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41. 发明申请

WO99060676A1 PULSED GAS LASER DEVICE 审中-公开
标题翻译：脉冲气体激光器件
公开(公告)号：WO99060676A1
公开(公告)日：1999-11-25
申请号：PCT/JP1999/002584
申请日：1999-05-18
IPC分类号： H01S3/03 , H01S3/038 , H01S3/097
CPC分类号： H01S3/09705 , H01S3/03 , H01S3/038
摘要： A pulsed gas laser device comprises a first main electrode (24), a cylindrical electrical discharge tube (21) of insulator to form a main electrical discharge path, and a second main electrode (25), which are arranged in line in this order, and medium gas is enclosed inside. A pair of mirrors (22) and (23) is arranged outside the first and second main electrodes to form an optical resonator, and a power supply (27) is provided for applying main discharge voltage between the first and second main electrodes. A cylindrical dielectric member (40) and an adjacent supplementary electrode (41) are provided near either or both of the first and second main electrodes. Means (28) for applying voltage to the supplementary electrode is provided so that plasma electrode (25a) may form inside the cylindrical dielectric member during operating.
摘要翻译：脉冲气体激光装置包括第一主电极（24），形成主放电路径的绝缘体的圆柱形放电管（21）和依次排成一行的第二主电极（25）中间气体封闭在里面。一对反射镜（22）和（23）布置在第一和第二主电极外部以形成光谐振器，并且提供电源（27）用于在第一和第二主电极之间施加主放电电压。在第一主电极和第二主电极之一或两者附近提供圆柱形电介质构件（40）和相邻辅助电极（41）。提供用于向辅助电极施加电压的装置（28），使得等离子体电极（25a）可以在操作期间在圆柱形电介质构件内形成。

42. 发明申请

WO99031773A1 HIGH PULSE RATE PULSE POWER SYSTEM 审中-公开
标题翻译：高脉冲速率脉冲电源系统
公开(公告)号：WO99031773A1
公开(公告)日：1999-06-24
申请号：PCT/US1998/026602
申请日：1998-12-15
IPC分类号： G03F7/20 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/097 , H01S3/0971 , H01S3/225 , H02M9/02 , H03K3/57 , H03K17/80 , H01S3/10
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70558 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H03K3/57 , H03K17/80
摘要： A high pulse rate pulse power source (20) for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source (20) includes a pulse generating circuit (40) including a charging capacitor (42), a solid state switch (46) and a current limiting inductor (48). Pulses generated in the pulse generating circuit (40) are compressed in at least two pulse compression circuits (60) and a step-up pulse transformer (26) increases peak voltage to at least 12,000 volts. A very fast regulated power supply (20) is provided for charging the charging capacitor (42) in less than 400 microseconds and a pulse control system (20) including a programmed processor (102) controls the charging of the charging capacitor (42) to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
摘要翻译：用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源（20）。源极（20）包括包括充电电容器（42），固态开关（46）和限流电感器（48）的脉冲发生电路（40）。在脉冲发生电路（40）中产生的脉冲在至少两个脉冲压缩电路（60）中被压缩，升压脉冲变压器（26）将峰值电压增加到至少12000伏。提供了一种非常快速的调节电源（20），用于在小于400微秒内对充电电容器（42）充电，以及包括编程处理器（102）的脉冲控制系统（20），其控制充电电容器（42）的充电至精确度低于约百分之一，速度至少为每秒2000次。

43. 发明申请

WO9908156A8 LASER-ILLUMINATED STEPPER OR SCANNER WITH ENERGY SENSOR FEEDBACK 审中-公开
标题翻译：带有能量传感器反馈的激光照明的步进或扫描仪
公开(公告)号：WO9908156A8
公开(公告)日：1999-05-14
申请号：PCT/US9815974
申请日：1998-07-31
申请人： CYMER INC , SANDSTROM RICHARD L , DAS PALASH P , FOMENKOV IGOR V , BESAUCELE HERVE A , OZARSKI ROBERT G
发明人： SANDSTROM RICHARD L , DAS PALASH P , FOMENKOV IGOR V , BESAUCELE HERVE A , OZARSKI ROBERT G
IPC分类号： G03F7/20 , G03F7/22 , H01L21/027 , H01S3/03 , H01S3/036 , H01S3/08 , H01S3/104 , H01S3/134 , H01S3/225 , G03B27/42 , G03B27/54 , G03B27/60 , G03B27/72 , H01S3/10 , H01S3/18
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/036 , H01S3/08009 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： A laser-illuminated wafer-exposing system such as a stepper (20) or scanner having a first light intensity detector (44) located within the exposing system near a mask (36) and second light intensity detector (46) located near the output of the laser (12). A feedback control system (14) controls the output of the laser based on signals detected by at least one of the detectors. The feedback control system includes a processor programmed with an algorithm which is used to control the laser discharge voltage in order to provide light pulses having desired intensity at the mask with the laser operating in a burst mode. The algorithm utilizes at least the following parameters; a previously measured pulse energy, a calculated energy error, a calculated dose error, a value for the rate of change of pulse energy with voltage, and at least one reference voltage. In a preferred embodiment the algorithm uses the pulse energy measured with the light intensity detector located near the mark to provide the feedback control and uses the light intensity detector at the output of the laser to assure that the output of the laser is maintained within a predetermined range.
摘要翻译：诸如步进器（20）或扫描器的激光照明晶片曝光系统具有位于曝光系统内靠近掩模（36）的第一光强度检测器（44）和位于靠近掩模（36）的输出处的第二光强度检测器激光器（12）。反馈控制系统（14）基于由至少一个检测器检测到的信号来控制激光器的输出。反馈控制系统包括用算法编程的处理器，该算法用于控制激光放电电压，以便在激光器以突发模式工作时在掩模上提供具有期望强度的光脉冲。该算法至少使用以下参数; 先前测量的脉冲能量，计算的能量误差，计算的剂量误差，脉冲能量随电压的变化率的值以及至少一个参考电压。在优选实施例中，算法使用位于标记附近的光强度检测器测量的脉冲能量来提供反馈控制，并使用激光器输出端处的光强度检测器来确保激光器的输出保持在预定的范围。

44. 发明申请

WO1995029523A1 CARTRIDGE EXCIMER LASER SYSTEM 审中-公开
标题翻译： CARTRIDGE EXCIMER激光系统
公开(公告)号：WO1995029523A1
公开(公告)日：1995-11-02
申请号：PCT/US1995004831
申请日：1995-04-18
申请人： AUTONOMOUS TECHNOLOGIES CORPORATION
发明人： AUTONOMOUS TECHNOLOGIES CORPORATION , FREY, Rudolph, W. , BOLEN, Philip, D.
IPC分类号： H01S03/22
CPC分类号： H01S3/225 , H01S3/03
摘要： A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmitting a laser beam output (400), and an external gas port (90). The cartridge (10) fits onto a receptacle (100) located within a receiving compartment (200) of the laser base (300) of the new system. The cartridge (10) is easily replaced by the system operator and is refurbished by the manufacturer when the gas mixture (19) therein is exhausted.
摘要翻译：提供了一种用于使用该系统产生准分子激光束的新的盒式准分子激光器系统和方法。该系统利用包含卤素惰性气体混合物（19）的盒（10），具有外部电连接（30,40）的电极（50,60）和用于传输激光束输出（400）的组件（20），和外部气体口（90）。盒（10）装配在位于新系统的激光基座（300）的接收室（200）内的容器（100）上。盒（10）容易地被系统操作员更换，并且当其中的气体混合物（19）被耗尽时由制造商翻新。

45. 发明申请

WO9405973A3 LASER GYRO HIGH VOLTAGE START MODULE AND HIGH VOLTAGE PULSE GENERATOR 审中-公开
标题翻译：激光陀螺高压起动模块和高电压脉冲发生器
公开(公告)号：WO9405973A3
公开(公告)日：1994-04-14
申请号：PCT/US9308083
申请日：1993-08-27
申请人： HONEYWELL INC
发明人： BERNDT DALE F , KILLPATRICK JOSEPH E
IPC分类号： G01C19/66 , H01S3/03 , H01S3/083 , H01S3/097
CPC分类号： H01S3/03 , G01C19/661 , H01S3/097
摘要： A high voltage start circuit includes a high voltage start module and high voltage pulse generator apparatus. The high voltage pulse generator amplifies a five volt pulse at 60KHz duty cycle to an output of 280 volts pulses at approximately 50 % duty cycle. A PN junction high voltage diode with a high forward voltage drop and a resistor divider drives and holds a first transistor out of saturation. A low voltage diode creates a dead band such that two high voltage start module transistors are never on at the same time. The high voltage module contains two high voltage blocking diodes which protect the laser gyro active current control circuitry during start up. Two small ballast resistors and a parallel 10 times voltage multiplier generate at least a 2500 VDC output. The high voltage start circuit is contained within a laser gyro housing and is configured to have a volume less than the volume of the ring laser gyro block.

46. 发明申请

WO1992002977A1 MIXED GAS ION LASER 审中-公开
标题翻译：混合气体激光
公开(公告)号：WO1992002977A1
公开(公告)日：1992-02-20
申请号：PCT/US1991005313
申请日：1991-07-26
申请人： ION LASER TECHNOLOGY
发明人： ION LASER TECHNOLOGY , OSTLER, Kevin
IPC分类号： H01S03/10
CPC分类号： H01S3/0323 , H01S3/02 , H01S3/03 , H01S3/08059 , H01S3/104
摘要： A laser (10) that is capable of producing light from a chosen group of frequencies not available using a single gas laser is provided. The laser (10) is capable of producing selected and well defined light wavelengths. The laser (10) is also capable of eliminating unwanted frequencies in order to prevent such frequencies from robbing power from the desired wavelengths. The laser (10) constitutes a multiple gas laser. A combination of argon and krypton is used. Argon is known to produce a good blue laser beam in the area of 488 nm. Mixed with the argon is krypton. Krypton also produces a blue output at 482 nm and 476 nm. In addition, krypton produces strong outputs in red, yellow and green wavelengths (647 nm, 568 nm, and 529 nm respectively). Accordingly, access to each of these colors is provided by the argon-krypton in the mixture. Certain light frequencies are unnecessary and undesirable. Elimination of undesirable wavelengths is accomplished primarily through the optics used. Optics (18, 20) are chosen which transmit unwanted wavelengths. As a result no lasing action takes place at the unwanted wavelengths.
摘要翻译：提供了能够从使用单个气体激光器不可用的所选择的频率组产生光的激光器（10）。激光器（10）能够产生选定且明确定义的光波长。激光器（10）也能够消除不需要的频率，以防止这种频率从期望的波长中抢夺功率。激光器（10）构成多气体激光器。使用氩和氪的组合。已知氩在488nm的区域产生良好的蓝色激光束。与氩气混合是氪气。氪也产生了482 nm和476 nm的蓝色输出。此外，氪在红色，黄色和绿色波长（分别为647nm，568nm和529nm）产生强输出。因此，通过混合物中的氩氪提供对这些颜色中的每一种的访问。某些光频是不必要的和不合需要的。消除不需要的波长主要通过所使用的光学器件实现。选择发射不需要的波长的光学（18,20）。因此，在不需要的波长下不发生激光作用。

47. 发明申请

WO1990003052A1 DISCHARGE TUBE FOR A GAS LASER DEVICE 审中-公开
标题翻译：排气管用于气体激光装置
公开(公告)号：WO1990003052A1
公开(公告)日：1990-03-22
申请号：PCT/JP1989000856
申请日：1989-08-22
申请人： FANUC LTD , IEHISA, Nobuaki , YAMAZAKI, Etsuo
发明人： FANUC LTD
IPC分类号： H01S03/03
CPC分类号： H01S3/0975 , H01S3/03
摘要： A discharge tube for a gas laser device in which the axis of the laser gas stream is in concentric with the axis of the laser oscillation beam, and the direction of discharge for discharge excitation is at right angles therewith. The discharge tube (1) has a rectangular inner cross section to intersect the axis of the laser oscillation beam at right angles therewith, and the non-discharge portions (10a, 10b) have an inner diameter which is greater than the diagonal of the discharge tube (1). The laser beam generated in the rectangular discharge region (11) has a nearly rectangular shape in cross section and is emitted maintaining this shape. Therefore, a beam mode of a nearly rectangular shape is obtained.

48. 发明申请

WO1989010017A1 DISCHARGE TUBE FOR A GAS LASER DEVICE 审中-公开
标题翻译：排气管用于气体激光装置
公开(公告)号：WO1989010017A1
公开(公告)日：1989-10-19
申请号：PCT/JP1989000287
申请日：1989-03-16
申请人： FANUC LTD , IEHISA, Nobuaki , YAMAZAKI, Etsuo
发明人： FANUC LTD
IPC分类号： H01S03/03
CPC分类号： H01S3/0975 , H01S3/03
摘要： A discharge tube for a discharge-excited gas laser device of the type of high-speed gas stream. Capacitive load media (9) under the surfaces of metal electrodes (2a, 2b) are opposed to each other in a convexed curved manner to constitute the discharge tube. Therefore, the distribution of laser oscillation gains is uniformized in the discharge tube (1), and a laser beam of a single mode is obtained.

49. 发明申请

WO2017100965A1 一种用于激光器的射频电源审中-公开
公开(公告)号：WO2017100965A1
公开(公告)日：2017-06-22
申请号：PCT/CN2015/000904
申请日：2015-12-14
申请人：徐海军
发明人：徐海军
IPC分类号： H01S3/097 , H01S3/03
CPC分类号： H01S3/03 , H01S3/097
摘要：一种用于激光器的射频电源，包括第一功率放大模块（1），第二功率放大模块（2），第三功率放大模块（3），第四功率放大模块（4），第五功率放大模块（5），第六功率放大模块（6），第一微带功率合成电路（7），第二微带功率合成电路（8），第三微带功率合成电路（9），射频输出匹配电路（10）和水冷散热器（11）。六个功率放大模块同时给出81.36MHz的射频功率电流，通过三个微带功率合成电路合成一路，然后通过电极输送给输出匹配微带电路，经过输出匹配微带电路匹配后输出到二氧化碳激光器。

50. 发明申请

WO2016075806A1 狭帯域化モジュール、狭帯域化レーザ装置、及び、狭帯域化モジュールを位置決めする方法审中-公开
标题翻译：带状纳米模块，带状纳米激光器件和用于定位带状纳米模块的方法
公开(公告)号：WO2016075806A1
公开(公告)日：2016-05-19
申请号：PCT/JP2014/080171
申请日：2014-11-14
申请人：ギガフォトン株式会社
发明人：渡部　義信 , 五十嵐　美和 , 芦川　耕志
IPC分类号： H01S3/137
CPC分类号： G02B27/1086 , G02B27/0972 , H01S3/005 , H01S3/03 , H01S3/101 , H01S3/137 , H01S3/225
摘要：狭帯域化モジュールは、レーザ光を狭帯域化するグレーティングと、グレーティングを保持するホルダと、を含むグレーティング装置と、グレーティング装置を収容する筐体と、グレーティングの分散面に略垂直な方向から、グレーティング装置の重心位置又はその近傍位置を支持するとともに、グレーティングの分散面に略垂直な方向に、グレーティング装置を筐体に対して移動させるグレーティング移動装置と、を備えてもよい。
摘要翻译：该带窄模块可以包括：光栅装置，其包括使激光束的带宽变窄的光栅和保持光栅的保持器; 容纳光栅装置的壳体; 以及光栅移动装置，其从基本上垂直于光栅的色散平面的方向支撑光栅装置的重心位置或其附近的位置，并且使光栅装置相对于壳体沿方向移动基本上垂直于光栅的色散平面。

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