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1. 发明申请

WO2011076910A1 MICROELECTROMECHANICAL TRANSDUCER AND CORRESPONDING ASSEMBLY PROCESS 审中-公开
标题翻译：微电子变压器及相关组件工艺
公开(公告)号：WO2011076910A1
公开(公告)日：2011-06-30
申请号：PCT/EP2010/070608
申请日：2010-12-22
申请人： STMICROELECTRONICS S.R.L. , STMICROELECTRONICS (MALTA) LTD , FORMOSA, Kevin , AZZOPARDI, Mark Anthony , CORTESE, Mario Francesco
发明人： FORMOSA, Kevin , AZZOPARDI, Mark Anthony , CORTESE, Mario Francesco
IPC分类号： H04R19/00 , B81B7/00
CPC分类号： H04R19/005 , B81B2201/0257 , B81B2207/012 , B81B2207/07 , B81B2207/093 , B81C1/0023 , B81C2203/019 , B81C2203/035 , B81C2203/0785 , B81C2203/0792 , H01L2224/05554 , H01L2224/48091 , H01L2224/48137 , H01L2224/8592 , H01L2924/10253 , H01L2924/1461 , H01L2924/16151 , H01L2924/3025 , Y10T29/49117 , H01L2924/00014 , H01L2924/00
摘要： A MEMS transducer (1) has a micromechanical sensing structure (10) and a package (46). The package (46) is provided with a substrate (45), carrying first electrical-connection elements (47), and with a lid (25), coupled to the substrate to define an internal cavity (24), in which the micromechanical sensing structure (10) is housed. The lid (25) is formed by: a cap layer (20) having a first surface (20a) and a second surface (20b), set opposite to one another, the first surface (20a) defining an external face of the package (46) and the second surface (20b) facing the substrate (45) inside the package (46); and a wall structure (21), set between the cap layer (20) and the substrate (45), and having a coupling face (21a) coupled to the substrate (45). At least a first electrical component (10, 11) is coupled to the second surface (20b) of the cap layer (20), inside the package (46), and the coupling face (21a) of the wall structure (21) carries second electrical-connection elements (30), electrically connected to the first electrical component (10, 11) and to the first electrical-connection elements (47).
摘要翻译： MEMS传感器（1）具有微机械感测结构（10）和封装（46）。封装（46）设置有承载第一电连接元件（47）的衬底（45），以及耦合到衬底以限定内部空腔（24）的盖（25），其中微机械感测结构（10）被容纳。盖（25）由以下部分形成：盖层（20），具有彼此相对设置的第一表面（20a）和第二表面（20b），所述第一表面（20a）限定包装的外表面 46）和所述第二表面（20b）面对所述衬底（45）; 以及设置在所述盖层（20）和所述基板（45）之间并且具有联接到所述基板（45）的联接面（21a）的壁结构（21）。至少第一电气部件（10,11）在封装（46）的内部联接到盖层（20）的第二表面（20b），并且壁结构（21）的联接面（21a）承载电连接到第一电气部件（10,11）和第一电连接元件（47）的第二电连接元件（30）。

2. 发明申请

WO2011061771A1 LID, FABRICATING METHOD THEREOF, AND MEMS PACKAGE MADE THEREBY 审中-公开
标题翻译： LID，其制造方法和MEMS封装
公开(公告)号：WO2011061771A1
公开(公告)日：2011-05-26
申请号：PCT/IT2009/000527
申请日：2009-11-20
申请人： UNIMICRON TECHNOLOGY CORP. , STMICROELECTRONICS S.R.L. , CORTESE, Mario, Francesco , AZZOPARDI, Mark, A. , HSU, Shih-Ping , TSAI, Kun-Chen , MICALLEF, Ivan
发明人： CORTESE, Mario, Francesco , AZZOPARDI, Mark, A. , HSU, Shih-Ping , TSAI, Kun-Chen , MICALLEF, Ivan
IPC分类号： B81B7/00
CPC分类号： B81B7/0064 , B81B2201/0257 , B81C2203/0118 , H01L24/73 , H01L2224/32225 , H01L2224/48091 , H01L2224/48137 , H01L2224/48227 , H01L2224/48228 , H01L2224/73265 , H01L2924/1461 , H01L2924/3025 , H04R19/005 , Y10T156/1056 , Y10T428/24562 , H01L2924/00012 , H01L2924/00014 , H01L2924/00
摘要： A lid for a MEMS device and the relative manufacturing method. The lid includes: a first board (20) with opposite first and second surfaces (20a, 20b) having first and second metal layers (21a, 21b) disposed thereon, respectively, wherein a through cavity (200) extends through the first board and the first and second metal layers; a second board (23) with opposite third and fourth surfaces (23a, 23b); an adhesive layer (22) sandwiched between the second surface of the first board and the third surface of the second board to couple the first and second boards together such that the through cavity is closed by the second board, thereby forming a recess (200); and a first conductor layer (25a) coating the bottom and the side surfaces (201a, 201b) of the recess. The lid enhances the shielding effect upon the MEMS device.
摘要翻译： MEMS器件的盖子及相关制造方法。所述盖包括：分别具有相对的第一和第二表面（20a，20b）的第一板（20），其具有分别设置在其上的第一和第二金属层（21a，21b），其中通孔（200）延伸穿过所述第一板和第一和第二金属层; 具有相对的第三和第四表面（23a，23b）的第二板（23）; 夹在所述第一板的第二表面和所述第二板的第三表面之间的粘合剂层（22），以将所述第一和第二板连接在一起，使得所述通孔由所述第二板封闭，从而形成凹部（200） ; 以及涂覆凹部的底部和侧面（201a，201b）的第一导体层（25a）。盖子增强了对MEMS器件的屏蔽效果。

3. 发明申请

WO2008089969A3 ELECTRONIC DEVICE COMPRISING DIFFERENTIAL SENSOR MEMS DEVICES AND DRILLED SUBSTRATES 审中-公开
标题翻译：包含差分传感器MEMS器件和钻孔基板的电子器件
公开(公告)号：WO2008089969A3
公开(公告)日：2008-12-31
申请号：PCT/EP2008000495
申请日：2008-01-23
申请人： ST MICROELECTRONICS SRL , BALDO LORENZO , COMBI CHANTAL , CORTESE MARIO FRANCESCO
发明人： BALDO LORENZO , COMBI CHANTAL , CORTESE MARIO FRANCESCO
IPC分类号： B81B7/00 , G01D11/24 , G01L9/00 , G01L13/02
CPC分类号： B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81C2203/0154 , G01L19/141 , G01L19/147 , G01L19/148 , H01L2224/48091 , H01L2224/48247 , H01L2924/10253 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： Electronic device (1, 1a, 1b, 1c, 1d, 1e) which comprises: a substrate (2) provided with at least one passing opening (5), a MEMS device (7) with function of differential sensor provided with a first and a second surface (9, 10) and of the type comprising at least one portion (11) sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface (11a, 11b) thereof, the first surface (9) of the MEMS device (7) leaving the first active surface (11a) exposed and the second surface (10) being provided with a further opening (12) which exposes said second opposed active surface (11b), the electronic device (1, 1d, 1e) being characterised in that the first surface (9) of the MEMS device (7) faces the substrate (2) and is spaced therefrom by a predetermined distance, the sensitive portion (11) being aligned to the passing opening (5) of the substrate (2), and in that it also comprises: a protective package (14, 14a, 14b), which incorporates at least partially the MEMS device (7) and the substrate (2) so as to leave the first and second opposed active surfaces (11a, 11b) exposed respectively through the passing opening (5) of the substrate (2) and the further opening (12) of the second surface (10).
摘要翻译：电子设备（1,1a，1b，1c，1d，1e）包括：设置有至少一个通过开口（5）的基板（2），具有差动传感器功能的MEMS装置（7）第二表面（9,10），并且包括对与其第一和第二相对的有效表面（11a，11b）相对应存在的流体的化学和/或物理变化敏感的至少一个部分（11）的类型，离开第一有源表面（11a）的MEMS器件（7）的第一表面（9）暴露，并且第二表面（10）设置有暴露所述第二相对的有效表面（11b）的另外的开口（12），电子其特征在于，所述MEMS器件（7）的所述第一表面（9）面向所述基板（2）并且与所述第一表面（9）隔开预定距离，所述敏感部分（11）与所述基板通过基板（2）的开口（5），并且还包括：保护封装（14,14a，14b），其中至少部分地将MEMS器件（7）和衬底（2）并入，以使得分别暴露于衬底（2）的通过开口（5）的第一和第二相对的有效表面（11a，11b）和进一步打开第二表面（10）的开口（12）。

4. 发明申请

WO2008089969A2 ELECTRONIC DEVICE COMPRISING DIFFERENTIAL SENSOR MEMS DEVICES AND DRILLED SUBSTRATES 审中-公开
标题翻译：包含微分传感器MEMS器件和钻孔衬底的电子器件
公开(公告)号：WO2008089969A2
公开(公告)日：2008-07-31
申请号：PCT/EP2008/000495
申请日：2008-01-23
申请人： STMICROELECTRONICS S.R.L. , BALDO, Lorenzo , COMBI, Chantal , CORTESE, Mario, Francesco
发明人： BALDO, Lorenzo , COMBI, Chantal , CORTESE, Mario, Francesco
IPC分类号： B81B7/00 , G01L9/00 , G01L13/02 , G01D11/24
CPC分类号： B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81C2203/0154 , G01L19/141 , G01L19/147 , G01L19/148 , H01L2224/48091 , H01L2224/48247 , H01L2924/10253 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： Electronic device (1, 1a, 1b, 1c, 1d, 1e) which comprises: a substrate (2) provided with at least one passing opening (5), a MEMS device (7) with function of differential sensor provided with a first and a second surface (9, 10) and of the type comprising at least one portion (11) sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface (11a, 11b) thereof, the first surface (9) of the MEMS device (7) leaving the first active surface (11a) exposed and the second surface (10) being provided with a further opening (12) which exposes said second opposed active surface (11b), the electronic device (1, 1d, 1e) being characterised in that the first surface (9) of the MEMS device (7) faces the substrate (2) and is spaced therefrom by a predetermined distance, the sensitive portion (11) being aligned to the passing opening (5) of the substrate (2), and in that it also comprises: a protective package (14, 14a, 14b), which incorporates at least partially the MEMS device (7) and the substrate (2) so as to leave the first and second opposed active surfaces (11a, 11b) exposed respectively through the passing opening (5) of the substrate (2) and the further opening (12) of the second surface (10).
摘要翻译：一种电子装置（1,1a，1b，1c，1d，1e），包括：设置有至少一个通过开口（5）的衬底（2），具有功能的MEMS装置（7），所述差动传感器设置有第一和第二表面（9,10），并且所述类型包括至少一个对与第一和第二相对的有效表面相对应的流体的化学和/或物理变化敏感的部分（11）（11a，11b），所述MEMS器件（7）的第一表面（9）离开所述第一有源表面（11a）并且所述第二表面（10）设置有另一开口（12），所述另一开口（12）暴露所述第二对置所述电子装置（1,1d，1e）的特征在于，所述MEMS装置（7）的所述第一表面（9）面向所述衬底（2）且与所述衬底（2）隔开预定距离，所述敏感表面部分（11）与衬底（2）的通过开口（5）对准，并且其还包括：保护包装（14，，其至少部分地并入MEMS器件（7）和衬底（2），从而使第一和第二相对的有源表面（11a，11b）分别暴露于衬底的通过开口（5）（2）和第二表面（10）的另一开口（12）。

5. 发明申请

WO2008012846A8 PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS 审中-公开
标题翻译：具有非平面运动停止结构的平面微电子设备
公开(公告)号：WO2008012846A8
公开(公告)日：2009-01-08
申请号：PCT/IT2006000576
申请日：2006-07-26
申请人： ST MICROELECTRONICS SRL , MERASSI ANGELO , CORTESE MARIO FRANCESCO , VIOLA FULVIO , SIMONI BARBARA , RUSCONI CLERICI BELTRAMI ANDRE
发明人： MERASSI ANGELO , CORTESE MARIO FRANCESCO , VIOLA FULVIO , SIMONI BARBARA , RUSCONI CLERICI BELTRAMI ANDRE
IPC分类号： B81B7/00 , G01P15/08
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2201/0242 , G01P15/08 , G01P15/125 , G01P2015/0828
摘要： Described herein is a microelectromechanical device (10) having a mobile mass (12) that undergoes a movement, in particular a spurious movement, in a first direction (z) in response to an external event; the device moreover has a stopper structure (14, 20) configured so as to stop said spurious movement. In particular, a stopper element (20) is fixedly coupled to the mobile mass (12) and is configured so as to abut against a stopper mass (14) in response to the spurious movement, thereby stopping it. In detail, the stopper element (20) is arranged on the opposite side of the stopper mass (14) with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass (12) and extends in the space occupied by the stopper mass, in the first direction (z).
摘要翻译：这里描述的是具有响应于外部事件在第一方向（z）上经历移动，特别是杂散运动的移动质量块（12）的微机电装置（10）。该装置还具有构造成停止所述杂散运动的止动结构（14,20）。特别地，止动元件（20）固定地联接到移动质量块（12），并且被配置为响应于伪运动而抵靠止动块（14），从而停止它。详细地说，止动元件（20）相对于杂散运动的方向设置在止动块（14）的相对侧上，从可移动质量块（12）所占据的空间突出，并在占据的空间通过止动块在第一方向（z）上。

6. 发明申请

WO2008012846A1 PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS 审中-公开
标题翻译：具有非平面运动停止结构的平面微电子设备
公开(公告)号：WO2008012846A1
公开(公告)日：2008-01-31
申请号：PCT/IT2006/000576
申请日：2006-07-26
申请人： STMICROELECTRONICS S.R.L. , MERASSI, Angelo , CORTESE, Mario, Francesco , VIOLA, Fultio , SIMONI, Barbara , RUSCONI CLERICI BELTRAMI, Andrea
发明人： MERASSI, Angelo , CORTESE, Mario, Francesco , VIOLA, Fultio , SIMONI, Barbara , RUSCONI CLERICI BELTRAMI, Andrea
IPC分类号： B81B7/00 , G01P15/08
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2201/0242 , G01P15/08 , G01P15/125 , G01P2015/0828
摘要： Described herein is a microelectromechanical device (10) having a mobile mass (12) that undergoes a movement, in particular a spurious movement, in a first direction (z) in response to an external event; the device moreover has a stopper structure (14, 20) configured so as to stop said spurious movement. In particular, a stopper element (20) is fixedly coupled to the mobile mass (12) and is configured so as to abut against a stopper mass (14) in response to the spurious movement, thereby stopping it. In detail, the stopper element (20) is arranged on the opposite side of the stopper mass (14) with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass (12) and extends in the space occupied by the stopper mass, in the first direction (z).
摘要翻译：这里描述的是具有响应于外部事件在第一方向（z）上经历移动，特别是杂散运动的移动质量块（12）的微机电装置（10）。该装置还具有构造成停止所述杂散运动的止动结构（14,20）。特别地，止动元件（20）固定地联接到移动质量块（12），并且被配置为响应于伪运动而抵靠止动块（14），从而停止它。详细地说，止动元件（20）相对于杂散运动的方向设置在止动块（14）的相对侧上，从可移动质量块（12）所占据的空间突出，并在占据的空间通过止动块在第一方向（z）上。

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