化操作可以产生更好的带宽，并且可以比比较的退化模式操作提高信噪比（SNR）。增加BAW谐振器的Q便于交换带宽以提高SNR，从而提供比简并模式设备可实现的带宽和SNR更好的组合。此外，分裂电极配置有助于最小化BAW谐振器中的正交误差。

2. 发明申请

WO2005103621A1 COUPLING APPARATUS FOR INERTIAL SENSORS 审中-公开
标题翻译：惯性传感器联轴器
公开(公告)号：WO2005103621A1
公开(公告)日：2005-11-03
申请号：PCT/US2005/013109
申请日：2005-04-14
申请人： ANALOG DEVICES, INC. , GEEN, John, A. , CLARK, William, A. , KUANG, Jinbo
发明人： GEEN, John, A. , CLARK, William, A. , KUANG, Jinbo
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , G01C19/574
摘要： A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at least one supporting structure supporting the bar. The at least one structure is coupled to a substrate underlying the frames. The structures allow the bar to rotate at a pivot point when the frames move in anti-phase to one another along substantially parallel axes but substantially prevent in-phase movements of the frames.
摘要翻译：耦合装置允许惯性传感器元件框架沿着平行轴线的相位移动，但是基本上防止框架的相位移动。联接装置包括连接在第一和第二传感器元件框架之间的杆和支撑杆的至少一个支撑结构。至少一个结构耦合到框架下方的基板。当框架沿着基本上平行的轴线彼此反相移动而基本上防止框架的相位移动时，结构允许杆在枢转点处旋转。

3. 发明申请

WO2005083449A2 METHOD FOR CONTINUOUS SENSOR SELF-TEST 审中-公开
标题翻译：连续传感器自检的方法
公开(公告)号：WO2005083449A2
公开(公告)日：2005-09-09
申请号：PCT/US2005/002183
申请日：2005-01-24
申请人： ANALOG DEVICES, INC. , WEINBERG, Harvey , GEEN, John, A.
发明人： WEINBERG, Harvey , GEEN, John, A.
IPC分类号： G01P
CPC分类号： G01D3/08 , G01D18/002 , G01D21/00
摘要： A method and device for self-test of a sensor. The method includes stimulating the sensor with signals that generate sensor outputs at a frequency that differs from the frequency of expected sensed parameter signals. The sensor output is filtered to remove the effects of the stimulation inputs, generating a sensed parameter signal. The unfiltered sensor output is compared to the expected output of the sensor with the stimulus input. A malfunctioning sensor may be detected by the comparison and appropriate action may then be taken.
摘要翻译：
一种用于传感器自检的方法和装置。该方法包括利用以与期望的感测参数信号的频率不同的频率生成传感器输出的信号来刺激传感器。传感器输出被过滤以去除刺激输入的影响，从而生成感测的参数信号。未过滤的传感器输出与带有刺激输入的传感器的预期输出进行比较。通过比较可以检测到故障传感器，然后采取适当的措施。

4. 发明申请

WO2011017069A1 INERTIAL SENSORS WITH REDUCED SENSITIVITY TO QUADRATURE ERRORS AND MICROMACHINING INACCURACIES 审中-公开
标题翻译：具有降低灵敏度的惯性传感器对于平坦度误差和微小误差误差
公开(公告)号：WO2011017069A1
公开(公告)日：2011-02-10
申请号：PCT/US2010/043312
申请日：2010-07-27
申请人： ANALOG DEVICES, INC. , KUANG, Jinbo , GEEN, John, A.
发明人： KUANG, Jinbo , GEEN, John, A.
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies include a gyroscope incorporating two specially- configured single-axis gyroscopes for sensing rotations about two orthogonal axes (the axes of sensitivity) in the device plane, where each single-axis gyroscope includes a resonator having two rotationally-dithered shuttles interconnected by a fork and each shuttle is configured to tilt out-of-plane along a tilt axis perpendicular to the axis of sensitivity and includes corresponding Coriolis sensing electrodes positioned along an axis perpendicular to the tilt axis (i.e., parallel to the axis of sensitivity). The two single-axis gyroscopes may be interconnected, e.g., by one or more in-phase or anti-phase couplings interconnecting the forks and/or the shuttles.
摘要翻译：惯性传感器对正交误差和微加工不精确度的灵敏度降低，包括一个陀螺仪，包括两个特别配置的单轴陀螺仪，用于感测设备平面中两个正交轴（灵敏轴）的旋转，其中每个单轴陀螺仪包括谐振器具有通过叉互连的两个旋转抖动的梭子和每个梭子被配置为沿着垂直于灵敏轴的倾斜轴线倾斜于平面外，并且包括沿垂直于倾斜轴线的轴线定位的相应的科里奥利感测电极（即，平行于灵敏度轴）。两个单轴陀螺仪可以例如通过互连叉和/或梭的一个或多个同相或反相耦合来互连。

5. 发明申请

WO2010135223A2 MODE-MATCHING APPARATUS AND METHOD FOR MICROMACHINED INERTIAL SENSORS 审中-公开
标题翻译：用于微机械传感器的模拟匹配装置和方法
公开(公告)号：WO2010135223A2
公开(公告)日：2010-11-25
申请号：PCT/US2010/035071
申请日：2010-05-17
申请人： ANALOG DEVICES, INC. , GEEN, John A.
发明人： GEEN, John A.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5776
摘要： A mode matching servo for an inertial sensor having a resonator and an accelerometer provides a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than an accelerometer resonance mode frequency so as to induce acceleration signals from the accelerometer substantially at the test signal frequency when the modes are not matched. A feedback signal is provided in response to such induced signals to substantially nullify the signals.
摘要翻译：用于具有谐振器和加速度计的惯性传感器的模式匹配伺服器以比预定的惯性传感器响应频率高且低于加速度计谐振模式频率的频率提供测试信号，以便基本上在测试中感应来自加速度计的加速度信号当模式不匹配时的信号频率。响应于这种感应信号提供反馈信号以基本上使信号无效。

6. 发明申请

WO2006105314A1 CAPACITIVE SENSOR WITH DAMPING 审中-公开
标题翻译：具有阻尼功能的电容式传感器
公开(公告)号：WO2006105314A1
公开(公告)日：2006-10-05
申请号：PCT/US2006/011679
申请日：2006-03-28
申请人： ANALOG DEVICES, INC. , DENISON, Timothy, J. , HOLLOCHER, David , GEEN, John, A.
发明人： DENISON, Timothy, J. , HOLLOCHER, David , GEEN, John, A.
IPC分类号： G01P15/125 , G01P1/00
CPC分类号： G01C19/5719 , G01P1/003 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A capacitive accelerometer. The capacitive accelerometer includes a first fixed electrode and second fixed electrode. The first fixed electrode is separated from the second fixed electrode by a gap. A movable electrode is positioned between the first and second fixed electrodes, the movable electrode being movable between the first and second fixed electrodes. The movable electrode is dimensioned to produce a squeeze damping effect between the movable and fixed electrodes to damp movement of the movable electrode. Circuitry determines the position of the movable electrode in any position across substantially the entire gap between the first and second fixed electrodes.
摘要翻译：电容式加速度计电容加速度计包括第一固定电极和第二固定电极。第一固定电极通过间隙与第二固定电极分离。可动电极位于第一和第二固定电极之间，可动电极可在第一和第二固定电极之间移动。可移动电极的尺寸被设计成在可移动电极和固定电极之间产生挤压阻尼效应，以阻止可动电极的运动。电路确定可移动电极在跨过第一和第二固定电极之间的整个间隙的任何位置的位置。

7. 发明申请

WO2012075338A3 NON-DEGENERATE MODE MEMS GYROSCOPE 审中-公开
标题翻译：非退化模式MEMS陀螺仪
公开(公告)号：WO2012075338A3
公开(公告)日：2012-11-08
申请号：PCT/US2011062961
申请日：2011-12-01
申请人： ANALOG DEVICES INC , JUDY MICHAEL W , GEEN JOHN A , JOHARI-GALLE HOURI
发明人： JUDY MICHAEL W , GEEN JOHN A , JOHARI-GALLE HOURI
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (??). The difference (??) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators.
摘要翻译：体声波（BAW）陀螺仪有意地使用非简并模式进行操作，即，驱动和感测模式的谐振频率被控制，使得它们不相同。谐振频率相差很小的控制量（??）。选择差值（Δθ），使得由于使用非退化模式而导致的灵敏度损失是适度的。非退化操作可以产生更好的带宽，并且与可比退化模式操作相比可提高信噪比（SNR）。增加体声波谐振器的Q值便于交换带宽以提高SNR，从而提供带宽和SNR的组合，其优于退化模式器件所能实现的带宽和SNR。另外，分离电极配置有助于最小化BAW谐振器中的正交误差。

8. 发明申请

WO2012128796A1 NON-DEGENERATE MODES MEMS GYROSCOPE 审中-公开
标题翻译：非变性模型MEMS陀螺仪
公开(公告)号：WO2012128796A1
公开(公告)日：2012-09-27
申请号：PCT/US2011/062966
申请日：2011-12-01
申请人： ANALOG DEVICES, INC. , JUDY, Michael, W. , GEEN, John, A. , JOHARI-GALLE, Houri
发明人： JUDY, Michael, W. , GEEN, John, A. , JOHARI-GALLE, Houri
IPC分类号： G01C19/5698 , G01C19/5684 , G01C19/56
CPC分类号： G01C19/5698
摘要： Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (Δί). The difference (Δί) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators.
摘要翻译：体声波（BAW）陀螺仪有目的地使用非简并模式操作，即驱动和感测模式的谐振频率被控制，使得它们不相同。共振频率的控制量小（Δε）小。选择差异（Δε）使得作为使用非简并模式的结果的灵敏度的损失是适度的。非退化操作可以产生更好的带宽，并且可以比比较的退化模式操作提高信噪比（SNR）。增加BAW谐振器的Q便于交换带宽以提高SNR，从而提供比简并模式设备可实现的带宽和SNR更好的组合。此外，分裂电极配置有助于最小化BAW谐振器中的正交误差。

9. 发明申请

WO2011022256A3 OFFSET DETECTION AND COMPENSATION FOR MICROMACHINED INERTIAL SENSORS 审中-公开
公开(公告)号：WO2011022256A3
公开(公告)日：2011-02-24
申请号：PCT/US2010/045037
申请日：2010-08-10
申请人： ANALOG DEVICES, INC. , CLARK, William, A. , GEEN, John, A.
发明人： CLARK, William, A. , GEEN, John, A.
IPC分类号： G01C19/56
摘要： Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.

10. 发明申请

WO2005103620A1 INERTIAL SENSOR WITH A LINEAR ARRAY OF SENSOR ELEMENTS 审中-公开
标题翻译：具有传感器元件线性阵列的惯性传感器
公开(公告)号：WO2005103620A1
公开(公告)日：2005-11-03
申请号：PCT/US2005/012932
申请日：2005-04-14
申请人： ANALOG DEVICES, INC. , GEEN, John, A.
发明人： GEEN, John, A.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , G01C19/574
摘要： An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to move in anti-phase to one another along parallel axes but are substantially prevented from moving in phase with one another.
摘要翻译：惯性传感器包括以线性阵列布置的至少一对传感器元件。每个传感器元件具有框架和悬挂在框架内的可移动质量块。每对传感器元件的框架可以被联接，使得框架被允许沿着平行的轴线彼此反相地移动，但是基本上被阻止彼此相位地移动。

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