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1. 发明申请

WO0075401A9 SIMULTANEOUS ELECTRICAL AND FLUID CONNECTION FOR ANODE 审中-公开
标题翻译：用于阳极的同时电气和流体连接
公开(公告)号：WO0075401A9
公开(公告)日：2002-06-20
申请号：PCT/US0014975
申请日：2000-05-31
申请人： MYKROLIS CORP , STOCKBOWER DAVID WINDSOR , KIMBALL PETER V , GASHGAEE IRAJ , KAISER GEOFFREY WAYNE
发明人： STOCKBOWER DAVID WINDSOR , KIMBALL PETER V , GASHGAEE IRAJ , KAISER GEOFFREY WAYNE
IPC分类号： C25D5/08 , C25D17/12 , C25B9/00 , C25B11/00
CPC分类号： C25D5/08 , C25D17/12
摘要： A plating cell base design that utilizes a single connection that provides both fluid communication and electrical communication to the cell. The design eliminates many of the components previously necessary to effectuate fluid and electrical seals. With fewer connections, material cost is reduced, reliability is enhanced, and downtime is reduced.
摘要翻译：电镀单元基座设计，其利用提供与电池的流体通信和电通信的单个连接。该设计消除了许多以前必要的组件来实现流体和电气密封。连接较少，材料成本降低，可靠性提高，停机时间缩短。

2. 发明申请

WO0218822A3 MODULAR TWO WAY CHECK VALVE CONSTRUCTION 审中-公开
标题翻译：模块式两路检查阀构造
公开(公告)号：WO0218822A3
公开(公告)日：2002-05-23
申请号：PCT/US0126719
申请日：2001-08-28
申请人： MYKROLIS CORP , GASHGAEE IRAJ
发明人： GASHGAEE IRAJ
IPC分类号： F16K27/00 , A61M39/00 , F16K11/04 , F16K11/10 , F16K15/02 , F16K15/06 , F16K17/04
CPC分类号： F16K11/105 , F16K15/021 , F16K17/0473 , Y10T137/7838 , Y10T137/7842 , Y10T137/88054
摘要： A check valve construction is provided which includes a housing having a first flow path and a second flow path. Liquid flow is controlled within the first and second flow path by movable plungers (22, 24) having a sealing surface and a plurality of prongs that control the length of movement of the plunger within the housing. One of the plungers permits liquid flow while the other of the plungers prevents liquid flow in response to pressure change within the flow paths.
摘要翻译：提供了一种止回阀结构，其包括具有第一流动路径和第二流动路径的壳体。液体流动通过具有密封表面的可移动的活塞（22,24）和多个插头来控制在第一和第二流动路径内，多个尖头控制柱塞在壳体内的移动长度。柱塞中的一个允许液体流动，而另一个柱塞防止液体流动响应于流动路径内的压力变化。

3. 发明申请

WO2004010474A3 LIQUID FLOW CONTROLLER AND PRECISION DISPENSE APPARATUS AND SYSTEM 审中-公开
标题翻译：液体流量控制器和精确分配装置和系统
公开(公告)号：WO2004010474A3
公开(公告)日：2004-05-06
申请号：PCT/US0322579
申请日：2003-07-18
申请人： MYKROLIS CORP , LAVERDIERE MARC , MCLOUGHLIN ROBERT F , GONNELLA GEORGE , GASHGAEE IRAJ , MARRS JENNIFER
发明人： LAVERDIERE MARC , MCLOUGHLIN ROBERT F , GONNELLA GEORGE , GASHGAEE IRAJ , MARRS JENNIFER
IPC分类号： G05D7/06 , G05D16/20 , F16K31/12
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the' pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
摘要翻译：用于监测（优选数字地）和/或控制到气动负载（例如比例流体控制阀）的压力并且使用来自响应流速的流体测量装置的测量输入的装置和控制系统，使用液体测量输入以控制对气动负载的压力，从而可以增加或减少气动负载（以成比例地打开或关闭气动阀）以将流体的流量改变为期望的速率。气动负载也可以调整（按比例打开或关闭气动阀）以适应流体温度和粘度的变化。

4. 发明申请

WO2007061957A3 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 审中-公开
公开(公告)号：WO2007061957A3
公开(公告)日：2007-10-04
申请号：PCT/US2006044907
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
发明人： GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
IPC分类号： F04B49/06
CPC分类号： F04B49/065 , F04B13/00 , F04B17/03 , F04B43/0081 , F04B43/02 , F04B2201/0201 , F04B2201/1208
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

5. 发明申请

WO2007067342A2 SYSTEM AND METHOD FOR VALVE SEQUENCING IN A PUMP 审中-公开
标题翻译：用于阀中的阀门排序的系统和方法
公开(公告)号：WO2007067342A2
公开(公告)日：2007-06-14
申请号：PCT/US2006044980
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ , MAGOON PAUL
发明人： GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ , MAGOON PAUL
IPC分类号： B67B7/00
CPC分类号： F04B13/00 , F04B7/0076 , Y10T137/87885
摘要： Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).
摘要翻译：公开了用于最小化泵送装置内的压力波动的系统和方法。本发明的实施例可用于通过避免关闭阀以在流体路径中产生封闭或截留空间并且类似地避免在两个截留空间之间打开阀来减少泵送装置的流体路径内的压力变化。更具体地说，本发明的实施例可以用于根据阀门序列来操作泵送设备的阀门系统，该阀门序列被配置为基本上最小化通过泵送设备的流体流动路径关闭的时间（例如泵送到泵送外部的区域仪器）。

6. 发明申请

WO2007145997A3 SYSTEMS AND METHODS FOR MANAGING HEAT TRANSFER IN A FLUID HANDLING DEVICE 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：WO2007145997A3
公开(公告)日：2008-08-14
申请号：PCT/US2007013322
申请日：2007-06-06
申请人： ENTEGRIS INC , LAVERDIERE MARC , GASHGAEE IRAJ , BRODEUR CRAIG L , MCLOUGHLIN ROBERT F
发明人： LAVERDIERE MARC , GASHGAEE IRAJ , BRODEUR CRAIG L , MCLOUGHLIN ROBERT F
IPC分类号： F16K31/12 , F16K31/36
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions' of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：通过将控制设备的发热部分与处理或接近流体流动路径的设备部分分离来减少由流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙以提供流体处理部件与发热部件的热绝缘。在一个实施例中，通过使用绝缘间隔件连接两个外壳来维持气隙。两个外壳之间的组件之间的互连可以通过在每个末端密封的绝缘管路由，以防止热量通过管道传递。

7. 发明申请

WO2006057957A3 SYSTEM AND METHOD FOR A VARIABLE HOME POSITION DISPENSE SYSTEM 审中-公开
标题翻译：用于可变的家庭位置调节系统的系统和方法
公开(公告)号：WO2006057957A3
公开(公告)日：2007-11-15
申请号：PCT/US2005042127
申请日：2005-11-21
申请人： ENTEGRIS INC , LAVERDIERE MARC , CEDRONE JAMES , GONNELLA GEORGE , GASHGAEE IRAJ , MAGOON PAUL , KING TIMOTHY J
发明人： LAVERDIERE MARC , CEDRONE JAMES , GONNELLA GEORGE , GASHGAEE IRAJ , MAGOON PAUL , KING TIMOTHY J
IPC分类号： F04B49/00 , B67D7/30 , F04B49/06
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译：本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。可以选择膜片的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持体积的同时执行分配循环的各个步骤。另外，可以选择隔膜的原始位置来优化正位移的有效范围。

8. 发明申请

WO2012006019A3 CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER 审中-公开
标题翻译：带智能控制器的可定制分配系统
公开(公告)号：WO2012006019A3
公开(公告)日：2012-04-05
申请号：PCT/US2011042018
申请日：2011-06-27
申请人： ENTEGRIS INC , CEDRONE JAMES , GASHGAEE IRAJ , MAGOON PAUL J , BRAGGIN JENNIFER M , GONNELLA GEORGE L , VAIL JOHNATHAN OWEN
发明人： CEDRONE JAMES , GASHGAEE IRAJ , MAGOON PAUL J , BRAGGIN JENNIFER M , GONNELLA GEORGE L , VAIL JOHNATHAN OWEN
IPC分类号： H01L21/205 , H01L21/302
CPC分类号： B65D83/00 , F04B43/06 , F04B49/007 , F04B49/02 , H01L21/67017
摘要： Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
摘要翻译：所公开的实施例提供了实施模块化体系结构的可定制分配系统，该可定制分配系统包括智能控制器，该智能控制器被配置为在对印刷图案中的缺陷敏感的各种半导体制造过程中操作各种气动泵和马达泵。智能控制器被配置为在从与第一泵通信切换到第二泵时自动识别第二泵并且应用控制方案来控制第二泵，所述第二泵可以是马达泵或气动泵。由于第一台泵的物理连接和第二台泵的物理连接，或者它可以完全通过软件完成，这可能是由于这种情况。智能控制器可连接到轨道和各种设备，包括智能滤波器。

9. 发明申请

WO2007061957B1 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 审中-公开
标题翻译：用于位置控制泵中的机械活塞的系统和方法
公开(公告)号：WO2007061957B1
公开(公告)日：2007-12-06
申请号：PCT/US2006044907
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
发明人： GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
IPC分类号： F04B49/06
CPC分类号： F04B49/065 , F04B13/00 , F04B17/03 , F04B43/0081 , F04B43/02 , F04B2201/0201 , F04B2201/1208
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
摘要翻译：这里公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵以实时，平稳地运动，并且对流体运动进行极其精确和可重复的位置控制，并且分配量，用于半导体制造。 BLDCM可以使用位置传感器来实时位置反馈给执行定制的场定向控制方案的处理器。本发明的实施例可以通过经由定制控制方案根据基础功能的关键性增加和减小BLDCM的操作频率而减少热量产生而不会不利地损害分配泵的精确位置控制。该控制方案能够以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以最小的变化以很宽的速度范围运行，从而大大提高了分配性能和操作能力。

10. 发明申请

WO2007067339B1 FIXED VOLUME VALVE SYSTEM 审中-公开
公开(公告)号：WO2007067339B1
公开(公告)日：2007-11-22
申请号：PCT/US2006044908
申请日：2006-11-20
申请人： ENTEGRIS INC , GASHGAEE IRAJ , GONNELLA GEORGE , CEDRONE JAMES
发明人： GASHGAEE IRAJ , GONNELLA GEORGE , CEDRONE JAMES
IPC分类号： G01F11/00
CPC分类号： F04B25/00 , F04B7/0275
摘要： Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.

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