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1. 发明申请

WO2005103621A1 COUPLING APPARATUS FOR INERTIAL SENSORS 审中-公开
标题翻译：惯性传感器联轴器
公开(公告)号：WO2005103621A1
公开(公告)日：2005-11-03
申请号：PCT/US2005/013109
申请日：2005-04-14
申请人： ANALOG DEVICES, INC. , GEEN, John, A. , CLARK, William, A. , KUANG, Jinbo
发明人： GEEN, John, A. , CLARK, William, A. , KUANG, Jinbo
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , G01C19/574
摘要： A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at least one supporting structure supporting the bar. The at least one structure is coupled to a substrate underlying the frames. The structures allow the bar to rotate at a pivot point when the frames move in anti-phase to one another along substantially parallel axes but substantially prevent in-phase movements of the frames.
摘要翻译：耦合装置允许惯性传感器元件框架沿着平行轴线的相位移动，但是基本上防止框架的相位移动。联接装置包括连接在第一和第二传感器元件框架之间的杆和支撑杆的至少一个支撑结构。至少一个结构耦合到框架下方的基板。当框架沿着基本上平行的轴线彼此反相移动而基本上防止框架的相位移动时，结构允许杆在枢转点处旋转。

2. 发明申请

WO2011017069A1 INERTIAL SENSORS WITH REDUCED SENSITIVITY TO QUADRATURE ERRORS AND MICROMACHINING INACCURACIES 审中-公开
标题翻译：具有降低灵敏度的惯性传感器对于平坦度误差和微小误差误差
公开(公告)号：WO2011017069A1
公开(公告)日：2011-02-10
申请号：PCT/US2010/043312
申请日：2010-07-27
申请人： ANALOG DEVICES, INC. , KUANG, Jinbo , GEEN, John, A.
发明人： KUANG, Jinbo , GEEN, John, A.
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies include a gyroscope incorporating two specially- configured single-axis gyroscopes for sensing rotations about two orthogonal axes (the axes of sensitivity) in the device plane, where each single-axis gyroscope includes a resonator having two rotationally-dithered shuttles interconnected by a fork and each shuttle is configured to tilt out-of-plane along a tilt axis perpendicular to the axis of sensitivity and includes corresponding Coriolis sensing electrodes positioned along an axis perpendicular to the tilt axis (i.e., parallel to the axis of sensitivity). The two single-axis gyroscopes may be interconnected, e.g., by one or more in-phase or anti-phase couplings interconnecting the forks and/or the shuttles.
摘要翻译：惯性传感器对正交误差和微加工不精确度的灵敏度降低，包括一个陀螺仪，包括两个特别配置的单轴陀螺仪，用于感测设备平面中两个正交轴（灵敏轴）的旋转，其中每个单轴陀螺仪包括谐振器具有通过叉互连的两个旋转抖动的梭子和每个梭子被配置为沿着垂直于灵敏轴的倾斜轴线倾斜于平面外，并且包括沿垂直于倾斜轴线的轴线定位的相应的科里奥利感测电极（即，平行于灵敏度轴）。两个单轴陀螺仪可以例如通过互连叉和/或梭的一个或多个同相或反相耦合来互连。

3. 发明申请

WO2006113162A1 CROSS-QUAD AND VERTICALLY COUPLED INERTIAL SENSORS 审中-公开
标题翻译：交叉和垂直耦合惯性传感器
公开(公告)号：WO2006113162A1
公开(公告)日：2006-10-26
申请号：PCT/US2006/012963
申请日：2006-04-06
申请人： ANALOG DEVICES, INC. , GEEN, John, A. , KUANG, Jinbo
发明人： GEEN, John, A. , KUANG, Jinbo
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： An inertial sensor includes a cross-quad configuration of four interconnected sensor elements. Each sensor element has a frame and a resonator suspended within the frame. The sensor elements are arranged so that the frames of adjacent sensor elements are allowed to move in anti-phase to one another but are substantially prevented from moving in phase with one another. The sensor elements may be configured in a horizontally coupled arrangement, a vertically coupled arrangement, or a fully coupled arrangement. A pair of sensor elements may be vertically coupled.
摘要翻译：惯性传感器包括四个互连传感器元件的十字形配置。每个传感器元件具有悬架在框架内的框架和谐振器。传感器元件被布置成使得相邻传感器元件的框架被允许彼此反相移动，但是基本上被阻止彼此相位移动。传感器元件可以被配置为水平耦合布置，垂直耦合布置或完全耦合布置。一对传感器元件可以垂直联接。

4. 发明申请

WO2010030740A1 PIEZOELECTRIC TRANSDUCERS AND INTERTIAL SENSORS USING PIEZOELECTRIC TRANSDUCERS 审中-公开
标题翻译：压电传感器和使用压电传感器的外部传感器
公开(公告)号：WO2010030740A1
公开(公告)日：2010-03-18
申请号：PCT/US2009/056456
申请日：2009-09-10
申请人： ANALOG DEVICES, INC. , KUANG, Jinbo , CLARK, William, Albert , GEEN, John, Albert
发明人： KUANG, Jinbo , CLARK, William, Albert , GEEN, John, Albert
IPC分类号： G01C19/56 , B06B1/06 , G01P15/09 , G01P15/097 , H01L41/02 , H01L41/08 , H04R17/00
CPC分类号： G01C19/56 , G01C19/5677 , G01P15/09 , Y10T29/42
摘要： Transducers comprising a frame structure made of piezoelectric material convert energy, through piezoelectric effect, between electrostatic energy associated with voltage differential between the electrodes sandwiching the frame structure and mechanical energy associated with deformation of the frame structure. Inertial sensors such as gyroscopes and accelerators, including inertial sensors comprising ring resonators, utilize said transducers both to generate oscillations of their resonators and to sense the changes in such oscillations produced, in the sensors' frame of reference, by Coriolis forces appearing due to the movement of the sensors.
摘要翻译：包括由压电材料制成的框架结构的传感器通过压电效应在夹持框架结构的电极与与框架结构的变形相关联的机械能相关联的静电能量之间转换能量。诸如陀螺仪和加速器的惯性传感器，包括包括环形谐振器的惯性传感器，利用所述换能器来产生它们的谐振器的振荡，并且感测在传感器参考系中由于由于所述传感器参考系而出现的科里奥利力产生的这种振荡的变化传感器的运动。

5. 发明申请

WO2018089733A1 VERTICAL STOPPER FOR CAPPING MEMS DEVICES 审中-公开
标题翻译：用于CAP设备的垂直挡板
公开(公告)号：WO2018089733A1
公开(公告)日：2018-05-17
申请号：PCT/US2017/061001
申请日：2017-11-10
申请人： ANALOG DEVICES, INC.
发明人： KUANG, Jinbo , VOHRA, Gaurav
IPC分类号： B81B7/00 , B81B3/00
摘要： Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
摘要翻译：描述了加盖的微机电系统（MEMS）器件。在至少一些情况下，MEMS装置包括一个或多个移动的质量块。帽可以包括阻挡一个或多个可移动块的运动的挡块。至少在某些情况下，塞子阻止其中一个质量块的运动，但不会阻塞另一个质量块。

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