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51. 发明申请

WO1995016798A1 PLASMA-ACTIVATED VAPOUR-DEPOSITION PROCESS AND DEVICE 审中-公开
标题翻译：方法和设备等离子体活化蒸镀
公开(公告)号：WO1995016798A1
公开(公告)日：1995-06-22
申请号：PCT/DE1994001415
申请日：1994-11-22
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , KIRCHHOFF, Volker , GOEDICKE, Klaus , NEUMANN, Manfred , RESCHKE, Jonathan , SCHILLER, Siegfried
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： C23C14/08
CPC分类号： C23C14/32
摘要： The object of the invention is to achieve a high and stable deposition rate over a long period of time in order to apply preferably reactive layers of electrically insulating compounds. Reactivity, energetic activation and layer composition and structure should be regulated and kept constant by acting on the plasma density. For that purpose, vapour propagates from the vaporiser (1) through a plasma produced between electrodes (1, 1') and interacts therewith. The electrodes are made of a material to be vaporised or of a component and/or doting material of the layer to be applied. The plasma is maintained in the vapour of the material to be vaporised and/or in an inert gas. This process is suitable for improving the surface of semi-finished products and assembly units, in particular for applying oxide layers with barrier effect on plastic foils in the packaging industry.
摘要翻译：的目的是实现在长时间内稳定的高沉积量反应性地沉积优选电绝缘接头的层。反应性和活力的激活和层组成和结构是要被调节并通过控制等离子体密度保持恒定。根据本发明，从贯通电极之间（2 2，“）蒸汽中传播的蒸发器（1）所产生的等离子体的推移和与该反应进行交互。所述电极由蒸发材料或组分和/或掺杂的层的材料被施加的。等离子体被保持在蒸发材料和/或惰性气体的蒸汽。该方法被用于半成品和成品表面精加工，特别是用于具有在塑料薄膜用于包装工业的阻挡效果的氧化物层。

52. 发明申请

WO1995014920A1 PROCESS FOR DETECTING TOTALLY OR PARTIALLY HIDDEN NON-HOMOGENEITIES BY MICROWAVE RADIATION 审中-公开
标题翻译：用于检测全部或部分隐藏的不均匀性方法微波辐射的方式
公开(公告)号：WO1995014920A1
公开(公告)日：1995-06-01
申请号：PCT/DE1994001384
申请日：1994-11-23
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , HARTRUMPF, Matthias , MUNSER, Roland
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： G01N22/02
CPC分类号： G01N22/02 , E03F7/12 , G01S13/003 , G01S13/0209 , G01S13/885 , G01V3/12
摘要： A process is disclosed for detecting totally or partially hidden non-homogeneities in opaque media by microwave radiation. A directional microwave transmission-reception antenna is oriented on a carrier in such a way that the axis of its directional diagram extends through the surface of the medium at an angle other than a right angle. Also disclosed are advantageous arrangements with one or several transmission or reception antennas.
摘要翻译：本发明涉及一种方法，用于通过微波辐射来检测在不透明介质完全或部分地隐藏不均匀，在载体上具有定向微波发射 - 接收天线，这是对准，使得其方向性的轴线特性以一定的角度等于所述介质的表面 90°渗透。与一个或多个发射器或接收器天线进一步有利的安排进行描述。

53. 发明申请

WO1995013019A1 PROCESS AND DEVICE FOR THE AUTOMATIC DETECTION OF ABNORMAL BREATHING SOUNDS 审中-公开
标题翻译：方法和设备进行自动检测惊人的呼吸噪声
公开(公告)号：WO1995013019A1
公开(公告)日：1995-05-18
申请号：PCT/DE1994001282
申请日：1994-10-28
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , UFZ-UMWELTFORSCHUNGSZENTRUM , OBERST, Eberhard , BECKER, Hans , KRUMBIEGEL, Peter , HERBARTH, Olf
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , UFZ-UMWELTFORSCHUNGSZENTRUM
IPC分类号： A61B07/00
CPC分类号： A61B5/0816 , A61B5/0803 , A61B7/003
摘要： The proposed process facilitates continuous and unobtrusive recording of abnormal breathing sounds produced by a subject under normal conditions of life and over a period of several hours or days. The subject's breathing sounds are captured, processed and evaluated in real-time. Within the range of frequencies detected, attention is paid only to frequencies previously found to be characteristic; the position of these characteristic frequencies in the frequency spectrum of the subject's breathing sounds serves as an indicator by which an abnormal breathing sound can be recognized on the basis of a significant feature. The data obtained at these frequency positions are compared with data specific to the subject with a view to determining whether or not the particular criteria of abnormality are met, and the result of the comparison is converted into a signal. This process considerably reduces the volume of data required and thus makes it possible to miniaturise a suitable device which can then be worn by the subject over long periods without it restricting his or her movement. The proposed process is especially suitable for the automatic and long-term monitoring of the respiratory tract of persons suffering or at risk from bronchitis or asthma.
摘要翻译：本发明的方法在一段几个小时或几天使正常的生活条件下一个对象的连续和无应力注册显眼呼吸音。呼吸的声音录制，实时处理和评估。在评价的预定特性频率将只从所检测到的频率范围内被考虑，在显眼的呼吸音可由显著特征被识别的对象的呼吸声音的频谱的位置。在这些频率位置检测到的数据进行比较以用于对针对异常呼吸音的发生某些标准履行所述受试者数据单独地确定，并且提供该比较作为信号的结果。相关联的数据显著降低使得相应的设备可能的，其然后可以由主体佩戴时间长而不运动的限制的小型化。该方法特别适合于在较长时间内支气管炎或哮喘和-gefährdeten个体的呼吸道的自动监控。

54. 发明申请

WO1995009256A1 TREATMENT OF SURFACES BY CORONA DISCHARGE 审中-公开
标题翻译： WITH BARRIER放电表面处理
公开(公告)号：WO1995009256A1
公开(公告)日：1995-04-06
申请号：PCT/DE1994001132
申请日：1994-09-27
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , NEFF, Willi , LEBERT, Rainer , POCHNER, Klaus
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： C23G05/00
CPC分类号： H01J37/32348 , B08B6/00 , B08B7/0057 , B21B45/0284 , B29C59/10 , B29C59/14 , B29C59/16 , B29C2035/0827 , C23G5/00 , H01J37/32009 , H05H1/2406 , H05H2001/2431 , H05H2245/1225
摘要： A process for treating, in particular cleaning, surfaces, in particular foils and metallic surfaces, is disclosed. Such surfaces are in general covered with a film of oil or grease immediately after they are produced. Grease and oil must however be removed before the surfaces or foils can be further processed, in order to ensure a perfect coating or gluing. In order to achieve this aim in a short time and with low energy consumption, a dielectrically blocked discharge (12, 2, 3, 13a) acts on the surface of the foil web (10), for example. The action of high-energy loaded particles and of photons from the UV spectral domain removes the film of oil or grease in a short time already, so that further processing (coating or gluing) is possible without causing an increased energy consumption nor damaging the surface. Disinfection/sterilisation are also considered as surface cleaning processes.
摘要翻译：本发明涉及与治疗，特别是清洗，表面的，特别是膜 - 和金属表面。它们通常是直接覆盖或者其生产的油膜后变成脂肪。脂肪和油必须是膜的表面的进一步处理之前，或消除，但可以允许令人满意的涂层或粘合。这应该被快速且以较小的能量完成，并且由在本发明中，一个介质阻挡放电（12，2，3，13A）达到作用在示例性箔带（10）的表面上。只有很短的时间后，油或脂被去除的程度，进一步的处理（涂覆或粘合）是可能的，而不增加的能量消耗发起或通过暴露于高能带电粒子，并通过光子从的UV光谱范围的动作损坏已经发生的表面。作为表面清洁和消毒/杀菌考虑。

55. 发明申请

WO1995006170A1 METHOD AND VEHICLE FOR EMPTYING AND CLEANING ROAD GULLIES 审中-公开
标题翻译：方法和车辆清洁和道路PROCESSES排空
公开(公告)号：WO1995006170A1
公开(公告)日：1995-03-02
申请号：PCT/DE1994000909
申请日：1994-08-03
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , VOLZ, Hansjörg , STROMMER, Walter, Michael
IPC分类号： E03F07/10
CPC分类号： E03F7/10
摘要： The invention concerns a method and vehicle (1) for emptying and cleaning road gullies (5) covered by gratings (6), the vehicle having a tank (4) for mud and refuse, and a slewing arm (2) with control means being associated with the tank (4). The functions of recognizing, gripping and moving the grating (6) covering a gully and the functions of emptying and cleaning the gully (5) are carried out automatically by means of appropriate control means acting on a manipulator fitted to the slewing arm (2). For precise positioning of the arm (2), a support device, the gripper system and the suction tube (3), a sensor system is associated with the manipulator. This sensor system passes its measurement data to a processor which controls the manipulator. The gratings (6) of the gullies to be emptied and cleaned are recognized by the manipulator by means of a databank associated with the processor and in which known grating dimensions are stored. The type of grating is determined by comparing the data stored in the databank with the data provided by the sensor system.
摘要翻译：本发明涉及一种方法和一种车辆（1）进行清洁和道路的沟渠（5），其与格栅（6）关闭的排空，以及用于垃圾和污泥的容器（4）具有，其中所述容器（4）可枢转的延伸臂（2）与控制装置相关联。识别，抓持和格栅的移动（6）覆盖所述街道入口（5）的功能，和道路的沟渠的排空和清洗的功能（5）（由一个操作装置的适当控制装置的分配，在与延伸臂一起 2）自动执行。对于Auslegarmes的精细定位的目的（2），支承装置，夹持系统和抽吸软管（3），传感器系统被分配给操作装置。该传感器系统是所测量的数据到一台计算机，这反过来还控制操作装置。的要被清空并清洗网格（6）由所述处理装置识别由数据库，其被分配给计算机的装置，并且被存储在公知的防锈几何形状的数据。将这些数据与所述传感器系统的测量数据进行比较等识别的锈类。

56. 发明申请

WO1995004254A1 THREE-DIMENSIONAL MEASUREMENT ARRANGEMENT FOR INACCESSIBLE CAVITIES 审中-公开
标题翻译：安排三维测量难以接近的中空空间
公开(公告)号：WO1995004254A1
公开(公告)日：1995-02-09
申请号：PCT/DE1994000898
申请日：1994-07-29
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , HARTRUMPF, Matthias , MUNSER, Roland
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： G01B11/24
CPC分类号： G01B11/24 , G01B11/25
摘要： A three-dimensional measurement arrangement for inaccessible cavities (for example sewers) has a light source and a camera mounted on an inspection head or support. A structured light source is used. The camera and the structured light source have a common inlet or outlet and an at least partially common optical axis or at least partially parallel axes in front of the inlet or outlet. The distance between the axes is substantially smaller than the distance (a) between the point of origin of the pattern and the main plane of the camera objective at the side of the object.
摘要翻译：本发明涉及一种装置，用于难以接近的空腔（例如废水下水道管）具有由光源和照相机，其被安装在检查头或载体，从而形成一种结构化光源的使用量和照相机和结构光源的装置共同的入口和出口开口的三维测量并至少部分地有一个共同的光轴在开口的前面，或具有至少部分平行的轴线，其间距小于图案的源点和照相机透镜的物体侧的主平面之间的距离（a）显着更少。

57. 发明申请

WO1995004171A1 PROCESS FOR PRODUCING HIGH-RESISTANCE SILICON CARBIDE 审中-公开
标题翻译：法生产硅的高电阻
公开(公告)号：WO1995004171A1
公开(公告)日：1995-02-09
申请号：PCT/EP1994002400
申请日：1994-07-21
申请人： DAIMLER-BENZ AKTIENGESELLSCHAFT , FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , NIEMANN, Ekkehard , SCHNEIDER, Jürgen , MÜLLER, Harald , MAIER, Karin
发明人： DAIMLER-BENZ AKTIENGESELLSCHAFT , FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： C30B23/02
CPC分类号： H01L29/1608 , C30B23/02 , C30B29/36 , H01L21/0445 , Y10S438/931
摘要： A process is disclosed for producing high-resistance SiC from a low-resistance starting material. The flat donor levels of a prevailing nitrogen impurity are overcompensated by admixture of a trivalent element, the concentration of said doping element in the SiC being such that it changes the conductivity type from a n-conductivity to a p-conductivity. In addition, a transition element is added having donor levels approximately in the middle of the SiC energy gap, so that the excess acceptor levels are in turn compensated and a high specific resistance is achieved.
摘要翻译：本发明涉及一种用于从一个低电阻原料生产高电阻的SiC的方法。它在于通过添加三价元素的通行氮杂质的平坦施主能级得到补偿，在这种掺杂是在所述SiC，其由正到p型导电，并且进一步改变导电类型的浓度掺入过渡元素，其具有在SiC中大致在带隙施主能级的中间，被添加，其中过量的受体水平反过来补偿，从而高电阻率得以实现。

58. 发明申请

WO1995003682A1 METHOD FOR MATCHING THE GENERATOR IN DIPOLAR LOW-PRESSURE GLOW PROCESSES 审中-公开
标题翻译：方法发电机的双极性低压力调整GLIMMPROZESSEN
公开(公告)号：WO1995003682A1
公开(公告)日：1995-02-02
申请号：PCT/DE1994000817
申请日：1994-07-13
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , KIRCHHOFF, Volker , RESCHKE, Jonathan , SCHILLER, Siegfried , GOEDICKE, Klaus
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： H05H01/46
CPC分类号： H01J37/32018 , H01J37/32036 , H05H1/46
摘要： The generator must be statically and dynamically matched to the electrodes in the high power and frequency range in order to perform dipolar low-pressure glow processes. The prior art processes either require considerable complexity or are not usable in the range. According to the invention, the operating time during the positive and/or negative half-wave is controlled in such a way that no power is fed to the glow device, at least during the time of a part of a negative and/or positive half-wave. The invention is applicable to plasma surface treatment, the separation of layers from the plasma and plasma-enhanced surface cleaning.
摘要翻译：发生器到电极上的功率大的频率范围内的一个静态未动态调整是必需的用于双极低压Glimmprozesse的实施。已知的方法或者需要很高的成本或并不适用于该地区。根据本发明的控制的正和/或负半波期间的动作时间为预热过程，使得至少为的负和/或不供电Glimmeinrichtung的正半波的部分的周期。本发明是在等离子体处理中的表面，该等离子体和等离子体辅助表面清洁应用的层的沉积使用。

59. 发明申请

WO1994029681A1 SIMULTANEOUS DETERMINATION OF LAYER THICKNESS AND SUBSTRATE TEMPERATURE DURING COATING 审中-公开
标题翻译：涂层在同时厘定厚度和基质温度
公开(公告)号：WO1994029681A1
公开(公告)日：1994-12-22
申请号：PCT/DE1994000168
申请日：1994-02-16
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , BÖBEL, Friedrich , BAUER, Norbert
IPC分类号： G01J05/00
CPC分类号： G01B11/0633 , G01J5/60
摘要： The invention describes a process and device for measuring temperature and layer thickness during coating by prior art methods in semiconductor manufacturing, plasma, ion and other dry-etching plants and in the production of optical coatings. The current results of layer thickness and temperature measurements may be used in process control. The interference phenomena in thermal substrate radiation on the growing layer continuously cause the emissivity epsilon to change during coating, thus preventing the use of pyrometric temperature measurement, which gives rise to particular problems in multi-layer systems in which the current emissivity depends on the thickness of all the layer, their optical constants, the temperature-dependence of the optical constant and the observation angle and wavelength. The present invention solves these fundamental problems by determining the reflectivity R of the wafer using a reflectometer. According to the law of the conservation of energy, for non-transparent substrates epsilon = 1 - R, and hence the current emissivity of the entire (multi-layer) system can be directly determined with the reflectometer. The temperature is measured by means of a given evaluation rule, while the thickness is found by comparing the reflectometer curve with the theoretical layer thickness dependence.
摘要翻译：本发明描述了在与半导体制造设备，等离子体，离子等干式蚀刻，并在生产光学层的公知的涂布技术涂覆工艺用于温度测量和层厚的方法和装置。层厚度和温度测量的当前测量值可以用于工艺控制。为一体的热衬底辐射到生长层的干扰现象的结果，连续地涂布，因此不能被应用于一个测温温度测量期间EPSILON发射率的变化。特别成问题的是多层系统的测温温度测量，当前发射率是依赖于它的光学常数中，光学常数的温度依赖关系，观察角度和观测波长的所有层的厚度。这个基本问题将通过本发明的晶片的反射率R用反射计测定所要解决。由于能量守恒定律是有效的用于非透明基板的ε-= 1 - R，使得总（多层）系统的实际发射率与反射计直接确定。温度测量然后通过确定的评估规则进行的，而厚度是由Reflektometerkurve与理论膜厚依赖性进行比较来确定。

60. 发明申请

WO1994028318A1 MICROVALVE 审中-公开
标题翻译：微型阀
公开(公告)号：WO1994028318A1
公开(公告)日：1994-12-08
申请号：PCT/DE1994000599
申请日：1994-05-21
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , LISEC, Thomas , QUENZER, Hans-Joachim , WAGNER, Bernd
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
IPC分类号： F15C05/00
CPC分类号： F15C3/04
摘要： The present invention relates to a microvalve usable primarily as a pilot valve in pneumatic controls. The prior art solenoid valves used in this field can be miniaturised only at considerably high cost. The microvalve of the invention consists of a first part (1), on the pressure side, with a diaphragm structure (3) as the movable closing component and a second part (2) with an outlet aperture (7) and a seat (5). The diaphragm structure has heating elements and is coated on one side with a material with differing coefficients of heat expansion, in such a way that heating causes the diaphragm to bend against the pressure applied on it. At least one of the two parts has a recesses (6) of defined depth arranged in such a way that with the valve closed hollows are formed which are heated by the heating elements. The microvalve described can be economically produced with semiconductor technology means and has improved switching properties on account of its combined thermomechanical-thermopneumatic method of operation.
摘要翻译：本发明涉及一种微型阀，其主要用作气动控制系统的先导阀。以前在这个领域中使用的Hubmagentventile只能用相当大的成本增加小型化。本发明的微型阀由第一压力侧部分（1）与膜结构（3）可动作为封闭体的，和一第二部分（2）与出口开口（7）和阀座（5）。膜结构被提供有加热元件，从而在一侧上涂覆有材料具有不同的热膨胀系数的该加热至弯曲靠压力的膜当施加的结果。至少两个部分中的一个具有凹坑限定的深度（6），其被布置以便形成与阀关闭腔，其由所述加热元件加热。指定的微型阀可廉价随着半导体技术的装置和显示产生由于改进的开关特性及其组合的热 - 机械热气动操作。

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