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1. 发明申请

WO2004010474A2 LIQUID FLOW CONTROLLER AND PRECISION DISPENSE APPARATUS AND SYSTEM 审中-公开
标题翻译：液体流量控制器和精密配置设备和系统
公开(公告)号：WO2004010474A2
公开(公告)日：2004-01-29
申请号：PCT/US2003/022579
申请日：2003-07-18
申请人： MYKROLIS CORPORATION , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , GONNELLA, George , GASHGAEE, Iraj , MARRS, Jennifer
发明人： LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , GONNELLA, George , GASHGAEE, Iraj , MARRS, Jennifer
IPC分类号： H01L
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the' pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
摘要翻译：装置和控制系统，用于监测（优选数字地）和/或控制诸如比例流体控制阀的气动负载的压力，并且使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入以控制气压负荷的压力，使得气动负载可以增加或减小（按比例打开或关闭气动阀），以将流体的流速改变到所需的速率。也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。

2. 发明申请

WO2007145997A2 SYSTEMS AND METHODS FOR MANAGING HEAT TRANSFER IN A FLUID HANDLING DEVICE 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：WO2007145997A2
公开(公告)日：2007-12-21
申请号：PCT/US2007/013322
申请日：2007-06-06
申请人： ENTEGRIS, INC. , LAVERDIERE, Marc , GASHGAEE, Iraj , BRODEUR, Craig, L. , MCLOUGHLIN, Robert, F.
发明人： LAVERDIERE, Marc , GASHGAEE, Iraj , BRODEUR, Craig, L. , MCLOUGHLIN, Robert, F.
IPC分类号： F28F1/00
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions' of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：通过将控制设备的发热部分与处理或非常靠近流体流动路径的设备的部分分离来减少流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙，以提供流体处理部件与发热部件的热隔离。在一个实施例中，通过使用绝缘间隔件连接两个外壳来保持气隙。两个外壳中的组件之间的互连可以通过绝缘管路，绝缘管在每一端密封，以防止通过管的热传递。

3. 发明申请

WO2006057957A2 SYSTEM AND METHOD FOR A VARIABLE HOME POSITION DISPENSE SYSTEM 审中-公开
标题翻译：用于可变的家庭位置调节系统的系统和方法
公开(公告)号：WO2006057957A2
公开(公告)日：2006-06-01
申请号：PCT/US2005/042127
申请日：2005-11-21
申请人： ENTEGRIS, INC. , LAVERDIERE, Marc , CEDRONE, James , GONNELLA, George , GASHGAEE, Iraj , MAGOON, Paul , KING, Timothy, J.
发明人： LAVERDIERE, Marc , CEDRONE, James , GONNELLA, George , GASHGAEE, Iraj , MAGOON, Paul , KING, Timothy, J.
IPC分类号： B67D7/30
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译：本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。另外，可以选择隔膜的原位来优化正位移的有效范围。

4. 发明申请

WO2012006019A2 CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER 审中-公开
标题翻译：具有智能控制器的可定制开发系统
公开(公告)号：WO2012006019A2
公开(公告)日：2012-01-12
申请号：PCT/US2011/042018
申请日：2011-06-27
申请人： ENTEGRIS, INC. , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul, J. , BRAGGIN, Jennifer, M. , GONNELLA, George, L. , VAIL, Johnathan, Owen
发明人： CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul, J. , BRAGGIN, Jennifer, M. , GONNELLA, George, L. , VAIL, Johnathan, Owen
IPC分类号： H01L21/205 , H01L21/302
CPC分类号： B65D83/00 , F04B43/06 , F04B49/007 , F04B49/02 , H01L21/67017
摘要： Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
摘要翻译：所公开的实施例提供了实现模块化架构的可定制的分配系统，该可定制的分配系统包括智能控制器，该智能控制器被配置为在对印刷图案的缺陷敏感的各种半导体制造过程中操作各种气动泵和电动泵。智能控制器被配置为在从与第一泵通信到第二泵的转换时自动识别第二泵并应用控制方案来控制第二泵，其可以是电动泵或气动泵。这是由于第一个泵的物理断开和第二个泵的物理连接造成的，或者它可以通过软件完全完成。智能控制器可以连接到轨道和各种设备，包括智能过滤器。

5. 发明申请

WO2007067342A3 SYSTEM AND METHOD FOR VALVE SEQUENCING IN A PUMP 审中-公开
公开(公告)号：WO2007067342A3
公开(公告)日：2007-06-14
申请号：PCT/US2006/044980
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul
发明人： GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul
IPC分类号： H02K44/02
摘要： Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).

6. 发明申请

WO2007061957A2 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 审中-公开
标题翻译：泵的机械活塞位置控制的系统和方法
公开(公告)号：WO2007061957A2
公开(公告)日：2007-05-31
申请号：PCT/US2006/044907
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj
发明人： GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj
IPC分类号： F04B49/06
CPC分类号： F04B49/065 , F04B13/00 , F04B17/03 , F04B43/0081 , F04B43/02 , F04B2201/0201 , F04B2201/1208
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
摘要翻译：本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以便实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制，分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

7. 发明申请

WO2007061956A2 SYSTEM AND METHOD FOR A PUMP WITH REDUCED FORM FACTOR 审中-公开
标题翻译：具有减少形式因子的泵的系统和方法
公开(公告)号：WO2007061956A2
公开(公告)日：2007-05-31
申请号：PCT/US2006/044906
申请日：2006-11-20
申请人： ENTEGRIS, INC. , CEDRONE, James , GONNELLA, George , GASHGAEE, Iraj
发明人： CEDRONE, James , GONNELLA, George , GASHGAEE, Iraj
IPC分类号： F04B3/00
CPC分类号： F04B43/04 , F04B7/0076 , F04B9/02 , F04B13/00 , F04B23/06 , F04B49/065 , F04B53/06 , F04B53/16 , F04B53/22 , F04B2201/0201 , F04B2201/0601 , F04B2205/03 , Y10T29/49236 , Y10T137/87885
摘要： Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having a motor driven feed stage pump and a motor driven dispense stage pump. The feed stage motor and the feed stage motor can include various types of motors and the pumps can be rolling diaphragm or other pumps. According to one embodiment, a dispense block defining the pump chambers and various flow passages can be formed out of a single piece of material.
摘要翻译：本发明的实施例提供具有减小形状因素并提高可靠性和可服务性的特征的泵。此外，本发明的实施例提供了用于温和流体处理特性的特征。本发明的实施例可以包括具有马达驱动的进料级泵和马达驱动的分配级泵的泵。进料级马达和进料级马达可以包括各种类型的马达，泵可以是滚动隔膜或其他泵。根据一个实施例，可以由一片材料形成限定泵室和各种流动通道的分配块。

8. 发明申请

WO2007067339A2 FIXED VOLUME VALVE SYSTEM 审中-公开
标题翻译：固定量阀系统
公开(公告)号：WO2007067339A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/044908
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GASHGAEE, Iraj , GONNELLA, George , CEDRONE, James
发明人： GASHGAEE, Iraj , GONNELLA, George , CEDRONE, James
IPC分类号： F04B53/10
CPC分类号： F04B25/00 , F04B7/0275
摘要： Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.
摘要翻译：本发明的实施例提供了提供均匀滞留体积的阀。本发明的实施例提供了一种阀，其包括阀体（例如，一个或多个），其限定具有阀座的阀室，入口流动通道，出口流动通道和与阀座相交的隔膜控制流动通道。阀座的形状使得当至少一个阈值真空被施加到隔膜控制流动通道时，阀具有固定的保持容积。阀还包括可朝向和离开阀座移动的隔膜。根据本发明的一个实施例，当将最小真空施加到隔膜控制流动通道时，阀座可以具有半隔膜形状，隔膜适合于该隔膜。

9. 发明申请

WO2007067343A2 O-RING-LESS LOW PROFILE FITTINGS AND FITTING ASSEMBLIES 审中-公开
标题翻译： O型圈低配置配件和配件组合
公开(公告)号：WO2007067343A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/044981
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GASHGAEE, Iraj
发明人： GASHGAEE, Iraj
IPC分类号： F16L25/00
CPC分类号： F16L41/086 , F04B53/16 , F16L19/02 , F16L41/12
摘要： Embodiments of the invention provide new fittings and fitting assemblies for tight, leak-proof filter and fluid connections in a pump useful in dispensing fluid onto wafers during a semiconductor manufacturing process. One embodiment of a fitting assembly comprises an o-ring-less low profile fitting and a low profile male threaded locking nut. A manifold of the pump is machined with a female threaded hole for receiving the fitting and the locking nut. The fitting has higher compressibility than the manifold. Initially, as one end of the fitting touches the bottom of the receiving hole, there is a small gap between the end of the fitting and the bottom of the receiving hole. As the fitting is pressed down, the end of the fitting that touches the bottom of the receiving hole begins to deform and fill the small gap, thus creating a tight seal between the fitting and the manifold.
摘要翻译：本发明的实施例提供了用于在半导体制造过程中用于将流体分配到晶片上的泵中的紧密，防漏过滤器和流体连接的新配件和配件组件。配件组件的一个实施例包括无环形低轮廓配件和小型外螺纹锁紧螺母。泵的歧管被加工有用于接收配件和锁定螺母的内螺纹孔。配件比歧管具有更高的压缩性。最初，当配件的一端接触接收孔的底部时，在配件的端部和接收孔的底部之间存在小的间隙。当配件被按压时，接触接收孔底部的配件的端部开始变形并填充小间隙，从而在配件和歧管之间形成紧密的密封。

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