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61. 发明申请

WO2006130165A2 DETECTING EVENTS OF INTEREST USING QUANTUM RESONANCE INTERFEROMETRY 审中-公开
标题翻译：使用量子共振干涉法检测利益事件
公开(公告)号：WO2006130165A2
公开(公告)日：2006-12-07
申请号：PCT/US2005/031382
申请日：2005-09-02
申请人： VIALOGY CORP. , GULATI, Sandeep
发明人： GULATI, Sandeep
IPC分类号： G06F19/00
CPC分类号： G01N33/48 , G01B9/02084 , G01B2290/55 , G06F19/00 , G06F19/10 , G06F19/20 , G06F19/24 , G10L21/02 , G10L21/0208
摘要： Incoming data from, for example, an array of detectors, may be received. A dynamical system may be initialized corresponding to a modality of the incoming data so that a measurement probe based on the initialized dynamical system may be generated. Such a measurement probe may be injected into a quantum mechanical system so that it may be determined whether the injection of the measurement probe into the quantum mechanical system results in a collapse of the quantum mechanical system. Thereafter, it may be determined that a signal is present within the incoming data if the quantum mechanical system collapses. Related methods, apparatuses, systems, and computer-program products are also described.
摘要翻译：可以接收来自例如检测器阵列的传入数据。可以根据输入数据的模态对动态系统进行初始化，从而可以生成基于初始化的动力系统的测量探针。可以将这样的测量探针注入到量子力学系统中，从而可以确定将测量探针注入量子力学系统是否导致量子力学系统的崩溃。此后，如果量子力学系统崩溃，则可以确定在输入数据内存在信号。还描述了相关方法，装置，系统和计算机程序产品。

62. 发明申请

WO2006125131A2 METHOD AND SYSTEM FOR ANALYZING LOW-COHERENCE INTERFEROMETRY SIGNALS FOR INFORMATION ABOUT THIN FILM STRUCTURES 审中-公开
标题翻译：用于分析薄膜结构信息的低相干干涉信号的方法和系统
公开(公告)号：WO2006125131A2
公开(公告)日：2006-11-23
申请号：PCT/US2006/019350
申请日：2006-05-18
申请人： ZYGO CORPORATION , DE GROOT, Peter
发明人： DE GROOT, Peter
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B11/2441 , G01B9/02084 , G01B9/02087 , G01B9/02088 , G01B9/0209 , G01N21/8422
摘要： Methods and systems are disclosed for analyzing a scanning interferometry signal. Steps include: providing a scanning interferometry signal produced by a scanning interferometer for a first location of a test object (e.g., a sample having a thin film); providing a model function of the scanning interferometry signal produced by the scanning interferometer, wherein the model function is parametrized by one or more parameter values; fitting the model function to the scanning interferometry signal for each of a series of shifts in scan position between the model function and the scanning interferometry signal by varying the parameter values; and determining information about the test object (e.g., a surface height or height profile, and/or a thickness or thickness profile for a thin film in the test object) at the first location based on the fitting.
摘要翻译：公开了用于分析扫描干涉测量信号的方法和系统。步骤包括：提供由扫描干涉仪产生的用于测试对象（例如，具有薄膜的样本）的第一位置的扫描干涉测量信号; 提供由扫描干涉仪产生的扫描干涉测量信号的模型函数，其中所述模型函数由一个或多个参数值参数化; 通过改变参数值，将模型函数与模型函数和扫描干涉测量信号之间的扫描位置的一系列移位中的每一个拟合到扫描干涉测量信号; 以及基于所述拟合来确定关于所述第一位置处的所述测试对象的信息（例如，表面高度或高度分布，以及/或所述测试对象中的薄膜的厚度或厚度分布）。

63. 发明申请

WO2005029193A3 INTERFEROMETRIC ANALYSIS OF SURFACES. 审中-公开
标题翻译：表面的平均分析。
公开(公告)号：WO2005029193A3
公开(公告)日：2005-10-06
申请号：PCT/US2004030196
申请日：2004-09-15
申请人： ZYGO CORP , DE GROOT PETER J
发明人： DE GROOT PETER J
IPC分类号： G01B9/02 , G01B11/00 , G01B11/06 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
摘要翻译：用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。扫描低相干干涉信号包括两个或更多个重叠的低相干干扰信号，每个干涉信号由相应的接口产生。基于低相干干涉信号，确定至少一个界面的空间属性。在一些情况下，该确定基于低相干干扰信号的子集，而不是整个信号。或者或另外，该确定可以基于模板，其可以指示用于获得低相干干涉信号的干涉仪的仪器响应。

64. 发明申请

WO2005047813A1 METHOD AND APPARATUS FOR PERFORMING OPTICAL IMAGING USING FREQUENCY-DOMAIN INTERFEROMETRY 审中-公开
标题翻译：使用频域干涉法进行光学成像的方法和装置
公开(公告)号：WO2005047813A1
公开(公告)日：2005-05-26
申请号：PCT/US2004/029148
申请日：2004-09-08
申请人： THE GENERAL HOSPITAL CORPORATION , YUN, Seok, Hyun, Ph., D. , BOUMA, Brett, Eugene, Ph., D. , TEARNEY, Guillermo, J., MD, Ph., D. , BOER, Johannes, Fitzgerald de, Ph., D.
发明人： YUN, Seok, Hyun, Ph., D. , BOUMA, Brett, Eugene, Ph., D. , TEARNEY, Guillermo, J., MD, Ph., D. , BOER, Johannes, Fitzgerald de, Ph., D.
IPC分类号： G01B9/02
CPC分类号： H01S5/5045 , A61B5/0059 , A61B5/0066 , A61B5/7257 , G01B9/02002 , G01B9/02004 , G01B9/02043 , G01B9/02075 , G01B9/02081 , G01B9/02083 , G01B9/02084 , G01B9/0209 , G01B9/02091 , G01B2290/45 , G01B2290/70 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0218 , G01J3/0264 , G01J3/453 , G01J9/0215 , G01N21/4795 , G02B6/3604 , G02B26/12 , G02B27/48 , G02F1/093 , G02F1/11 , H01S3/0071 , H01S3/0078 , H01S3/08009 , H01S3/08063 , H01S3/105 , H01S3/1068 , H01S5/0071 , H01S5/0078 , H01S5/1025 , H01S5/14 , H01S5/141 , H01S5/146
摘要： An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state. The first and/or second electro-magnetic radiations may have a spectrum whose mean frequency changes substantially continuously over time at a tuning speed that is greater than 100 Tera Hertz per millisecond.
摘要翻译：提供了一种装置和方法。特别地，可以向样品提供至少一个第一电磁辐射，并且可以向非反射参考提供至少一个第二电磁辐射。第一和/或第二辐射的频率随时间变化。在与第一辐射相关联的至少一个第三辐射与与第二辐射相关联的至少一个第四辐射之间检测到干扰。或者，第一电磁辐射和/或第二电磁辐射具有随时间变化的光谱。频谱可以在特定时间包含多个频率。此外，可以在第一偏振状态下检测第三辐射与第四辐射之间的干涉信号。此外，可能优选在与第一偏振状态不同的第二偏振状态下检测第三和第四辐射之间的另外的干涉信号。第一和/或第二电磁辐射可以具有在每毫秒大于100Tera赫兹的调谐速度下，其平均频率随时间而基本连续变化的频谱。

65. 发明申请

WO2004079294A3 CHARACTERIZING AND PROFILING COMPLEX SURFACE STRUCTURES USING SCANNING INTERFEROMETRY 审中-公开
标题翻译：使用扫描干涉法表征和分析复杂的表面结构
公开(公告)号：WO2004079294A3
公开(公告)日：2005-05-19
申请号：PCT/US2004007014
申请日：2004-03-08
申请人： ZYGO CORP , DE GROOT PETER J , STONER ROBERT , DE LEGA XAVIER COLONNA
发明人： DE GROOT PETER J , STONER ROBERT , DE LEGA XAVIER COLONNA
IPC分类号： G01B9/02 , G01B11/06 , G01B11/24
CPC分类号： G01B9/0201 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B11/0675 , G01B2290/70
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test objects, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform (eg. A Fourier transform) of a scanning interferometry signal corresponding to each of the models of the test object. In a second aspect the models correspond to a fixed surface height and they are parametrized by a series of characteristics different from the fixed surface height. In a third aspect the comparing comprises accounting for systematic contributions to the interferometry signal.
摘要翻译：一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。对应于多个模型的信息可以包括关于与测试对象的每个模型相对应的扫描干涉测量信号的变换的至少一个幅度分量（例如，傅里叶变换）的信息。在第二方面，模型对应于固定的表面高度，并且它们由与固定表面高度不同的一系列特征参数化。在第三方面，比较包括考虑对干涉测量信号的系统贡献。

66. 发明申请

WO2005029192A2 TRIANGULATION METHODS AND SYSTEMS FOR PROFILING SURFACES THROUGH A THIN FILM COATING 审中-公开
标题翻译：通过薄膜涂层分类表面的三角法和系统
公开(公告)号：WO2005029192A2
公开(公告)日：2005-03-31
申请号：PCT/US2004030051
申请日：2004-09-15
申请人： ZYGO CORP , DE LEGA XAVIER COLONNA , DE GROOT PETER J , KUCHEL MICHAEL
发明人： DE LEGA XAVIER COLONNA , DE GROOT PETER J , KUCHEL MICHAEL
IPC分类号： G01B9/02 , G01B11/00 , G01B11/06 , G03F7/20 , G03F9/00 , G01B11/02
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： An apparatus for positioning an object having a substrate and an overlying film and a portion of a photolithography apparatus relative to one another includes a photolithography apparatus relative to one another includes a photolithography system, a positioner, an optical system, and a processor. The photolithography system is configured to illuminate a portion of an object with an first light pattern and includes a reference surface. The positioner can change a relative position between the photolithography system and the object. The light projector is configured to project a second light pattern on the overlying thin film of the object. The optical system images light of the second light pattern that is diffusely scattered by the substrate. The processor is configured to determine a spatial property of the object based on the diffusely scatterd light and operate the positioner to change the relative position between the photolitography system and the object.
摘要翻译：一种用于定位具有基板和上覆膜的对象的设备以及光刻设备的一部分相对于彼此包括的光刻设备包括光刻系统，定位器，光学系统和处理器。光刻系统被配置为用第一光图案照亮物体的一部分并且包括参考表面。定位器可以改变光刻系统和物体之间的相对位置。光投影仪被配置为将第二光图案投影在物体的上覆薄膜上。光学系统对由基板漫反射散射的第二光图案的光进行成像。处理器被配置为基于漫散射的光来确定对象的空间属性，并且操作定位器以改变光学照相系统和对象之间的相对位置。

67. 发明申请

WO2003054474A1 METHOD AND APPARATUS FOR CALIBRATING A WAVELENGTH-TUNING INTERFEROMETER 审中-公开
标题翻译：用于校准波长调谐干扰仪的方法和装置
公开(公告)号：WO2003054474A1
公开(公告)日：2003-07-03
申请号：PCT/US2002/039457
申请日：2002-12-10
申请人： ZYGO CORPORATION , DECK, Leslie, L.
发明人： DECK, Leslie, L.
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02004 , G01B9/02069 , G01B9/02084 , G01B2290/60 , G01J9/0246
摘要： The invention features a system including: i) a frequency-tunable light source (140); ii) an interferometer which during operation directs different portions of an optical wave front derived from the light source (150) to multiple surfaces (121, 102) and recombines the different portions to form an optical interference image (105a, 105b); iii) a multi-element photo-detector (170) positioned to measure an interference signal at different locations of the optical interference image in response to varying the frequency of the light source; and iv) an electronic controller (190) coupled to the light source and the photo-detector. The electronic controller varies the frequency of light at a plurality of tuning rates and records interference signals corresponding to each of said tuning rates corresponding to a determined spectral peak optical interference image.
摘要翻译：本发明的特征在于一种系统，包括：i）可调频光源（140）; ii）干涉仪，其在操作期间将从光源（150）导出的光波阵面的不同部分引导到多个表面（121,102），并将不同部分重新组合以形成光学干涉图像（105a，105b）; iii）多元素光检测器（170），其被定位成响应于改变所述光源的频率而在所述光学干涉图像的不同位置处测量干扰信号; 以及iv）耦合到所述光源和所述光检测器的电子控制器（190）。电子控制器以多个调谐速率改变光的频率并且记录与对应于确定的光谱峰值光学干涉图像的每个所述调谐速率对应的干扰信号。

68. 发明申请

WO2002082008A1 A METHOD AND APPARATUS OF TWO WAVELENGTH INTERFEROMETRY FOR MEASURING ACCURATE HEIGHT OF SMALL STEP COMPOSED OF TWO DIFFERENT MATERIALS 审中-公开
标题翻译：用于测量由两种不同材料组成的小步骤的精确高度的两个波长干涉测量方法和装置
公开(公告)号：WO2002082008A1
公开(公告)日：2002-10-17
申请号：PCT/KR2002/000609
申请日：2002-04-08
申请人： KAIST , KIM, Seung-Woo , PARK, Min-Cheol
发明人： KIM, Seung-Woo , PARK, Min-Cheol
IPC分类号： G01B9/02
CPC分类号： G01B11/0608 , G01B9/02007 , G01B9/02057 , G01B9/02084 , G01B9/0209
摘要： This invention is on a measurement method and apparatus for measuring the accurate height of a very small step composed of two different flat materials. In this method, two wavelength-white light interferometry is used and the measuring error caused by the change in phase difference by two materials is compensated by a unique equation.
摘要翻译：本发明是用于测量由两种不同平板材料组成的非常小的台阶的精确高度的测量方法和装置。在这种方法中，使用两种波长 - 白光干涉测量法，由两种材料的相位差变化引起的测量误差由一个独特的方程补偿。

69. 发明申请

WO0136901A9 SYSTEMS AND METHODS FOR QUANTIFYING NONLINEARITIES IN INTERFEROMETRY SYSTEMS 审中-公开
标题翻译：用于量化系统中非线性的系统和方法
公开(公告)号：WO0136901A9
公开(公告)日：2002-05-16
申请号：PCT/US0031544
申请日：2000-11-17
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G01J9/02 , G01J9/04 , G01N21/45 , G03F7/20 , H01L21/027 , G01B
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02027 , G01B9/02045 , G01B9/02059 , G01B9/02084 , G01B2290/15 , G01B2290/45 , G01B2290/70 , G01N21/45 , G03F7/70775
摘要： The invention features interferometry systems and methods that quantify nonlinearities e.g. , cyclic errors, in an interference signal produced by an interferometry system. The systems and methods analyze interference signals for each of multiple Doppler shifts to thereby resolve nonlinearities that may otherwise overlap spectrally with a dominant interference signal, and also, to interpolate the contributions of the nonlinearities to measurements at different Doppler shifts. The time-varying interference signal or the phase extracted from the time-varying interference signal is Fourier transformed and at least some of the nonlinearities are associated with peaks in the square modulus of the Fourier transformed signal ( i.e. , the power spectrum). The amplitude and phase of the Fourier transform at the frequency of each such peak are used to quantify the associated nonlinearity. The quantified nonlinearities are used to correct optical path length measurements by the system. Changes in the magnitude of one or more of the quantified nonlinearities can also be used to identify degradation of a component of the interferometry system.
摘要翻译：本发明的特征在于干涉测量系统和方法，其量化由干涉测量系统产生的干扰信号中的非线性，例如循环误差。系统和方法分析多个多普勒频移中的每一个的干扰信号，从而解析否则可能与主要干扰信号频谱重叠的非线性，以及将非线性的贡献内插到不同多普勒频移处的测量。时变干扰信号或从时变干扰信号中提取的相位被傅里叶变换，并且至少一些非线性与傅里叶变换信号的平方模中的峰值相关（例如，功率谱）。在每个这样的峰值的频率处的傅立叶变换的幅度和相位用于量化相关联的非线性。量化的非线性用于校正系统的光程长度测量。一个或多个量化非线性的幅度的变化也可以用于识别干涉测量系统的分量的劣化。

70. 发明申请

WO2018219785A1 PROCEDE ET SYSTEME POUR RECONSTITUER UNE INFORMATION DE COULEUR D'UN ECHANTILLON MESURE PAR PROFILOMETRIE OPTIQUE EN LUMIERE BLANCHE, ET APPLICATIONS DE CE PROCEDE 审中-公开
公开(公告)号：WO2018219785A1
公开(公告)日：2018-12-06
申请号：PCT/EP2018/063705
申请日：2018-05-24
申请人： UNITY SEMICONDUCTOR
发明人： BOULANGER, Jean-François , PETITGRAND, Sylvain
IPC分类号： G01B9/02 , G01J3/28 , G01J3/453 , G01J3/46
CPC分类号： G01B9/0209 , G01B9/02084 , G01B11/2441
摘要： Procédé pour reconstituer une information de couleur d'un échantillon mesuré par profilométrie optique en lumière blanche, comprenant une acquisition (21) d'interférogrammes en une pluralité de points ou pixels dudit échantillon, ce procédé comprenant en outre, pour au moins un point de mesure: - un calcul (22) de densité spectrale optique de l'interférogramme, - à partir de cette densité spectrale optique, une détermination d'une réflectance spectrale, - un traitement (24) de ladite réflectance spectrale pour générer une information de couleur dudit échantillon (17).

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