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    • 2. 发明申请
    • MICRO-ELECTROMECHANICAL SYSTEMS
    • 微电子系统
    • WO2003078302A2
    • 2003-09-25
    • PCT/EP2003/050073
    • 2003-03-19
    • QINETIQ LIMITEDBRUNSON, Kevin, MichaelHAMILTON, David, JamesKING, David, OuryMcNIE, Mark, Edward
    • BRUNSON, Kevin, MichaelHAMILTON, David, JamesKING, David, OuryMcNIE, Mark, Edward
    • B81B7/02
    • G01C19/5684
    • A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring (11), forcing electrodes (1a, 1b, 5a, 5b) for driving the ring into resonance, and sensing electrodes (3a, 3b, 7a, 7b) providing an electrical output signal dependent on oscillation of the ring as a result of such forcing and any externally applied force. A positive feedback circuit is provided for feeding back a signal dependent on the output signal of the sensing electrodes (3a, 3b, 7a, 7b) to the forcing electrodes (1a, 1b, 5a, 5b) in order to sustain oscillation of the ring. The use of positive feedback to drive the forcing electrodes in order to sustain oscillation of the ring is highly advantageous in such an application since it produces a system which exhibits very low phase noise of a magnitude considerably less than the phase noise experienced in use of a phase-lock loop circuit to sustain oscillation.
    • 微机电系统(MEMS)包括:包含振荡环(11)的基板,迫使用于将环驱动到谐振中的电极(1a,1b,5a,5b)和感测电极(3a,3b,7a,7b) 由于这种强制和任何外部施加的力,取决于环的振荡的电输出信号。 提供正反馈电路,用于将取决于感测电极(3a,3b,7a,7b)的输出信号的信号反馈到强制电极(1a,1b,5a,5b),以维持环的振荡 。 使用正反馈来驱动强制电极以维持环的振荡在这种应用中是非常有利的,因为它产生的系统显示出非常低的相位噪声,其幅度远远小于使用 锁相环电路来维持振荡。
    • 3. 发明申请
    • MICRO-ELECTROMECHANICAL SYSTEMS
    • 微电子系统
    • WO2003078301A2
    • 2003-09-25
    • PCT/EP2003/050071
    • 2003-03-19
    • QINETIQ LIMITEDBRUNSON, Kevin, MichaelBUNYAN, Robert, John, TremayneHAMILTON, David, JamesMcNIE, Mark, Edward
    • BRUNSON, Kevin, MichaelBUNYAN, Robert, John, TremayneHAMILTON, David, JamesMcNIE, Mark, Edward
    • B81B7/02
    • B81C1/00246B81C2203/0735
    • A MEMS incorporating a sensing element and a JFET electrically connected to the sensing element is fabricated by the steps of: forming a first layer of electrically insulating barrier material on a surface of a substrate; patterning the first layer so as to expose a first region of the substrate, doping by ion implantation the first region of the substrate to form a well region of the JFET; forming a second layer of barrier material on the surface of both the first layer and the first region of the substrate; patterning the barrier material so as to expose a part of the first region of the substrate; doping by ion implantation the exposed part of the first region of the substrate to form source and drain contact areas of the JFET; patterning the barrier material so as to expose a second region of the substrate; and doping by ion implantation the second region of the substrate to form gate and substrate contact areas of the JFET in a single implantation step. The monolithic integration of the JFET with the MEMS enables the bond wires for interconnecting the sensing element and the associated sensing electronic circuitry to be provided only after the buffering stage of such circuitry. This means that the bond wires interconnecting the buffering stage and the remainder of the circuitry are connected to a low impedance node which is less sensitive to noise and parasitic capacitive loading. Thus greater detection accuracy can be achieved by virtue of the fact that the parasitic capacitances are reduced to a minimum.
    • 通过以下步骤制造结合感测元件和电连接到感测元件的JFET的MEMS:在衬底的表面上形成第一层电绝缘阻挡材料; 图案化第一层以暴露衬底的第一区域,通过离子注入掺杂衬底的第一区域以形成JFET的阱区; 在所述基板的所述第一层和所述第一区域的表面上形成第二层阻挡材料; 图案化所述阻挡材料以暴露所述基板的所述第一区域的一部分; 通过离子注入掺杂衬底的第一区域的暴露部分以形成JFET的源极和漏极接触区域; 图案化阻挡材料以暴露衬底的第二区域; 以及通过离子注入来掺杂衬底的第二区域,以在单个注入步骤中形成JFET的栅极和衬底接触区域。 JFET与MEMS的单片集成使得仅在这种电路的缓冲级之后才提供用于将感测元件和相关联的感测电子电路互连的接合线。 这意味着将缓冲级和电路的其余部分互连的接合线连接到对噪声和寄生电容负载较不敏感的低阻抗节点。 因此,通过将寄生电容减小到最小的事实可以实现更高的检测精度。
    • 5. 发明申请
    • GOLF SIMULATOR
    • 高尔夫模拟器
    • WO2003045506A2
    • 2003-06-05
    • PCT/GB2002/005224
    • 2002-11-21
    • TILTING TEES LIMITEDHUTCHON, Bruce, Gordon, ImrieHAMILTON, David, James
    • HUTCHON, Bruce, Gordon, ImrieHAMILTON, David, James
    • A63B
    • A63B69/3652A63B69/3658
    • The present invention provides a golf simulator (80) comprising a launch area (81) facing a screen (82) at which the ball is driven and which is used to display an image (86) of part of a golf course. Sensor devices (83) detect at least one of: the impact of a golf ball on the screen (82), the flight of the ball towards the screen (82), and the trajectory of the golf club head during the golf club swing. The launch area is provided by a playing surface panel of a tiltable tee apparatus (81). At least one displacement device (95, 96) for tilting the playing surface panel (81) so as to provide a desired slope angle α and slope direction β relative to a golf driving direction. A computer apparatus (84) is operatively connected to the sensor devices (83) and to the displacement device (95, 96), and programmed so as to control display of part of a golf course on the screen (82), based on the topography of the golf course, and the position of the launch area in relation to the golf course, and compute an estimated trajectory of the ball on the basis of the inputs received from the sensor devices (83), compute an estimated position of the ball based on the estimated trajectory and the ball landing zone topography. The computer (84) then controls the display on the screen (82) so as to display the estimated position of the ball on the screen image (86), computes the slope angle α and slope direction β of the estimated position or lie of the ball. The computer (84) further controls the displacement device (95, 96) so as to bring the playing surface panel slope angle α and slope direction β into correspondence with the computed slope angle and slope direction so that the next drive can be played from a realistic lie.
    • 本发明提供了一种高尔夫模拟器(80),其包括面向屏幕(82)的发射区域(81),球体被驱动并且用于显示高尔夫球场部分的图像(86)。 传感器装置(83)检测高尔夫球在屏幕(82)上的冲击,球向屏幕(82)的飞行以及高尔夫球杆摆动期间的高尔夫球杆头的轨迹中的至少一个。 发射区域由可倾斜T形设备(81)的游戏面板提供。 至少一个位移装置(95,96),用于使所述游戏表面面板(81)倾斜以提供相对于高尔夫球方向的期望的倾斜角α和斜率方向β。 计算机设备(84)可操作地连接到传感器设备(83)和移动设备(95,96),并且被编程以便基于屏幕(82)控制高尔夫球场的一部分的显示。 高尔夫球场的地形以及发射区域相对于高尔夫球场的位置,并且基于从传感器装置(83)接收的输入来计算球的估计轨迹,计算球的估计位置 基于估计的轨迹和球落地区的地形。 然后,计算机(84)控制屏幕(82)上的显示,以便在屏幕图像(86)上显示球的估计位置,计算估计位置的倾斜角α和斜率方向β 球。 计算机(84)进一步控制位移装置(95,96),以使播放表面面板倾斜角α和斜率方向β对应于所计算的倾斜角度和斜率方向,使得下一个驱动器可以从 现实的谎言