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1. 发明申请

WO2008073454A3 MULTIPLE-DEGREE OF FREEDOM INTERFEROMETER WITH COMPENSATION FOR GAS EFFECTS 审中-公开
标题翻译：具有补偿气体效应的多级自由度干涉仪
公开(公告)号：WO2008073454A3
公开(公告)日：2008-09-04
申请号：PCT/US2007025395
申请日：2007-12-11
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02
CPC分类号： G01N21/453 , G03F7/70775
摘要： The disclosure features multiple degree-of-freedom interferometers (e.g., non-dispersive interferometers) for monitoring linear and angular (e.g., pitch and/or yaw) displacements of a measurement object with compensation for variations in the optical properties of a gas in the interferometer measurement (and/or reference) beam paths. The disclosure also features interferometry systems that feature an array of interferometers (e.g., including one or more multiple degree-of-freedom interferometer), each configured to provide different information about variations in the optical properties of the gas in the system. Multiple degree-of-freedom interferometers are also referred to as multi-axis interferometers.
摘要翻译：本公开的特征在于用于监测测量对象的线性和角度（例如，俯仰和/或偏转）位移的多个自由度干涉仪（例如，非色散干涉仪），其中补偿所述测量对象中的气体的光学性质的变化干涉仪测量（和/或参考）光束路径。本公开还以干涉仪阵列为特征的干涉测量系统（例如，包括一个或多个自由度干涉仪），每个干涉测量系统被配置为提供关于系统中的气体的光学性质变化的不同信息。多自由度干涉仪也被称为多轴干涉仪。

2. 发明申请

WO2006041984A3 ERROR CORRECTION IN INTERFEROMETRY SYSTEMS 审中-公开
标题翻译：干涉系统中的错误校正
公开(公告)号：WO2006041984A3
公开(公告)日：2008-01-10
申请号：PCT/US2005035934
申请日：2005-10-06
申请人： ZYGO CORP , HILL HENRY A , JOHNSTON JEFFREY
发明人： HILL HENRY A , JOHNSTON JEFFREY
IPC分类号： G01B9/02
CPC分类号： G01B9/02059 , G01B9/02002 , G01B9/02021 , G01B9/02027 , G01B9/02061 , G01B9/0207 , G01B2290/45 , G01B2290/70 , G03F7/70775
摘要： In one aspect, the invention features methods that include using an interferometer to produce an output beam having a phase related to an optical path difference between a path of a first beam and a path of a second beam, wherein the first beam contacts a measurement object and either the measurement object or the interferometer are coupled to a stage that is moveable within a reference frame and monitoring variations in the phase while both varying an orientation of the stage with respect to at least one degree of freedom in the reference frame and keeping a reference mark on the stage in a common position with respect to the reference frame, and determining information based on the variations, the information being related to a contribution to the path difference caused by a deviation of the path of the first or second beam from a nominal path.
摘要翻译：一方面，本发明的特征在于，包括使用干涉仪产生具有与第一光束的路径和第二光束的路径之间的光程差有关的相位的输出光束的方法，其中第一光束接触测量对象并且测量对象或干涉仪耦合到可在参考帧内移动的阶段，并且监测相位中的变化，同时相对于参考框架中的至少一个自由度改变平台的取向并保持参考标记在相对于参考帧的共同位置的舞台上，以及基于变化确定信息，该信息与由第一或第二光束的路径偏离导致的对路径差的贡献有关名义路径

3. 发明申请

WO2005045529A3 CHARACTERIZATION AND COMPENSATION OF ERRORS IN MULTI-AXIS INTERFEROMETRY SYSTEM 审中-公开
标题翻译：多轴干涉系统中误差的表征和补偿
公开(公告)号：WO2005045529A3
公开(公告)日：2006-01-05
申请号：PCT/US2004036637
申请日：2004-11-04
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G03F7/20 , G03F9/00
CPC分类号： G03F9/7003 , G03F7/70775 , G03F9/7049
摘要： In general, in one aspect, the invention features a method that includes monitoring a position of a stage (140) along a first measurement axis and a second measurement axis of a multi-axis interferometry system and determining a position of the stage (140) with respect to another degree of freedom based on the monitored positions along the first and second axes and predetermined information about how the measurement axes deviate from being parallel to one another.
摘要翻译：通常，在一个方面，本发明的特征在于一种方法，其包括监测台（140）沿着多轴干涉测量系统的第一测量轴和第二测量轴的位置并确定平台（140）的位置，相对于沿着第一轴和第二轴的监视位置的另一自由度，以及关于测量轴如何偏离彼此平行的预定信息。

4. 发明申请

WO03012367A9 PASSIVE ZERO SHEAR INTERFEROMETERS 审中-公开
标题翻译：被动零切割干涉仪
公开(公告)号：WO03012367A9
公开(公告)日：2004-06-03
申请号：PCT/US0224196
申请日：2002-07-31
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G03F7/20
CPC分类号： G03F7/70775 , G01B9/02003 , G01B9/02018 , G01B9/02019 , G01B9/02061 , G01B2290/70 , H01J2237/20292 , H01J2237/3175
摘要： Beam shear can be reduced in an interferometric system (10) by conditioning an input beam prior to directing the input beam to an interferometer. Accordingly, apparatus and methods for conditioning an interferometer input beam are disclosed.
摘要翻译：在将输入光束引导到干涉仪之前，通过调节输入光束可以在干涉仪系统（10）中减少光束剪切。因此，公开了用于调节干涉仪输入光束的装置和方法。

5. 发明申请

WO03069273A2 SEPARATED BEAM MULTIPLE DEGREE OF FREEDOM INTERFEROMETER 审中-公开
标题翻译：分离波束多自由度干涉仪
公开(公告)号：WO03069273A2
公开(公告)日：2003-08-21
申请号：PCT/US0304063
申请日：2003-02-12
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G01B11/00 , G03F7/20
CPC分类号： G01B9/02059 , G01B9/02003 , G01B9/02019 , G01B11/002 , G01B2290/70 , G03F7/70775
摘要： An interferometric apparatus includes: a polarizing beam-splitting interface (50) positioned to separate an input beam (14) into two orthogonally polarized beams (16m and 17r) and interferometer optics (19) positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams. The interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object (70) at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom.
摘要翻译：一种干涉测量设备包括：定位成将输入光束（14）分成两个正交偏振光束（16m和17r）的偏振光束分离界面（50），以及定位成接收从一个光束衍射的第一组光束的干涉仪光学器件（19）正交偏振光束的第一组光束和从另一正交偏振光束衍生的第二组光束。干涉仪光学器件被配置为引导第一组中的每个光束至少接触一次测量对象（70）的不同位置，并且随后将第一组中的每个光束与来自第二组光束的对应光束组合以产生相应的输出光束包括关于测量对象相对于不同自由度的位置变化的信息。

6. 发明申请

WO0066969A9 INTERFEROMETRY SYSTEM HAVING A DYNAMIC BEAM-STEERING ASSEMBLY FOR MEASURING ANGLE AND DISTANCE 审中-公开
标题翻译：具有用于测量角度和距离的动态光束转向装置的干涉仪系统
公开(公告)号：WO0066969A9
公开(公告)日：2002-04-18
申请号：PCT/US0012097
申请日：2000-05-05
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G01B11/00 , G01B11/26 , G03F1/08 , G03F7/20 , G03F9/00 , H01L21/027 , G01B
CPC分类号： G01B9/02019 , G01B9/02003 , G01B9/02068 , G01B9/02081 , G01B2290/70 , G03F7/70775
摘要： The invention features an interferometry system that measures changes in the angular orientation of a measurement object and that also includes at least one dynamic beam-steering assembly. The dynamic beam-steering assembly redirects one or more beams within the interferometry system in response to a change in the angular orientation of the measurement object. In many embodiments, the presence of the dynamic beam-steering assembly permits the interferometry system to measure the angular orientation of the measurement object using only a single measurement beam to contact the measurement object. Furthermore, in many embodiments, a control signal derived from the measurement beam contacting the measurement object causes the beam-steering assembly to redirect a measurement beam to contact the measurement object at normal incidence. When at such normal incidence, the interferometry system can calculate the angular orientation of the measurement object based on one or more interferometric signals derived from the measurement beam or based on the orientation of the beam-steering assembly itself.
摘要翻译：本发明的特征在于一种干涉测量系统，其测量测量对象的角度定向的变化，并且还包括至少一个动态光束转向组件。响应于测量对象的角度定向的变化，动态光束转向组件重定向干涉测量系统内的一个或多个光束。在许多实施例中，动态光束转向组件的存在允许干涉测量系统仅使用单个测量光束来测量测量对象的角度定向以接触测量对象。此外，在许多实施例中，从测量光束导出的与测量对象接触的控制信号导致光束转向组件重定向测量光束以正常入射与测量对象接触。当在这种正常入射时，干涉测量系统可以基于从测量光束导出的一个或多个干涉测量信号或者基于光束转向组件本身的取向来计算测量对象的角度取向。

7. 发明申请

WO2008073486A3 MULTIPLE-DEGREE OF FREEDOM INTERFEROMETER WITH COMPENSATION FOR GAS EFFECTS 审中-公开
标题翻译：具有补偿气体影响的自由度干涉仪多重度
公开(公告)号：WO2008073486A3
公开(公告)日：2008-10-23
申请号：PCT/US2007025453
申请日：2007-12-11
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01N21/41
CPC分类号： G01N21/453 , G03F7/70775
摘要： The disclosure features multiple degree-of-freedom interferometers (e.g., non-dispersive interferometers) for monitoring linear and angular (e.g., pitch and/or yaw) displacements of a measurement object with compensation for variations in the optical properties of a gas in the interferometer measurement (and/or reference) beam paths. The disclosure also features interferometry systems that feature an array of interferometers (e.g., including one or more multiple degree-of-freedom interferometer), each configured to provide different information about variations in the optical properties of the gas in the system. Multiple degree-of-freedom interferometers are also referred to as multi-axis interferometers.
摘要翻译：该公开内容具有多个自由度干涉仪（例如，非分散干涉仪），用于监测测量对象的线性和角度（例如，俯仰和/或偏航）位移，并补偿测量对象中的气体的光学性质的变化干涉仪测量（和/或参考）光束路径。本公开还具有特征在于干涉仪阵列（例如，包括一个或多个多自由度干涉仪）的干涉测量系统，每个干涉仪被配置为提供关于系统中气体的光学性质变化的不同信息。多自由度干涉仪也被称为多轴干涉仪。

8. 发明申请

WO2007005314A3 APPARATUS AND METHODS FOR REDUCING NON-CYCLIC NON-LINEAR ERRORS IN INTERFEROMETRY 审中-公开
标题翻译：用于减少干涉中的非循环非线性误差的装置和方法
公开(公告)号：WO2007005314A3
公开(公告)日：2007-02-15
申请号：PCT/US2006024290
申请日：2006-06-22
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B11/02
CPC分类号： G03F7/70775 , G01B9/02018 , G01B9/02061 , G01B2290/70
摘要： In general, in one aspect, the invention features interferometry systems that include an interferometer configured to direct a first beam and a second beam derived from common light source along different paths and to combine the two beams to form an output beam including information related to an optical path difference between the different paths, wherein the path of the first beam contacts a measurement object. The interferometry systems also include an afocal system positioned in the path of the first beam and configured to increase a dimension of the first beam as it propagates from the interferometer towards the measurement object and reduces the dimension of the first beam as it returns from the measurement object propagating towards the interferometer.
摘要翻译：通常，在一个方面，本发明的特征在于包括干涉仪系统的干涉测量系统，该干涉仪被配置为将来自公共光源的第一光束和第二光束沿着不同路径引导，并且组合这两个光束以形成包括与不同路径之间的光程差，其中第一光束的路径接触测量对象。干涉测量系统还包括位于第一光束的路径中的无焦系统，该无焦系统被配置为当第一光束从干涉仪朝向测量对象传播时增加第一光束的尺寸并且当第一光束从测量返回时减小第一光束的尺寸物体向干涉仪传播。

9. 发明申请

WO2006041984A9 ERROR CORRECTION IN INTERFEROMETRY SYSTEMS 审中-公开
标题翻译：干涉系统中的错误校正
公开(公告)号：WO2006041984A9
公开(公告)日：2006-10-26
申请号：PCT/US2005035934
申请日：2005-10-06
申请人： ZYGO CORP , HILL HENRY A , JOHNSTON JEFFREY
发明人： HILL HENRY A , JOHNSTON JEFFREY
IPC分类号： G01B11/02
CPC分类号： G01B9/02059 , G01B9/02002 , G01B9/02021 , G01B9/02027 , G01B9/02061 , G01B9/0207 , G01B2290/45 , G01B2290/70 , G03F7/70775
摘要： In one aspect, the invention features methods that include using an interferometer to produce an output beam having a phase related to an optical path difference between a path of a first beam and a path of a second beam, wherein the first beam contacts a measurement object and either the measurement object or the interferometer are coupled to a stage that is moveable within a reference frame and monitoring variations in the phase while both varying an orientation of the stage with respect to at least one degree of freedom in the reference frame and keeping a reference mark on the stage in a common position with respect to the reference frame, and determining information based on the variations, the information being related to a contribution to the path difference caused by a deviation of the path of the first or second beam from a nominal path.
摘要翻译：一方面，本发明的特征在于，包括使用干涉仪产生具有与第一光束的路径和第二光束的路径之间的光程差有关的相位的输出光束的方法，其中第一光束接触测量对象并且测量对象或干涉仪耦合到可在参考框架内移动的阶段，并且监测相位中的变化，同时相对于参考框架中的至少一个自由度改变平台的取向并保持参考标记在相对于参考帧的共同位置的舞台上，以及基于变化确定信息，该信息与由第一或第二光束的路径偏离导致的对路径差的贡献有关名义路径

10. 发明申请

WO2004042319A3 COMPENSATION OF REFRACTIVITY PERTURBATIONS IN AN INTEREROMETER PATH 审中-公开
标题翻译：在一个经度仪路径中的反射率的补偿
公开(公告)号：WO2004042319A3
公开(公告)日：2004-11-04
申请号：PCT/US0335283
申请日：2003-11-04
申请人： ZYGO CORP , HILL HENRY A
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G03F7/20
CPC分类号： G01B9/02021 , G01B9/02019 , G01B9/02027 , G01B9/02075 , G01B9/02083 , G01B2290/70 , G03F7/70775
摘要： The invention features a method that includes directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object, directing a second measurement beam along a second path contacting the measurement object to determine an second interferometric phase related to the position of the measurement object, and determining a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase.
摘要翻译：本发明的特征在于一种方法，其包括沿着与测量对象接触的第一路径引导第一测量光束以确定与测量对象的位置相关的第一干涉测量相位，沿着与测量对象接触的第二路径引导第二测量光束以确定与测量对象的位置相关的第二干涉测量相位，以及基于第二干涉测量相位确定由于沿第一路径的折射率的扰动对第一干涉测量相的贡献。

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