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1. 发明申请

WO2005022575A1 MICRO ELECTROMECHANICAL SYSTEM SWITCH. 审中-公开
标题翻译：微电子系统开关。
公开(公告)号：WO2005022575A1
公开(公告)日：2005-03-10
申请号：PCT/GB2004/003711
申请日：2004-08-27
申请人： QINETIQ LIMITED , BUNYAN, Robert, John, Tremayne , COMBES, David, Jonathon , BRUNSON, Kevin, Michael
发明人： BUNYAN, Robert, John, Tremayne , COMBES, David, Jonathon , BRUNSON, Kevin, Michael
IPC分类号： H01H59/00
CPC分类号： H01H57/00 , H01G5/18 , H01G5/40 , H01H59/0009 , H01H2057/006
摘要： A micro electromechanical system (MEMS) switch includes a fixed contact (24) and a moveable contact (35) on an armature (30). The switch has electrodes (22, 34) associated with both the fixed and moveable contacts for providing an electrostatic switch operation and piezoelectric material with associated electrodes (36, 40) for bending the armature upon application of an electric voltage and providing an initial piezoelectric switch operation followed by electrostatic switching and clamping. The armature is of curved shape which is bent away from the fixed contact when in a switch open condition with zero applied voltage. This gives a large, e.g. 3pm, switch gap in an OFF state which is reduced by piezoelectric operation suitable for electrostatic switch closing. A curved condition is provided by varying strain across the armature thickness, and is produced during manufacture of the switch.
摘要翻译：微机电系统（MEMS）开关包括电枢（30）上的固定触点（24）和可移动触点（35）。开关具有与用于提供静电开关操作的固定触点和可移动触点相关联的电极（22,34），以及具有相关电极（36,40）的压电材料，用于在施加电压时弯曲电枢并提供初始压电开关操作后进行静电切换和夹紧。电枢是弯曲形状，当处于零施加电压的开关打开状态时，电枢弯曲离开固定触点。这给出了大的例如 3pm，开关间隙处于关闭状态，通过适合于静电开关闭合的压电操作减小。通过在电枢厚度上变化的应变提供弯曲状态，并且在开关的制造期间产生弯曲状态。

2. 发明申请

WO2003078302A3 MICRO-ELECTROMECHANICAL SYSTEMS 审中-公开
公开(公告)号：WO2003078302A3
公开(公告)日：2003-09-25
申请号：PCT/EP2003/050073
申请日：2003-03-19
申请人： QINETIQ LIMITED , BRUNSON, Kevin, Michael , HAMILTON, David, James , KING, David, Oury , McNIE, Mark, Edward
发明人： BRUNSON, Kevin, Michael , HAMILTON, David, James , KING, David, Oury , McNIE, Mark, Edward
IPC分类号： B81B7/02
摘要： A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring (11), forcing electrodes (1a, 1b, 5a, 5b) for driving the ring into resonance, and sensing electrodes (3a, 3b, 7a, 7b) providing an electrical output signal dependent on oscillation of the ring as a result of such forcing and any externally applied force. A positive feedback circuit is provided for feeding back a signal dependent on the output signal of the sensing electrodes (3a, 3b, 7a, 7b) to the forcing electrodes (1a, 1b, 5a, 5b) in order to sustain oscillation of the ring. The use of positive feedback to drive the forcing electrodes in order to sustain oscillation of the ring is highly advantageous in such an application since it produces a system which exhibits very low phase noise of a magnitude considerably less than the phase noise experienced in use of a phase-lock loop circuit to sustain oscillation.

3. 发明申请

WO2005029107A1 RESONANT MAGNETOMETER DEVICE 审中-公开
标题翻译：共振磁铁计装置
公开(公告)号：WO2005029107A1
公开(公告)日：2005-03-31
申请号：PCT/GB2004/004017
申请日：2004-09-21
申请人： QINETIQ LIMITED , KING, David, Oury , BRUNSON, Kevin, Michael
发明人： KING, David, Oury , BRUNSON, Kevin, Michael
IPC分类号： G01R33/028
CPC分类号： G01R33/0283 , G01R33/0286
摘要： A resonant magnetometer (20) is described that comprises a substrate having a member (26) and means for passing an alternating current (AC) through said oscillatory member (26). The magnetometer is characterised in that driving means (46,48) are also provided to impart a magnetic field independent oscillatory force to said oscillatory member (26). A micro-electromechanical systems (MEMS) implementation of the magnetometer is described.
摘要翻译：描述了一种谐振磁力计（20），其包括具有构件（26）的基板和用于使交流（AC）通过所述振荡构件（26）的装置。磁力计的特征在于，还提供驱动装置（46,48）以向所述振荡构件（26）施加与磁场无关的振荡力。描述了磁力计的微机电系统（MEMS）实现。

4. 发明申请

WO2007091053A1 OPTICAL MODULATOR 审中-公开
标题翻译：光学调制器
公开(公告)号：WO2007091053A1
公开(公告)日：2007-08-16
申请号：PCT/GB2007/000414
申请日：2007-02-06
申请人： QINETIQ LIMITED , MCNIE, Mark, Edward , LEWIS, Keith, Loder , SCOTT, Andrew, Maxwell , SLINGER, Christopher, William , BRUNSON, Kevin, Michael , SMITH, Gilbert, William
发明人： MCNIE, Mark, Edward , LEWIS, Keith, Loder , SCOTT, Andrew, Maxwell , SLINGER, Christopher, William , BRUNSON, Kevin, Michael , SMITH, Gilbert, William
IPC分类号： G02B5/28 , G02B26/00
CPC分类号： G02B26/001 , G02B5/281 , G02B5/284
摘要： A micro-opto-electro-mechanical systems (MOEMS) electro optical modulator (2) having an electrically tuneable optical resonator comprising an asymmetric Fabry-Perot etalon incorporating a mirror (10) resiliency biased with respect to a substrate (13) and moveable in relation thereto in response to a voltage applied there-between. The optical modulator (2) is capable of modulating electromagnetic radiation having a plurality of wavelengths. The modulator is adapted to modulate the transmission of short wave infrared radiation (SWIR), medium wave infrared radiation (MWIR) and long wave infrared radiation (LWIR) and the reflection of visible radiation. A spatial optical modulator having a plurality of said MOEMS optical modulators (2). A method of addressing said spatial optical modulator.
摘要翻译：一种微电光机电系统（MOEMS）电光调制器（2），其具有电可调光学谐振器，其包括不对称法布里 - 珀罗标准具，其包括相对于基板（13）偏置的反射镜（10）弹性并可在与其之间施加的电压的关系。光调制器（2）能够调制具有多个波长的电磁辐射。调制器适用于调制短波红外辐射（SWIR），中波红外辐射（MWIR）和长波红外辐射（LWIR）以及可见光辐射的透射。具有多个所述MOEMS光学调制器（2）的空间光学调制器。一种寻址所述空间光调制器的方法。

5. 发明申请

WO2007045875A1 OPTICAL MODULATION 审中-公开
标题翻译：光学调制
公开(公告)号：WO2007045875A1
公开(公告)日：2007-04-26
申请号：PCT/GB2006/003887
申请日：2006-10-19
申请人： QINETIQ LIMITED , SCOTT, Andrew, Maxwell , MCNIE, Mark, Edward , BRUNSON, Kevin, Michael
发明人： SCOTT, Andrew, Maxwell , MCNIE, Mark, Edward , BRUNSON, Kevin, Michael
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： An optical modulator comprising a spacing-controllable etalon having at least one sprung micro- mirror suspended above a substrate. At least one electrically insulating stop is provided between the micro-mirror and the substrate to avoid short-circuit when the micro-mirror is drawn towards the substrate by an applied voltage. An optical detector detects the time of arrival of a first laser pulse. A control circuit predicts from this an arrival time of the next incident laser pulse and, responsive to a control signal, either retains the micro-mirror in its pulled-down state held against the insulating stops or releases the micro-mirror at a time predicted to maximise or minimise the light transmitted through the modulator. After a time interval calculated to permit a predetermined number of mechanical oscillations, the micro-mirror is pulled back down onto the stops.
摘要翻译：一种光学调制器，其包括间隔可控的标准具，其具有悬挂在衬底上的至少一个弹簧微镜。在微反射镜和基板之间设置至少一个电绝缘止动件，以避免当微镜被施加电压朝向衬底拉动时短路。光检测器检测第一激光脉冲的到达时间。控制电路从此预测下一个入射激光脉冲的到达时间，并且响应于控制信号，将微镜保持在其抵抗绝缘停止的下拉状态或在预测的时间释放微镜以最大化或最小化透过调制器的光。在计算出允许预定数量的机械振荡的时间间隔之后，微镜被拉回到停止点上。

6. 发明申请

WO2005062064A1 COMBINED MAGNETIC FIELD GRADIENT AND MAGNETIC FIELD STRENGTH SENSOR 审中-公开
标题翻译：组合磁场梯度和磁场强度传感器
公开(公告)号：WO2005062064A1
公开(公告)日：2005-07-07
申请号：PCT/GB2004/005267
申请日：2004-12-16
申请人： QINETIQ LIMITED , KING, David, Oury , BRUNSON, Kevin, Michael
发明人： KING, David, Oury , BRUNSON, Kevin, Michael
IPC分类号： G01R33/028
CPC分类号： G01R33/0286 , G01R33/022 , G01R33/0283
摘要： A magnetic field sensor device (2) is described that comprises an oscillatory member (8) and current control means (6). The current control means (6) is arranged to pass an alternating current (AC) along at least first (10) and second (12) current paths provided through the oscillatory member (8) and is arranged to provide magnetic gradiometer mode operation (i.e. to measure magnetic field gradient) in which current flow through the first current path (10) is in substantially the opposite direction to current flow through the second current path (12). The current control means (6) can also prove magnetometer mode operation (i.e. to measure magnetic field strength). The magnetic field sensor (2) may be used in a compass.
摘要翻译：描述了包括振荡构件（8）和电流控制装置（6）的磁场传感器装置（2）。电流控制装置（6）被布置成沿着通过振荡构件（8）提供的至少第一（10）和第二（12）电流路径传递交流电（AC），并且布置成提供磁梯度计模式操作以测量磁场梯度），其中流过第一电流路径（10）的电流基本上与通过第二电流路径（12）的电流相反。电流控制装置（6）还可以证明磁力计模式操作（即测量磁场强度）。磁场传感器（2）可以用于罗盘。

7. 发明申请

WO2003083886A1 SWITCH DEVICE 审中-公开
标题翻译：开关装置
公开(公告)号：WO2003083886A1
公开(公告)日：2003-10-09
申请号：PCT/GB2003/001304
申请日：2003-03-26
申请人： QINETIQ LIMITED , BRUNSON, Kevin, Michael , COMBES, David, Jonathan , KINGS, David, Oury
发明人： COMBES, David, Jonathan , KINGS, David, Oury
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H47/325 , H01H2059/0036 , H01H2059/0063
摘要： The present invention relates to a switch device (10) comprising a first actuation electrode (11) and a second actuation electrode (12) and a first contact electrode (16) and a second contact electrode (17), the first actuation electrode (11) and first contact electrode (16) being mounted on at least part of, or forming at least part of, a resiliently flexible arm (13), the switch further comprising an electrical actuation means (21, 22, 23) for, when in use, applying a first inter-electrode potential difference between the first electrode (11) and the second electrode (12); characterised in that the electrical actuation means further comprises a resonance means for, when in use, varying the first inter-electrode potential difference in such a manner that mechanical resonance is caused to occur in the resiliently flexible arm (13). The resonance means comprises an electrical feedback circuit.
摘要翻译：本发明涉及包括第一致动电极（11）和第二致动电极（12）和第一接触电极（16）和第二接触电极（17）的开关装置（10），第一致动电极（11））和第一接触电极（16）安装在弹性柔性臂（13）的至少一部分或至少部分形成弹性柔性臂（13），所述开关还包括电致动装置（21,22,23），用于当处于使用在第一电极（11）和第二电极（12）之间施加第一电极间电位差; 其特征在于，电致动装置还包括谐振装置，用于在使用时改变第一电极间电位差，使得在弹性柔性臂（13）中发生机械共振。谐振装置包括电反馈电路。

8. 发明申请

WO2003078302A2 MICRO-ELECTROMECHANICAL SYSTEMS 审中-公开
标题翻译：微电子系统
公开(公告)号：WO2003078302A2
公开(公告)日：2003-09-25
申请号：PCT/EP2003/050073
申请日：2003-03-19
申请人： QINETIQ LIMITED , BRUNSON, Kevin, Michael , HAMILTON, David, James , KING, David, Oury , McNIE, Mark, Edward
发明人： BRUNSON, Kevin, Michael , HAMILTON, David, James , KING, David, Oury , McNIE, Mark, Edward
IPC分类号： B81B7/02
CPC分类号： G01C19/5684
摘要： A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring (11), forcing electrodes (1a, 1b, 5a, 5b) for driving the ring into resonance, and sensing electrodes (3a, 3b, 7a, 7b) providing an electrical output signal dependent on oscillation of the ring as a result of such forcing and any externally applied force. A positive feedback circuit is provided for feeding back a signal dependent on the output signal of the sensing electrodes (3a, 3b, 7a, 7b) to the forcing electrodes (1a, 1b, 5a, 5b) in order to sustain oscillation of the ring. The use of positive feedback to drive the forcing electrodes in order to sustain oscillation of the ring is highly advantageous in such an application since it produces a system which exhibits very low phase noise of a magnitude considerably less than the phase noise experienced in use of a phase-lock loop circuit to sustain oscillation.
摘要翻译：微机电系统（MEMS）包括：包含振荡环（11）的基板，迫使用于将环驱动到谐振中的电极（1a，1b，5a，5b）和感测电极（3a，3b，7a，7b）由于这种强制和任何外部施加的力，取决于环的振荡的电输出信号。提供正反馈电路，用于将取决于感测电极（3a，3b，7a，7b）的输出信号的信号反馈到强制电极（1a，1b，5a，5b），以维持环的振荡。使用正反馈来驱动强制电极以维持环的振荡在这种应用中是非常有利的，因为它产生的系统显示出非常低的相位噪声，其幅度远远小于使用锁相环电路来维持振荡。

9. 发明申请

WO2003078301A2 MICRO-ELECTROMECHANICAL SYSTEMS 审中-公开
标题翻译：微电子系统
公开(公告)号：WO2003078301A2
公开(公告)日：2003-09-25
申请号：PCT/EP2003/050071
申请日：2003-03-19
申请人： QINETIQ LIMITED , BRUNSON, Kevin, Michael , BUNYAN, Robert, John, Tremayne , HAMILTON, David, James , McNIE, Mark, Edward
发明人： BRUNSON, Kevin, Michael , BUNYAN, Robert, John, Tremayne , HAMILTON, David, James , McNIE, Mark, Edward
IPC分类号： B81B7/02
CPC分类号： B81C1/00246 , B81C2203/0735
摘要： A MEMS incorporating a sensing element and a JFET electrically connected to the sensing element is fabricated by the steps of: forming a first layer of electrically insulating barrier material on a surface of a substrate; patterning the first layer so as to expose a first region of the substrate, doping by ion implantation the first region of the substrate to form a well region of the JFET; forming a second layer of barrier material on the surface of both the first layer and the first region of the substrate; patterning the barrier material so as to expose a part of the first region of the substrate; doping by ion implantation the exposed part of the first region of the substrate to form source and drain contact areas of the JFET; patterning the barrier material so as to expose a second region of the substrate; and doping by ion implantation the second region of the substrate to form gate and substrate contact areas of the JFET in a single implantation step. The monolithic integration of the JFET with the MEMS enables the bond wires for interconnecting the sensing element and the associated sensing electronic circuitry to be provided only after the buffering stage of such circuitry. This means that the bond wires interconnecting the buffering stage and the remainder of the circuitry are connected to a low impedance node which is less sensitive to noise and parasitic capacitive loading. Thus greater detection accuracy can be achieved by virtue of the fact that the parasitic capacitances are reduced to a minimum.
摘要翻译：通过以下步骤制造结合感测元件和电连接到感测元件的JFET的MEMS：在衬底的表面上形成第一层电绝缘阻挡材料; 图案化第一层以暴露衬底的第一区域，通过离子注入掺杂衬底的第一区域以形成JFET的阱区; 在所述基板的所述第一层和所述第一区域的表面上形成第二层阻挡材料; 图案化所述阻挡材料以暴露所述基板的所述第一区域的一部分; 通过离子注入掺杂衬底的第一区域的暴露部分以形成JFET的源极和漏极接触区域; 图案化阻挡材料以暴露衬底的第二区域; 以及通过离子注入来掺杂衬底的第二区域，以在单个注入步骤中形成JFET的栅极和衬底接触区域。 JFET与MEMS的单片集成使得仅在这种电路的缓冲级之后才提供用于将感测元件和相关联的感测电子电路互连的接合线。这意味着将缓冲级和电路的其余部分互连的接合线连接到对噪声和寄生电容负载较不敏感的低阻抗节点。因此，通过将寄生电容减小到最小的事实可以实现更高的检测精度。

10. 发明申请

WO1998021757A1 INFRA-RED DETECTOR 审中-公开
标题翻译：红外探测器
公开(公告)号：WO1998021757A1
公开(公告)日：1998-05-22
申请号：PCT/GB1997003053
申请日：1997-11-06
申请人： THE SECRETARY OF STATE FOR DEFENCE , ANTHONY, Carl, John , BRUNSON, Kevin, Michael , ELLIOTT, Charles, Thomas , GORDON, Neil, Thomson , PHILLIPS, Timothy, Jonathan , UREN, Michael, John
发明人： THE SECRETARY OF STATE FOR DEFENCE
IPC分类号： H01L31/113
CPC分类号： H01L31/1136
摘要： An infra-red detector (10) comprises a detector region (38) and a collector region separated by a barrier region. Operation of these regions is controlled by potentials applied to respective gate electrodes (30, 34, 32), insulated from the detector, barrier and collector regions by an insulating oxide layer (36). The detector, barrier, and collector regions may be arranged on a silicon substrate (24). In operation, photo-excited electrons are generated in the detector region and these cross the barrier region for readout from the collector region.
摘要翻译：红外检测器（10）包括检测器区域（38）和由屏障区域分隔的收集区域。这些区域的操作由施加到通过绝缘氧化物层（36）与检测器，阻挡层和集电极区绝缘的各个栅极（30,34,32）的电位控制。检测器，阻挡层和集电极区域可以布置在硅衬底（24）上。在操作中，在检测器区域中产生光激发电子，并且这些电子跨越势垒区域以从集电极区域读出。

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