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1. 发明申请

WO2012006019A2 CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER 审中-公开
标题翻译：具有智能控制器的可定制开发系统
公开(公告)号：WO2012006019A2
公开(公告)日：2012-01-12
申请号：PCT/US2011/042018
申请日：2011-06-27
申请人： ENTEGRIS, INC. , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul, J. , BRAGGIN, Jennifer, M. , GONNELLA, George, L. , VAIL, Johnathan, Owen
发明人： CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul, J. , BRAGGIN, Jennifer, M. , GONNELLA, George, L. , VAIL, Johnathan, Owen
IPC分类号： H01L21/205 , H01L21/302
CPC分类号： B65D83/00 , F04B43/06 , F04B49/007 , F04B49/02 , H01L21/67017
摘要： Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
摘要翻译：所公开的实施例提供了实现模块化架构的可定制的分配系统，该可定制的分配系统包括智能控制器，该智能控制器被配置为在对印刷图案的缺陷敏感的各种半导体制造过程中操作各种气动泵和电动泵。智能控制器被配置为在从与第一泵通信到第二泵的转换时自动识别第二泵并应用控制方案来控制第二泵，其可以是电动泵或气动泵。这是由于第一个泵的物理断开和第二个泵的物理连接造成的，或者它可以通过软件完全完成。智能控制器可以连接到轨道和各种设备，包括智能过滤器。

2. 发明申请

WO2007145997A3 SYSTEMS AND METHODS FOR MANAGING HEAT TRANSFER IN A FLUID HANDLING DEVICE 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：WO2007145997A3
公开(公告)日：2008-08-14
申请号：PCT/US2007013322
申请日：2007-06-06
申请人： ENTEGRIS INC , LAVERDIERE MARC , GASHGAEE IRAJ , BRODEUR CRAIG L , MCLOUGHLIN ROBERT F
发明人： LAVERDIERE MARC , GASHGAEE IRAJ , BRODEUR CRAIG L , MCLOUGHLIN ROBERT F
IPC分类号： F16K31/12 , F16K31/36
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions' of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：通过将控制设备的发热部分与处理或接近流体流动路径的设备部分分离来减少由流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙以提供流体处理部件与发热部件的热绝缘。在一个实施例中，通过使用绝缘间隔件连接两个外壳来维持气隙。两个外壳之间的组件之间的互连可以通过在每个末端密封的绝缘管路由，以防止热量通过管道传递。

3. 发明申请

WO2006057957A3 SYSTEM AND METHOD FOR A VARIABLE HOME POSITION DISPENSE SYSTEM 审中-公开
标题翻译：用于可变的家庭位置调节系统的系统和方法
公开(公告)号：WO2006057957A3
公开(公告)日：2007-11-15
申请号：PCT/US2005042127
申请日：2005-11-21
申请人： ENTEGRIS INC , LAVERDIERE MARC , CEDRONE JAMES , GONNELLA GEORGE , GASHGAEE IRAJ , MAGOON PAUL , KING TIMOTHY J
发明人： LAVERDIERE MARC , CEDRONE JAMES , GONNELLA GEORGE , GASHGAEE IRAJ , MAGOON PAUL , KING TIMOTHY J
IPC分类号： F04B49/00 , B67D7/30 , F04B49/06
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译：本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。可以选择膜片的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持体积的同时执行分配循环的各个步骤。另外，可以选择隔膜的原始位置来优化正位移的有效范围。

4. 发明申请

WO0075401A9 SIMULTANEOUS ELECTRICAL AND FLUID CONNECTION FOR ANODE 审中-公开
标题翻译：用于阳极的同时电气和流体连接
公开(公告)号：WO0075401A9
公开(公告)日：2002-06-20
申请号：PCT/US0014975
申请日：2000-05-31
申请人： MYKROLIS CORP , STOCKBOWER DAVID WINDSOR , KIMBALL PETER V , GASHGAEE IRAJ , KAISER GEOFFREY WAYNE
发明人： STOCKBOWER DAVID WINDSOR , KIMBALL PETER V , GASHGAEE IRAJ , KAISER GEOFFREY WAYNE
IPC分类号： C25D5/08 , C25D17/12 , C25B9/00 , C25B11/00
CPC分类号： C25D5/08 , C25D17/12
摘要： A plating cell base design that utilizes a single connection that provides both fluid communication and electrical communication to the cell. The design eliminates many of the components previously necessary to effectuate fluid and electrical seals. With fewer connections, material cost is reduced, reliability is enhanced, and downtime is reduced.
摘要翻译：电镀单元基座设计，其利用提供与电池的流体通信和电通信的单个连接。该设计消除了许多以前必要的组件来实现流体和电气密封。连接较少，材料成本降低，可靠性提高，停机时间缩短。

5. 发明申请

WO0218822A3 MODULAR TWO WAY CHECK VALVE CONSTRUCTION 审中-公开
标题翻译：模块式两路检查阀构造
公开(公告)号：WO0218822A3
公开(公告)日：2002-05-23
申请号：PCT/US0126719
申请日：2001-08-28
申请人： MYKROLIS CORP , GASHGAEE IRAJ
发明人： GASHGAEE IRAJ
IPC分类号： F16K27/00 , A61M39/00 , F16K11/04 , F16K11/10 , F16K15/02 , F16K15/06 , F16K17/04
CPC分类号： F16K11/105 , F16K15/021 , F16K17/0473 , Y10T137/7838 , Y10T137/7842 , Y10T137/88054
摘要： A check valve construction is provided which includes a housing having a first flow path and a second flow path. Liquid flow is controlled within the first and second flow path by movable plungers (22, 24) having a sealing surface and a plurality of prongs that control the length of movement of the plunger within the housing. One of the plungers permits liquid flow while the other of the plungers prevents liquid flow in response to pressure change within the flow paths.
摘要翻译：提供了一种止回阀结构，其包括具有第一流动路径和第二流动路径的壳体。液体流动通过具有密封表面的可移动的活塞（22,24）和多个插头来控制在第一和第二流动路径内，多个尖头控制柱塞在壳体内的移动长度。柱塞中的一个允许液体流动，而另一个柱塞防止液体流动响应于流动路径内的压力变化。

6. 发明申请

WO2007061957A3 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 审中-公开
公开(公告)号：WO2007061957A3
公开(公告)日：2007-10-04
申请号：PCT/US2006044907
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
发明人： GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
IPC分类号： F04B49/06
CPC分类号： F04B49/065 , F04B13/00 , F04B17/03 , F04B43/0081 , F04B43/02 , F04B2201/0201 , F04B2201/1208
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

7. 发明申请

WO2007067342A3 SYSTEM AND METHOD FOR VALVE SEQUENCING IN A PUMP 审中-公开
公开(公告)号：WO2007067342A3
公开(公告)日：2007-06-14
申请号：PCT/US2006/044980
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul
发明人： GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul
IPC分类号： H02K44/02
摘要： Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).

8. 发明申请

WO2004010474A2 LIQUID FLOW CONTROLLER AND PRECISION DISPENSE APPARATUS AND SYSTEM 审中-公开
标题翻译：液体流量控制器和精密配置设备和系统
公开(公告)号：WO2004010474A2
公开(公告)日：2004-01-29
申请号：PCT/US2003/022579
申请日：2003-07-18
申请人： MYKROLIS CORPORATION , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , GONNELLA, George , GASHGAEE, Iraj , MARRS, Jennifer
发明人： LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , GONNELLA, George , GASHGAEE, Iraj , MARRS, Jennifer
IPC分类号： H01L
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the' pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
摘要翻译：装置和控制系统，用于监测（优选数字地）和/或控制诸如比例流体控制阀的气动负载的压力，并且使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入以控制气压负荷的压力，使得气动负载可以增加或减小（按比例打开或关闭气动阀），以将流体的流速改变到所需的速率。也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。

9. 发明申请

WO2007145997A2 SYSTEMS AND METHODS FOR MANAGING HEAT TRANSFER IN A FLUID HANDLING DEVICE 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：WO2007145997A2
公开(公告)日：2007-12-21
申请号：PCT/US2007/013322
申请日：2007-06-06
申请人： ENTEGRIS, INC. , LAVERDIERE, Marc , GASHGAEE, Iraj , BRODEUR, Craig, L. , MCLOUGHLIN, Robert, F.
发明人： LAVERDIERE, Marc , GASHGAEE, Iraj , BRODEUR, Craig, L. , MCLOUGHLIN, Robert, F.
IPC分类号： F28F1/00
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions' of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：通过将控制设备的发热部分与处理或非常靠近流体流动路径的设备的部分分离来减少流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙，以提供流体处理部件与发热部件的热隔离。在一个实施例中，通过使用绝缘间隔件连接两个外壳来保持气隙。两个外壳中的组件之间的互连可以通过绝缘管路，绝缘管在每一端密封，以防止通过管的热传递。

10. 发明申请

WO2007067343A2 O-RING-LESS LOW PROFILE FITTINGS AND FITTING ASSEMBLIES 审中-公开
标题翻译： O型圈低配置配件和配件组合
公开(公告)号：WO2007067343A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/044981
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GASHGAEE, Iraj
发明人： GASHGAEE, Iraj
IPC分类号： F16L25/00
CPC分类号： F16L41/086 , F04B53/16 , F16L19/02 , F16L41/12
摘要： Embodiments of the invention provide new fittings and fitting assemblies for tight, leak-proof filter and fluid connections in a pump useful in dispensing fluid onto wafers during a semiconductor manufacturing process. One embodiment of a fitting assembly comprises an o-ring-less low profile fitting and a low profile male threaded locking nut. A manifold of the pump is machined with a female threaded hole for receiving the fitting and the locking nut. The fitting has higher compressibility than the manifold. Initially, as one end of the fitting touches the bottom of the receiving hole, there is a small gap between the end of the fitting and the bottom of the receiving hole. As the fitting is pressed down, the end of the fitting that touches the bottom of the receiving hole begins to deform and fill the small gap, thus creating a tight seal between the fitting and the manifold.
摘要翻译：本发明的实施例提供了用于在半导体制造过程中用于将流体分配到晶片上的泵中的紧密，防漏过滤器和流体连接的新配件和配件组件。配件组件的一个实施例包括无环形低轮廓配件和小型外螺纹锁紧螺母。泵的歧管被加工有用于接收配件和锁定螺母的内螺纹孔。配件比歧管具有更高的压缩性。最初，当配件的一端接触接收孔的底部时，在配件的端部和接收孔的底部之间存在小的间隙。当配件被按压时，接触接收孔底部的配件的端部开始变形并填充小间隙，从而在配件和歧管之间形成紧密的密封。

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